Patent Application
20240409453
The present invention relates to a glass composition, in particular to a glass composition applicable for semiconductor manufacturing field.
Owing to obvious advantages over other materials (such as metal, crystal, and ceramic) in terms of light transmission performance, chemical performance, mechanical performance, electrical characteristic, manufacturing and processing costs, glass has been gradually used in semiconductor packaging, semiconductor manufacturing process, and other applications in recent years. With the increasing integration of semiconductor chip devices, carrier materials are needed in chip packaging process to prevent the deformation of packaging wafer and improve the yield of chip packaging. The glass is a promising material for semiconductor chip packaging carrier due to its good mechanical stability, excellent light transmittance and ultra-large size at a low cost.
The higher the transition temperature (Tg) of the glass used to package the carrier, the higher the tolerance of the glass in high-temperature manufacturing process, and the less easy to be deformed in the high-temperature manufacturing process, especially in the semiconductor manufacturing process that needs to be above 500° C. to 600° C. The transition temperature of the glass needs to be higher than 600° C. Compared with traditional stripping technology, UV laser stripping technology has the advantages of high yield and low cost, but the UV laser stripping technology requires the carrier glass composition to have high permeability near 365 nm. The carrier glass used in semiconductor packaging, with a high value, needs to be recycled dozens or even hundreds of times, and should be cleaned after each use. If the water resistance and acid resistance of the glass composition are poor, the smooth surface thereof will be destroyed during the cleaning process, thereby shortening its service life. More seriously, the carrier glass will be exposed to acid-base chemical reagents in the semiconductor manufacturing process. If the chemical stability is poor, the substance in the glass will be corroded into the acid-base solution used in the process, resulting in premature scrapping of the process liquid, thereby causing huge losses. Therefore, as the carrier glass, it needs to have excellent chemical stability.
Based on the above reasons, the technical problem to be solved by the present invention is to provide a glass composition with excellent chemical stability, high transition temperature and UV light transmittance.
To solve the technical problem, the present invention provides the technical solution as below:
The beneficial effects of the present invention are as follows: through rational component design, the glass composition of the present invention features excellent chemical stability, high UV light transmittance and transition temperature, so as to meet the requirements for carrier and packaging in semiconductor manufacturing process and to be applicable for semiconductor manufacturing field.
The implementations of the glass composition provided by the present invention will be described in detail below, but the present invention is not limited to the following implementations. Appropriate changes may be made within the scope of the purpose of the present invention for implementation. In addition, the repeated descriptions will not limit the aim of the invention although with appropriate omissions. In the following, the glass composition of the present invention is sometimes referred to as glass.
In the following paragraphs, the range of components of the glass composition provided by the present invention will be described. If not specified herein, the content of each component and the total content are expressed in weight percentage (wt %) relative to the total glass materials converted into oxide composition. “Converted into oxide composition” therein refers to that the total weight of this oxide is taken as 100% when the oxide, compound salt and hydroxide, used as raw materials for the ingredients (components) of the glass composition provided by the present invention, are decomposed and transformed into oxides during melting.
Unless otherwise noted in specific circumstances, the numerical range listed herein includes upper and lower limits, and the words “above” and “below” include the endpoint values as well as all integers and fractions within the range, but not limited to the specific values listed when the range is limited. The term “about” as used herein refers to that formulations, parameters and other quantities as well as characteristics are not, and do not need to be, accurate, and may be approximate and/or greater or lower if necessary, reflecting tolerances, conversion factors, measurement errors, etc. “And/or” mentioned herein is inclusive. For example, “A and/or B” refers to only A, or only B, or both A and B.
