1. Field of the Invention
The present invention relates to a glass base material manufacturing apparatus and a method thereof. More particularly, the present invention relates to a glass base material manufacturing apparatus and a method thereof for manufacturing a high quality glass base material.
2. Description of the Related Art
The glass-base-material was manufactured by such as an outside vapor deposition (OVD) method or a vapor-phase axial deposition (VAD) method. The OVD method accumulates glass particles, which are ejected from a burner, on a surface of a rotated core rod. Conventionally, both ends of the core rod were held by a single scroll chuck and were rotated by rotating the scroll chuck.
A length, a diameter, and a weight of glass base material have been increased in order to increase the productivity of manufacturing an optical fiber. When each end of the core rod was held by a single scroll chuck, it was difficult to hold the core rod firmly by the scroll chuck because the core rod may bend under its own weight, for example. Thus, the core rod may vibrate when the core rod is rotated by the rotation of the scroll chuck. As a result, the glass particles are accumulated around the core rod unequally so that the eccentricity of the manufactured glass base material increases. Thus, the productivity of manufacturing the glass base material decreases.
Therefore, it is an object of the present invention to provide a glass base material manufacturing apparatus and a method thereof, which is capable of overcoming the above drawbacks accompanying the conventional art. The above and other objects can be achieved by combinations described in the independent claims. The dependent claims define further advantageous and exemplary combinations of the present invention.
According to the first aspect of the present invention, an apparatus for manufacturing a glass base material, which is a base material of an optical fiber, the glass base material having a core rod as a central axis, comprising a holding unit having a plurality of scroll chucks connected in series along the core rod for holding an end of the core rod; and a burner that hydrolyzes a gas material, which is a base material of the glass base material, into glass particles and accumulates the glass particles around the core rod to form the glass base material.
The holding unit may have a connection plate provided between each scroll chuck in series for connecting each of a plurality of scroll chucks. The connection plate may have a circular shape. The connection plate may include a central hole, through which the core rod is penetrated, and a plurality of bolt holes around a periphery of the connection plate, through which a bolt is penetrated.
Each of the plurality of scroll chucks may include a plurality of bolt holes around a periphery of each plurality of the scroll chucks; and the holding unit may have a plurality of bolts, each of which penetrates through the bolt hole of the scroll chuck and the connection plate for connecting the scroll chucks and the connection plate. The holding unit may have two of the scroll chucks in series along the core rod.
The apparatus may further comprise a core-rod-rotation unit for rotating the core rod around a central axis of the core rod, and the plurality of scroll chucks connected in series hold one longitudinal end of the core rod, which is located closer to the core-rod-rotation unit than another longitudinal end of the core rod. Each of the scroll chucks may have a plurality of jaws, a number of which is an even number more than three, the jaws contacting and holding the core rod. Each of the scroll chucks may have six jaws.
Each of the scroll chucks may have a circular plan shape including a chuck-central-hole formed on a center of the scroll chuck, through which the core rod is penetrated, and the jaws may be provided on the scroll chuck radically in isogonal direction from the chuck-central-hole.
The apparatus may further comprise a chamber having a frame which accommodates the glass base material; a side-burner located inside the frame for heating a longitudinal end of the glass base material; and a position-adjusting unit connected to the side-burner for adjusting a position of the side-burner from outside the frame. The position-adjusting unit may adjust the position of the side-burner by moving the side-burner along a longitudinal direction of the core rod and rotating the side-burner toward the core rod.
The position-adjusting unit may have: a shaft, to which the side-burner is connected; a shaft-rotation handle for rotating the side-burner toward the core rod by rotating the shaft; a slide base, to which the shaft and the shaft-rotation handle are connected; a ball screw for moving the slide base along a longitudinal direction of the core rod; and a horizontal-movement handle which rotates the ball screw to move the slide base along a longitudinal direction of the core rod.
