The present invention relates generally to image sensors and in particular to a pixel array architecture having shared components among pixel cells of the array.
Typically, a digital imager array includes a focal plane array of pixel cells, each one of the cells including a photosensor, e.g. a photogate, photoconductor, or a photodiode. In a CMOS imager a readout circuit is connected to each pixel cell which typically includes a source follower output transistor. The photosensor converts photons to electrons which are typically transferred to a floating diffusion region connected to the gate of the source follower output transistor. A charge transfer device (e.g., transistor) can be included for transferring charge from the photosensor to the floating diffusion region. In addition, such imager cells typically have a transistor for resetting the floating diffusion region to a predetermined charge level prior to charge transference. The output of the source follower transistor is gated as a pixel output signal by a row select transistor.
Exemplary CMOS imaging circuits, processing steps thereof, and detailed descriptions of the functions of various CMOS elements of an imaging circuit are described, for example, in U.S. Pat. No. 6,140,630, U.S. Pat. No. 6,376,868, U.S. Pat. No. 6,310,366, U.S. Pat. No. 6,326,652, U.S. Pat. No. 6,204,524, and U.S. Pat. No. 6,333,205, each assigned to Micron Technology, Inc. The disclosures of each of the forgoing patents are hereby incorporated by reference in their entirety.
With reference to
Conventional CMOS imager designs, such as that shown in
In addition, image sensors, such as an image sensor employing the conventional pixel 100, have a characteristic dynamic range. Dynamic range refers to the range of incident light that can be accommodated by an image sensor in a single frame of pixel data. It is desirable to have an image sensor with a high dynamic range to image scenes that generate high dynamic range incident signals, such as indoor rooms with windows to the outside, outdoor scenes with mixed shadows and bright sunshine, night-time scenes combining artificial lighting and shadows, and many others.
The dynamic range for an image sensor is commonly defined as the ratio of its largest non-saturating signal to the standard deviation of its noise under dark conditions. The dynamic range is limited on an upper end by the charge saturation level of the sensor, and on a lower end by noise imposed limitations and/or quantization limits of the analog-to-digital converter used to produce the digital image. When the dynamic range of an image sensor is too small to accommodate the variations in light intensities of the imaged scene, e.g. by having a low saturation level, image distortion occurs. Accordingly, pixel cells having a high dynamic range are desirable in many instances.
A related problem associated with charge generation in conventional pixels, such as pixel 100, occurs when the incident light captured and converted into charge during an integration period is greater than the capacity of the photosensor 120. A pixel's maximum charge capacity may be reached at a relatively low level of illumination, which causes the pixel 100 to be easily saturated, thereby limiting the dynamic range of the pixel 100. Once the sensing region (photodiode photosensor 120) reaches saturation, any additional photon-to-charge conversion will require some charge leakage to escape the charge accumulation region 122 of the photosensor 120. Often times this leakage causes charges to migrate to undesirable parts of the pixel 100 or onto adjacent pixels, thereby causing cross-talk.
Additionally, when the charges generated during an integration period are output from the photosensor 120 during charge transfer, a small amount of charge may be left over in the photosensor 120. The residual charge may cause the photosensor 120 to exceed its maximum capacity during an integration period, thereby causing excess charge to overflow to adjacent pixels, similar to that just described. This undesirable phenomenon is known as “blooming” and results in a aberration in the resultant output image.
One solution that has been suggested to overcome the above blooming problems, is to provide a pixel 50 with an anti-blooming transistor 47, as shown in
Accordingly, there is a desire for an array having pixel cells which have a high dynamic range with minimized blooming effects and an efficient layout to permit a high fill factor. A method of operating such a pixel array is also desired.
The present invention, in the various exemplary embodiments, provides a pixel array architecture having multiple pixels with shared pixel components. The pixel architecture increases the fill factor, and in turn, the quantum efficiency of the pixel array. The common pixel cell components may be shared by a number of pixels in the array, and may include several components that are associated with the readout of a signal from the pixels as well as a shared gate for providing an anti-blooming characteristic for the pixels.
In accordance with a first exemplary embodiment of the invention, a pixel array is provided having two-way sharing between two, row-adjacent pixels that share gate structures, including a high dynamic range/anti-blooming (“HDR/AB”) transistor gate. A method of operating the two-way shared pixels includes global operation of the shared HDR/AB transistor gate.
In accordance with a second exemplary embodiment of the invention, a pixel cell array is provided having four-way sharing among four adjacent pixels that have several common gate structures, including a high dynamic range/anti-blooming (“HDR/AB”) transistor gate. A method of operating the four-way shared pixels includes operation of the shared HDR/AB transistor gate.