SiO2 serves as a key component of the glass provided by the present invention. In the glass of the present invention, an appropriate amount of SiO2 can ensure higher water resistance and acid resistance of the glass, and meanwhile achieve high UV light transmittance. If the content of SiO2 is less than 50%, the water resistance, acid resistance and UV light transmittance of the glass are lower than the design requirements. If the content of SiO2 is higher than 70%, melting temperature of the glass will rise sharply, and thus it is not easy to obtain high-quality glass, and the thermal expansion coefficient of the glass will be lower than the design expectation. Therefore, the content of SiO2 in the present invention is confined to 50-70%, preferably 54-68%, more preferably 55-64%. In some implementations, it can comprise about 50%, 50.5%, 51%, 51.5%, 52%, 52.5%, 53%, 53.5%, 54%, 54.5%, 55%, 55.5%, 56%, 56.5%, 57%, 57.5%, 58%, 58.5%, 59%, 59.5%, 60%, 60.5%, 61%, 61.5%, 62%, 62.5%, 63%, 63.5%, 64%, 64.5%, 65%, 65.5%, 66%, 66.5%, 67%, 67.5%, 68%, 68.5%, 69%, 69.5% or 70% of SiO2.
B2O3 can the transform the glass structure to be dense in the glass, achieve higher water resistance and acid resistance, promote the decrease of high-temperature viscosity of the glass, and thus it is easier to obtain high-quality glass under low temperature. If the content of B2O3 is less than 3%, the above effect will not be obvious. If the content of B2O3 is higher than 20%, the water resistance and acid resistance of the glass will instead decrease. Therefore, the content of B2O3 is confined to 3-20%, preferably 4-17%, more preferably 6-15%. In some implementations, it can comprise about 3%, 3.5%, 4%, 4.5%, 5%, 5.5%, 6%, 6.5%, 7%, 7.5%, 8%, 8.5%, 9%, 9.5%, 10%, 10.5%, 11%, 11.5%, 12%, 12.5%, 13%, 13.5%, 14%, 14.5%, 15%, 15.5%, 16%, 16.5%, 17%, 17.5%, 18%, 18.5%, 19%, 19.5% or 20% of B2O3.
An appropriate amount of Al2O3 can adjust the Young's modulus of the glass and increase the thermal conductivity of the glass, and the above effect is obtained by comprising above 11% of Al2O3 in the present invention. If the content of Al2O3 is higher than 25%, the thermal expansion coefficient of the glass will decrease rapidly, the melting performance will deteriorate, and meanwhile devitrification is particularly easy to occur. Therefore, the content of Al2O3 is 11-25%, preferably 12-24%, more preferably 14-20%. In some implementations, it can comprise about 11%, 11.5%, 12%, 12.5%, 13%, 13.5%, 14%, 14.5%, 15%, 15.5%, 16%, 16.5%, 17%, 17.5%, 18%, 18.5%, 19%, 19.5%, 20%, 20.5%, 21%, 21.5%, 22%, 22.5%, 23%, 23.5%, 24%, 24.5% or 25% of Al2O3.
In some implementations, by controlling the ratio of the content of Al2O3 to the content of B2O3, i.e., Al2O3/B2O3, within a range of 0.6-4.0, it is possible to obtain the desired thermal expansion coefficient and meanwhile enhance the light transmittance and inherent quality of the glass. Therefore, Al2O3/B2O3 is preferably 0.6-4.0, Al2O3/B2O3 is more preferably 0.8-3.5, Al2O3/B2O3 is further preferably 1.0-3.0, and Al2O3/B2O3 is more further preferably 1.2-2.5. In some implementations, the value of Al2O3/B2O3 is about 0.6, 0.65, 0.7, 0.75, 0.8, 0.85, 0.9, 0.95, 1.0, 1.05, 1.1, 1.15, 1.2, 1.25, 1.3, 1.35, 1.4, 1.45, 1.5, 1.55, 1.6, 1.65, 1.7, 1.75, 1.8, 1.85, 1.9, 1.95, 2.0, 2.05, 2.1, 2.15, 2.2, 2.25, 2.3, 2.35, 2.4, 2.45, 2.5, 2.55, 2.6, 2.65, 2.7, 2.75, 2.8, 2.85, 2.9, 2.95, 3.0, 3.05, 3.1, 3.15, 3.2, 3.25, 3.3, 3.35, 3.4, 3.45, 3.5, 3.55, 3.6, 3.65, 3.7, 3.75, 3.8, 3.85, 3.9, 3.95 or 4.0.
