Patent Application
20110159321
This application is based upon and claims the benefit of priority of the prior Japanese Patent Application No. 2009-299249, filed on Dec. 29, 2009, the entire contents of which are incorporated herein by reference.
The present invention relates to a glass substrate for magnetic disk having a pair of principal surfaces and a manufacturing method thereof.
Recently, a hard disk device is incorporated in a personal computer, a notebook personal computer, and a DVD (Digital Versatile Disc) recording apparatus in order to record data. Particularly, in the hard disk device used in an apparatus such as the notebook personal computer based on portability, a magnetic disk in which a magnetic layer is provided on a glass substrate is used, and magnetic recording information is recorded in or read from a magnetic layer using a magnetic head (DFH (Dynamic Flying Height) head) that is slightly floated on a surface of the magnetic disk surface. A glass substrate is suitably used as the substrate for the magnetic disk because substrate is hardly plastically deformed compared with a metallic substrate.
The magnetic recording density is being increased in order to correspond to a demand for an increase of a storage capacity in the hard disk device. For example, a magnetic recording information area is finely formed using a perpendicular magnetic recording system in which a magnetization direction of the magnetic layer is oriented toward a direction perpendicular to the substrate surface, which allows the storage capacity to be increased in one disk substrate. In order to correspond to the further increase of the storage capacity, a floating distance of the magnetic head from the magnetic recording surface is extremely shortened to form the fine magnetic recording information area. In the substrate of the magnetic disk, the magnetic layer is formed flat such that the magnetization direction of the magnetic layer is oriented toward the direction substantially perpendicular to the substrate surface. Therefore, the glass substrate is formed such that surface irregularity of the glass substrate is decreased as much as possible.
The shortened floating distance of the magnetic head easily causes a head crush trouble or a thermal asperity trouble. Because these troubles are generated by the micro irregularity or a particle on the magnetic disk surface, the glass substrate is formed such that the surface irregularity in an end face is also decreased as much as possible in addition to the principal surface.
A press forming method and a floating method are well known as a method for manufacturing the sheet glass material that becomes a base of the glass substrate used in the magnetic disk.
For example, Japanese Patent No. 3709033 discloses a press forming method as the method for manufacturing the glass material that becomes the base of the glass substrate used in the magnetic disk. In the disclosed press forming method, a glass gob made of molten glass is supplied onto a lower die that is a backing gob forming die, and press forming is performed to the glass gob using the lower die and an upper die that is a counter gob forming die. More specifically, the glass substrate used in the magnetic disk is manufactured by the following method: a glass gob made of molten glass is supplied onto a lower die that is a backing gob forming die; press forming is performed to the glass gob to prepare a sheet glass material using the lower die and an upper die that is a counter gob forming die; and the sheet glass material is formed into am information recording medium glass substrate.
However, the surface irregularity of the sheet glass material formed in accordance with the conventional method is not sufficient for the surface irregularity accuracy of the principle surfaces for the high density of the magnetic recording and the fine magnetic recording information area.
For example, in forming the sheet glass material, a mold release agent is applied to the die surface in order to prevent the glass material from fusing to the die surfaces of the upper die and lower die. The surface roughness of the principal surface of the sheet glass material is increased because of the mold release agent. There is a large surface temperature difference between the upper die and the lower die, and the lower die to which the glass gob (a lump of the glass material) is supplied becomes high temperature. Because the surface temperature difference causes a temperature distribution in a thickness direction of the formed sheet glass material and in a plane of the plate, a shrinkage quantity of the sheet glass material that is taken out from the die and cooled also has a distribution in the thickness direction of the formed sheet glass material and in the plane of the plate. The sheet glass material is easy to warp, and therefore good flatness of the formed sheet glass material is not achieved.
With the sheet glass material obtained by the conventional press forming method, it is necessary that the flatness of the sheet glass material be improved up to the flatness required as a glass substrate for magnetic disk. Therefore, a grinding process is performed to the sheet glass material after the press forming, thereby improving the flatness of the glass material. However, performing the grinding process becomes an additional process in the manufacturing of the glass substrate for magnetic disk, and further performing the grinding process caused a “roll-off problem”.