The foregoing and other aspects of the invention will be better understood from the following detailed description of the invention, which is provided in connection with the accompanying drawings, in which:
In the following detailed description, reference is made to the accompanying drawings, which form a part hereof and show by way of illustration specific embodiments in which the invention may be practiced. These embodiments are described in sufficient detail to enable those skilled in the art to practice the invention, and it is to be understood that other embodiments may be utilized, and that structural, logical, and electrical changes may be made without departing from the spirit and scope of the present invention. The progression of processing steps described is exemplary of embodiments of the invention; however, the sequence of steps is not limited to that set forth herein and may be changed as is known in the art, with the exception of steps necessarily occurring in a certain order.
The terms “wafer” and “substrate,” as used herein, are to be understood as including silicon, epitaxial, silicon-on-insulator (SOI) or silicon-on-sapphire (SOS) technology, doped and undoped semiconductors, and other semiconductor structures. Furthermore, when reference is made to a “wafer” or “substrate” in the following description, previous processing steps may have been utilized to form regions, junctions, or material layers in or over the base semiconductor structure or foundation. In addition, the semiconductor need not be silicon-based, but could be based on silicon-germanium, germanium, gallium arsenide or other semiconductors.
The term “pixel,” as used herein, refers to a photo-element unit cell containing a photosensor and associated transistors for converting photons to an electrical signal. For purposes of illustration, a small number of representative pixels are illustrated in the figures and description herein; however, typically fabrication of a large plurality of like pixels proceeds simultaneously. Accordingly, the following detailed description is not to be taken in a limiting sense, and the scope of the present invention is defined only by the appended claims.
The terms “at an angle,” “angled,” and “slanted,” as used herein are to be interpreted as meaning at any angle, with respect to some stated reference point, that is not exactly parallel or exactly perpendicular. Accordingly, when at least a portion of an object and some reference point meet to form an angle that is not 0°, 90°, or 180°, the object is considered “angled,” “at an angle,” or “slanted” with respect to the reference point.
Now referring to the figures, where like numerals designate like elements,
In the illustrated portions of pixel array 250, two row-adjacent pixels 200a, 200b having photosensors 201, 203 share common pixel components, including a common high dynamic range/anti-blooming gate 208, as discussed in more detail below. The photosensors 201, 203, may be any photosensitive structure for converting light photons into electrons (photo-charges), and in a preferred embodiment, the photosensors 201, 203 are photodiode regions. Each photosensor 201, 203 illustratively has an associated storage gate 212, 214 for storing the generated photo-charges in respective storage regions 213, 215 prior to a readout of the charges. The storage gates 212, 214 and associated storage regions 213, 215 increase the charge capacity of the pixels in array 250. It should be understood that the storage regions primarily comprise a doped region (n-type) located under the respective storage gates 212, 214 in the substrate.
In addition, the storage regions 213, 215 can also be utilized to store a first pixel signal from a first integration period while the photosensors 201, 203 are generating photo-charges during a second integration period. It should be understood that if ample charge storage capacity is not an issue for an imager implementing the invention, the storage gates 212, 214 can be removed from the layout in order to maximize the imager's photosensitive area, by maximizing the size of the photosensors 201, 203 for each shared pixel 200a, 200b in the array 250.
Each pixel 200a, 200b has a respective transfer gate 202, 204 as part of a respective transfer transistor 202′, 204′ for transferring the accumulated photos-charges from the photosensors 201, 203 to a common storage node, shown as floating diffusion region 210. If the storage gates 212, 214 are utilized, the transfer transistors 202′, 204′ transfer charges from charge storage regions 213, 215 under the storage gates 212, 214 to the shared floating diffusion region 210 through the respective transfer gates 202, 204. As shown, the individual transfer gates 202, 204 may be replaced by one shared transfer gate 205, as illustrated by the dashed lines in
The use of storage gates 212, 214 in association with storage regions 213, 215 are optional, however, they permit a readout operation, discussed below with reference to
Preferably, each of the storage gates 212, 214 (if used) and transfer gates 202, 204 have at least a portion of the gate that is angled with respect to the associated photosensors 201, 203. For example, the edges 227 of the storage gates 212, 214 are shown as being slanted with respect to the length L and the width W of the associated photosensors 201, 203. Similarly, each of the transfer gates 202, 204 (or 205) has an edge 272 that is similarly slanted with respect to the length L and the width W of the photosensors 201, 203. This preferred angled geometry of the gates 212, 214, 202, 204 (and/or 205) allows for an efficient layout of the gates 212, 214, 202, 204 (and/or 205), to improve the leakage and lag performance of the pixels 200a, 200b in array 250. In addition, this angled layout is also beneficial in maximizing the fill factor of the pixels 200a, 200b in array 250, by maximizing the area of the photosensors 201, 203.
