In various contexts, optics as technology enabling the development of many industrial fields can be greatly enriched with the ability to produce a variety of novel laser beams that include Hermite-Gaussian (HG), Laguerre-Gaussian (LG), Bessel, Airy, and Helmholtz beams, to name just a few.
The Laguerre-Gaussian beams—that is, laser beams having a transverse distribution of optical power (interchangeably referred to herein as transverse modes) described by LG functions—are probably the most prolific realizations in practice. The beams with LG transverse modes have been used to enhance the information capacity of both classical and quantum communication channels by employing many orthogonal optical angular momentum (OAM) modes as opposed to two polarization modes. Other key applications of the LG modes derive from the ability of the light OAM to be transferred to and rotate particles such as atoms and nanoparticles, driving optical micro-machines, and excitation of matter-wave vortices in cold atomic gases. Still other applications arise in quantum entanglement of twisted photon states and quantum information processing, spiral phase contrast microscopy, and astrophysics and space physics studies. Overall, it is rather undisputed that the ability to produce beams having diverse LG modes will continue to have significant impact in the fields of quantum communication, where LG beams are used to increase the information capacity, laser trapping where the laser can provide novel trapping potentials, and laser writing of optical structures such as extended waveguides using Bessel beams. It is of significant interest to have a source of novel laser beams with high power and over a large range of wavelengths for the variety of applications.
Despite familiarity with LG modes in applied and basic science, no unified optical source configured to generate laser beam(s) in such modes at high-power levels while permitting for spectral tunability of the laser beam(s) exists up to-date: a few known attempts to generate LG laser beams produced results limited in power and/or operating wavelength range. One means of generating LG beams related art refers to makes use of a spatial light modulator (SLM) device (such as one built around a MEMS structure), which is known to operate at wavelength(s) falling within the range of about 400-1064 nm and limited to being able to handle a few Watts of power before damage of the individual reflectors of the SLM device sets in. While higher power LG beams could arguably be realized using fused silica phase-masks, a different phase mask is necessary for each realization of the OAM. Likewise, although specific lasers can be coaxed to operate on LG modes, such a solution imposes a limit on the spectral tenability of the produced LG-laser beams and requires a multiplicity of the laser sources that inevitably drives up the costs of the overall system.
Despite significant interest in generation of laser light in LG modes, the generation of high power, high efficiency beams remains a major challenge. Implementations of the present invention address an unaddressed need in developing a unified source or generator of light characterized by LG modes, and are expected to have a transformative impact on the multiple applications described above, and lead to hitherto unforeseen new uses as new wavelengths and powers are opened up.
Embodiments of the invention provide a laser source that includes (i) a laser cavity network, including first and second spatially-distinct cavity aims and a collinear portion, (ii) a first optical system, disposed across an axis of the at least one of the first and second cavity arms, to either refract or reflect light incident on the first optical system while, at the same time transforming a transverse distribution of such light, and (iii) a second optical system disposed across this axis and characterized by optical losses, at the corresponding wavelength, that are non-uniformly distributed across the second optical system, the second optical system disposed between the corresponding gain medium and the first optical system.
Here, the first and second spatially-distinct cavity arms share the collinear portion, and at least one of the first and second cavity arms contains (intracavity) a corresponding gain medium including one of (i) a VECSEL-based laser gain medium, (ii) a solid-state gain medium, and (iii) a fiber amplifier and configured to provide amplification of light at a corresponding wavelength. (The discussion below refers only to the VECSEL-based gain medium, for simplicity of disclosure). The laser source if configured to maintain, in operation, generation of light having, intracavity, (a) a first transverse mode distribution in a first portion of the laser cavity network between a gain medium and the second optical system; (b) a second transverse mode distribution in a second portion of the laser cavity network between the second and first optical systems, and (c) a third transverse mode distribution in a third portion of the laser cavity network, the third portion being a remaining portion of the laser cavity network. In a specific case, such first, second, and third transverse mode distributions are different from one another.
Embodiments of the invention additionally provide a laser source including a laser cavity network that contains i) at least one output coupler (configured to transmit at least a portion of light generated intracavity by the laser source to form a light output; ii) multiple spatially-distinct cavity arms; iii) a collinear cavity portion; and (iv) an astigmatic mode converter (AMC). The AMC may be disposed intracavity or outside of the cavity network. Here: each of a first arm and a second arm is configured to support intracavity circulation of laser light at at least one wavelength; the first and second arms share the collinear cavity portion and overlap with one another along the collinear cavity portion; and at least one of said first and second arms contains an intracavity mode converter element (MCE). The light output from the laser source has a transverse mode distribution that is tunable in response to a change in spatial cooperation between a) the at least one of said first and second arms and b) at least one of the MCE and AMC. The laser source may optionally include at least one wavelength tuning mechanism disposed within the cavity network and configured to tune a wavelength of light in at least one of the first and second cavity arms. Optionally, at least one of the MCE and AMC is disposed in a collinear portion of the laser cavity network (i) to cause a formation of light having a Laguerre-Gaussian transverse mode intracavity in the collinear portion of the cavity and (ii) to maintain a circulation of such light in the collinear portion of the cavity. Optionally, the laser source includes a system configured to cause the laser source to produce the laser output in a pulsed fashion.
In one specific embodiment, the first cavity arm contains a corresponding gain medium element while the second cavity arm is devoid of a corresponding gain medium element. Here, an end-reflector of the second cavity arm is partially transparent to light at a pump wavelength, and the laser source is equipped with a pump laser source that is configured to generate pump light at the pump wavelength and that is positioned to deliver the pump light through the end reflector along an optical axis of the second cavity arm.
In a related implementation, at least one of the following conditions is satisfied: a) at least one of the first and second arms contains an intracavity non-linear frequency conversion element, and b) the output coupler is a reflector that either terminates an arm of the laser cavity network or is located within the laser cavity network. In a specific embodiment, alternatively or in addition, each of said first and second cavity arms may employ respectively-corresponding first and second laser gain media, each of which media a) is designed to amplify light at respectively-corresponding first and second wavelengths and/or b) includes one of a VECSEL-based gain medium, a solid-state gain medium; and a fiber amplifier. In such specific embodiment, the laser source may further comprise at least one wavelength tuning mechanism juxtaposed with the cavity network and configured to tune at least one of the first and second wavelengths independently from another of the first and second wavelengths while, at the same time, allowing the first and second wavelengths to become equal as a result of such tuning. In such specific embodiment, the laser source may contain (in the collinear cavity portion) an optical element defining a spatial fold of a path of light propagating intracavity and forming, intracavity, first and second Rayleigh regions of first and second light portions of light, where the first and second light portions respectively contain the first and second wavelengths, and where the first and second Rayleigh regions overlap with one another in the spatial fold. (In the latter case, at least one of the following conditions may be optionally satisfied: a) the optical element is not a reflector that terminates the cavity network and is the at least one output coupler, and b) at least one of said first and second cavity arms contains an intracavity non-linear frequency conversion element.)