That is, a machining allowance (ground quantity) is increased in the grinding process because the flatness is not so good with the conventional press forming method. For example, the machining allowance is about 200 μm with the conventional press forming method. When the machining allowance is increased in the grinding process, a deep crack is generated in the surface of the sheet glass material. Therefore, in a polishing process subsequent to the grinding process, the machining allowance (polishing quantity) is inevitably increased such that the deep crack is not left. Here, when the machining allowance is increased in the polishing process in which the loose abrasive grain and the resin polisher are used, the neighborhood in the outer circumferential edge portion is rounded in the principal surface of the sheet glass material to cause a “roll-off problem” of the edge portion. That is, because the neighborhood in the outer circumferential edge portion is rounded in the sheet glass material, a distance between the magnetic layer and the magnetic head in the neighborhood of the outer circumferential edge portion becomes larger than the floating distance of the magnetic head in another portion of the glass substrate when the magnetic disk is prepared using the sheet glass material as the glass substrate. The surface irregularity is generated because the neighborhood of the outer circumferential edge portion has the rounded shape. As a result, the recording and reading operations of the magnetic head are not precisely performed in the magnetic layer in the neighborhood of the outer circumferential edge portion. That is, the recordable and readable regions are reduced. The above is the “roll-off problem”.
Because the sheet glass material having the sufficient flatness is not obtained with the conventional press forming method, it takes a relatively longer time to perform the grinding process that is the post-process, and then the “roll-off problem” is generated by the grinding process.
On the other hand, with the floating method, the sheet glass material is obtained by continuously flowing the molten glass in a bath filled with molten metal such as tin. The molten glass is flown along a traveling direction in the bath to which an exact temperature operation is performed, and the belt-shaped glass ribbon is formed while finally adjusted to desired thickness and width. The sheet glass material that becomes the base of the glass substrate used in the magnetic disk is cut out from the glass ribbon. Because the tin surface in the bath is kept horizontal, the sheet glass material obtained by the floating method has the sufficiently high surface flatness.
In the other aspect, a predetermined impact resistance is required for the glass substrate used in the magnetic disk. Therefore, a chemically strengthening process is performed to the sheet glass material that becomes the base of the glass substrate in order to improve the impact resistance of the glass substrate.
The chemically strengthening process is performed as follows. A mixed solution of potassium nitrate and sodium sulfate is used as a chemically strengthening solution. For example, the chemically strengthening solution is heated to 300° C. to 400° C. For example, after the washed sheet glass material is preheated to 200° C. to 300° C., the sheet glass material is dipped in the chemically strengthening solution for 3 to 4 hours. Therefore, ion replacement with sodium ion and potassium ion occurs in the surface layer of the glass material to form a compressive stress layer. Accordingly, the crack that is possibly generated in the surface of the glass material hardly progresses to the inside of the glass material. The compressive stress layer formed through the chemically strengthening process has the thickness of about 50 to 200 μm.
However, when the chemically strengthening process is performed to the extremely-high-flatness sheet glass material obtained by the floating method, unfortunately a warp is generated in the sheet glass material. That is, in the sheet glass material obtained by the floating method, a tin diffusion layer having a thickness of about 10 to 50 μm is inevitably formed in one of the surfaces of the sheet glass material by tin used as the molten metal, and the tin diffusion layer is not formed in the other surface. When the chemically strengthening process is performed to the sheet glass material, the warp is generated to degrade the flatness because the compressive stress layers formed both the surfaces differs from each other by the presence or absence of tin diffusion layer. Therefore, when the chemically strengthening is performed, it is necessary that a grinding process for removing the tin diffusion layer be performed to the surface in which the tin diffusion layer is produced in the sheet glass material obtained by the floating method.
In summary, with the conventional press forming method, the grinding process is required because the sheet glass material having the sufficiently flatness is not obtained. With the floating method, although the sheet glass material having the sufficiently flatness is obtained, the grinding process is required to remove the tin diffusion layer of the material surface.
In the above regard, an object of the invention is to provide a method for efficiently manufacturing the glass substrate for magnetic disk having the good surface irregularity accuracy and impact resistance.
In accordance with an aspect of the invention, there is provided a method for manufacturing a glass substrate for magnetic disk including a pair of principal surfaces, the method including the steps of: performing press forming to molten glass to prepare a sheet glass material, the sheet glass material having a roughness of the principal surface of 0.01 μm or less and target flatness of a glass substrate for magnetic disk; chemically strengthening the sheet glass material by dipping the sheet glass material in a chemically strengthening salt containing an alkali metal ion to form a compressive stress layer at least on the principal surfaces of the sheet glass material, thereby preparing a disk substrate; polishing the principal surfaces of the disk substrate by pressing the polishing pad against the principal surfaces of the disk substrate while supplying a polishing solution including a polishing material between the disk substrate and the polishing pad, and relatively moving the disk substrate and the polishing pad. In the method, a thickness of the sheet glass material prepared in the press forming step is larger than a target thickness of the glass substrate for magnetic disk by a polishing quantity of the principal surface polishing step.
