Claims
- 1. An ultra-fast response, high sensitivity sensor structure for optical detection of low concentrations of hydrogen gas, comprising:
a substrate;
a water-doped WO3 layer coated on said substrate; and a palladium layer coated on said water-doped WO3 layer.
- 2. A method of preparing an ultra-fast response, high sensitivity sensor structure for optical detection of low concentrations of hydrogen gas, comprising:
providing a substrate; depositing a layer of WO3 upon said substrate while doping the WO3 with water by in-situ addition; and depositing a layer of palladium onto the water-doped WO3 layer.
- 3. The method of claim 2 wherein depositing said layer of WO3 while doping with water by in-situ addition is by evaporation.
- 4. The method of claim 2 wherein depositing said layer of WO3 while doping with water by in-situ addition is by plasma enhanced chemical vapor deposition (PECVD).
- 5. The method of claim 2 wherein depositing said layer of WO3 while doping with water by in-situ addition is by sputtering.
- 6. An improved method of detecting hydrogen with ultra-fast response and high sensitivity comprising:
subjecting a sensor structure comprising a substrate, a water-doped WO3 layer coated on said substrate, and a palladium layer coated on said water-doped WO3 layer to an environment comprising hydrogen to obtain ultra fast coloration of said sensor as a detection of hydrogen.
- 7. The method of claim 7 wherein the amount of hydrogen in the environment is about 1%.
- 8. The sensor structure of claim 1 wherein said substrate is glass.
- 9. The method of claim 6 wherein ultra fast coloration is from about 1 to about 2 seconds in a hydrogen environment of about 1%.
- 10. The method of claim 6 wherein ultra fast coloration of said sensor after storage in ambient air after about a week is about 20 seconds.
- 11. The method of claim 6 wherein said water-doped Pd/WO3 sensor is used in combination with a Pd/WO3 sensor that becomes saturated at about 2% hydrogen levels.
Parent Case Info
[0001] This application claims priority from U.S. Provisional Application Serial No. 60/202,155, filed May 5, 2000.
CONTRACTUAL ORIGIN OF THE INVENTION
[0002] The United States Government has rights in this invention under Contract No. DE-AC36-99GO10337 between the United States Department of Energy and the National Renewable Energy Laboratory, a division of the Midwest Research Institute.
PCT Information
Filing Document |
Filing Date |
Country |
Kind |
PCT/US01/14375 |
5/5/2001 |
WO |
|