According to the second aspect of the present invention, an apparatus for manufacturing a glass base material, which is a base material of an optical fiber, the glass base material having a core rod as an central axis, comprises a burner that hydrolyzes a gas material, which is a base material of the glass base material, into glass particles and accumulates the glass particles around the core rod to form the glass base material; a chamber which accommodates the core rod and the burner; an air vent formed on a bottom sidewall of the chamber to intake a cleaning gas for cleaning inside the chamber; a filter formed inside the chamber, the filter located lower than the burner and higher than the air vent for regulating a flow speed distribution of the cleaning gas that flows from the air vent; and an air-regulating-plate formed inside the chamber, the air-regulating-plate located lower than the burner and higher than the air vent and having a plurality of holes to regulate a direction of a flow of the cleaning gas that flows from the air vent.
The air-regulating-plate may be formed on an upper side of the filter in the chamber. The filter and the air regulating plate may be located horizontally parallel to longitudinal direction of the core rod. Each of the filter and the air-regulating-plate may cover all over a bottom face of the chamber. The apparatus may further comprise an exhaustion vent formed on a top of the chamber along a longitudinal direction of the core rod for exhausting the cleaning gas existing inside the chamber.
A distance L1 between a bottom surface of the glass base material and the air-regulating-plate may be substantially 140 mm or greater. A distance L1 between a bottom surface of the glass base material and the air-regulating-plate may be substantially 1.25 D or greater when there is a relationship of 1.25 D≧140 mm where D is a diameter of a finished the glass base material. A distance L2 between the air-regulating-plate and the filter may have a relationship of 0≦L2/D≦1.0 where D is a diameter of a finished the glass base material.
According to the third aspect of the present invention, an apparatus for manufacturing a glass base material, which is a base material of an optical fiber, the glass base material having a core rod as a central axis, comprises a burner that hydrolyzes a gas material, which is a base material of the glass base material, into glass particles and accumulates the glass particles around the core rod to form the glass base material; a chamber installed on a floor, the chamber accommodating the core rod and the burner; and a supporting unit formed on a bottom face of the chamber and contacting with the floor for supporting the chamber, the supporting unit comprising a fixed leg fixed on the floor and a plurality of movable legs which are movable with respect to the floor.
The fixed leg may be disposed on the chamber on a center line thereof in at least one of the longitudinal direction and the widthwise direction. The fixed leg may be disposed on the chamber except on a corner of the chamber. The apparatus may further comprise a core-rod-rotation unit for rotating the core rod around a central axis of the core rod, and the core-rod-rotation unit being provided outside the chamber.
According to the fourth aspect of the present invention, a method for manufacturing a glass base material, which is a base material of an optical fiber, the glass base material having a core rod as a central axis, comprises hydrolyzing a gas material, which is a base material of the glass base material, into glass particles; accumulating the glass particles around the core rod to form the glass base material; in taking a cleaning gas into a chamber; regulating a flow speed distribution of the cleaning gas that flows into the chamber by a filter; and regulating a direction of a flow of the cleaning gas that passes through the filter.
The regulating the flow speed distribution and the regulating the direction of the flow may regulate the flow of the cleaning gas to be a laminar flow. The apparatus may further comprise exhausting the cleaning gas from the chamber.
The summary of the invention does not necessarily describe all necessary features of the present invention. The present invention may also be a sub-combination of the features described above. The above and other features and advantages of the present invention will become more apparent from the following description of the embodiments taken in conjunction with the accompanying drawings.
The invention will now be described based on the preferred embodiments, which do not intend to limit the scope of the present invention, but exemplify the invention. All of the features and the combinations thereof described in the embodiments are not necessarily essential to the invention.
The holding units 14 hold each end of a core rod 10. Each of the chuck shafts 16 is connected to each end of the core rod 10 and the corresponding core-rod-rotation unit 38. The core-rod-rotation unit 38 rotates the core rod 10 around the central axis of the core rod 10 by rotating the chuck shaft 16. The core-rod-rotation unit 38 is provided outside the chamber 32. In
The plurality of burners 18 hydrolyzes a gas material, which is a base material of the glass base material 12, into glass particles and accumulates the glass particles around the core rod 10 to form a glass base material 12. The plurality of burners 18 is mounted on the burner stage 20. The burner stage 20 is supported by the burner shaft 24. The burner-moving unit 22 moves the burner shaft 24 along a longitudinal direction of the core rod 10 so that the plurality of burners 18 moves along a longitudinal direction of the core rod 10. A part of the bottom side of the burner 18, the burner stage 20, the burner shaft 24, and the burner-moving unit 22, which are shown by the hidden line, are provided outside the chamber 32 to protect the burner-moving unit 22 from the heat inside the chamber 32.