Accordingly, the formed sheet glass material has the principal surface roughness of 0.01 or less and the target flatness of the glass substrate for magnetic disk. The thickness of the sheet glass material is larger than the target thickness of the glass substrate for magnetic disk by the polishing quantity of the glass substrate for magnetic disk. Because the sheet glass material obtained through the press forming step has the good surface irregularity accuracy, only the polishing process is performed to the sheet glass material in the surface treatment process, but the grinding process having the machining allowance larger than that of the polishing process is not performed to the principal surface. The good impact resistance is obtained by the compressive stress layer formed through the chemically strengthening process. Therefore, the glass substrate for magnetic disk having the good surface irregularity accuracy and impact resistance can efficiently be produced.
Preferably the press forming step includes the steps of: causing a lump of the molten glass to fall down; and forming the sheet glass material by performing the press forming to the lump while sandwiching the lump between surfaces of a pair of dies from both sides of a falling path of the lump, the dies being disposed opposite each other, the dies being set to substantially same temperature. Accordingly, the sheet glass material having the principal surface roughness of 0.01 μm or less, the flatness necessary as the glass substrate for magnetic disk, and the target thickness of the glass substrate for magnetic disk can be prepared by the press forming.
Preferably, the pair of dies is opened immediately after the press forming is performed to the lump while the lump is sandwiched between the surfaces of the pair of dies in the step of forming the sheet glass material.
Preferably, the target flatness as the glass substrate for magnetic disk is 4 μm or less.
Preferably, the manufacturing method of glass substrate for magnetic disk further comprises the step of scribing the sheet glass material between the forming step and the polishing step.
Preferably, a glass substrate for magnetic disk that is manufactured by the above manufacturing method of glass substrate for magnetic disk has the principal surface with the flatness of 4 μm or less and the roughness of 0.2 nm or less.
The object and advantages of the invention will be realized and attained by means of the elements and combinations particularly pointed out in the claims.
It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory and are not restrictive of the invention, as claimed.
Referring now to the attached drawings which form a part of this original disclosure:
A manufacturing method of glass substrate for magnetic disk and a glass substrate for magnetic disk according to an embodiment of the present invention will be described in detail below.
In a magnetic disk 1 of
The magnetic disk 1 will be described with a more specific example. A CrTi adhesive layer, a CoTaZr/Ru/CoTaZr soft magnetic layer, a CoCrSiO2 granular non-magnetic underlying layer, a CoCrPt—SiO2.TiO2 granular magnetic layer, and a carbon hydride protective layer are sequentially deposited in both the principal surfaces of the glass substrate 2 with an in-line type sputtering apparatus. A perfluoropolyether lubricant layer is deposited on the uppermost layer by a dipping method to form the magnetic layers 3A and 3B.
As illustrated in
At this point, a central portion of the glass substrate 2 of the magnetic disk 1 to an outer circumferential edge portion 5 are precisely processed with target surface irregularity accuracy, and the magnetic heads 4A and 4B can be precisely operated while the distance H of about 5 nm is maintained.
A surface treatment process performed to the surface irregularity of the glass substrate 2 does not include a grinding process having a relatively large machining allowance, but only includes first polishing and second polishing processes having relatively small machining allowances.
The principal surface of the glass substrate 2 used in the magnetic disk 1 has surface irregularity in which flatness is 4 μm or less and surface roughness is 0.2 nm or less. The flatness of 4 μM or less is target flatness required for the glass substrate for magnetic disk as a final product. For example, the flatness can be measured with a flatness tester FT-900 manufactured by NIDEK CO., LTD. The roughness of the principal surface is expressed by arithmetic average roughness Ra defined by JIS B0601:2001. When the roughness ranges from 0.006 μm to 200 μm, for example, the roughness is measured with a roughness measuring machine SV-3100 manufactured by Mitutoyo Corporation, and the roughness can be computed by a method defined by JIS B0633:2001. As a result of the measurement, when the roughness is 0.03 μm or less, for example, the roughness is measured with a scanning probe microscope (atomic force microscope) manufactured by SIT Nano Technology Inc, and the roughness can be computed by a method defined by JIS R1683:2007.