In another related embodiment, at least one of the first and second arms contains a respectively-corresponding gain medium, and the MCE contains an array of mode controller elements that is configured to be repositionable across an axis of at least one of the first and second arms to cause (i) a formation of an intracavity light having a Hermite-Gaussian transverse mode, and (ii) cavity-supported propagation of such light between the MCE and the collinear portion of the cavity during an operation of the laser source. In this case, alternatively or in addition, the first and second arms may be merged into the collinear portion of the cavity at a beamsplitter, and the laser source is configured to maintain and support intracavity light having (a) a Gaussian transverse mode between said gain medium and the MCE; (b) in said Hermite-Gaussian transverse mode between the MCE and the collinear portion of the cavity; and (c) in a Laguerre-Gaussian transverse mode in the collinear portion of the cavity during the operation of the laser source.
Embodiments of the invention additionally a method that includes (i) spatially combining first and second light portions (each forming respectively corresponding first and second standing wave in respectively corresponding first and second cavity arms of a multi-arm laser cavity network) to form a mixed intracavity beam in which the first and second light portions overlap and are co-linearly propagated through a collinear portion of said laser cavity network that is common for the first and second cavity arms; and (ii) transmitting at least one of the first and second light portions through the MCE and the AMC (each of which is disposed in a corresponding of the first and second cavity arms), while transmitting the mixed beam through a non-linear optical (NLO) element disposed intracavity.
A related embodiment further provides a method including the steps of forming a first intracavity standing optical wave, at a first wavelength, between and terminated by first and second reflectors of a laser cavity network. Here, the laser cavity network includes multiple spatially-distinct cavity arms that share a collinear portion of the laser cavity network. Here, the first intracavity standing optical wave has a first transverse mode distribution in the collinear portion of the laser cavity network and a second transverse mode distribution in a first part of a first arm, where the first part is located outside of the collinear portion of the laser cavity network. Here, the first and second transverse mode distributions are different from one another. The method further includes the step of outcoupling a pre-determined portion of light energy, provided by the first intracavity standing optical wave, through an outcoupler of the laser cavity network. Here, such predetermined portion of light energy has a second wavelength, the first and second wavelengths being different from one another.
The invention will be more fully understood by referring to the following Detailed Description of Specific Embodiments in conjunction with the not-to scale Drawings, of which:
Generally, the sizes and relative scales of elements in Drawings may be set to be different from actual ones to appropriately facilitate simplicity, clarity, and understanding of the Drawings. For the same reason, not all elements present in one Drawing may necessarily be shown in another.
Implementations of the present invention provide a novel on-demand laser source configured to generate spectrally-tunable laser beam(s) in (generally variable during the frequency-tuning process) LG modes. The idea of the present invention stems from the realization that intracavity generation and nonlinear mixing of coaxial Gaussian (G) and Hermite-Gaussian (HG) modes in a multi-color, T-cavity laser device (such as one, built around a Vertical External Cavity Surface Emitting Laser, or VECSEL, for example) permits efficient HG and/or LG mode(s) generation.
The Laguerre-Gaussian (LG) beams—that is, laser beams having a transverse distribution of optical power (or transverse modes) described by LG functions—can probably boast the most prolific realization in practice. The beams with LG transverse modes have been used to enhance the information capacity of both classical and quantum communication channels by employing many orthogonal optical angular momentum (OAM) modes as opposed to two polarization modes. Other key applications of the LG modes derives from the ability of the light OAM to be transferred to and rotate particles such as atoms and nanoparticles, driving optical micro-machines, and excitation of matter-wave vortices in cold atomic gases. Still other applications arise in quantum entanglement of twisted photon states and quantum information processing, spiral phase contrast microscopy, and astrophysics and space physics studies. Overall, it is rather undisputed that the ability to produce beams having diverse LG modes will continue to have significant impact in the fields of quantum communication, where LG beams are used to increase the information capacity, laser trapping where the laser can provide novel trapping potentials, and laser writing of optical structures such as extended waveguides using Bessel beams. It is of significant interest to have a source of novel laser beams with high power and over a large range of wavelengths for the variety of applications.
Despite familiarity with LG modes in applied and basic science, no unified optical source configured to generate laser beam(s) in such modes at high-power levels while permitting for spectral tunability of the laser beam(s) exists up to-date: a few known attempts to generate LG laser beams produced results limited in power and/or operating wavelength range. One means of generating LG beams related art can refer to made use of a spatial light modulator (SLM) device (such as one built around a MEMS structure), which is known to operate at wavelength(s) falling within the range of about 400-1064 nm and limited to being able to handle a few Watts of power before damage of the individual reflectors of the SLM device sets in. While higher power LG beams could arguably be realized using fused silica phase-masks, a different phase mask is necessary for each realization of the OAM. Likewise, although specific lasers can be coaxed to operate on LG modes, such a solution imposes a limit on the spectral tenability of the produced LG-laser beams and requires a multiplicity of the laser sources that inevitably drives up the costs of the overall system.
VECSEL-based laser systems so far have been developed to provide high output powers over a wide range of fundamental lasing wavelengths (670 nm-2.4 μm) as a result of semiconductor heterostructure bandgap engineering. In particular, the well-developed VECSEL heterostructures based on GaAs/InGaAs semiconductors are considered to be preferred for generating high power continuous wave (cw) outputs in the 900 nm to 1200 nm range. The free-space external cavity of VECSELs combined with optical pumping allows for excellent mode quality, while the access to the high intracavity circulating power also allows for efficient second harmonic generation (SHG) providing tunability via the second-harmonic in addition to the fundamental harmonic, and single frequency operation can be obtained if intracavity etalons or birefringent filters are used.