The filter 30 is formed inside the chamber 32. The filter 30 regulates a flow speed distribution of the cleaning gas that flows from the bottom of the chamber 32. The air-regulating-plate 28 is formed on an upper side of the filter 30 in the chamber 32. The air-regulating-plate 28 regulates a direction of a flow of the cleaning gas that passes through the filter 30. The air-regulating-plate 28 has a plurality of holes 29 to regulate a direction of a flow of the cleaning gas. The exhaustion vent 46 exhausts a cleaning gas existing inside the chamber 32. The exhaustion vent 46 is formed on a top of the chamber 32 along a longitudinal direction of the core rod 10.
The chamber 32 accommodates the core rod 10, holding units 14, a plurality of burners 18, a filter 30, and an air-regulating-plate 28. The chamber 32 may be a conventional chamber that has a frame, inner wall, insulation material, and outer wall, which are not shown in
The shape of the chamber 32 may be box type as shown in
The side-burner 44 heats a longitudinal end of the accumulated glass base material 12. The longitudinal end of the accumulated glass base material 12 is heated to prevent the accumulated glass base material 12 from peeling away from the core rod 10 and causing cracks. The position-adjusting unit 40 adjusts a position of the side-burner 44. The position-adjusting unit 40 is provided outside the chamber 32. For example, in
The supporting unit 35 is formed on a bottom face of the chamber 32. The supporting unit 35 contacts with the floor 150 and supports the chamber 32. The supporting unit 35 has a fixed leg 36, which is fixed on the floor 150, and a plurality of movable legs 34 which are movable with respect to the floor 150.
Each scroll chuck 75A and 75B includes a center hole 160 and a plurality of bolt holes 63A and 63B, respectively, around the center hole 160. The core rod 10 penetrates through the central hole 160 of the scroll chucks 75A and 75B and connection plate 88. The holding unit 14 has a plurality of bolts 91, each of which penetrates through the bolt hole 63A and 63B of the scroll chucks 75A and 75B, bolt holes 162 of the connection plate 88, and a motor-connection-metal-fitting 90 and firmly connects them to be one body. The motor-connection-metal-fitting 90 is connected to the chuck shaft 16, which is connected to the core rod rotation unit 38.
The scroll chuck 75A has jaws 60A, a front disk 62A, a back disk 78A, a cylinder 72A, a bevel gear 68A, and a gear axis 70A. The scroll chuck 75B has a front disk 62B, a back disk 78B, a cylinder 72B, a bevel gear 68B, and a gear axis 70B. The front disk 62A is provided closer to the longitudinal center of the core rod 10 than the back disk 78A. The front disk 62A has a guiding groove 64A, along which the jaws 60A moves.
Each of the jaws 60A has a front spiral groove 74 that swirls to the axial center 93 of the holding unit 14. The back disk 78A has a back spiral groove 76 that swirls to the axial center 93 of the core rod 10. The back spiral groove 76 engages with the front spiral groove 74 of all of the six jaws 60A. Thus, when the back disk 78A rotates around the central axis of the core rod 10, the jaws 60A that engages with the back disk 78A move along the direction perpendicular to longitudinal direction of the core rod 10, as shown by the arrow referred to as “B”.
The cylinder 72A connects the front disk 62A and the connection plate 88. The cylinder 72A is arranged such that the axial center of the cylinder 78A is identical with the axial center 93 of the holding unit 14. The cylinder 72A has six penetration holes 66, through which each of the gear axis 70A penetrates. The diameter of the penetration hole 66 is smaller than the diameter of the bottom part of the bevel gear 68A. Each of the six bevel gears 68A is connected to the corresponding gear axis 70A. The gear axis 70A are arranged such that the direction of the gear axis 70A is parallel to the moving direction of the jaws 60A, shown by the arrow “B”. In other words, the longitudinal direction of the gear axis 70A is perpendicular to longitudinal direction of the core rod 10.
The back disk 78A has cogs 79 on an opposite side of the back spiral groove 76 that engage with the bevel gear 68A. Thus, the bevel gear 68A can rotate the back disk 78A around the axial center 93 of the holding unit 14 by rotating around the gear axis 70A. The gear axis 70A may be rotated manually by the hexagonal wrench 84 or rotated automatically by a motor, not shown in the figures.