In the embodiment, the sheet glass material of pre-polishing process was measured with the roughness measuring machine, and the glass substrate of post-polishing was measured with the scanning probe microscope (atomic force microscope).
Specifically, the surface irregularity is classified into heave having the largest wavelength (wavelength of about 0.6 μm to about 130 mm), waviness (wavelength of about 0.2 μm to about 1 mm), micro-waviness (wavelength of 0.1 μm to 1 mm), and roughness (wavelength of 10 nm or less).
The heave can be expressed by the flatness as an index, and the roughness can be expressed by the arithmetic average roughness Ra as an index.
With the manufacturing method of the embodiment, the sheet glass material of pre-polishing process obtained after the press forming has the following property: the roughness of the principal surface is 0.01 μm or less, and the flatness has the target flatness of the glass substrate for magnetic disk. The sheet glass material prepared by the press forming has a thickness larger than the target thickness of the glass substrate for magnetic disk by the polishing quantity of the polishing process. That is, the thickness of the sheet glass material of the post-press forming is the thickness added to the target thickness of the glass substrate for magnetic disk of the final product by the small machining allowance of the polishing process. The glass substrate for magnetic disk is prepared without performing the grinding process for adjusting the flatness and the thickness to the sheet glass material of the post-press forming. For example, “the target flatness of the glass substrate for magnetic disk” is 4 μm or less. The reason the surface flatness of the sheet glass material is set to 4 μm or less is that the flatness of the glass substrate 2 used in the magnetic disk 1 is maintained and therefore the magnetic heads 4A and 4B can properly perform the recording and reading operations. For example, the sheet glass material having the principal surface roughness of 0.01 μm or less, the target flatness of the glass substrate for magnetic disk, and the thickness larger than the target thickness of the glass substrate for magnetic disk by the polishing quantity of the principal surface polishing, can be achieved by the press forming of the embodiment. On the other hand, the sheet glass material having the principal surface roughness of 0.01 μm or less, the target flatness of the glass substrate for magnetic disk, and the thickness larger than the target thickness of the glass substrate for magnetic disk by the polishing quantity of the principal surface polishing, cannot be achieved by the conventional press forming.
According to the manufacturing method of the embodiment, after the press forming, the glass substrate for magnetic disk having the flatness of 4 μm or less and the surface roughness of 0.2 nm or less can be obtained through the first polishing process and the second polishing process.
At this point, the reason the surface roughness of the sheet glass material of the post-press forming is set to 0.01 μm or less is because surface roughness can be adjusted to 0.2 nm by the two-time polishing process without increasing the machining allowance. Further, when the surface roughness is 0.01 μm or less, the scribing can efficiently be performed to the sheet glass material.
The surface irregularity of a sheet glass material G can be achieved by adjusting the surface roughness of the die in the press forming.
For example, aluminosilicate glass, soda-lime glass, and borosilicate glass can be used as a material for the glass substrate 2 of the magnetic disk 1. Particularly, the aluminosilicate glass can be suitably used in that chemically strengthening can be performed and in that the glass substrate for magnetic disk excellent for the flatness of the principal surface and the strength of the substrate can be prepared.
A chemically strengthened glass material mainly containing by molar percent of 57 to 74% SiO2, 0 to 2.8% ZnO2, 3 to 15% Al2O3, 7 to 16% LiO2, and 4 to 14% Na2O is suitably used as the aluminosilicate glass.
For example, the press forming is performed with an apparatus illustrated in
An apparatus 101 illustrated in
Specifically, as illustrated in
As used herein, “the substantially same temperature” means that an absolute value of a temperature difference between a temperature at a press forming surface of first press forming die constituting the pair of dies and a temperature at a press forming surface of a second press forming die is 10° C. or less. More preferably the absolute value of the temperature difference is 5° C. or less, most preferably the absolute value of the temperature difference is 0° C. When a temperature distribution exists in the press forming surface, “the temperature at the press forming surface” means a temperature near a center portion of the press forming surface.
