The present invention generally relates to magnetic recording media and, in particular, relates to HAMR media structure having an anisotropic thermal barrier layer.
Heat assisted magnetic recording (HAMR) is likely to enable the next wave of areal density growth in the hard disk drive (HDD) industry. The HAMR magnetic recording media differs from conventional magnetic recording media in that the HAMR media must be designed to achieve certain thermal and thermo-magnetic properties so that the electromagnetic energy received from a near field transducer (NFT) on the head can be used effectively in assisting writing sharp magnetic transitions at the high intended recording densities.
In certain aspects, a heat assisted magnetic recording (HAMR) media structure is provided. The HAMR media structure can comprise a magnetic recording layer comprising an array of magnetic grains for storing information. The HAMR media structure can further comprise a heat sink layer disposed below the magnetic recording layer and having a first thermal conductivity. The HAMR media structure can further comprise an anisotropic thermal barrier layer disposed between the magnetic recording layer and the heat sink layer and having a vertical thermal conductivity and an in-plane thermal conductivity, wherein the vertical thermal conductivity is substantially higher than the in-plane thermal conductivity.
In certain aspects, the anisotropic thermal barrier layer can comprise an array of columnar grains having a second thermal conductivity that is equal or less than the first thermal conductivity and an insulating boundary separating two adjacent columnar grains and having a third thermal conductivity that is lower than the second thermal conductivity.
One significant problem in HAMR recording is a low NFT delivery efficiency—defined as the percentage ratio of the light energy delivered to the HAMR media 150 from the NFT divided by the light energy received by the NFT. The NFT delivery efficiency is typically less than 15% in practical HAMR systems. One factor contributing to the low efficiency is the fact that the intended thermal spot size on the HAMR media is much smaller than the wavelength of the light from the laser source. This means that a good deal of energy is dissipated in the head itself and particularly, at the near field transducer (NFT).
Because the NFT delivery efficiency is low, power requirement for the light source 110 is quite high. For example, heat dissipation by a laser diode needs special care with consideration of the 30˜40% of lasering efficiency and the light absorption by the adjacent magnetic elements due to the interaction of scattering light from waveguide resultant from taper, bend and process imperfections. Furthermore, besides the portion of energy delivered to the HAMR media 150, the absorption by the NFT 140 itself together with the pole absorption can heat up the NFT 140 to a very high temperature at which the NFT 140 can melt, deform or recrystallize and lose its function.
From a recording capability point of view, a higher thermal gradient (typically measured in Kelvin per nanometer, K/nm) in the HAMR recording media is preferred as it translates into sharper transitions resulting in lower media noise (lower transition jitter) and higher linear density capability. One way to increase the thermal gradient is to increase the heat-sinking properties of the HAMR media 150 to remove or dissipate the thermal energy as fast as possible. However, since a minimum peak temperature on the HAMR media 150 is a requirement (typically it must exceed the Curie point of the magnetic alloy used in the magnetic recording layer), the laser power also need to be increased. A higher laser power in turn increases the power dissipation in the head including at the NFT 140 and reduces the reliability of the HAMR system 100.
In this regard, a HAMR media structure with heat dissipation characteristics that achieves a sizable reduction in the power requirement for the light source 110 while maintaining an equivalent thermal spot size on the recording media 150 can significantly improve the reliability of the HAMR system 100 as a whole.
The protective overcoat 250 (e.g., carbon overcoat) provides a protection for the magnetic recording layer 240. The nucleation/seed layer 230 promotes a growth of the magnetic grains 242 and also creates a desired magnetic orientation for the grains. The nucleation/seed layer 230 comprises MgO, SiC, TiN, TiC, NiAl, RuAl, or a combination thereof. In certain embodiments, the nucleation layer has a thickness between about 2 and 10 nm.
The heat sink layer 210 is responsible for dissipating or removing the light-generated heat from the magnetic recording layer 240. For fast and efficient heat dissipation, the heat sink layer 210 is typically made of a material (e.g., a metal) having a high thermal conductivity (typically greater than 40 W·m−1·K−1). Non-limiting examples include copper, silver, ruthenium, nickel, aluminum, tungsten, gold, or a combination thereof. In certain embodiments, the heat sink layer 210 has a thickness between about 20 and 200 nm.