MgO can increase the chemical stability of the glass, and adjust the optical constant of the glass. If the content of MgO exceeds 10%, the thermal expansion coefficient of the glass will decrease, which is difficult to meet the design requirements. Therefore, the content of MgO is 0-10%, preferably 0.1-8%, more preferably 0.5-5%. In some implementations, it can comprise about 0%, greater than 0%, 0.01%, 0.05%, 0.1%, 0.5%, 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5%, 5%, 5.5%, 6%, 6.5%, 7%, 7.5%, 8%, 8.5%, 9%, 9.5% or 10% of MgO.
CaO can increase the thermal stability and refractive index of the glass, and adjust the thermal expansion coefficient. The present invention obtains the above effect by comprising over 1% of CaO. On the other hand, if the content of CaO is higher than 15%, the devitrification resistance of the glass will deteriorate, and the Young's modulus will be beyond the design requirements. Therefore, the content of CaO is 1-15%, preferably 2-13%, more preferably 4-9.5%. In some implementations, it can comprise about 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5%, 5%, 5.5%, 6%, 6.5%, 7%, 7.5%, 8%, 8.5%, 9%, 9.5%, 10%, 10.5%, 11%, 11.5%, 12%, 12.5%, 13%, 13.5%, 14%, 14.5% or 15% of CaO.
In some implementations of the present invention, by controlling the ratio of the content of CaO to the content of SiO2, i.e., CaO/SiO2, within a range of 0.02-0.25, it can enable the glass to obtain the desired transition temperature and meanwhile optimize the devitrification resistance of the glass. Therefore, CaO/SiO2 is preferably 0.02-0.25, CaO/SiO2 is more preferably 0.04-0.22, CaO/SiO2 is further preferably 0.08-0.2, and CaO/SiO2 is more further preferably 0.1-0.18. In some implementations, the value of CaO/SiO2 is about 0.02, 0.03, 0.04, 0.05, 0.06, 0.07, 0.08, 0.09, 0.1, 0.11, 0.12, 0.13, 0.14, 0.15, 0.16, 0.17, 0.18, 0.19, 0.2, 0.21, 0.22, 0.23, 0.24 or 0.25.
In some implementations, by controlling the ratio of the total content of MgO and CaO(MgO+CaO) to the content of B2O3, i.e., (MgO+CaO)/B2O3, within a range of 0.1-4.0, it is possible to easily obtain the desired Young's modulus and meanwhile increase the chemical stability and light transmittance of the glass. Therefore, (MgO+CaO)/B2O3 is preferably 0.1-4.0, (MgO+CaO)/B2O3 is more preferably 0.2-3.5, (MgO+CaO)/B2O3 is further preferably 0.3-2.0, and (MgO+CaO)/B2O3 is more further preferably 0.5-1.5. In some implementations, the value of (MgO+CaO)/B2O3 is about 0.1, 0.2, 0.3, 0.4, 0.5, 0.6, 0.7, 0.8, 0.9, 1.0, 1.1, 1.2, 1.3, 1.4, 1.5, 1.6, 1.7, 1.8, 1.9, 2.0, 2.1, 2.2, 2.3, 2.4, 2.5, 2.6, 2.7, 2.8, 2.9, 3.0, 3.1, 3.2, 3.3, 3.4, 3.5, 3.6, 3.7, 3.8, 3.9 or 4.0.
BaO can increase the refractive index and transition temperature of the glass, and optimize the stability and mechanical performance of the glass. If the content of BaO exceeds 10%, the density of the glass will increase, and the chemical stability will deteriorate. Therefore, the content of BaO is 0-10%, preferably 0-5%, more preferably 0-2%. In some implementations, it can comprise about 0%, greater than 0%, 0.01%, 0.05%, 0.1%, 0.5%, 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5%, 5%, 5.5%, 6%, 6.5%, 7%, 7.5%, 8%, 8.5%, 9%, 9.5% or 10% of BaO.