Preferably the lump is brought into contact with the surfaces of the pair of dies in substantially the same timing, and the press forming is performed while the lump is sandwiched between the surfaces of the pair of dies in the substantially same timing. “The lump is brought into contact with the surfaces of the pair of dies in substantially the same timing” means that the absolute value of the time difference between the time the molten glass lump comes into contact with one of the press forming surfaces and the time the molten glass lump comes into contact with the other press forming surface is 0.1 second or less. More preferably the absolute value of the time difference 0.05 second or less, most preferably the absolute value of the time difference is 0 second.
Each of the press units 120, 130, 140, and 150 is driven by a moving mechanism (not illustrated) so as to be able to proceed and retreat with respect to the molten glass outflow port 111. That is, each of the press units 120, 130, 140, and 150 can be moved between a catch position and a retreat position. The catch position (position in which the press unit 140 is drawn by a solid line in
The cutting unit 160 is provided on a path of the molten glass between the catch position and the molten glass outflow port 111. The cutting unit 160 forms the lump (hereinafter also referred to as “gob”) of the molten glass by cutting a proper quantity of the molten glass flowing out from the molten glass outflow port 111. The cutting unit 160 includes a pair of cutting blades 161 and 162. The cutting blades 161 and 162 are driven so as to intersect each other on the path of the molten glass at constant timing. When the cutting blades 161 and 162 intersect each other, the molten glass is cut to obtain the gob. The obtained gob falls down toward the catch position.
The press unit 120 includes a first die 121, a second die 122, a first driving unit 123, and a second driving unit 124. Each of the first die 121 and the second die 122 is a plate-shaped member including a surface used to perform the press forming for the gob. The first die 121 and the second die 122 are disposed such that normal directions of the surfaces become substantially horizontal, and such that the surfaces become parallel to each other. The first driving unit 123 causes the first die 121 to proceed and retreat with respect to the second die 122. On the other hand, the second driving unit 124 causes the second die 122 to proceed and retreat with respect to the first die 121. Each of the first driving unit 123 and the second driving unit 124 includes a mechanism for causing the surface of the first driving unit 123 and the surface of the second driving unit 124 to be rapidly brought close to each other, for example, a mechanism in which an air cylinder or a solenoid and a coil spring are combined.
Because the structures of the press units 130, 140, and 150 are similar to that of the press unit 120, the descriptions of the press units 130, 140, and 150 are omitted.
After each press unit moves to the catch position, the falling gob is sandwiched between the first die and the second die by driving the first driving unit and the second driving unit, and the gob is formed into a predetermined thickness while rapidly cooled, thereby preparing the disk-shaped sheet glass material G. Then, after the press unit moves to the retreat position, the first die and the second die are separated to cause the formed sheet glass material G to fall down. A first conveyer 171, a second conveyer 172, a third conveyer 173, and a fourth conveyer 174 are provided below the retreat positions of the press units 120, 130, 140, and 150, respectively. Each of the first to fourth conveyers 171 to 174 receive the sheet glass material G falling down from the corresponding press unit, and the conveyer conveys the sheet glass material G to an apparatus (not illustrated) of the next process.
The apparatus 101 is configured such that the press units 120, 130, 140, and 150 sequentially move to the catch position and move to the retreat position while the gob is sandwiched, so that the sheet glass material G can continuously be formed without waiting for the cooling of the sheet glass material G in each press unit.
As illustrated in
The made gob GG falls down toward a gap between the first die 121 and second die 122 of the press unit 120. At this point, the first driving unit 123 and the second driving unit 124 (see
A temperature control mechanism (not illustrated) is provided in each of the first die 121 and second die 122, and temperatures at the first die 121 and second die 122 is retained sufficiently lower than a glass transition temperature TG of the molten glass LG.
A time until the gob GG is completely confined between the first die 121 and the second die 122 after the gob GG comes into contact with the inner circumferential surface 121a of the first die 121 or the inner circumferential surface 122a of the second die 122, is as extremely short as about 0.06 second in the apparatus 101. Therefore, the gob GG is formed into the substantially disk shape by spreading along the inner circumferential surface 121a of the first die 121 and the inner circumferential surface 122a of the second die 122 within an extremely short time, and the gob GG is rapidly cooled and solidified in the form of amorphous glass, thereby preparing the disk-shaped sheet glass material G. In the embodiment, for example, the sheet glass material G is a disk-shaped plate having a diameter of 75 to 80 mm and a thickness of about 1 mm.
After the first die 121 and the second die 122 are closed, the press unit 120 quickly moves to the retreat position, instead the press unit 130 moves to the catch position, and the press unit 130 performs the pressing to the gob GG.