In accordance with the invention, the shared HDR/AB gate 208 is provided to drain excess charges away from the photosensors 201, 203. One side of the shared HDR/AB gate 208 is located adjacent the photosensors 201, 203, forming HDR/AB transistors 208′, 238′. Preferably, as shown, at least a portion of an edge 227 of the HDR/AB gate 208 is formed at an angle with respect to the photosensors 201, 203, as to maximize photosensitive area of the array 250. On the other side of the HDR/AB gate 208 is a drain region 218, into which the HDR/AB gate 208 drains charges. The drain region 218 is connected to an array pixel voltage Vaa-pix at connection 228. It should be noted the drain region 218 is also a drain for a reset transistor gate 307, which is used for resetting floating diffusion region 310 in an adjacent row of array 550. This layout minimizes the non-photosensitive areas of the array 250, by increasing the size of the photosensors 201, 203.
The degree of leakage from photosensors 201, 203 to the drain region 218 through the shared HDR/AB gate 208 depends upon many factors, including the threshold voltage characteristics of the HDR/AB transistors 208′, 238′ and the voltage applied to the gate 208 of the HDR/AB transistors 208′, 238′. It should be understood that these factors can be adjusted, as desired, to optimize the functioning of an imager 1300 implementing the shared HDR/AB gate 208. For example, although the operation of the HDR/AB gate 208 may be done globally for every pixel in array 250, a circuit can be implemented to adjust the operating parameters of the HDR/AB transistors 208′, 238′ as will be described herein. In addition, the doping profile of the substrate beneath the HDR/AB gate 208 can be fabricated as desired to modify the threshold voltage of the HDR/AB transistors 208′, 238′ depending on the optimal performance of the transistors 208′, 238′.
In one operational aspect, the HDR/AB transistors 208′, 238′ operates as a global reset for the array, permitting a frame shutter operation. Typically, CMOS pixel sensors (e.g., pixel 100 of
In accordance with another operational aspect of the invention, the HDR/AB transistors 208′, 238′ operates as a means for obtaining a high dynamic range for the pixels in array 250 while also preventing blooming. By permitting a certain amount of charge on the photosensors 201, 203 to drain into drain region 218 during charge integration, the photosensors 201, 203 will saturate at a higher level of illumination in comparison to the conventional photosensor 120, thereby providing an increased dynamic range. This, in turn, advantageously permits the imaging of scenes having varied light intensities using pixel array 250 and mitigates blooming into undesirable locations of the pixel array 250. The particular voltage applied for optimizing the anti-blooming characteristics will be somewhere between 0.0 V and the operating voltage applied to either the storage gates 212, 214 or the transfer gates 202, 204, if the storage gates 212, 214 are not used. The applied voltage decreases the potential difference between the photosensors 201,203 and the drain region 218 to control the movement of excess photo-charges into the drain region 218.
In accordance with another operational aspect of the invention, a shared capacitor 248 may be constructed utilizing the shared HDR/AB gate 208 as one electrode of the capacitor. As such, the capacitance of each pixel 200a, 200b can be increased by storing excess charge in the capacitor 248, so long as the voltage applied to the HDR/AB gate does not cause these excess charges to drain into the common drain region 218. A second electrode of the capacitor 248 is electrically connected to a gate of a source follower transistor for an adjacent pair of pixels. This capacitor 248 is optional, and is not necessary if the pixels 200a, 200b have sufficient capacitance.
The remaining pixel components are shared between the row adjacent pixels as shown in
As shown in
Turning to
It is assumed that the integration period for photosensors 201, 203 has occurred, and the generated charges have been transferred from charge accumulation regions in the photosensors 201, 203 to respective storage regions 213, 215. As shown in
It should be understood that the steps just described would be repeated for the next adjacent pixel except that the transfer signal for this pixel TX1 would go high instead of TX0. This process also repeats row-by-row for every row in the array 250. Thus, for every other pixel sensor in a row an even transfer signal (for even numbered columns of the array) TX0 turns on the even column transfer gates, while an odd transfer signal TX1 (for odd numbered columns of the array) turns on the odd column transfer gates.
Turning to
As illustrated in
As shown in
One reset transistor 512′ having a gate 512 is utilized for resetting charges at both floating diffusion regions 510, 520. To one side of the reset gate 512 is a source/drain region 513 that is capable of receiving a supply voltage Vaa-pix. The remaining readout components on the trunk 551 shared among photosensors 501, 502, 503, 504 include a source follower transistor having a gate 514 connected to the floating diffusion regions 510, 520, and a row select transistor having a gate 516. Isolation regions 530 in the substrate are utilized to isolate the active areas on the trunk 551 from the photosensors, and also isolate the individual charge accumulation regions of photosensors 501, 502, 503, 504 from one another. Any known isolation technique, including but not limited to shallow trench isolation (STI), may be used when forming isolation regions 530.