The role of SrO is similar to that of BaO. If the content of SrO exceeds 10%, the thermal expansion coefficient of the glass will fail to meet the design requirements, and meanwhile the chemical stability of the glass will decrease sharply. Therefore, the content of SrO is below 10%, preferably below 5%, more preferably below 2%. In some implementations, it can comprise about 0%, greater than 0%, 0.01%, 0.05%, 0.1%, 0.5%, 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5%, 5%, 5.5%, 6%, 6.5%, 7%, 7.5%, 8%, 8.5%, 9%, 9.5% or 10% of SrO.
In some implementations, by controlling the ratio of the content of CaO to the total content of BaO, SrO, and MgO(BaO+SrO+MgO), i.e., CaO/(BaO+SrO+MgO), within a range of 0.5-10.0, it can enable the thermal expansion coefficient of the glass to easily meet the design requirements, and meanwhile it can optimize the melting temperature of the glass, increase the light transmittance, and increase the chemical stability. Therefore, CaO/(BaO+SrO+MgO) is preferably 0.5-10.0, CaO/(BaO+SrO+MgO) is more preferably 2.0-8.0, CaO/(BaO+SrO+MgO) is further preferably 3.0-7.0, and CaO/(BaO+SrO+MgO) is more further preferably 3.5-6.0. In some implementations, the value of CaO/(BaO+SrO+MgO) is about 0.5, 0.6, 0.7, 0.8, 0.9, 1.0, 1.3, 1.5, 1.7, 2.0, 2.3, 2.5, 2.7, 3.0, 3.3, 3.5, 3.7, 4.0, 4.3, 4.5, 4.7, 5.0, 5.3, 5.5, 5.7, 6.0, 6.3, 6.5, 6.7, 7.0, 7.3, 7.5, 7.7, 8.0, 8.3, 8.5, 8.7, 9.0, 9.3, 9.5, 9.7 or 10.0.
In some implementations, by controlling the ratio of the total content of alkaline-earth metal oxides MgO, CaO, SrO, and BaO(MgO+CaO+SrO+BaO) to the total content of SiO2 and B2O3 (SiO2+B2O3), i.e., (MgO+CaO+SrO+BaO)/(SiO2+B2O3), within a range of 0.02-0.7, it is possible to easily obtain the desired Young's modulus and meanwhile increase the chemical stability and transition temperature of the glass. Therefore, (MgO+CaO+SrO+BaO)/(SiO2+B2O3) is preferably 0.02-0.7, (MgO+CaO+SrO+BaO)/(SiO2+B2O3) is more preferably 0.04-0.6, (MgO+CaO+SrO+BaO)/(SiO2+B2O3) is further preferably 0.05-0.5, and (MgO+CaO+SrO+BaO)/(SiO2+B2O3) is more further preferably 0.08-0.3. In some implementations, the value of (MgO+CaO+SrO+BaO)/(SiO2+B2O3) is about 0.02, 0.03, 0.04, 0.05, 0.06, 0.07, 0.08, 0.09, 0.1, 0.13, 0.15, 0.17, 0.2, 0.23, 0.25, 0.27, 0.3, 0.33, 0.35, 0.37, 0.4, 0.43, 0.45, 0.47, 0.5, 0.53, 0.55, 0.57, 0.6, 0.63, 0.65, 0.67 or 0.7.
ZnO can improve the chemical stability and reduce the thermal expansion coefficient in the glass. If the content of ZnO is excessive, the transition temperature of the glass will decrease rapidly, so that the glass is easy to soften and deform under high-temperature working environment, exerting a fatal effect on glass devices that need to work at high temperature. Therefore, the content of ZnO is below 8%, preferably below 5%, more preferably below 3%. In some implementations, it further preferably contains no ZnO. In some implementations, it can comprise about 0%, greater than 0%, 0.01%, 0.05%, 0.1%, 0.5%, 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5%, 5%, 5.5%, 6%, 6.5%, 7%, 7.5% or 8% of ZnO.
