Claims
- 1. A method of making a gas separating member which comprises the steps of setting a porous substrate in the form of a film, wall or hollow fiber in a plasma generator,
- activating an organosilane monomer by plasma to form a plasma polymerized film of said organosilane as a first layer having high gas permeability on a surface of the substrate, and
- activating a second monomer other than the organosilane by plasma to form a plasma polymerized layer as the second layer having high gas separation factor on the organosilane first layer.
- 2. The method according to claim 1, wherein the organosilane is a member selected from the group consisting of hexamethyldisiloxane, diethoxymethylsilane, octamethylcyclotertrasiloxane, tetraexthoxysilane, triethoxyvinylsilane and tetramethylsilane.
- 3. The method according to claim 1, wherein the second monomer other than the organosilane are hydrocarbons.
- 4. The method according to claim 3, wherein the hydrocarbon is a member selected from the group consisting of 1-hexane, cyclohexene, toluene, styrene, divinylbenzene, 1,3-pentadiene, dicyclopentadiene, furan, acrylic acid, benzonitrile, acetylenecarboxylic acid and acetylene dicarboxylic acid dimethylester.
- 5. The method according to claim 1, wherein the substrate is a porous glass hollow fiber.
- 6. A gas separating member comprising a porous substrate in the form of a film, wall or hollow fiber and a plasma polymerizate polymer film on a surface of the substrate, the polymer film including two layers formed by plasma polymerization, the two layers being a first layer having high gas permeability formed from an organosilane formed on a surface of the substrate by plasma polymerization and the second layer having high gas separation factor formed of a monomer other than an organosilane formed on the first layer by plasma polymerization.
- 7. The gas separating member according to claim 6, wherein the organosilane is a member selected from the group consisting of hexamethyldisiloxane, diethoxydimethylsilane, octamethylcyclotertrasiloxane, tetraethoxysilane, triethoxyvinylsilane and tetramethylsilane.
- 8. The gas separating member according to claim 7, wherein the substrate is a porous polymer hollow fiber which has a diameter of several thousands of angstroms to several millimeters.
- 9. The gas separating member according to claim 3, wherein the porous polymer hollow fiber is a member selected from the group consisting of a porous polypropylene hollow fiber and a porous cellulose acetate hollow fiber.
- 10. The gas separating member according to claim 6, wherein the monomer other than the organosilane is a hydrocarbon.
- 11. The gas separating member according to claim 10, wherein the hydrocarbon is a member selected from the group consisting of 1-hexane, cyclohexane, toluene, styrene, divinylbenzene, 1,3-pentadiene, dicyclopentadiene, furan, acrylic acid, benzonitrile, acetylenecarboxylic acid and acetylene dicarboxylic acid dimetylester.
- 12. The gas separating member according to claim 6, wherein the substrate is a porous glass hollow fiber.
- 13. The gas separating member according to claim 6, wherein the substrate has pores having a diameter of several tens of angstroms to several micrometers.
- 14. The gas separating member according to claim 13, wherein the substrate has circular pores having a diameter which is not more than several thousands of angstroms.
- 15. The gas separating member according to claim 13, wherein the substrate has rectangular or oval pores having a minor side or axis which is not more than 1,000 angstroms.
- 16. The gas separating member according to claim 13, wherein the substrate is a sintered product of metal, ceramic or polymer particles.
- 17. The gas separating member according to claim 13, wherein the substrate is a fibrous product formed by knitting, weaving or stacking fibers in felt forms.
- 18. The gas separating member according to claim 13, wherein the substrate is a porous polymer film.
- 19. The gas separating member according to claim 18, wherein the porous polymer film is a member selected from the group consisting of a porous cellulose acetate film, a porous polycarbonate film and a porous polypropylene film.
Priority Claims (2)
Number |
Date |
Country |
Kind |
54-79952 |
Jun 1979 |
JPX |
|
54-134466 |
Oct 1979 |
JPX |
|
Parent Case Info
This is a continuation, of application Ser. No. 159,275, filed June 13, 1980, now abandoned.
US Referenced Citations (16)
Continuations (1)
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Number |
Date |
Country |
Parent |
159275 |
Jun 1980 |
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