By rotating the gear axis 70A and 70B with a hexagonal wrench 84 in the direction shown by the arrow referred to as “A”, the back disks 78A and 78B, each of which engages with the bevel gears 68A and 68B, are rotated around the axial center 93 of the holding unit 14. Then, the six jaws 60A and 60B, each of which engages with the back disks 78A and 78B, move closer to the core rod 10 in the direction shown by the arrow “B” along the guiding grooves 64A and 64B and finally hold the core rod 10.
The configuration of the scroll chuck 75B is the same with that of the scroll chuck 75A except the thickness of the jaw 60B in the longitudinal direction of the core rod 10 is thinner than that of the scroll chuck 75A and the cylinder 72B connecting the front disk 64B and the motor-connection-metal-fitting 90. Thus, the explanation of the scroll chuck 75B is abbreviated.
Referring to
If the number of jaws is three, it is difficult to hold the core rod such that the axial center of the core rod becomes the same with the axial center of the holding unit 14, which is the same with the center of the central hole 160. That is, jaws begin the holding process before the pressure applied to the core rod 10 by the jaws becomes equal for each jaw. Thus, the scroll chuck may hold the core rod 10 such that the axial center of the core rod 10 does not match with the axial center of the scroll chuck.
If the scroll chuck has an odd number of jaws, such as five, seven, and so on, the scroll chuck tends to hold the core rod such that the axial center of the core rod 10 does not match with the axial center of the scroll chuck. Thus, the scroll chuck of the present embodiment has even number of jaws more than three.
Because the holding unit 14 has a plurality of scroll chucks 75A and 75B connected in series, the holding unit 14 can firmly hold the core rod 10 so that the core rod 10 does not vibrate when the core rod 10 rotates. Furthermore, because each scroll chuck 75A and 75B has six jaws 60A and 60B, the scroll chucks 75A and 75B can firmly hold the core rod 10 so that the core rod 10 does not vibrate when the core rod 10 rotates. Therefore, the glass base material manufacturing apparatus 100 of the present embodiment can manufacture a high quality glass base material 12, the axial center of core rod 10 of which positions accurately at the axial center of the glass base material 12.
Furthermore, because each scroll chuck 75A and 75B has isogonally arranged six jaws 60A and 60B, the stress applied on the core rod 10 by each of the jaws 60A and 60B is smaller than the stress applied on the core rod 10 by the scroll chuck having jaws, the number of which is smaller than six.
Also, because the number of jaws 60A and 60B are even numbers of six, and the jaws 60A and 60B are arranged isogonal with the center hole 160 of the front disk 62A and 62B, the stress applied on the core rod 10 by the jaws 60A and 60B is substantially equal. In other words, the holding unit 14 can hold the core rod 10 such that the axial center of the core rod becomes the axial center 93 of the holding unit 14. Thus, the core rod 10 does not vibrate when the core rod 10 rotates. Therefore, a crack does not occur on the core rod 10 and the glass base material 12 during holding and rotating the core rod 10 by the scroll chuck.
The holding unit 14 of the present embodiment may be provided on both sides of the core rod 10. Also, the holding unit 14 of the present embodiment may be provided only on one end of the core rod 10, and a holding unit, which has a single scroll chuck, may be provided on another end of the core rod 10. In this case, if the apparatus 100 has only one holding unit 14 of the present embodiment and has only one core-rod-rotation unit 38, the holding unit 14 of the present embodiment is provided on the end of the core rod 10, which is located closer to the core-rod-rotation unit 38 than the other end of the core rod 10.
The use of the holding unit 14 of the present embodiment is not limited to the OVD method as shown in
One end of the core rod 10 was held by the holding unit 14 of the present embodiment, and another end of the core rod was held by the holding unit 14 having a single scroll chuck. The diameter of the core rod 10 was 50 mm, and the length of the core rod 10 was 3 m. The amount of vibration of the core rod 10 during holding and rotating the core rod 10 by the holding unit 14 was 0.2 mm, which was smaller than that of the conventional holding unit.