Rn2O(Rn2O is one or more of Li2O, Na2O, and K2O) can reduce the melting temperature and density of the glass. However, when the content of Rn2O is high, the transition temperature of the glass will decrease. On the other hand, when the glass comprising Rn2O is used as the carrier, alkali metal ions Li+, Na+, and K+ will enter the monocrystalline silicon substrate and pollute the chip circuit. Therefore, the content of Rn2O is confined to be below 8%, preferably below 5%, more preferably below 2%, further preferably 0%. In some implementations, it can comprise about 0%, greater than 0%, 0.01%, 0.05%, 0.1%, 0.5%, 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5%, 5%, 5.5%, 6%, 6.5%, 7%, 7.5% or 8% of Rn2O.
In some implementations, by controlling the ratio of the content of Rn2O to the total content of MgO and CaO(MgO+CaO), i.e., Rn2O/(MgO+CaO), to be below 1.0, it is conducive to improving the chemical stability of the glass to obtain the desired thermal expansion coefficient. Therefore, Rn2O/(MgO+CaO) is preferably below 1.0, Rn2O/(MgO+CaO) is more preferably below 0.8, Rn2O/(MgO+CaO) is further preferably below 0.5, and Rn2O/(MgO+CaO) is more further preferably below 0.2. In some implementations, the value of Rn2O/(MgO+CaO) is about 0, greater than 0, 0.01, 0.05, 0.1, 0.15, 0.2, 0.25, 0.3, 0.35, 0.4, 0.45, 0.5, 0.55, 0.6, 0.65, 0.7, 0.75, 0.8, 0.85, 0.9, 0.95 or 1.0.
Ln2O3 (Ln2O3 is one or more of La2O3, Gd2O3, Y2O3, and Yb2O3) can increase the thermal expansion coefficient and refractive index of the glass. However, if the content of Ln2O3 is excessive, the devitrification resistance of the glass will decrease, and the Young's modulus and transition temperature will be difficult to meet the design requirements. Therefore, Ln2O3 is below 8%, preferably below 5%, more preferably below 2%, further preferably 0%. In some implementations, it can comprise about 0%, greater than 0%, 0.01%, 0.05%, 0.1%, 0.5%, 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5%, 5%, 5.5%, 6%, 6.5%, 7%, 7.5% or 8% of Ln203.
In some implementations, by controlling the ratio of the content of Ln2O3 to the content of B2O3, i.e., Ln2O3/B2O3, to be below 1.0, it is possible to easily obtain the desired thermal expansion coefficient and meanwhile increase the chemical stability of the glass. Therefore, Ln2O3/B2O3 is preferably below 1.0, Ln2O3/B2O3 is more preferably below 0.8, Ln2O3/B2O3 is further preferably below 0.5, and Ln2O3/B2O3 is more further preferably below 0.2. In some implementations, the value of Ln2O3/B2O3 is about 0, greater than 0, 0.01, 0.05, 0.1, 0.15, 0.2, 0.25, 0.3, 0.35, 0.4, 0.45, 0.5, 0.55, 0.6, 0.65, 0.7, 0.75, 0.8, 0.85, 0.9, 0.95 or 1.0.
WO3 can increase the refractive index and mechanical strength of the glass. If the content of WO3 is high, the light transmittance and transition temperature of the glass will decrease. Therefore, the content of WO3 is confined to be below 5%, preferably below 3%, more preferably below 1%. In some implementations, it can comprise about 0%, greater than 0%, 0.01%, 0.05%, 0.1%, 0.5%, 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5% or 5% of WO3.