The thermal barrier layer 220 is provided between the magnetic recording layer 240 and the heat sink layer 210 to control the heat management characteristics (e.g., magnitude and rate of heat containment and/or dissipation, thermal gradients). The thermal barrier layer 220 is made of a material having a thermal conductivity (typically about 10 W·m−1·K−1) that is substantially lower than that of the heat sink layer 210. In the HAMR media structure shown in
According to certain aspects of the subject disclosure, a HAMR media structure having an anisotropic thermal barrier layer is proposed for superior heat management characteristics. In some embodiments, such an anisotropic thermal barrier is achieved using a columnar array of grains made of essentially the same material as used in the isotropic thermal barrier layer 220 with a thermally insulating boundary separating each grain from its adjacent grain. The composite arrangement reduces the effective in-plane thermal conductivity. In this manner, the vertical thermal conductivity would be comparable to that of the conventional isotropic thermal barrier layer but the in-plane conductivity is made substantially less.
In certain embodiments, the anisotropic thermal barrier layer 320 has a thickness between about 5 and 50 nm. Unlike the isotropic thermal barrier layer 220 of
In some exemplary embodiments, the thermal barrier layer 320 is a composite of two different materials. For example, in the illustrated example of
The insulating boundary 324 has a thermal conductivity that is lower than the thermal conductivity of the columnar grain 322. In certain embodiments, the insulating boundary 324 comprises SiO2, TiO2, MgO, TiC, TiN, Ta3O5, CoO, C, B, or a combination thereof. In certain embodiments, the thermal conductivity of the insulating boundary 324 is between about 0.1 and 20 W·m−1·K−1 and, in some embodiments, between about 0.1 and 5 W·m−1·K−1. In certain embodiments, each insulating boundary 324 has a width in the range of between about 0.5 and 3 nm.
Various methods of growing a composite thin-film structure having an array of columnar grains and insulating boundaries such as the thermal barrier layer 320 shown in
The deposition conditions of substrate temperature and pressure for promoting columnar growth depend on materials properties and materials systems. For single materials, a Thornton diagram disclosed in the above-identified article by J. A. Thornton provides a good direction on how to obtain columnar structures but, again, for systems where an impurity or a second phase segregates as the film grows, a columnar structure is a common outcome of such growth. These materials are most commonly grown by DC sputtering methods although other deposition methods such as RF sputtering and evaporation may be used.
In some exemplary embodiments, the anisotropic thermal barrier layer 320 may be realized using a single material having an intrinsic thermal anisotropy. Materials such as graphite, WSe (tungsten selenide) or various Micas compounds such as MoS2, WS2 and WSe2 are highly and naturally highly anisotropic in terms of their thermal conductivities along main symmetry axes of the crystal structures. For instance, graphite, in the plane of the sheet atoms are bonded through strong chemical bonds while in between sheets, the bonding is mostly electrostatic in nature and much weaker than the atomic bonds within the sheets. Graphite has a layered, planar structure. In each layer, the carbon atoms are arranged in a honeycomb lattice with separation of 0.142 nm, and the distance between planes is 0.335 nm. The acoustic and thermal properties of graphite are highly anisotropic, since phonons propagate very quickly along the tightly-bound planes, but are slower to travel from one plane to another.
A thermomagnetic modeling was performed to verify and quantify (i.e., estimate) the benefits of a HAMR structure having an anisotropic thermal barrier layer over a HAMR media structure having an isotropic thermal barrier layer. Various physical parameters used for the modeling are shown in Table 1 below:
Accordingly, a HAMR media structure with an anisotropic thermal barrier layer can achieve a reduction in the power requirement for the light source while maintaining an equivalent thermal spot size on the recording media. A reduction in laser power requirement, in turn, can significantly improve the reliability of the HAMR system as a whole.
The description of the invention is provided to enable any person skilled in the art to practice the various embodiments described herein. While the present invention has been particularly described with reference to the various figures and embodiments, it should be understood that these are for illustration purposes only and should not be taken as limiting the scope of the invention.