Furthermore, the eccentricity of the glass base material manufactured by the apparatus 100 of the present embodiment was 0.1 which was smaller than the eccentricity of the glass base material manufactured by the conventional apparatus. Furthermore, the eccentricity of the optical fiber drawn from the glass base material manufactured by the present apparatus 100 of the present embodiment was 0.1%, which was smaller than the eccentricity of the optical fiber drawn from the glass base material manufactured by the conventional apparatus.
Both ends of the core rod 10, which was the same as the core rod 10 used in EXAMPLE 1, were held by the holding unit having a single scroll chuck. The amount of vibration of the core rod 10 during holding and rotating the core rod 10 by the holding unit was 0.4 mm, which was larger than that of the holding unit 14 of the present embodiment.
Furthermore, the eccentricity of the glass base material manufactured by the conventional apparatus was 0.2%, which was larger than the eccentricity of the glass base material manufactured by the apparatus 100 of the present embodiment. Furthermore, the eccentricity of the optical fiber drawn from the glass base material manufactured by the conventional apparatus was 0.2%, which was larger than the eccentricity of the optical fiber drawn from the glass base material manufactured by the apparatus 100 of the present embodiment.
A glass base material was manufactured by the OVD method using the apparatus 100 of the present embodiment, which had a holding unit 14 that included a scroll chuck 75 having six jaws 60. First, both ends of a core rod 10, which had a 50 mm diameter and 3000 mm length, was held by the scroll chuck 75 having six jaws 60. The holding units 14 held the core rod 10 in the horizontal direction and rotated the core rod 10 around the axial center of the core rod 10. Then, the glass particles were ejected from the burners 18 and accumulated around the surface of the core rod 10. The amount of vibration of core rod 10 during holding and rotating the core rod 10 by the holding unit 14 was 0.2 mm in average value, which was smaller than that of the conventional holding unit.
Furthermore, the eccentricity of the glass base material manufactured by the apparatus 100 of the present embodiment was 0.1%, which was smaller than the eccentricity of the glass base material manufactured by the conventional apparatus. Furthermore, the eccentricity of the optical fiber drawn from the glass base material manufactured by the apparatus 100 of the present embodiment was 0.1%, which was smaller than the eccentricity of the optical fiber drawn from the glass base material manufactured by the conventional apparatus.
A glass base material was manufactured by the OVD method using the conventional apparatus, which has a holding unit that includes a scroll chuck having three jaws. Other conditions were the same as EXAMPLE 2. The amount of vibration of the core rod 10 during holding and rotating the core rod 10 by the holding unit was 0.4 mm in average value, which was larger than that of the holding unit 14 of the present embodiment.
Furthermore, the eccentricity of the glass base material manufactured by the conventional apparatus was 0.2%, which was larger than the eccentricity of the glass base material manufactured by the apparatus 100 of the present embodiment. Also, the eccentricity of the optical fiber drawn from the glass base material manufactured by the conventional apparatus was 0.2%, which was larger than the eccentricity of the optical fiber drawn from the glass base material manufactured by the apparatus 100 of the present embodiment.
To heat the appropriate position of the glass base material by the side-burner 44, the position-adjusting unit 40 adjusts the position and angle of the side-burner 44 toward the glass base material 12. The position-adjusting unit 40 has a shaft 42, bearings 104, a shaft-rotation handle 96, a slide base 94, a ball screw 102, and a horizontal-movement handle 98.
The side-burner 44 is connected to the shaft 42. The shaft 42 is supported by the bearings 104 such that the shaft 42 can rotate inside a hole formed in the bearing 104. The shaft-rotation handle 96 rotates the side-burner 44 around the axis of the shaft 42. Thus, the shaft-rotation handle 96 can adjust the angle of the side-burner 44 toward the core rod 10 by rotating the shaft 42.
The shaft 42, bearings 104, and the shaft-rotation handle 96 are installed on the slide base 94. The horizontal-movement handle 98 is connected to the ball screw 102. Thus, when the horizontal-movement handle 98 rotates, the ball screw 102 rotates. The slide base 94 moves in a longitudinal direction of the shaft 42 by rotating the horizontal-movement handle 98. Thus, the shaft 42, bearings 104, and the shaft-rotation handle 96 move in the horizontal direction together with the slide base 94. Therefore, the position-adjusting unit 40 can adjust the position and angle of the side-burner 44 by rotating the shaft-rotation handle 96 and the horizontal-movement handle 98.