In aiming to produce a high-power wavelength tunable beam, however, the VECSEL-based technology thus far has been exclusively focusing on doing so with a Gaussian transverse profile. On the other hand, higher-order modes other than the Gaussian are currently of great fundamental and technological interest (including Hermite-Gaussian (HG), Laguerre-Gaussian (LG), Bessel-Gaussian (BG), Airy, and Helmholtz beams, to mention just a few). While some attention has been paid to laser systems for generating these higher-order modes (including LG modes from a microlaser, optically pumped solid state lasers, and spatially-structured vertical cavity surface emitting lasers with mode shaping with integrated optical elements), none of the considered possibilities offered the potential for such high-order spatial modes beams to combine high power and spectral tunability. In addition, none of the considered laser-structure options is necessarily as well adapted to intracavity SHG or other forms of wave mixing as VECSELs are.
Similarly, to date the research on VECSELs was mainly focused on power-scaling or short-pulse generation at various wavelengths. However, the use of VECSEL-based laser systems for generation of higher-order LG modes carrying orbital angular momentum (OAM) beams has not been explored.
The implementations of this invention fill the gaps in the ability of currently-available technology to generate these sought-after light beams. In particular:
1) The unaddressed need of enabling a laser device to generate light at a chosen wavelength or, simultaneously at a multiplicity of wavelengths (whether in a spectrally-stationary or spectrally-tunable fashion) while, at the same time, being able to control and vary the spatial distribution of light output from the laser device in a plane transverse to the optical axis (referred to herein as a “transverse mode” of a laser beam) is solved by devising a laser-cavity network that contains multiple spatially-distinct laser cavity arms which (i) share, among themselves, at least one portion of the cavity network, and (ii) at least one of which contains, intracavity, a mode-control element (MCE) and/or an astigmatic mode converter (AMC), and, optionally, (iii) at least one of which contains a non-linear frequency conversion element intracavity.
For the purposes of this disclosure, an MCE is defined as an optical system configured to make a laser cavity (with which the MCE is juxtaposed) support lasing at a predetermined transverse mode of light that is defined by the configuration of the MCE. An MCE may be configured an optical element or system causing loss of light, which loss has a predetermined distribution in a plane transverse to the axis of the laser cavity. Alternatively, the MCE may include an optical gain element causing the amplification of light intracavity in accord with a specific predetermined distribution of gain across the beam amplified intracavity. An AMC is an optical system causing a re-distribution or spatial restructuring of first light, having first transverse distribution or mode, into second light having second transverse distribution or more upon the transmission of the first light therethrough.
Here, the control of the transverse mode of the laser output is effectuated at at least one of the wavelengths present in the laser output, and at least one cavity arm of the overall cavity network may be passive (and not contain a gain medium intracavity). It is appreciated that, in general, the nonlinear frequency conversion may be required only if the wavelength of the LG modes needs to be changed through some non-linear conversion mechanism such as, for example, second harmonic generation (SHG), sum frequency generation (SFG) or difference frequency generation (DFG). Otherwise, without a nonlinear optical element disposed intracavity the co-axial superpositions of the LG modes at fundamental wavelengths is still created in an embodiment of the invention.
The MCE(s) and AMC—taken separate or as a combination—are interchangeably referred to herein as a transverse mode converter system (TMCS). Since at least one portion of the cavity network is being shared between or among at least two cavities, intracavity light portions propagating spatially independently in different cavity arms of the cavity network are propagating co-linearly in such shared portion or region of the cavity network. The shared portion of the devised cavity network may be referred to, therefore, as a “co-linear portion of the cavity network” or “collinear cavity portion”, for short.
2) The unaddressed need of enabling a laser device to simultaneously generate light at two or more wavelengths that are independently tunable without a practical limit of how small a spectral separation between such wavelengths can be made while, at the same time, being able to control the transverse mode of the laser output at at least one of the wavelengths present in the laser output is solved by devising a laser-cavity network that contains such multiple spatially-distinct laser cavity aims which (i) not only share among themselves at least one portion of the cavity network, but are also defined by optical elements preventing the intracavity amplification of light at two of these wavelengths via amplification processes occurring in the same laser gain medium, and at least one of which (ii) contains, intracavity, a TMCS. Here, an open cavity network of a laser device of the invention is structured to support a first process of laser light amplification at the first wavelength and a second process of laser light amplification at the second wavelength, which processes (i) do not share the same gain bandwidth but respectively correspond to different gain curves, and (ii) propagate along spatially different intracavity optical paths that share a common optical path portion along the direction of light propagation, while the open cavity network includes a TMCS intracavity. In such arrangement, each of the cavity arms of the overall cavity network is active in that it includes a specifically-dedicated and respectively-corresponding gain medium (such as, in one non-limiting example, a VECSEL gain medium). Here, the control of the transverse mode of the laser output is effectuated at at least one of the wavelengths present in the laser output. Moreover, in stark contradistinction with related at, in such configuration the control of transverse laser modes can be effectuated simultaneously and/or independently in two or more of the cavity aims of the overall cavity network.
Accordingly, below are discussed but several examples of a laser source, structured according the idea of the invention and based on sum- or difference-frequency generation in a T-cavity VECSEL, for both continuous-wave (CW) and pulsed operation.
The specific case of T-cavity VECSEL configuration facilitates the process of controlling the transverse mode of laser light distribution independently in multiple laser cavity arms: For example, one arm may be operating on the Gaussian or HG00 mode and the other on the HG01 higher-order mode. Intracavity nonlinear frequency generation may then be used to produce a new high power novel laser beam, depending on the transverse modes employed. The frequency of the novel laser beam can be controlled via the resonant frequency in each arm and the choice of sum- or difference-frequency generation.
This implementation provides demonstrates that a linear-cavity VECSEL structure, containing an MCE intracavity, is enabled to control oscillation of the cavity field in a selected higher-order HG beam at the fundamental wavelength.
In the experiments reported here, MOCVD was used to grow a VECSEL heterostructure designed to emit at about 1070 nm. The active region included 12 compressively-strained 8-nm-thick InGaAs quantum wells (QWs) with GaAs-pump-absorbing barriers and a layer of GaAsP between each neighboring QWs for strain compensation. On top of the multi-quantum well (MQW) unit the 25 pairs of alternating AlGaAs/AlAs layers were grown to operate as a high reflectivity (˜99.9%) distributed Bragg reflector (DBR) at the emission wavelength. The specific thickness and composition of the heterostructure layers were judiciously chosen to achieve resonant periodic gain (RPG) such that each QW is positioned at the antinodes of the standing optical wave formed in the laser cavity. Thermal management of operation of the laser structure was accomplished by solder-bonding of a VECSEL chip to a CVD diamond element. Once bonded, selective chemical wet etching was used to remove the GaAs substrate. The surface of the chip was antireflection (AR) coated at the pump wavelength of about 808 nm, and the overall device was mounted and clamped to a water-cooled copper heat-sink system for temperature control.
