The present invention relates to a field of a rotation sensitive device using a vibration member, such as a field of a vibration angular velocity sensor (G01C19/56) based on the Coriolis force, and in particular, to a gyroscope.
A MEMS gyroscope is a micro-electromechanical system gyroscope. MEMS (Micro-Electro-Mechanical Systems) is a whole micro-electromechanical system that integrates mechanical elements, micro-sensors, micro-actuators, circuits for signal processing and control, interface circuits, communications, and power supplies.
Moreover, the accuracy of structures of gyroscopes in terms of rotation detection is not high enough, therefore it is necessary to provide a gyroscope capable of performing a rotation measurement with a high accuracy.
Many aspects of the exemplary embodiment can be better understood with reference to the following drawings. The components in the drawings are not necessarily drawn to scale, the emphasis instead being placed upon clearly illustrating the principles of the present invention. Moreover, in the drawings, like reference numerals designate corresponding parts throughout the several views.
1—fixing frame, 2—connection frame, 21—second connection plate, 22—second movable electrode plate, 3—weight, 31—first connection plate, 32—first movable electrode plate, 4—first connection member, 5—second connection member, 6—first fixed electrode plate, and 7—second fixed electrode plate.
The present invention will be further illustrated with reference to the accompanying drawings and the embodiments.
As shown in
In an embodiment, an arrangement and an installment of the electrode plates is as follows. As shown in
The vibration unit includes a first connection plate 31 extending from one side of the weight 3, and first movable electrode plates 32 extending from one side of the first connection plate 31 and arranged in a shape of a comb. The first movable electrode plate 32 is parallel with a direction in which the second connection member 5 extends. The vibration unit further includes first fixed electrode plates 6 extending from the connection frame 2 and arranged to be parallel with the first movable electrode plate 32 in a one-to-one correspondence. Each of two sides of the second connection member 5 is provided with a first connection plate 31 and a first movable electrode plate 32. The second fixed electrode plate 7 and the first fixed electrode plate 6 can be directly arranged at a corresponding position of the fixing frame 1. Alternatively, one part of each of the second fixed electrode plate 7 and the first fixed electrode plate 6 can be arranged at the fixing frame 1, and the other part of each of the second fixed electrode plate 7 and the first fixed electrode plate 6 can be arranged in a relatively fixed location with respect to a movable electrode through other components. A structure is as shown in
When the gyroscope rotates irregularly, that is, when the gyroscope rotates in two rotation directions, since the second movable electrode plate 22 and the first movable electrode plate 32 directly or indirectly connected to the weight 3 and the connection frame 2, at this time, the weight 3 and the connection frame 2 each rotate, the first movable electrode plate 32 and the second movable electrode plate 22 are brought to move relative to the first fixed electrode plate 6 and the second fixed electrode plate 7, respectively. Since fixed electrode plates of the gyroscope are stationary with respect to each other, at this time, an opposite area between the second movable electrode plate 22 and the second fixed electrode plate 7 is changed, that is, a capacitance area of a peripheral capacitor plate is changed, so that a change of electric quantity is output. An opposite area between the first movable electrode plate 32 and the first fixed electrode plate 6 is changed, that is, a capacitance area of a periphery of the weight 3 is changed, so that a change of electric quantity is output. The situation of a rotation of the gyroscope can be calculated by obtaining the two changes of electric quantity.
The above are only optional embodiments of the present invention. Here, it should be noted that those skilled in the art can make modifications without departing from the inventive concept of the present invention, but these modifications shall fall into the protection scope of the present invention.
Number | Date | Country | Kind |
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201811648843.7 | Dec 2018 | CN | national |