After the press unit 120 moves to the retreat position, the first die 121 and the second die 122 are kept closed until the sheet glass material G is sufficiently cooled (until the sheet glass material G becomes at least a temperature below a yield point). Then, the first driving unit 123 and the second driving unit 124 are driven to separate the first die 121 and the second die 122, the sheet glass material G falls down from the press unit 120, and the conveyer 171 located below the press unit 120 receives the sheet glass material G (see
As described above, in the apparatus 101, the first die 121 and the second die 122 are closed within a time as extremely short as 0.1 second (about 0.06 second), and the molten glass substantially simultaneously comes into contact with the whole of the inner circumferential surface 121a of the first die 121 and the whole of the inner circumferential surface 122a of the second die 122. Therefore, the inner circumferential surface 121a of the first die 121 and the inner circumferential surface 122a of the second die 122 are not locally heated, and a deformation is hardly generated in the inner circumferential surface 121a and the inner circumferential surface 122a. Because the molten glass is formed into the disk shape before the heat transfers from the molten glass to the first die 121 and the second die 122, a temperature distribution of the formed molten glass becomes substantially even. Therefore, in cooling the molten glass, the shrinkage quantity of the glass material has the small distribution, and the large deformation is not generated in the sheet glass material G. Accordingly, the principal surface flatness of the prepared sheet glass material G is improved better than that of the sheet glass material prepared by the conventional press forming, and the principal surface flatness of the prepared sheet glass material G can be set to 4 μm or less.
The surface roughness of the inner circumferential surface 121a and the surface roughness of the inner circumferential surface 122a are adjusted such that the arithmetic average roughness Ra of the sheet glass material G is 0.01 μm or less.
In the example illustrated in
As illustrated in
Alternatively, as illustrated in
As illustrated in
As illustrated in
After the press forming, scribing is performed to the formed sheet glass material G as illustrated in
As used herein, the scribing means that two concentric (inside concentric and outside concentric) cutting-plane lines (scratch in the form of a line) are provided in the surface of the sheet glass material G with a scriber made of a super alloy or diamond particles in order to obtain the donut-shape (ring-shape) of the formed sheet glass material G having a predetermined size. The sheet glass material G scribed into two-concentric-circle shape is partially heated, and a portion outside the outside concentric circle and a portion inside the inside concentric circle are removed by a difference in thermal expansion of the sheet glass material G, thereby obtaining the donut-shaped sheet glass material.
As described above, the cutting-plane line can suitably be provided with the scriber, because the sheet glass material G produced through the (a) press forming process has the roughness of 0.01 μm or less. In the case in which the roughness of the sheet glass material exceeds 1 μm, the scriber does not precisely trace on the surface, and cutting-plane line may not be evenly provided. Even in such case, the sheet glass material may be prepared so as to have an outer diameter and circularity to an extent in which the scribing is not required, and a round hole is made in the sheet glass material with a core drill, thereby obtaining the ring sheet glass material.
(c) Shape processing Process (Chamfering Process)
Then shape processing is performed to the scribed sheet glass material G (Step S30). The shape processing includes chamfering (chamfering of outer circumferential end portion and inner circumferential end portion). In the chamfering process, the outer circumferential end portion and inner circumferential end portion of the disk-shaped sheet glass material G are chamfered using a diamond abrasive grain.
(d) Edge polishing Process
Then end face polishing is performed to the sheet glass material G (Step S40).
In the end face polishing, the mirror-surface finishing is performed to an inner-circumferential-side end face and an outer-circumferential-side end face of the sheet glass material G by brush polishing. At this point, slurry that includes fine particles such as cerium oxide as the loose abrasive grain is used. The contamination of dust and damage such as a flaw are removed by performing the edge polishing. Therefore, generation of ions such as a sodium and potassium which cause corrosion can be prevented.
The first polishing is performed to the ground principal surface of the sheet glass material G (Step S50). The first polishing is intended to remove the flaw left on the principal surface and the deformation.
For example, the first polishing has the machining allowance of several micrometers to about 10 micrometers. In the manufacturing method of the embodiment, because the grinding process having the large machining allowance is not performed, the flaw and deformation that may be caused by the grinding process are not generated for the sheet glass material G. Therefore, the machining allowance can be reduced in the first polishing process.