As shown in the embodiment 100 of
During the operation of the system 100, the position and/or orientation of the MCE 126 was adjusted to achieve different Hermite-Gaussian mode intensity profiles, and the output powers and beam profiles of the laser output 130 were measured. In order to characterize the transverse beam structure, a DataRay BeamMap2 scanning slit beam profiler was used. To obtain an image of the lasing mode, the beam was refocused into the profiler sensor to a size of tens of microns in diameter.
Here, as shown in
The same optical pumping arrangement as that of
Theoretical Model and Simulations.
The simulations were performed in the undepleted pump beam approximation. Following the notation used by R. W. Boyd in (Nonlinear Optics Academic, Amsterdam, 2008, 3rd Ed., Chap. 2), the propagation of the second-harmonic field in the LBO crystal 430 is described by the paraxial wave equation
where A1,2 are the slowly varying envelopes of the fundamental and second-harmonic fields that are propagating dominantly along the z-axis; the ±signs correspond to propagation in the forward and backward directions in the LBO crystal. Diffraction was accounted for via the transverse Laplacian term, as was the walk-off with angle δ along the x-axis. Here deff≃1 pm/V is the effective nonlinear coefficient, and Δk is the wavevector mismatch. The fundamental field obeys a similar equation with no walk-off (θ=90° is maintained) or nonlinearity, and the subscript 2 is replaced by 1. Eq. (1) assumes that the second-harmonic field is polarized along the x-axis, and so is the direction of the walk-off.
Both in the experiment and the simulations there are two control parameters—the distance d and the wavevector mismatch Δk. Based on the estimated spot size of light fundamental frequency w0=50 μm at the flat mirror 426, and the transverse mode selected by the MCE 1256 for operation at the fundamental harmonic (FH) by the MCE 125, for the HG transverse mode with mode indices (n, m) the fundamental frequency light-field at the flat mirror 426 is set as
where the parameter A0 controls the power at the FH. Then, given the distance d, the FH light field was determined at the input facet 430A of the LBO crystal 430 using linear propagation, along with the corresponding spot size win at the input facet 430A. The FH and SH fields were then propagated over the length L of the crystal using the Beam Propagation Method known in the art, from the input facet 430A to the facet nearest the flat mirror 426. Both the FH and SH fields were then propagated free-space style (with the use of a standard Fourier Optics methods) over the distance 2d back to the crystal 430, including the phase difference arising from the dispersion of air. Finally, the FH and the SH fields were propagated in reverse direction—through the LBO crystal 430—to determine the profile of the output SH field 438.
In the following, the walk-off effect is neglected. The second-harmonic polarization P2 is in general driven by the square of the fundamental field P2∝A12. Now if the fundamental field is taken as a one-dimensional Hermite-Gaussian for illustration, then the polarization for the second-harmonic will vary as
That is, the SH field will be driven by a polarization that is a superposition of HG beams with amplitudes ak and based on the spot size w0/√{square root over (2)}, and therefore—depending on phase-matching—the output at the SH can be presented by a variety of spatial distributions.
Turning now to the simulation results,
Experimental Results.
This section presents the results of measurement of properties of spatially-structured SH beams, that were generated with the use of a laser system 400 by utilizing the higher-order HG modes excited at the FH wavelength (˜1070 nm) in the V-cavity equipped with the MCE 126. As a reference, initially the Gaussian mode SHG output was measured for a Gaussian FH intracavity light in absence of the MCE 126 in the cavity. Next, the MCE 126 was introduced to create a circulating HG01 FH mode, which was then converted at the LBO crystal 430 into the green output at 438. The spatial structure of the green beam 438 depended on the fine-tuning of the phase-matching angle as well as the relative position of the crystal 430 and the mirror 426 (i.e., on the beam waist position) as predicted by the simulations discussed above.
The output power at SH was also characterized for each of the structured beams and the results are compared in
The following Examples 3 and 4 disclose the designs of and experimental results obtained with multi-chip T-cavity VECSEL-based laser systems utilized for multi-color collinear generation of Hermite-Gaussian and Laguerre-Gaussian transverse modes. Here, (i) a combination of an intracavity MCE(s) and an external (with respect to the cavity) astigmatic mode converter (AMC), such combination forming a TMCS of Example 3; and (ii) a combination of the intracavity MCE(s) and the intracavity AMC(s) were used to achieve high-power LG modes, such combination forming the TMCS of Example 4. By incorporating intracavity BFs in each arm of the T-cavity in Example 3, wide wavelength tuning range (in excess of 14 nm) for each mode were demonstrated, while the output power exceeding 1.5 W was measured for all the modes.
The multi-color T-cavity VECSEL-based system is an advantageous modification of conventional VECSEL cavities, simultaneously allowing for the generation of high-power multi-color coaxial emission and a broad-range of wavelength generation through intracavity nonlinear sum or difference frequency conversion. See, for example, U.S. Pat. No. 9,231,373, the entire disclosure of which is incorporated herein by reference. The Example 3 below discloses the first demonstration of higher-order HG and LG modes generated in a two-color T-cavity VECSEL geometry. By combining intracavity mode-control elements (MCEs) with external astigmatic mode converters (AMC), a wide range of HG and LG mode pairs were demonstrated. An MCE disposed into a resonator introduces a localized loss in the transverse field, thus allowing the skilled artisan to obtain a variety of HG modes at both generated wavelengths. With the addition of an AMC, various LG modes for each wavelength are generated, while maintaining the high output power and wavelength tuning properties of each cavity.
The separate VECSEL chips used in the experimental setup schematically depicted in
To facilitate optimal thermal management to achieve efficient lasing, pairs of a CVD deposition diamond and a corresponding coated VECSEL chip were coated with Ti/Au layers and then indium solder bonded together. The removal of GaAs substrate with selective chemical wet etching guarantees an optically flat surface of a finished bonded chip. Upon the fabrication completion, the chips were mounted and clamped to water-cooled copper heat sinks and maintained at a temperature of 15° C.
