Number | Date | Country | Kind |
---|---|---|---|
6-100154 | May 1994 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4447263 | Sugizawa et al. | May 1984 | |
4469801 | Hirai et al. | Sep 1984 | |
4507189 | Doi et al. | Mar 1985 | |
4525415 | Poral | Jun 1985 | |
4540596 | Nimmagadda | Sep 1985 | |
4599281 | Schintlmeister et al. | Jul 1986 | |
4714660 | Gates, Jr. | Dec 1987 | |
4753854 | Gavrilov et al. | Jun 1988 |
Entry |
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Quinto et al "High temperature Microhardness of Hard Coatings Produced by physical and chemical vapor Deposition" Thin Solid Films, 153 (1987) 19-36. |
Dasadowski "Electric Properties of Ti-Si-N Thin Cermet Films Deposited in a triode Sputtering System with hot Cathode" Thin Solid Films 162 (1988) 111-117. |