The broken lines shown in the drawings represent portions of the gas nozzle for substrate processing apparatus that form no part of the claimed design.
The broken lines shown in the drawings represent portions of the gas nozzle for substrate processing apparatus that form no part of the claimed design.
Number | Name | Date | Kind |
---|---|---|---|
D58914 | Kerr | Sep 1921 | S |
D258309 | Leighton | Feb 1981 | S |
D322470 | Garlich | Dec 1991 | S |
6553986 | Liu | Apr 2003 | B1 |
6851420 | Jennings | Feb 2005 | B2 |
D613116 | Roberts | Apr 2010 | S |
D695883 | Vest | Dec 2013 | S |
D771772 | Morita | Nov 2016 | S |
D783351 | Fujino | Apr 2017 | S |
D847301 | Yoshida | Apr 2019 | S |
D851763 | Mathews | Jun 2019 | S |
20080171296 | Yen | Jul 2008 | A1 |
20100154775 | Robinson | Jun 2010 | A1 |