The T-cavity setup 1000, along with the AMC used for the second part of the experiment, is shown in
The first arm 1100 of the embodiment 1000 (which contains a first VECSEL gain chip 1140) supports the lasing at wavelength (for example, 970 nm), while the second arm 1200 (which contains a second VECSEL ship 1240) supports the lasing at wavelength λ2 (for example, 1070 nm). A birefringent filter (BF) 1260 in the arm 1100 is oriented at a Brewster's angle such that light 1280 circulating along the arm 1100 is p-polarized (TM lasing mode). A BF 1360 of the arm 1200, on the other hand, is oriented at a Brewster's angle in such a way that the plane of incidence for light 1380 circulating in the arm 1200 defines s-polarization (TE lasing mode). Each of the (3 mm thick, in one implementation) BFs 1260, 1360 not only selects a linear polarization of the corresponding portion of intracavity light, but also facilitates the wavelength tuning operation of the device 1000 in the corresponding arms 1100, 1200. It is intended that related embodiments of the invention can utilize different spectrum-tuning mechanisms such as, for example, a spatially-repositionable intracavity diffraction grating or prism, an optical etalon, or an external cavity, or a temperature-tuning mechanism, to name just a few. According to one embodiment of the invention, each of the BFs includes quartz plates of optical quality oriented, with respect to planes of incidence of the respective intracavity fields 1280, 1380 such as to prevent optical coupling between these fields. The polarization selectivity in the cavity arms of the embodiment 1000 can be achieved, for example, by placing the BF's at Brewster angle. Therefore, generally an embodiment of the invention includes at least one wavelength tuning mechanism disposed within the cavity network and configured to tune a wavelength of light in at least one of the first and second cavity aims of the cavity network.
The optical field present in each of the regions 1100, 1200 is operationally independent from any other optical field in any other portion of the overall cavity of the device 1000 and does not share the gain medium with any other optical field. Accordingly, auxiliary elements optionally present in regions 1100, 1200 interact only with the light fields at λ1, λ2, respectively. The common, co-linear region 1400 of the cavity is the cavity portion between the beam splitter 1440 and the output coupler 1480, which were shared by the optical fields 1280, 1380. Here, a dichroic mirror 1440 which was AR coated at λ1˜970 nm and high reflectivity (HR) coated at λ2−1070 nm for an angle of incidence of about 22.5°, which allows a person of skill in the art to have completely independent laser cavity portions 1100, 1200 sharing the same output coupler mirror 1480 and producing collinear output beams. The reflector 144 ensured that p-polarized light 128 propagated unabated while the s-polarized light was reflected in a substantially transverse direction (in one implementation, at about 90 degrees, in another implementation—at about 120 degrees) with respect to the z-axis. In the cavity region 1400, the two individual optical fields at wavelengths and λ2 overlap spatially to form an overall optical intracavity field and the corresponding output 1500 characterized by the two wavelengths corresponding to two orthogonal linear polarizations.
Each of the arms 1100 and 1200 were complemented, in part of the experiment, with a respectfully-corresponding MCEs 1520, 1530 (shown in dashed lines) such that each of the two independent resonators or cavities (the first one defined between the chip 1140 and the mirror 1480, and the second one defined between the ship 1240 and the mirror 1480) contained dedicated intracavity BF and MCE. While the BFs allow for independent wavelength tuning and polarization control based on BF orientation, the presence of MCEs enables laser operation at higher-order transverse modes (in an aim with an MCE). In one implementation, each of the MCEs was made of a fused-silica transparent substrate, which was selectively etched to provide a pattern generating the least loss for a targeted HG mode (while increasing losses for non-desired HG modes). Thus, a two-color individually tunable output 1500 with orthogonally polarized beams was generated, though if required the light output components corresponding to different cavity arms 1100, 1200 could be made of the same polarization. Since the MCEs were placed between the chips 1140, 1240 and the beamsplitter 1440, each operationally-independent cavity was configured, generally, to produce a different transverse mode. The light outputs of two 808 nm pump laser diodes (not shown) were fiber-coupled and focused to form approximately 500 μm diameter spots on each of the VECSEL chips 1100, 1200 to provide optical pumping. In a specific embodiment, the shared output coupler mirror 1480 had a radius of curvature of 25 cm and was broadband coated to be about 97% reflective within 900 nm-1200 nm spectral range. Considering the total distance from the chip to the output coupler, each of the cavities was about 23 cm long.
In the second part of the experiment, an external (outside of the laser cavity) astigmatic mode converter, or AMC, 1600 was added and judiciously aligned with the T-cavity VECSEL. In one implementation, the AMC 1600 was based on a pair of identical cylindrical lenses 1600A, 1600B separated by a distance d that was dependents on their focal lengths f:
In this implementation, the focal lengths of the cylindrical lenses were 30 mm, causing the separation distance to be about 42 mm. To ensure the correct mode conversion, the incoming laser beam 1620 had to be of a certain Rayleigh range ZR:
and its beam waist has to be positioned approximately in the central point between those two lenses 1600A, 1600B. For this purpose, a spherical lens 1600C with focal length 150 mm was placed in front of the cylindrical lenses 1600A, 1600B (that is, between the cylindrical lenses and the output coupler 1480 of the laser cavity). The separation between the elements 1480, 1600C was about 88 mm and the distance from the spherical lens 1600C to the nearer cylindrical lens 1600A was about 250 mm.
Finally, the MCEs 1520, 1530 were appropriately adjusted to ensure that the symmetry axis of the incoming HG mode (the output 1500) be oriented diagonally at 45° with respect to the curvature axis of the cylindrical lens. The spherical lens 1600C and cylindrical lenses 1600A, 1600B were AR coated for the spectral region of 900 nm-1200 nm to ensure that the loss introduced by the AMC 1600 be is minimal and, specifically, <0.5% in one implementation.
To confirm that the overall T-cavity 1000 is configured for simultaneous and independent generation of collinear beams at two wavelengths (forming the output 1500), the throughput 1660 through the AMC 1600 was fiber coupled into an optical spectrum analyzer (OSA).