Referring to
The filter 30 is formed inside the chamber 32 near the bottom end of the chamber 32 and above the air vent 48 to intake the air that flows from the air vent 48. The filter 30 regulates a flow speed distribution of the cleaning gas that flows from the bottom of the chamber 32. The air-regulating-plate 28 is formed on an upper side of the filter 30 in the chamber 32. However, the air-regulating-plate 28 may be formed on a lower side of the filter 30 in the chamber 32.
The air-regulating-plate 28 has a plurality of holes 29. The air-regulating-plate 28 regulates the direction of the flow of the cleaning gas that passed through the filter 30 by the plurality of holes 29. The filter 30 and the air-regulating-plate 28 are arranged horizontally parallel to the longitudinal direction of the core rod 10. The filter 30 and the air-regulating-plate 28 cover all over a bottom face of the chamber 32.
The air-regulating-plate 28 can regulate and change the direction of the flow of the cleaning gas that flows inside the chamber 32. However, it is difficult to prevent the unevenness of the flow speed distribution of the cleaning gas occurring locally only by the air-regulating-plate 28. On the other hand, the filter can prevent the unevenness of the flow speed distribution of the cleaning gas. However, it is difficult to regulate and change the direction of the flow of the cleaning gas only by the filter 30. Thus, the present embodiment uses both the air-regulating-plate 28 and the filter 30 to regulate the flow of the cleaning gas to be a laminar flow.
When the glass base material 12, on which the floated glass particles 8 are attached, is sintered and vitrified to form a preform, a bubble is generated from the re-attached glass particles 8 as a nucleus. If the glass base material 12 contains a bubble, the optical fiber drawn from this glass base material 12 may be broken at the position of the bubble. Thus, the glass particles 8 floated inside the chamber 32 are removed from the chamber 32 by the cleaning gas.
The air-regulating-plate 28 and the filter 30 regulate the direction and speed of the flow of the cleaning gas to be a laminar flow, which has multiple layers flowing parallel to each other as shown in
Thus, the glass particles that float inside the chamber 32, which are not accumulated on the core rod 10, can be removed from the chamber 32 so that the floated glass particles do not attach to the core rod 10 again or do not attach to the inner wall of the chamber 32. Furthermore, the present embodiment can prevent the floated glass particles, which are accumulated on the inner wall of the chamber 32 and fall from the inner wall of the chamber 32, to attach to the core rod 10 again.
The distance L1 between the bottom surface of the glass base material 12 and the air-regulating-plate 28 is substantially 140 mm or greater. When the diameter of the finished glass base material 12 is referred to as “D”, and when there is a relationship of 1.25 D≧140 mm, the distance L1 is substantially 1.25 D or greater. When the above mentioned relationship is satisfied, the laminar flow of the cleaning gas can be easily obtained. Furthermore, the flow of the cleaning gas can be easily regulated to be laminar flow when the relationship of 0≦L2/D≦1.0 is satisfied where L2 denotes the distance between the air-regulating-plate 28 and the filter 30.
Then, the glass base material 12 manufactured by the apparatus of the present embodiment is sintered and vitrified to form a preform. The manufactured preform had less bubbles than the preform manufactured by the conventional apparatus that did not have the filter 30 and the air-regulating-plate 28.
Then, the glass base material 12 manufactured by the apparatus shown in
Then, the glass base material 12 manufactured by the apparatus shown in
During the manufacturing process of the glass base material 12, temperature in the chamber 32 increases by the heat generated by the burners 18. Especially, when there is a plurality of burners 18 in the chamber 32 as shown in
Because the heat increases inside the chamber 32 by the burners 18, the size of the chamber 32 expands. If all the legs are fixed on the floor 150, the chamber 32 may be distorted or broken owing to the stress caused by the expansion of the chamber 32. Thus, the present embodiment has a fixed leg 36 and a plurality of movable legs 34 to remove the stress caused by the expansion of the chamber 32.