There may be many other ways to implement the invention. Various functions and elements described herein may be partitioned differently from those shown without departing from the spirit and scope of the invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and generic principles defined herein may be applied to other embodiments. Thus, many changes and modifications may be made to the invention, by one having ordinary skill in the art, without departing from the spirit and scope of the invention.
A reference to an element in the singular is not intended to mean “one and only one” unless specifically stated, but rather “one or more.” The term “some” refers to one or more. Underlined and/or italicized headings and subheadings are used for convenience only, do not limit the invention, and are not referred to in connection with the interpretation of the description of the invention. All structural and functional equivalents to the elements of the various embodiments of the invention described throughout this disclosure that are known or later come to be known to those of ordinary skill in the art are expressly incorporated herein by reference and intended to be encompassed by the invention. Moreover, nothing disclosed herein is intended to be dedicated to the public regardless of whether such disclosure is explicitly recited in the above description.
Number | Name | Date | Kind |
---|---|---|---|
5846648 | Chen et al. | Dec 1998 | A |
6013161 | Chen et al. | Jan 2000 | A |
6063248 | Bourez et al. | May 2000 | A |
6068891 | O'Dell et al. | May 2000 | A |
6086730 | Liu et al. | Jul 2000 | A |
6099981 | Nishimori | Aug 2000 | A |
6103404 | Ross et al. | Aug 2000 | A |
6117499 | Wong et al. | Sep 2000 | A |
6136403 | Prabhakara et al. | Oct 2000 | A |
6143375 | Ross et al. | Nov 2000 | A |
6145849 | Bae et al. | Nov 2000 | A |
6146737 | Malhotra et al. | Nov 2000 | A |
6149696 | Jia | Nov 2000 | A |
6150015 | Bertero et al. | Nov 2000 | A |
6156404 | Ross et al. | Dec 2000 | A |
6159076 | Sun et al. | Dec 2000 | A |
6164118 | Suzuki et al. | Dec 2000 | A |
6200441 | Gornicki et al. | Mar 2001 | B1 |
6204995 | Hokkyo et al. | Mar 2001 | B1 |
6206765 | Sanders et al. | Mar 2001 | B1 |
6210819 | Lal et al. | Apr 2001 | B1 |
6216709 | Fung et al. | Apr 2001 | B1 |
6221119 | Homola | Apr 2001 | B1 |
6248395 | Homola et al. | Jun 2001 | B1 |
6261681 | Suekane et al. | Jul 2001 | B1 |
6270885 | Hokkyo et al. | Aug 2001 | B1 |
6274063 | Li et al. | Aug 2001 | B1 |
6283838 | Blake et al. | Sep 2001 | B1 |
6287429 | Moroishi et al. | Sep 2001 | B1 |
6290573 | Suzuki | Sep 2001 | B1 |
6299947 | Suzuki et al. | Oct 2001 | B1 |
6303217 | Malhotra et al. | Oct 2001 | B1 |
6309765 | Suekane et al. | Oct 2001 | B1 |
6358636 | Yang et al. | Mar 2002 | B1 |
6362452 | Suzuki et al. | Mar 2002 | B1 |
6363599 | Bajorek | Apr 2002 | B1 |