The output powers of fundamental and higher-order transverse modes generated in the T-cavity VECSEL system 1000 were measured and characterized as shown in
Images of various transverse modes were captured with a CCD camera (not shown in
In reference to another embodiment, a laser cavity network 1800 is schematically shown in
As shown, the TMCS employed by the embodiment 1800 is completely intracavity and includes the intracavity AMC 1814 in combination with the intracavity MCE1 (labelled as 1818A) and the intracavity MCE2 (labelled as 1818B). The MCE1 is disposed in the free portion 1806 of the first cavity arm between the chip 1800A and the beamsplitter BS, while the MCE2 is disposed in the free portion 1808 of the second cavity arm between the chip 1800B and the beamsplitter BS. The MCE1 and MC2 are appropriately structured (as discussed below) to ensure that light distributions amplified by chips 1800A, 1800B are represented by at least one of the lowest order Gaussian mode (labelled G1, G2) and/or at least one of the Hermit-Gaussian modes (labelled HG1, HG2). Accordingly, the mixed beam 1809 has a transverse distribution of light characterized by combination of at least some of the Gaussian and Hermite-Gaussian modes defined within the first and second free portions 1806, 1808 of the individual first and second cavity arms.
The AMC portion 1814 of the TMCS is shown positioned across the optical axis intracavity in the common portion 1804 of the laser cavity network 1800. Configured with the use of refractive optical elements configured to change angle(s) of spatial divergence of the beams 1809, 1809′, the AMC 1814 operates on the mixed beam 1809 such that, upon traversing the AMC 1814 (as shown—from left to right) the mixed beam 1809 is transformed to a mixed beam 109′ the wavefront of which is represented by Laguerre-Gaussian modes (LG1 that correspond to the HG1 modes of the free portion 1806 of the first cavity arm, and/or LG2 that correspond to the HG2 modes of the free portion 1808 of the second cavity arm).
The outcoupler OC is disposed to form an optical fold 1810 of and within the common portion 1804 of the laser cavity network 1800, and in a specific case the OC can be structured as a curved optical reflector. At least a part of light energy contained in the mixed beam 1809′ is reflected by the OC into the folded part 1810 of the common portion 1804 towards the end reflector ER. The end reflector ER is generally positioned at or in the vicinity of location of the waist of the Rayleigh region defined by the transverse distribution of light directed towards it intracavity by the outcoupler OC. The non-linear optical (NLO) element such as a non-linear crystal is disposed between the ER and the OC to ensure that at least some light energy contained in light distribution of the beam 1809′ that arrived at the OC from the BS and that has been reflected by the OS towards the ER passes through the NLO-element and is non-linearly converted to light at a different optical frequency (as governed by specific circumstances describing the particular implementation of the embodiment 1800). The spectral distribution of reflectance characteristics of the OC is judiciously defined to provide for at least a partial transmission of light at wavelenghths (frequencies) resulting from the NL-conversion of light intracavity at the NLO-element, such that at least a portion of light L outcoupled from the cavity network 1800 through the OC (and forming the sought-after laser output) has an optical spectrum including the wavelengths generated as a result of interaction between the NLO-element and light from the beam 1809′. At the same time, as is readily understood, the transverse distribution of the light output L includes LG modes present in the mixed beam 1809′. Light output L includes LG modes of the nonlinearly mixed beams generated from the beams 1809. (The SFG or DFG of different LG modes generates a new LG mode at a new frequency).
In a specific implementation, an auxiliary light output L′ from the laser cavity network 1800 can be formed through the ER by making it partially transparent to light at wavelengths present at point P between the NLO element and the ER. For example, the optical properties of the reflectors OC and ER can be defined to outcouple the non-linearly converted light at SFG/DFG frequenc(ies) through the OC while outcoupling at least a portion of light at least one of the wavelengths λ1,λ2 through the ER.
In a related implementation 1900, shown schematically in
Generally, an MCE employed in any embodiment of the invention is configured to contain at least one MCE element. The MCE element, in its simplest form, may be represented by a wire or a trace of a lossy material (formed, for example, lithographically) on a substantially lossless substrate that is disposed across the optical axis intracavity to provide for different level of optical losses for light at different transverse modes (i.e., providing for non-uniform distribution of optical losses in a plane across the axis of the laser cavity) and, therefore, preferentially create conditions for amplification of those transverse modes that experience lower losses intracavity. In a related embodiment, an MCE may include an element formed by at least two “wires”, which are disposed parallel to one another or that cross one another. In yet another related embodiment, an MCE includes a superposition of wires forming a wire-mesh, in which multiple wires are extending, in a given plane, in one direction substantially parallel to one another and another set of wires extends in a transverse direction (in the same given plane or in a plane parallel to the given plane). In yet another embodiment, an MCE unit is used that is structured as an array (for example, a 1D-array or a 2D-array containing any feasible combination of the above-mentioned MCE elements.
In light of the discussion presented above, a person of ordinary skill in the art will readily appreciate that an intracavity beam-mixing process, resulting in the formation of a desired transverse-mode profile, is within the scope of the invention. Such intracavity beam mixing (and corresponding hardware set-up) includes:
A) Generating light with a wavefront having a spatial distribution that includes at least one desired HG mode in a cavity arm containing a gain-medium with the use of either (i) a corresponding MCE (a portion of the TMCS) disposed in such cavity arm or (ii) an off-axis pumping of the gain medium. When multiple cavity arms contain respectively-corresponding gain media (VECSEL chips), multiple HG modes are being formed in the laser cavity network, each at a wavelength of light amplified by the corresponding gain medium in a given cavity arm. In a specific case a simple Gaussian mode can be generated, either alone or in combination with another HG mode.
B) Passing the so-generated light intracavity through an AMC (another portion of the TMCS) to transform the generated HG mode(s) to the LG mode(s). The traversal of the AMC leaves the simple Gaussian mode unchanged, intact.
C) Passing the light contained in LG mode(s) intracavity through a NLO element to generate, intracavity, at least one of SHG-light, SFG-light, and DFG-light in LG transverse mode(s).
The choice of HG modes and associated LG modes and their combination(s) provides a wide range of LG modes in the laser output extracted from the cavity network through the output coupler at the targeted wavelength(s). In an embodiment configured to provide a spectrally-tunable laser output containing at least two different wavelengths of light (such as embodiment 1800 of
The spectral tuning of operation of any of the cavity arms of an embodiment of the invention is carried out with the use of a process discussed in U.S. Pat. No. 9,231,373, which (in a specific implementation) causes the tuning of light at first and second wavelengths (respectively generated by and supported by different cavity arms) to be independent from one another while allowing these two wavelengths to become equal to one another during the tuning process. (Such process, advantageously, has little or no effect on the operation of the components of the TMCS of the device of the invention, and for that reason is intended to be freely implemented.) The AMC portion of the TMCS may include a system of lenses and is substantially lossless at wavelengths of resonance of the cavity network. The effect of the MCE on light traversing it has also minimal effect on the cavity loss. As a result, the laser output in the form of spectrally- and/or spatially tunable/variable HG and/or LG modes is formed with inherently high power, comparable to that characterizing performance of a conventional T-cavity VECSEL-based laser system.
