TREA

Handling arm for boats for thermal treatment of semiconductor wafers

Follow

Information

  • Patent Grant
  • D323332
  • Patent Number
    D323,332
  • Date Filed
    Wednesday, January 25, 1989
    35 years ago
  • Date Issued
    Tuesday, January 21, 1992
    32 years ago
  • US Classifications
    Field of Search
    • US
    • D15 144
    • D15 199
    • 219 390
    • 219 411
    • 414 222
    • 414 225
    • 414 226
    • 414 443
    • 432 6
    • 432 153
    • 432 33
    • 432 239
    • 432 253
    • 432 258
    • 432 260
    • 432 261
    • Term of Grant
      14Years
Information
Abstract
Description
Claims
  • The ornamental design for a handling arm for boats for thermal treatment of semiconductor wafers, as shown and described.
Priority Claims (1)
Number Date Country Kind
63-29834 Jul 1988 JPX
US Referenced Citations (4)
Number Name Date Kind
D199694 Belke Dec 1964
D272743 Knox Feb 1984
4344729 Orsinger et al. Aug 1982
4787805 Kosikowski Nov 1988
Foreign Referenced Citations (1)
Number Date Country
28151 Feb 1987 JPX