6365012 | Sato et al. | Apr 2002 | B1 |
6381090 | Suzuki et al. | Apr 2002 | B1 |
6381092 | Suzuki | Apr 2002 | B1 |
6387483 | Hokkyo et al. | May 2002 | B1 |
6391213 | Homola | May 2002 | B1 |
6395349 | Salamon | May 2002 | B1 |
6403919 | Salamon | Jun 2002 | B1 |
6408677 | Suzuki | Jun 2002 | B1 |
6426157 | Hokkyo et al. | Jul 2002 | B1 |
6428906 | Wong et al. | Aug 2002 | B1 |
6429984 | Alex | Aug 2002 | B1 |
6482330 | Bajorek | Nov 2002 | B1 |
6482505 | Bertero et al. | Nov 2002 | B1 |
6500567 | Bertero et al. | Dec 2002 | B1 |
6528124 | Nguyen | Mar 2003 | B1 |
6548821 | Treves et al. | Apr 2003 | B1 |
6552871 | Suzuki et al. | Apr 2003 | B2 |
6565719 | Lairson et al. | May 2003 | B1 |
6566674 | Treves et al. | May 2003 | B1 |
6571806 | Rosano et al. | Jun 2003 | B2 |
6579590 | Ju et al. | Jun 2003 | B2 |
6628466 | Alex | Sep 2003 | B2 |
6664503 | Hsieh et al. | Dec 2003 | B1 |
6670055 | Tomiyasu et al. | Dec 2003 | B2 |
6682807 | Lairson et al. | Jan 2004 | B2 |
6683754 | Suzuki et al. | Jan 2004 | B2 |
6730420 | Bertero et al. | May 2004 | B1 |
6743528 | Suekane et al. | Jun 2004 | B2 |
6759138 | Tomiyasu et al. | Jul 2004 | B2 |
6778353 | Harper | Aug 2004 | B1 |
6795274 | Hsieh et al. | Sep 2004 | B1 |
6855232 | Jairson et al. | Feb 2005 | B2 |
6857937 | Bajorek | Feb 2005 | B2 |
6893748 | Bertero et al. | May 2005 | B2 |
6899959 | Bertero et al. | May 2005 | B2 |
6916558 | Umezawa et al. | Jul 2005 | B2 |
6939120 | Harper | Sep 2005 | B1 |
6946191 | Morikawa et al. | Sep 2005 | B2 |
6967798 | Homola et al. | Nov 2005 | B2 |
6972135 | Homola | Dec 2005 | B2 |
7004827 | Suzuki et al. | Feb 2006 | B1 |
7006323 | Suzuki | Feb 2006 | B1 |
7016154 | Nishihira | Mar 2006 | B2 |
7019924 | McNeil et al. | Mar 2006 | B2 |
7045215 | Shimokawa | May 2006 | B2 |
7070870 | Bertero et al. | Jul 2006 | B2 |
7090934 | Hokkyo et al. | Aug 2006 | B2 |
7099112 | Harper | Aug 2006 | B1 |
7105241 | Shimokawa et al. | Sep 2006 | B2 |
7119990 | Bajorek et al. | Oct 2006 | B2 |
7147790 | Wachenschwanz et al. | Dec 2006 | B2 |
7161753 | Wachenschwanz et al. | Jan 2007 | B2 |
7166319 | Ishiyama | Jan 2007 | B2 |
7166374 | Suekane et al. | Jan 2007 | B2 |
7169487 | Kawai et al. | Jan 2007 | B2 |
7174775 | Ishiyama | Feb 2007 | B2 |
7179549 | Malhotra et al. | Feb 2007 | B2 |
7184139 | Treves et al. | Feb 2007 | B2 |
7196860 | Alex | Mar 2007 | B2 |
7199977 | Suzuki et al. | Apr 2007 | B2 |
7208236 | Morikawa et al. | Apr 2007 | B2 |
7220500 | Tomiyasu et al. | May 2007 | B1 |
7229266 | Harper | Jun 2007 | B2 |
7239970 | Treves et al. | Jul 2007 | B2 |
7252897 | Shimokawa et al. | Aug 2007 | B2 |
7277254 | Shimokawa et al. | Oct 2007 | B2 |
7281920 | Homola et al. | Oct 2007 | B2 |
7292329 | Treves et al. | Nov 2007 | B2 |
7294419 | Shin et al. | Nov 2007 | B2 |
7301726 | Suzuki | Nov 2007 | B1 |
7302148 | Treves et al. | Nov 2007 | B2 |