It is understood therefore that, generally, the partially co-linear open cavity network of the proposed device for multiple wavelength/multiple transverse mode generation is built around a cavity design that has multiple spatial cavity sleeves or branches or arms extended transversely with respect to one another and sharing a co-linear cavity portion, as discussed, for example, in the co-assigned U.S. Pat. No. 9,231,373, the disclosure of which is incorporated herein by reference for all purposes. Each of the branches includes a corresponding gain element (optionally-VECSEL chip) within the cavity. In one embodiment, a VECSEL chip may contain semiconductor quantum wells judiciously engineered to support light generation within large wavelength range (670 nm-2.4 um has been empirically demonstrated).
Here, the components of the TMCS (that is, MCE(s) and AMC(s)) are used to complement the device structure described in reference to FIG. 5 of U.S. Pat. No. 9,231,373, reproduced herein as
The collinear cavity portion 2510 (defined by the intracavity optical path from the PBS 2144 to the output coupler 2512 to the high-reflectance optionally flat mirror 2514) includes a cavity fold 2540. The output coupler 2512 is appropriately shaped and positioned such as to form a Rayleigh region of an intracavity light beam propagating between the output couple 2512 and the mirror 2514 substantially in the region of the fold 2540 itself, where the non-linear optical medium 2526 can be placed (in which case the cavity modes lasing at λ1, λ2 spatially overlap at the medium 2526). The formation of the cavity fold 2540 allows the light at the fundamental wavelengths λ1, λ2 to be substantially overlapping and co-propagating along the corresponding Rayleigh ranges to maximize the efficiency of the non-linear frequency conversion. This flexibility in beam size control facilitates efficient sum or difference frequency generation in the embodiment of the device. (Similar folding of a collinear cavity can be employed with any of other embodiments of the invention.)
While not shown in
In one implementation of the embodiment 2100, strain compensated InGaAs/GaAs/GaAsP multi-quantum well (MQW) structures capable of emitting light in the proximity of 980 nm were used. The “bottom emitting” VECSEL structure included an active region containing 14 QWs (each of about 8 nm thick), surrounded by GaAsP strain compensation layers and GaAs pump absorbing barriers. A high reflectivity (R˜99.9%) DBR mirror made of alternating Al02Ga0.8As/AlAs was grown on top of such MQW structure. The thickness and composition of the layers were designed such that each QW be positioned at an antinode of the cavity standing wave to provide resonant periodic gain (RPG). In order to facilitate selective substrate etching process, a thin high aluminum concentration AlGaAs etch-stop layer is initially grown on the GaAs substrate prior to the active layers growth. The VECSEL structure fabrication process included solder-bonding the epitaxial side of the wafer on a high thermal conductivity chemical vapor deposition (CVD) diamond followed by substrate removal through a selective wet etching process. (See, for example, C. Hessenius et al., in Proc. Of SPIE, v. 8242, 82420E, 2012, incorporated herein by reference). The processed devices were mechanically mounted on a water-cooled copper heat sink for temperature control.
In practice, a pump spot diameter of ˜500 microns was used on each of the chips 2114, 2124. (It is understood, however, that the same or different appropriately chosen pump-spot-diameter pump beams can be employed, for example as large as 1 to 2 mm, in some cases). The distance from the surface of each of the chips 2114, 2124 to the curved OC 2512 was about 19 cm and the distance from the curved OC 2512 to the HR flat mirror 2514 was about 6 cm. The temperature of the gain media 2114, 2124 was maintained at about 15 C with the use of heatsinks 122. The flat end mirror 2514 incorporated a broadband HR coating, while the coating at the surface of the curved OC 2512 exhibited high reflectance (of about 99.9%) at a fundamental lasing wavelength and low reflectance (for example, less than 0.25%) for the blue-green portion of the light output 2550. It is understood that when the two VECSEL chips 2114, 2124 are chosen from the same wafer growth, very spectrally close or nearly identical gain curves and, therefore, gain center wavelengths can be provided to support the intracavity optical fields 2128, 2138. The spectral separation between the wavelengths λ1, λ2 is adjusted by controlling the angular orientation of the BF(s) 2126, 2136 rotation and individual wavelength tuning of each polarization.
In this case, the idea of the invention is implemented by supplementing the device structure described in reference to FIG. 10 of U.S. Pat. No. 9,231,373 (reproduced herein as
While the implementations of the embodiments of the invention were described in reference to specific diagrams and laser cavity networks, it is understood that any cavity configuration described in U.S. Pat. No. 9,231,373 can be used in implementation of the idea of the preset invention as long as at least one of the individual cavity arms of the overall cavity network contains a TMCS. According to the idea of the invention, an MCE component of the TMCS is present in at least one cavity arm while an AMC component of the TMCS is also present in at least one cavity arm, intracavity. In so structuring an embodiment of the invention, the embodiment may be further complemented with at least one wavelength tuning mechanism (such as a rotatable BF) juxtaposed with the cavity network and configured to tune a first wavelength of multiple wavelengths generated by the embodiment independently with respect to a second wavelength of such multiple wavelengths while allowing the first and second wavelengths to become equal as a result of tuning.
Finally, as discussed in U.S. Pat. No. 9,231,373, in each of various embodiments, pulsed operation of the beams at fundamental frequencies (as opposed to those at non-linearly converted frequencies) can be incorporated into the setup. By the means of passive mode-locking (e.g. SESAM) or q-switching (e.g. chopper) systems juxtaposed with the embodiment of the laser source, one or both of the input waves can be pulsed, leading to space-time novel laser fields. For example, Airy-Bessel beams, that have an Airy temporal profile and a Bessel spatial profile, have been proposed as versatile linear light bullets. Accordingly, embodiments can be used to generate the full variety of such space-time novel laser pulses.