A double-side polishing apparatus 3 illustrated in
The plural sheet glass materials G are retained in the polishing carrier 33. The upper surface plate 31 can vertically be moved, and the upper surface plate 31 presses the polishing pad 10 against the pair of principal surfaces of the sheet glass material G as illustrated in
In the first polishing process, for example, a hard resin polisher is used as the polishing pad, and a cerium oxide abrasive grain is used as the polishing material.
After the first polishing, the sheet glass material G is chemically strengthened (Step S60).
For example, a mixed solution of potassium nitride (60%) and sodium sulfate (40%) can be used as a chemically strengthening solution. In the chemically strengthening, for example, the chemically strengthening solution is heated to 300° C. to 400° C., the washed sheet glass material G is pre-heated to 200° C. to 300° C., and the sheet glass material G is dipped in the chemically strengthening solution for three to four hours. Preferably, in order that the whole principal surfaces of the sheet glass material G are chemically strengthened, the dipping is performed while the plural sheet glass materials G are accommodated in a holder by retaining the sheet glass materials G at the end faces.
When the sheet glass material G is dipped in the chemically strengthening solution, the lithium ion and the sodium ion in the surface layer of the sheet glass material G are replaced with the sodium ion and the potassium ion which have relatively large ion radiuses in the chemically strengthening solution, respectively, thereby forming a compressive stress layer having a thickness of about 50 to 200 μm. Therefore, the sheet glass material G is strengthened to have good impact resistance. The sheet glass material G to which the chemically strengthening treatment is performed is washed. For example, after washing the sheet glass material G using the sulfuric acid, the sheet glass material G is washed using pure water and IPA (isopropyl alcohol).
Then second polishing is performed to the sheet glass material G to which the chemically strengthening treatment and washing are sufficiently performed (Step S80). For example, the second polishing has the machining allowance of about 1 μm.
The second polishing is intended at the mirror-surface polishing of the principal surface. In the second polishing process, similarly to the first polishing process, the polishing is performed to the sheet glass material G using the double-side polishing apparatus 3 (see
The sheet glass material G polished through the second polishing process is washed again. The washing is performed using neutral detergent, pure water, and IPA.
The glass substrate for magnetic disk 2 having the surface irregularity, in which the flatness of the principal surface is 4 μm or less and the roughness of the principal surface is 0.2 nm or less, is obtained by the second polishing.
Then, as illustrated in
The flow of the manufacturing method illustrated in
As described above, according to the manufacturing method of the embodiment, the sheet glass material having the surface irregularity in which principal surface flatness is 4 μm or less and the principal surface roughness is 0.01 μm or less, can be formed by the press forming process. Therefore, the grinding process for improving the flatness and the grinding process having the machining allowance as large as about 200 μm are omitted after the press forming. Obviously, with the manufacturing method of the embodiment, because the sheet glass material is not produced by the floating method, the tin diffusion layer is not formed in the principal surface, and a grinding process is not therefore required to remove the tin diffusion layer. In the first polishing process and second polishing of the process manufacturing method of the embodiment, the sheet glass material G has the machining allowance as small as about 10 μm, and the machining allowance is smaller than the thickness (about 50 to 200 μm) of the compressive stress layer. Therefore, there is not generated the conventional “roll-off problem” that is caused by the large machining allowance in the grinding process and therefore the large machining allowance in the polishing process.
The good impact resistance is obtained by the compressive stress layer that is formed through the chemically strengthening process after the press forming. Obviously, with the manufacturing method of the embodiment, the imbalance of the compressive stress layer caused due to the tin diffusion layer formed only on one side of the principal surfaces, does not occur because the sheet glass material is not produced by the floating method.
According to the manufacturing method of the embodiment, the glass substrate for magnetic disk having the good surface irregularity accuracy and impact resistance can efficiently be produced.
In the flow of
Hereinafter, the effectiveness of the method illustrated in
In Examples and Comparative examples, the alminosilicate glass (57 to 74% SiO2, 0 to 2.8% ZnO2, 3 to 15% Al2O3, 7 to 16% LiO2, and 4 to 14% Na2O) was used as the glass material.
The magnetic layer was formed on the prepared glass substrate using in-line type sputtering apparatus. Specifically, the CrTi adhesive layer, the CoTaZr/Ru/CoTaZr soft magnetic layer, the CoCrSiO2 granular non-magnetic underlying layer, the CoCrPt—SiO2.TiO2 granular magnetic layer, and the carbon hydride protective layer were sequentially deposited on both the principal surfaces of the glass substrate. Then the perfluoropolyether lubricant layer was deposited on the deposited uppermost layer by a dipping method, thereby obtaining the magnetic disk.