7305119 | Treves et al. | Dec 2007 | B2 |
7314404 | Singh et al. | Jan 2008 | B2 |
7320584 | Harper et al. | Jan 2008 | B1 |
7329114 | Harper et al. | Feb 2008 | B2 |
7375362 | Treves et al. | May 2008 | B2 |
7420886 | Tomiyasu et al. | Sep 2008 | B2 |
7425719 | Treves et al. | Sep 2008 | B2 |
7471484 | Wachenschwanz et al. | Dec 2008 | B2 |
7498062 | Calcaterra et al. | Mar 2009 | B2 |
7531485 | Hara et al. | May 2009 | B2 |
7537846 | Ishiyama et al. | May 2009 | B2 |
7549209 | Wachenschwanz et al. | Jun 2009 | B2 |
7569490 | Staud | Aug 2009 | B2 |
7597792 | Homola et al. | Oct 2009 | B2 |
7597973 | Ishiyama | Oct 2009 | B2 |
7608193 | Wachenschwanz et al. | Oct 2009 | B2 |
7632087 | Homola | Dec 2009 | B2 |
7656615 | Wachenschwanz et al. | Feb 2010 | B2 |
7678476 | Weller et al. | Mar 2010 | B2 |
7682546 | Harper | Mar 2010 | B2 |
7684152 | Suzuki et al. | Mar 2010 | B2 |
7686606 | Harper et al. | Mar 2010 | B2 |
7686991 | Harper | Mar 2010 | B2 |
7695833 | Ishiyama | Apr 2010 | B2 |
7722968 | Ishiyama | May 2010 | B2 |
7733605 | Suzuki et al. | Jun 2010 | B2 |
7736768 | Ishiyama | Jun 2010 | B2 |
7755861 | Li et al. | Jul 2010 | B1 |
7758732 | Calcaterra et al. | Jul 2010 | B1 |
7833639 | Sonobe et al. | Nov 2010 | B2 |
7833641 | Tomiyasu et al. | Nov 2010 | B2 |
7862914 | Kubota et al. | Jan 2011 | B2 |
7910159 | Jung | Mar 2011 | B2 |
7911736 | Bajorek | Mar 2011 | B2 |
7924519 | Lambert | Apr 2011 | B2 |
7944165 | O'Dell | May 2011 | B1 |
7944643 | Jiang et al. | May 2011 | B1 |
7955723 | Umezawa et al. | Jun 2011 | B2 |
7983003 | Sonobe et al. | Jul 2011 | B2 |
7993497 | Moroishi et al. | Aug 2011 | B2 |
7993765 | Kim et al. | Aug 2011 | B2 |
7998912 | Chen et al. | Aug 2011 | B2 |
8002901 | Chen et al. | Aug 2011 | B1 |
8003237 | Sonobe et al. | Aug 2011 | B2 |
8012920 | Shimokawa | Sep 2011 | B2 |
8038863 | Homola | Oct 2011 | B2 |
8057926 | Ayama et al. | Nov 2011 | B2 |
8062778 | Suzuki et al. | Nov 2011 | B2 |
8064156 | Suzuki et al. | Nov 2011 | B1 |
8076013 | Sonobe et al. | Dec 2011 | B2 |
8092931 | Ishiyama et al. | Jan 2012 | B2 |
8100685 | Harper et al. | Jan 2012 | B1 |
8101054 | Chen et al. | Jan 2012 | B2 |
8125723 | Nichols et al. | Feb 2012 | B1 |
8125724 | Nichols et al. | Feb 2012 | B1 |
8137517 | Bourez | Mar 2012 | B1 |
8142916 | Umezawa et al. | Mar 2012 | B2 |
8163093 | Chen et al. | Apr 2012 | B1 |
8171949 | Lund et al. | May 2012 | B1 |
8173282 | Sun | May 2012 | B1 |
8178480 | Hamakubo et al. | May 2012 | B2 |
8206789 | Suzuki | Jun 2012 | B2 |
8218260 | Iamratanakul et al. | Jul 2012 | B2 |
8241766 | Lu et al. | Aug 2012 | B2 |
8247095 | Champion et al. | Aug 2012 | B2 |
8257783 | Suzuki et al. | Sep 2012 | B2 |
8298609 | Liew et al. | Oct 2012 | B1 |
8298689 | Sonobe et al. | Oct 2012 | B2 |
8309239 | Umezawa et al. | Nov 2012 | B2 |
8316668 | Chan et al. | Nov 2012 | B1 |