Overall, a skilled artisan will readily appreciate that a laser source, configured according to the idea of the invention, comprises a laser cavity network including first and second spatially-distinct cavity arms and a collinear portion, wherein the first and second spatially-distinct cavity arms share the collinear portion. (At least one of the first and second cavity aims contain, intracavity, a corresponding gain medium including one of a VECSEL-based laser gain medium, a solid-state gain medium, and a fiber amplifier and configured to provide amplification of light at a corresponding wavelength). The laser source also comprises a first optical system (disposed across an axis of the at least one of the first and second cavity arms, to either refract or reflect light incident thereon while transforming a transverse distribution of said light) a second optical system (disposed across said axis and characterized by optical losses, at the corresponding wavelength, that are non-uniformly distributed across the second optical system). The second optical system disposed between the corresponding gain medium and the first optical system. Optionally, both the first and the second optical systems may be located in the collinear portion of the laser cavity network.
The so-configured laser source in operation, maintains intracavity generation of light at the corresponding wavelength, said light having, intracavity, (i) a first transverse mode distribution in a first portion of the laser cavity network between the gain medium and the second optical system, (ii) a second transverse mode distribution in a second portion of the laser cavity network between the second and first optical systems, and (iii) a third transverse mode distribution in a third portion of the laser cavity network, the third portion being a remaining portion of the laser cavity network, the first, second, and third transverse mode distributions being different from one another.
A laser source further includes an optical element defining a spatial fold of a path of light propagating intracavity and forming, intracavity, first and second Rayleigh regions of first and second light portions of light, where the first and second light portions respectively contain the first and second wavelengths, and where the first and second Rayleigh regions overlap with one another in the spatial fold. Here, at least one of the following conditions is satisfied: a) such optical element is not a reflector that terminates the cavity network while such optical element is an output coupler configured to transmit a portion of light, generated intracavity, to form a light output from the laser source, and b) at least one of the first and second cavity arms contains an intracavity non-linear frequency conversion element. In a specific implementation, at least one of the following conditions may be satisfied: (i) at least one of the first and second cavity arms is devoid of a gain medium, and (ii) the first transverse mode distribution is a Gaussian distribution; the second transverse mode distribution is a Hermite-Gaussian distribution, and the third transverse mode distribution is a Laguerre-Gaussian distribution. Alternatively, each of the first and second cavity arms may contain a respectively corresponding first and second VECSEL-based laser medium to cause independent lasing at respectively-corresponding first and second wavelengths, while the laser source further comprises at least one wavelength tuning mechanism juxtaposed with the cavity network and configured to tune at least one of the first and second wavelengths independently from another of the first and second wavelengths while allowing the first and second wavelengths to become equal as a result of such tuning.
Depending on the embodiment, the first cavity arm may contain a corresponding gain medium element while the second cavity arm may be devoid of a corresponding gain medium element. In this case, an end-reflector of the second cavity arm is made partially transparent to light at a pump wavelength, the laser source is further equipped with a pump laser source that is configured to generate pump light at said pump wavelength and is positioned to deliver said pump light through said end reflector along an optical axis of the second cavity arm. Depending on the embodiment, The AMC may be disposed inside or outside the multi-arm cavity network. Alternatively or in addition (and while not necessarily shown in the drawings, for simplicity of illustrations), more than one AMC may be disposed inside at least one cavity arm of the multi-arm cavity network of the system of the invention.
For the purposes of this disclosure and the appended claims, the use of the terms “substantially”, “approximately”, “about” and similar terms in reference to a descriptor of a value, element, property or characteristic at hand is intended to emphasize that the value, element, property, or characteristic referred to, while not necessarily being exactly as stated, would nevertheless be considered, for practical purposes, as stated by a person of skill in the art. These terms, as applied to a specified characteristic or quality descriptor means “mostly”, “mainly”, “considerably”, “by and large”, “essentially”, “to great or significant extent”, “largely but not necessarily wholly the same” such as to reasonably denote language of approximation and describe the specified characteristic or descriptor so that its scope would be understood by a person of ordinary skill in the art. The use of these terms in describing a chosen characteristic or concept neither implies nor provides any basis for indefiniteness and for adding a numerical limitation to the specified characteristic or descriptor. As understood by a skilled artisan, the practical deviation of the exact value or characteristic of such value, element, or property from that stated falls and may vary within a numerical range defined by an experimental measurement error that is typical when using a measurement method accepted in the art for such purposes.
An embodiment of the system of the invention includes electronic circuitry (for example, a computer processor) controlled by instructions stored in a memory, to perform governing of the described laser source and/or specific data collection/processing steps. The memory may be random access memory (RAM), read-only memory (ROM), flash memory or any other memory, or combination thereof, suitable for storing control software or other instructions and data. Those skilled in the art would readily appreciate that instructions or programs defining the operation of the present invention may be delivered to a processor in many forms, including, but not limited to, information permanently stored on non-writable storage media (e.g. read-only memory devices within a computer, such as ROM, or devices readable by a computer I/O attachment, such as CD-ROM or DVD disks), information alterably stored on writable storage media (e.g. floppy disks, removable flash memory and hard drives) or information conveyed to a computer through communication media, including wired or wireless computer networks. In addition, while the invention may be embodied in software, the functions necessary to implement a method of the invention may optionally or alternatively be embodied in part or in whole using firmware and/or hardware components, such as combinatorial logic, Application Specific Integrated Circuits (ASICs), Field-Programmable Gate Arrays (FPGAs) or other hardware or some combination of hardware, software and/or firmware components.
The idea and implementation of the idea of the present invention opens the door to obtaining high-power circulating within the laser cavity network LG modes, which opens the path to producing circularly symmetric transverse modes at multiple wavelengths by the means of nonlinear frequency conversion, as discussed in Examples above. The currently limited availability of higher order transverse modes in spectral regions such as UV, visible or mid-IR is, therefore, greatly expanded. Thus, the laser systems configured according to the idea of the invention, thanks to their flexibility and opportunities for customization, can be implemented when beams with particular orbital angular momentum are required for atoms or particles manipulation.
The invention as recited in claims appended to this disclosure is intended to be assessed in light of the disclosure as a whole. Various changes in the details, steps and components that have been described may be made by those skilled in the art within the principles and scope of the invention.
This patent application claims priority form and benefit of U.S. Provisional Patent Applications No. 62/437,452 filed on Dec. 21, 2016, and No. 62/569,891 filed on Oct. 9, 2017. The disclosure of each of the above-identified patent documents is incorporated by reference herein.
Filing Document | Filing Date | Country | Kind |
---|---|---|---|
PCT/US2017/067359 | 12/19/2017 | WO | 00 |
Number | Date | Country | |
---|---|---|---|
62437452 | Dec 2016 | US | |
62569891 | Oct 2017 | US |