The four-way shared pixel layout described herein illustratively has a first pair of column-adjacent pixels having respective photosensors 501, 502 (
Each HDR/AB gate 518, 519, 521, 522 is shared among, and overlaps corners of, four adjacent pixels. Exemplary HDR/AB gate 518 is located between a first pair of row adjacent photosensors 501, 541 at a lower edge 561 and a second pair of row adjacent photosensors (not shown), which are in an adjacent row, and are located at the same position of the HDR/AB gate 518 on an upper edge 562. Preferably, at least one edge 571 of the HDR/AB gate is located at an angle where it intersects with each of the photosensors 501, 541. As stated above, this angled geometry maximizes the fill factor for each pixel in array 550. Each HDR/AB gate 518, 519, 521, 522 has a connection at one side to a drain region 528. This drain region 528 is connected to a pixel supply voltage Vaa-pix, such that the HDR/AB gate 518 can drain excess charges away from the photosensors 501, 541 to the drain region 528. In addition, when a sufficient voltage is supplied to the HDR/AB gates 518, 519, 521,522, the gate can operate to reset the photosensors associated therewith e.g., 501, 502, 503, 504.
In an exemplary method of operating the pixel array 550, storage gate (SG) and high dynamic range (HDR) gate signals operate globally throughout all of the rows in a pixel array 550. An integration period for each of the photosensors (such as 501, 502, 503, 504) begins by resetting the photosensor through the respective HDR/AB gates 518, 519, 521, 522. The integration time ends for each of the pixels when the charges generated in the photosensors 501, 502, 503, 504 are transferred to a storage region 553 through a storage gate 552. If a storage gate 552 is utilized with the invention, pixel readout can occur during a next integration time for the array 550, as the charges from a previous integration time are stored in a storage region 553.
The steps for pixel readout will now be described. It should be noted that the transfer gate signal lines TX_ODD, TX_EVEN, shown in
With reference to
Next, a transfer signal TXeven is turned to high, to activate the even column transfer transistor gates 506 in two adjacent rows. Charges stored in the storage area 553 are thus transferred through the transfer transistor 506′ into a floating diffusion region 510 and similarly for the charges generated by photo-sensors 602 in the next row by turning “on” transfer gate 606. Next, for Row001, a pixel voltage signal Vsig is read onto the column line 580 by activating the row select transistor 516 turning RS and sample and hold SHS signals to high. This is done while the in_sel signal is low so that the reset signal Vrst for Row001 is matched up in a set of sample and hold capacitors 715, 716 with the pixel signal Vsig sampled from this row. The row select and sample and hold signals RS and SHS return to low. For Row002, a pixel voltage signal Vsig is now read out repeating the pulsing of row select (RS) and sample and hold signals (SHS). From floating diffusion region 610, a signal is generated by source follower transistor gate 614, through row select transistor 616 and onto the column line 580. During this readout, however, the in_sel signal is returned to high to store the signal from Row002 into the appropriate set of capacitors 715, 716.
This exemplary method is performed simultaneously for every other column in a row, utilizing the alternative transfer gate signal TX_odd to activate transfer transistor gates in odd columns of the array. The method is repeated in this sequence for each pair of rows (Row001 and Row002) until signals are read out for each pixel in array 550. It should be understood that these steps are meant for exemplary purposes only, and the invention is in no way limited to the method of readout operation as described herein.
The CMOS imager 1300 is operated by the timing and control circuit 1250, which controls address decoders 1220, 1270 for selecting the appropriate row and column lines for pixel readout. The control circuit 1250 also controls the row and column driver circuitry 1210, 1260 such that these apply driving voltages to the drive transistors of the selected row and column lines. The pixel column signals, which typically include a pixel reset signal (Vrst) and a pixel image signal (Vsig), are read by a sample and hold circuit 1265 associated with the column device 1260. A differential signal (Vrst−Vsig) is produced by differential amplifier 1267 for each pixel which is digitized by analog to digital converter 1275 (ADC). The analog to digital converter 1275 supplies the digitized pixel signals to an image processor 1280 which forms a digital image.
The processes and devices described above illustrate preferred methods and typical devices of many that could be used and produced. The above description and drawings illustrate embodiments, which achieve the objects, features, and advantages of the present invention. However, it is not intended that the present invention be strictly limited to the above-described and illustrated embodiments. For example, although the invention is discussed only with reference to pixel arrays having a 2-way or 4-way sharing of component parts, other multi-way sharing pixel arrays are also intended to be within the scope of the invention. Additionally, any modifications, though presently unforeseeable, of the present invention that come within the spirit and scope of the following claims should be considered part of the present invention.