8331056 | O'Dell | Dec 2012 | B2 |
8351309 | Kanbe et al. | Jan 2013 | B2 |
8354618 | Chen et al. | Jan 2013 | B1 |
8367228 | Sonobe et al. | Feb 2013 | B2 |
8383209 | Ayama | Feb 2013 | B2 |
8394243 | Jung et al. | Mar 2013 | B1 |
8397751 | Chan et al. | Mar 2013 | B1 |
8399809 | Bourez | Mar 2013 | B1 |
8402638 | Treves et al. | Mar 2013 | B1 |
8404056 | Chen et al. | Mar 2013 | B1 |
8404369 | Ruffini et al. | Mar 2013 | B2 |
8404370 | Sato et al. | Mar 2013 | B2 |
8406918 | Tan et al. | Mar 2013 | B2 |
8414966 | Yasumori et al. | Apr 2013 | B2 |
8425975 | Ishiyama | Apr 2013 | B2 |
8431257 | Kim et al. | Apr 2013 | B2 |
8431258 | Onoue et al. | Apr 2013 | B2 |
8453315 | Kajiwara et al. | Jun 2013 | B2 |
8488276 | Jung et al. | Jul 2013 | B1 |
8491800 | Dorsey | Jul 2013 | B1 |
8492009 | Homola et al. | Jul 2013 | B1 |
8492011 | Itoh et al. | Jul 2013 | B2 |
8496466 | Treves et al. | Jul 2013 | B1 |
8517364 | Crumley et al. | Aug 2013 | B1 |
8517657 | Chen et al. | Aug 2013 | B2 |
8524052 | Tan et al. | Sep 2013 | B1 |
8530065 | Chernyshov et al. | Sep 2013 | B1 |
8546000 | Umezawa | Oct 2013 | B2 |
8551253 | Na'im et al. | Oct 2013 | B2 |
8551627 | Shimada et al. | Oct 2013 | B2 |
8556566 | Suzuki et al. | Oct 2013 | B1 |
8559131 | Masuda et al. | Oct 2013 | B2 |
8562748 | Chen et al. | Oct 2013 | B1 |
8565050 | Bertero et al. | Oct 2013 | B1 |
8570844 | Yuan et al. | Oct 2013 | B1 |
8580410 | Onoue | Nov 2013 | B2 |
8584687 | Chen et al. | Nov 2013 | B1 |
8591709 | Lim et al. | Nov 2013 | B1 |
8592061 | Onoue et al. | Nov 2013 | B2 |
8596287 | Chen et al. | Dec 2013 | B1 |
8597723 | Jung et al. | Dec 2013 | B1 |
8603649 | Onoue | Dec 2013 | B2 |
8603650 | Sonobe et al. | Dec 2013 | B2 |
8605388 | Yasumori et al. | Dec 2013 | B2 |
8605555 | Chernyshov et al. | Dec 2013 | B1 |
8608147 | Yap et al. | Dec 2013 | B1 |
8609263 | Chernyshov et al. | Dec 2013 | B1 |
8619381 | Moser et al. | Dec 2013 | B2 |
8623528 | Umezawa et al. | Jan 2014 | B2 |
8623529 | Suzuki | Jan 2014 | B2 |
8634155 | Yasumori et al. | Jan 2014 | B2 |
8658003 | Bourez | Feb 2014 | B1 |
8658292 | Mallary et al. | Feb 2014 | B1 |
8665541 | Saito | Mar 2014 | B2 |
8668953 | Buechel-Rimmel | Mar 2014 | B1 |
8674327 | Poon et al. | Mar 2014 | B1 |
8685214 | Moh et al. | Apr 2014 | B1 |
8696404 | Sun et al. | Apr 2014 | B2 |
8711499 | Desai et al. | Apr 2014 | B1 |
8743666 | Bertero et al. | Jun 2014 | B1 |
8758912 | Srinivasan et al. | Jun 2014 | B2 |
8787124 | Chernyshov et al. | Jul 2014 | B1 |
8787130 | Yuan et al. | Jul 2014 | B1 |
8791391 | Bourez | Jul 2014 | B2 |
8795765 | Koike | Aug 2014 | B2 |
8795790 | Sonobe et al. | Aug 2014 | B2 |
8795857 | Ayama et al. | Aug 2014 | B2 |
8800322 | Chan et al. | Aug 2014 | B1 |
8811129 | Yuan et al. | Aug 2014 | B1 |
8817410 | Moser et al. | Aug 2014 | B1 |
9034492 | Mallary | May 2015 | B1 |