In
The configuration of the movable legs 34 is not limited to
The core-rod-rotation unit 38 is provided outside the chamber 32 in order to prevent the distance between the holding units 14 to be changed by the heat expansion of the chamber 32, which may cause the breakage of the glass base material 12.
A glass base material was manufactured using the apparatus shown in
The size of the chamber 32 was 3.5 m in width, 2 m in length, and 1.5 m in depth. The chamber 32 has an opening for burners 18 and an opening for exhaustion.
The condition of raw material gas supplied to the burner 18 was 50 Nl/min per burner of hydrogen gas (H2), 30 Nl/min per burner of oxygen gas (O2), and 3.5 g/min per burner of raw material gas of silicon chloride (SiCl4) at the initial stage of the accumulation of the glass particles on the core rod 10. Furthermore, the condition of raw material gas supplied to the burner 18 was adjusted to be 100 Nl/min per burner of hydrogen gas (H2), 50 Nl/min per burner of oxygen gas (O2), and 23 g/min per burner of raw material gas of silicon chloride (SiCl4) according to the growth of the glass base material 12 at an end of the accumulation of the glass particles.
The burner-moving unit 22 had a high-speed axis and a low-speed axis to move the burner shaft 24. The high-speed axis moves the burner shaft 24 with high speed, and the low-speed axis moves the burner shaft 24 with a speed lower than the high-speed axis. The high-speed axis was moved with the speed of 1000 mm/min, and the low-speed axis was moved with the speed of 20 mm/min. The moving distance of both the high-speed axis and the low-speed axis was 150 mm. 10 burners 18 were mounted on the burner stage 20 at 150 mm intervals. The distance between the burners 18 and the glass base material 12 was controlled to be constant during the accumulation process.
The condition of the chamber 12 was observed during the accumulation process. The temperature inside the chamber 32 during the accumulation process was almost the same as the conventional chamber. However, no strain was observed on the inner wall of the chamber 32 after the end of the accumulation process. The amount of deformation of the chamber 32 was measured by measuring the amount of movement of the movable leg 34. The amount of movement of the movable leg 34 was 10 mm. Therefore, the stress caused by the heat expansion of the chamber 12 was removed by the movable legs 34.
A glass base material was manufactured using a chamber that has a supporting unit including legs, all of which were fixed on the floor by an anchor. The glass base material was manufactured according to the same condition with that of EXAMPLE 4 except the configuration of the supporting unit.
The condition of the chamber was observed during the accumulation process. The temperature was increased over 300° C. inside the chamber 32 during the accumulation process. There was strain in the inner wall of the chamber 32 after the end of the accumulation process because the stress caused by the heat expansion could not escape. The strain was greater at the center part of the chamber 32 than the strain at the other parts.
As explained above, the apparatus 100 of the present embodiment can select the direction, to which the stress caused by the heat expansion is removed, by selecting the position of the fixed leg 36 and the movable legs 34 on the chamber 32. The position of the fixed leg 36 on the chamber 32 may be determined according to the location of the chamber 32 in the factory, equipment provided around the apparatus 100, a working space, and so on.
Although the present invention has been described by way of exemplary embodiments, it should be understood that those skilled in the art might make many changes and substitutions without departing from the spirit and the scope of the present invention which is defined only by the appended claims.
Number | Date | Country | Kind |
---|---|---|---|
2001-136988 | May 2001 | JP | national |
2001-171961 | Jun 2001 | JP | national |
2001-202438 | Jul 2001 | JP | national |
2001-364866 | Nov 2001 | JP | national |
2001-396363 | Dec 2001 | JP | national |
The present application is a divisional of U.S. patent application Ser. No. 11/987,538 filed Nov. 30, 2007 which is a divisional of U.S. patent application Ser. No. 10/140,436 filed May 8, 2002 which claims priority from Japanese patent application Nos. 2001-136988 filed May 8, 2001, No, 2001-171961 filed Jun. 7, 2001, No. 2001-202438 filed Jul. 3, 2001, No. 2001-364866 filed Nov. 29, 2001, and No. 2001-396363 filed Dec. 27, 2001, the contents of which are incorporated herein by reference.
Number | Date | Country | |
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Parent | 11987538 | Nov 2007 | US |
Child | 14054571 | US | |
Parent | 10140436 | May 2002 | US |
Child | 11987538 | US |