ZrO2 can improve the devitrification resistance capacity in the glass, and meanwhile enhance the chemical stability of the glass. However, if the content of ZrO2 exceeds 5%, the thermal expansion coefficient of the glass will decrease significantly, which is difficult to meet the design requirements, and meanwhile the melting performance of the glass will decrease, the high-temperature viscosity will increase significantly, and the glass is prone to non-melting substances. Therefore, the content of ZrO2 is confined to be below 5%, preferably below 3%, more preferably below 1%, further preferably 0%. In some implementations, it can comprise about 0%, greater than 0%, 0.01%, 0.05%, 0.1%, 0.5%, 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5% or 5% of ZrO2.
TiO2 can enhance the devitrification resistance and mechanical strength of the glass. If the content of TiO2 exceeds 5%, UV transmittance of the glass will decrease rapidly to make subsequent laser stripping difficult, and meanwhile the thermal expansion coefficient of the glass will decrease. Therefore, the content of TiO2 is below 5%, preferably below 2%, more preferably below 1%, further preferably 0%. In some implementations, it can comprise about 0%, greater than 0%, 0.01%, 0.05%, 0.1%, 0.5%, 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5% or 5% of TiO2.
P2O5 is an optional component for improving the devitrification resistance of the glass. In particular, when the content of P2O5 is below 5%, the decrease in chemical stability of the glass can be suppressed. Therefore, the content of P2O5 is confined to be below 5%, preferably below 2%, more preferably below 1%. In some implementations, it can comprise about 0%, greater than 0%, 0.01%, 0.05%, 0.1%, 0.5%, 1%, 1.5%, 2%, 2.5%, 3%, 3.5%, 4%, 4.5% or 5% of P2O5.
The glass provided by the present invention comprises 0-1% of clarifying agent to increase the clarifying capability of the glass, and increase the bubble degree of the glass. The content of the clarifying agent is preferably 0-0.8%, more preferably 0-0.5%. The clarifying agent may comprise one or more of Sb2O3, CeO2, SnO2, and SnO, Because CeO2, SnO2, and SnO can seriously damage the UV transmittance of the glass when compared with Sb2O3, Sb2O3 is preferably used as the clarifying agent in the present invention. In some implementations, it can comprise about 0%, greater than 0%, 0.01%, 0.05%, 0.1%, 0.15%, 0.2%, 0.25%, 0.3%, 0.35%, 0.4%, 0.45%, 0.5%, 0.55%, 0.6%, 0.65%, 0.7%, 0.75%, 0.8%, 0.85%, 0.9%, 0.95% or 1% of clarifying agent.
Th, Cd, TI, Os, Be and Se oxides have been used in a controlled manner as a harmful chemical substance in recent years, which is necessary not only in the glass manufacturing process, but also in the processing procedure and disposal after the productization for environmental protection measures. Therefore, in the case of attaching importance to the influence on the environment, it is preferably not actually included except for the inevitable incorporation. As a result, the glass does not actually contain a substance that contaminates the environment. Therefore, the glass of the present invention can be manufactured, processed, and discarded even if no measure is taken as a special environmental countermeasure.
In order to achieve environmental friendliness, As2O3 and PbO are not contained in the glass of the present invention. Although As2O3 can eliminate bubbles and better prevent glass from coloring, the addition of As2O3 will increase the platinum erosion of glass on the furnace, especially on the platinum furnace, resulting in more platinum ions entering the glass. It brings a negative impact on the service life of the platinum furnace. PbO can significantly improve the high refractive index and high dispersion performance of the glass, but both PbO and As2O3 cause environmental pollution.
The terms “not contained” and “0%” as used herein mean that the compound, molecule or element and the like are not intentionally added to the glass of the present invention as raw materials; however, as raw materials and/or equipment for the production of glass, there will be some impurities or components that are not intentionally added in small or trace amounts in the final glass, and this situation also falls within the protection scope of the present invention patent.
Hereinafter, the performance of the glass composition provided by the present invention will be described.
The acid resistance stability (DA) (powder method) of the glass composition is tested as per the method specified in GB/T 17129.
The acid resistance stability (DA) of the glass composition provided by the present invention is above Class 3, preferably above Class 2, more preferably Class 1.
