GMR angle sensor for vehicles

Abstract

A GMR angle sensor for vehicles includes a GMR element in which the element resistance is changed in response to an external magnetic field, lead conductors connected to either end of the GMR element, and a protective layer that seals the GMR element and the lead conductors, wherein the protective layer has a laminated structure including an oxidation-resistant inorganic film that ensures that the GMR element and the lead conductors are sufficiently insulated and a silicone-based organic film laminated on the inorganic film.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic view illustrating angle detection by a GMR angle sensor for vehicles according to the present invention;

FIG. 2 is a plan view showing the schematic structure of the GMR angle sensor shown in FIG. 1;

FIG. 3 is a cross-sectional view showing the schematic structure of the GMR angle sensor shown in FIG. 1; and

FIG. 4 is a cross-sectional view showing the structure of a protective layer of the present invention.

Claims

1. A GMR angle sensor for vehicles comprising: a giant magnetoresistive element in which the element resistance is changed in response to an external magnetic field;lead conductors connected to the giant magnetoresistive element; anda protective layer that seals the giant magnetoresistive element and the lead conductors,wherein the protective layer has a laminated structure including an inorganic film that ensures that the giant magnetoresistive element and the lead conductors are sufficiently insulated and a silicone-based organic film.

2. The GMR angle sensor for vehicles according to claim 1, wherein the organic film comprises a silicone-based photosensitive resin that can be cured at 200° C. to 250° C.

3. The GMR angle sensor for vehicles according to claim 1, wherein the organic film has a thickness of at least 5 μm.

4. The GMR angle sensor for vehicles according to claim 1, wherein the organic film is formed by patterning using photolithography.

5. The GMR angle sensor for vehicles according to claim 1, wherein the inorganic film comprises a silica (SiO2) film and an oxidation-preventing film laminated on at least one of the upper surface or the lower surface of the silica film.

6. The GMR angle sensor for vehicles according to claim 5, wherein the oxidation-preventing film is an alumina (Al2O3) film.

7. The GMR angle sensor for vehicles according to claim 1, wherein the inorganic film is provided on the giant magnetoresistive element and the lead conductors, and the organic film is provided on the inorganic film.