The glass substrate was prepared through Steps S20 to S70 illustrated in
The glass substrate was prepared through Steps S20 to S70 illustrated in
The glass substrate was prepared through Steps S20 to S70 illustrated in
The glass substrate was prepared through Steps S20 to S70 illustrated in
The conditions of the grinding and polishing of Examples and Comparative examples were set as follows:
The first polishing process: the polishing was performed using a cerium oxide abrasive grain (average particle size; diameter of 1 μm to 2 μm) as a polishing material and a hard urethane pad as a polishing pad, and the machining allowance of about 3 μm.
The second polishing process: the polishing was performed using colloidal silica (average particle size; diameter of 0.1 μm) as a polishing material and a soft polyurethane pad as a polishing pad, and the machining allowance of about 1 μm.
The flatness and surface roughness (the flatness and surface roughness of post-forming) of the glass substrate obtained by each of Examples and Comparative examples were measured.
The LUL (Load/UnLoad) endurance test (600,000 times) was performed to evaluate floating stability of the magnetic head with respect to the magnetic disk that was prepared based on the glass substrate obtained by each of Examples and Comparative examples. The LUL endurance test is one that checks error occurrence, dirt of head after test, and abnormality generation such as abrasion by operating the HDD (hard disk device) in a cycle of lamp→ID stop→lamp→ID stop→ . . . while the HDD is placed in a thermo-hygrostat of 70° C. and 80%. After the LUL test of 80000 times/day×7.5 days=600000 times in which 10 HDDs were used with respect to Examples and Comparative examples, the test result was evaluated as fail when abnormality was generated even in one HDD.
Table 1 illustrates the roughness of the principal surface, forming method, and flatness (pre-forming and post-forming) in Examples 1 to 5 and Comparative examples 1 to 11 and the LUL endurance test result (pass or fail). In the surface roughness of the post-forming in Table 1, “OK” indicates that the surface roughness satisfies a criteria of 0.2 nm or less (the criteria required as the glass substrate for magnetic disk), and “NOK” indicates that the surface roughness does not satisfy the criteria of 0.2 nm or less.
As can be seen from Table 1, when the glass material formed by the press forming method illustrated in
On the other hand, as can be seen from Table 1, when the glass material formed by the press forming method illustrated in FIGS. 4 and 5 has the flatness of 4 μm or less and the surface roughness exceeding 0.01 μm (Comparative examples 1 to 6), the surface roughness does not reach the criteria (0.2 nm or less) only by the first polishing process and the second polishing process. In such cases, the glass material fails in the LUL endurance test.
As can be seen from Table 1, although the glass material formed by the floating method (Comparative examples 7 and 8) has the good surface roughness and flatness, a warp is generated due to a stress difference of the surfaces, because there is a difference of ion exchange between one surface in which the tin diffusion layer exists and the other surface in which the tin diffusion layer does not exist by the chemically strengthening process, and the flatness degraded by the warp is not improved only by the first polishing process and the second polishing process. In such cases, the glass material fails in the LUL endurance test.
As can be also seen from Table 1, when the glass material formed by the conventional press forming method has the flatness exceeding 4 μm and the surface roughness of 0.01 μm or less (Comparative examples 9 to 11), the flatness does not satisfy the criteria (4 μm or less) only by the first polishing process and the second polishing process. In such cases, the glass material fails in the LUL endurance test.
As is clear from Examples 1 to 5 and Comparative Examples 1 to 11, when the glass material formed by the press forming method of the embodiment has the flatness of 4 μm or less and the surface roughness of 0.01 μm or less, the surface roughness and the flatness satisfy the criterion required as the glass substrate for magnetic disk only by the first polishing process and the second polishing process without performing the grinding process having the large machining allowance.
All examples and conditional language recited herein are intended for pedagogical purposes to aid the reader in understanding the invention and the concepts contributed by the inventor to furthering the art, and are to be construed as being without limitation to such specifically recited examples and conditions, nor does the organization of such examples in the specification relate to a showing of the superiority and inferiority of the invention. Although the embodiment(s) of the present inventions have been described in detail, it should be understood that the various changes, substitutions, and alternations could be made hereto without departing from the spirit and scope of the invention.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2009-299249 | Dec 2009 | JP | national |
