Claims
- 1. A process for fabricating an electrical contact with at least one hard metallic film with Vickers Hardness Numbers greater than 100 on a substrate, said metallic film comprising gold, comprising the step of sputtering a gold alloy composition onto the substrate using a carrier gas characterized in that the gold alloy composition consists essentially of between 0.05 and 5 weight percent noble refractory metal remainder gold, said noble refractory metal consisting essentially of at least one element selected from the group consisting of rhodium and ruthenium and the substrate is maintained at a temperature below 80 degrees C. during the sputtering procedure.
- 2. The process of claim 1 in which the amount of noble refractory metal is between 0.1 and 3.0 weight percent.
- 3. The process of claim 2 in which the amount of noble refractory metal between 0.2 and 0.8 weight percent.
- 4. The process of claim 1 in which argon is used as the carrier gas.
- 5. The process of claim 4 in which the pressure of the carrier gas is between 1 and 50 millitorrs.
- 6. The process of claim 1 in which the substrate is maintained at a temperature below 50 degrees C.
CROSS-REFERENCE TO RELATED APPLICATION
This application is a continuation of application Ser. No. 50,342, filed June 20, 1979, now abandoned.
US Referenced Citations (3)
Number |
Name |
Date |
Kind |
3437888 |
Hall |
Apr 1969 |
|
3530049 |
Scherzer et al. |
Sep 1970 |
|
3711383 |
Schiekel et al. |
Jan 1973 |
|
Foreign Referenced Citations (2)
Number |
Date |
Country |
49-50234 |
Oct 1974 |
JPX |
322411 |
Nov 1972 |
SUX |
Continuations (1)
|
Number |
Date |
Country |
Parent |
50342 |
Jun 1979 |
|