20020060883 | Suzuki | May 2002 | A1 |
20030022024 | Wachenschwanz | Jan 2003 | A1 |
20030108721 | Fullerton et al. | Jun 2003 | A1 |
20040022387 | Weikle | Feb 2004 | A1 |
20040107426 | Sato et al. | Jun 2004 | A1 |
20040132301 | Harper et al. | Jul 2004 | A1 |
20040202793 | Harper et al. | Oct 2004 | A1 |
20040202865 | Homola et al. | Oct 2004 | A1 |
20040209123 | Bajorek et al. | Oct 2004 | A1 |
20040209470 | Bajorek | Oct 2004 | A1 |
20050016836 | Kuo et al. | Jan 2005 | A1 |
20050036223 | Wachenschwanz et al. | Feb 2005 | A1 |
20050135010 | Liu et al. | Jun 2005 | A1 |
20050142990 | Homola | Jun 2005 | A1 |
20050150862 | Harper et al. | Jul 2005 | A1 |
20050151282 | Harper et al. | Jul 2005 | A1 |
20050151283 | Bajorek et al. | Jul 2005 | A1 |
20050151300 | Harper et al. | Jul 2005 | A1 |
20050155554 | Saito | Jul 2005 | A1 |
20050167867 | Bajorek et al. | Aug 2005 | A1 |
20050202287 | Lu et al. | Sep 2005 | A1 |
20050263401 | Olsen et al. | Dec 2005 | A1 |
20060093867 | Takenoiri et al. | May 2006 | A1 |
20060147758 | Jung et al. | Jul 2006 | A1 |
20060154110 | Hohlfeld et al. | Jul 2006 | A1 |
20060181697 | Treves et al. | Aug 2006 | A1 |
20060207890 | Staud | Sep 2006 | A1 |
20060222904 | Hsia et al. | Oct 2006 | A1 |
20070026263 | Kubota et al. | Feb 2007 | A1 |
20070070549 | Suzuki et al. | Mar 2007 | A1 |
20070245909 | Homola | Oct 2007 | A1 |
20070247756 | Lai et al. | Oct 2007 | A1 |
20070279791 | Mallary | Dec 2007 | A1 |
20080026255 | Das et al. | Jan 2008 | A1 |
20080075845 | Sonobe et al. | Mar 2008 | A1 |
20080093760 | Harper et al. | Apr 2008 | A1 |
20090040644 | Lu et al. | Feb 2009 | A1 |
20090117408 | Umezawa et al. | May 2009 | A1 |
20090136782 | Lu | May 2009 | A1 |
20090136784 | Suzuki et al. | May 2009 | A1 |
20090169922 | Ishiyama | Jul 2009 | A1 |
20090191331 | Umezawa et al. | Jul 2009 | A1 |
20090202866 | Kim et al. | Aug 2009 | A1 |
20090311557 | Onoue et al. | Dec 2009 | A1 |
20100055499 | Harkness | Mar 2010 | A1 |
20100143752 | Ishibashi et al. | Jun 2010 | A1 |
20100182714 | Kanbe et al. | Jul 2010 | A1 |
20100190035 | Sonobe et al. | Jul 2010 | A1 |
20100196619 | Ishiyama | Aug 2010 | A1 |
20100196740 | Ayama et al. | Aug 2010 | A1 |
20100209601 | Shimokawa et al. | Aug 2010 | A1 |
20100215992 | Horikawa et al. | Aug 2010 | A1 |
20100232065 | Suzuki et al. | Sep 2010 | A1 |
20100247965 | Onoue | Sep 2010 | A1 |
20100261039 | Itoh et al. | Oct 2010 | A1 |
20100279151 | Sakamoto et al. | Nov 2010 | A1 |
20100300884 | Homola et al. | Dec 2010 | A1 |
20100304186 | Shimokawa | Dec 2010 | A1 |
20110096432 | Lu et al. | Apr 2011 | A1 |
20110097603 | Onoue | Apr 2011 | A1 |
20110097604 | Onoue | Apr 2011 | A1 |
20110171495 | Tachibana et al. | Jul 2011 | A1 |
20110206947 | Tachibana et al. | Aug 2011 | A1 |
20110212346 | Onoue et al. | Sep 2011 | A1 |