The water resistance stability (DW) (powder method) of the glass composition is tested as per the method specified in GB/T 17129.
The water resistance stability (DW) of the glass composition provided by the present invention is above Class 3, preferably above Class 2, more preferably Class 1.
The thermal expansion coefficient (α20/300° C.) of the glass composition is tested at 20-300° C. as per the method specified in GB/T 7962.16-2010.
In some implementations, the lower limit of the thermal expansion coefficient (α20/300° C.) of the glass composition provided by the present invention is 22×10−7/K, preferably 23×10−7/K, more preferably 25×10−7/K, further preferably 28×10−7/K.
In some implementations, the upper limit of the thermal expansion coefficient (α20/300° C.) of the glass composition provided by the present invention is 45×10−7/K, preferably 40×10−7/K, more preferably 38×10−7/K, further preferably 37×10−7/K.
The light transmittance mentioned in the present invention refers to the outer transmittance of 10 mm-thick glass sample at 365 nm, which is represented by τ365 nm and tested as per the method specified in GB/T 7962.12-2010.
In some implementations, the outer transmittance at 365 nm (τ365 nm) of the glass composition provided by the present invention is above 70%, preferably above 75%, more preferably above 80%, further preferably above 85%.
The transition temperature (Tg) of the glass composition is tested as per the method specified in GB/T 7962.16-2010.
In some implementations, the transition temperature (Tg) of the glass composition provided by the present invention is above 620° C., preferably above 640° C., more preferably above 650° C., further preferably 660-800° C.
The Young's modulus (E) of the glass composition is calculated according to the following formula:
In some implementations, the upper limit of the Young's modulus (E) of the glass composition provided by the present invention is 90 GPa, preferably 85 GPa, more preferably 80 GPa, further preferably 78 GPa.
In some implementations, the lower limit of the Young's modulus (E) of the glass composition provided by the present invention is 60 GPa, preferably 65 GPa, more preferably 68 GPa, further preferably 70 GPa.
The density (p) of the glass composition is tested as per the method specified in GB/T 7962.20-2010.
In some implementations, the density (p) of the glass composition provided by the present invention is below 3.0 g/cm3, preferably below 2.8 g/cm3, more preferably below 2.6 g/cm3.
The glass composition of the present invention, with the above excellent performance, can be widely used in the packaging field of electronic devices and photosensitive devices, and can also be used in the manufacture of glass elements and various equipment or instruments, such as imaging device, sensor, microscope, medical technology, digital projection, communication, optical communication technology/information transmission, optics/lighting in the automobile field, photolithography, excimer laser, wafer, computer chip, and integrated circuit and electronic device including such circuit and chip, or camera equipment and device used in the fields of on-board product, surveillance and security. It can be applied in the semiconductor packaging and semiconductor manufacturing process to make packaging material and/or packaging carrier, etc.
The manufacturing method of the glass composition provided by the present invention is as follows: The glass of the present invention is made of conventional raw materials with conventional process. Use carbonate, nitrate, sulfate, hydroxide, oxide, fluoride, phosphate, and metaphosphate as raw materials, mix the ingredients according to the conventional method, and then feed the mixed furnace burden into a 1400-1600° C. smelting furnace for melting. Later, obtain homogeneous melted glass without bubbles and undissolved substances after clarification, stirring and homogenization, shape the molten glass in a mould and perform annealing. Those skilled in the art can appropriately select raw materials, process methods and process parameters according to actual needs.
The following non-limiting embodiments are provided in order to further clearly explain and illustrate the technical solution of the present invention. This embodiment obtains the glass composition with the composition shown in Tables 1 to 3 by the above manufacturing method of glass composition. In addition, the characteristics of each glass are measured by the test method described in the present invention, and the measurement results are shown in Tables 1 to 3.
| Number | Date | Country | Kind |
|---|---|---|---|
| 202111151059.7 | Sep 2021 | CN | national |
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/CN2022/117241 | 9/6/2022 | WO |