20110223446 | Onoue et al. | Sep 2011 | A1 |
20110244119 | Umezawa et al. | Oct 2011 | A1 |
20110277508 | Osawa et al. | Nov 2011 | A1 |
20110299194 | Aniya et al. | Dec 2011 | A1 |
20110311841 | Saito et al. | Dec 2011 | A1 |
20120069466 | Okamoto et al. | Mar 2012 | A1 |
20120070692 | Sato et al. | Mar 2012 | A1 |
20120077060 | Ozawa | Mar 2012 | A1 |
20120127599 | Shimokawa et al. | May 2012 | A1 |
20120127601 | Suzuki et al. | May 2012 | A1 |
20120129009 | Sato et al. | May 2012 | A1 |
20120140359 | Tachibana | Jun 2012 | A1 |
20120141833 | Umezawa et al. | Jun 2012 | A1 |
20120141835 | Sakamoto | Jun 2012 | A1 |
20120148875 | Hamakubo et al. | Jun 2012 | A1 |
20120156523 | Seki et al. | Jun 2012 | A1 |
20120164488 | Shin et al. | Jun 2012 | A1 |
20120170152 | Sonobe et al. | Jul 2012 | A1 |
20120171369 | Koike et al. | Jul 2012 | A1 |
20120175243 | Fukuura et al. | Jul 2012 | A1 |
20120189872 | Umezawa et al. | Jul 2012 | A1 |
20120194942 | Hohlfeld | Aug 2012 | A1 |
20120196049 | Azuma et al. | Aug 2012 | A1 |
20120207919 | Sakamoto et al. | Aug 2012 | A1 |
20120225217 | Itoh et al. | Sep 2012 | A1 |
20120251842 | Yuan | Oct 2012 | A1 |
20120251845 | Wang | Oct 2012 | A1 |
20120251846 | Desai et al. | Oct 2012 | A1 |
20120276417 | Shimokawa et al. | Nov 2012 | A1 |
20120308722 | Suzuki et al. | Dec 2012 | A1 |
20130004796 | Peng et al. | Jan 2013 | A1 |
20130034747 | Taniguchi | Feb 2013 | A1 |
20130040167 | Alagarsamy et al. | Feb 2013 | A1 |
20130071694 | Srinivasan et al. | Mar 2013 | A1 |
20130165029 | Sun et al. | Jun 2013 | A1 |
20130175252 | Bourez | Jul 2013 | A1 |
20130216865 | Yasumori et al. | Aug 2013 | A1 |
20130230647 | Onoue et al. | Sep 2013 | A1 |
20130314815 | Yuan et al. | Nov 2013 | A1 |
20140011054 | Suzuki | Jan 2014 | A1 |
20140044992 | Onoue | Feb 2014 | A1 |
20140050843 | Yi et al. | Feb 2014 | A1 |
20140151360 | Gregory et al. | Jun 2014 | A1 |
20140234666 | Knigge et al. | Aug 2014 | A1 |
Number | Date | Country |
---|---|---|
2011-060344 | Mar 2011 | JP |
Entry |
---|
Chen, J.S., J.F. Hu, B.C. Lim, W.L. Phyoe, B. Liu and G. Ju, “Structure and Magnetic Properties of L1(0) FePt film with Ag Heat Sink Layer,” Journal of Applied Physics 105, 07B724, American Institute of Physics, published Mar. 18, 2009. |
Marshall, A.F., Y.S. Lee and D.A. Stevenson, “Crystallization Behavior of Amorphous Cu(48)Ti(52): Formation of an Intermediate Long-Period Superlattice Phase,” Center for Material Research and Department of Materials Science, Stanford University, Stanford, California, Pergamon Journals Ltd., Aug. 1985, pp. 61-68. |
Okamoto, “Cu—Ti (Copper-Titanium),” Journal of Phase Equillibria 26, 3 (2002) pp. 549-550. |
Hua Yuan, et al., U.S. Appl. No. 13/077,160, filed Mar. 31, 2011, 22 pages. |
Thornton, “Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings,” J.Vac. Sci. Technol. 11, pp. 666-670 (1974). |