Information
-
Patent Grant
-
6491383
-
Patent Number
6,491,383
-
Date Filed
Thursday, May 24, 200123 years ago
-
Date Issued
Tuesday, December 10, 200222 years ago
-
Inventors
-
Original Assignees
-
Examiners
Agents
-
CPC
-
US Classifications
Field of Search
US
- 347 54
- 347 56
- 347 68
- 347 69
- 347 71
- 349 107
- 359 608
-
International Classifications
-
Abstract
A head chip and a head unit, in which manufacturing cost is reduced and also manufacturing steps are simplified, are provided. In a head chip 10 in which: partition walls 12 made of piezoelectric ceramic are arranged on two upper and lower sheets of a first board 11 and a second board 16 with predetermined intervals; chambers 13 are defined between the respective partition walls 12; a driver voltage is applied to electrodes 14 provided on the side surfaces of the partition walls 12 to change the capacity in ink flow paths; and the ink filled in the ink flow paths is jetted from nozzle openings, the first board 11 and the second board 16 are formed of a dielectric material; wiring lines 15 which are electrically conducted to the electrodes 14 and elongated to the outside of the end portions of the partition walls 12 in the longitudinal direction, are provided on the surface of any one of the first board 11 and the second board 16; and further the wiring lines 15 include an inorganic conductive film 15a as the lowermost layer and metal films 15b and 15c formed thereon.
Description
BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a method for manufacturing a head chip which is mounted on an ink-jet type recording apparatus applicable to, for example, a printer and a facsimile.
2. Description of the Related Art
Conventionally, an ink-jet type recording apparatus is known in the technical field, in which a recording head for jetting ink droplets from a plurality of nozzles is employed to record characters and/or images on a recording medium. In such an ink-jet type recording apparatus, the recording head positioned opposite to the recording medium is provided on a head holder, and this head holder is mounted on a carriage so as to be scanned along a direction perpendicular to a transport direction of the recording medium.
In
FIG. 12
, there is shown an exploded/perspective view of one example of such a recording head.
FIGS. 13A and 13B
are sectional view of a major portion of this recording head.
FIG. 13A
is a sectional view of the recording head taken along the longitudinal direction of side walls.
FIG. 13B
is a sectional view of the recording head taken along the thickness direction of side walls. A plurality of grooves
102
are arranged in a piezoelectric ceramic plate
101
in a parallel manner. The respective grooves
102
are separated from each other by side walls
103
. One end portion of each of the grooves
102
in the longitudinal direction is elongated up to one end surface of the piezoelectric ceramic plate
101
, whereas the other end portion is not elongated up to the other end surface of this piezoelectric ceramic plate, and a depth thereof gradually becomes shallow. Also, an electrode
105
used to apply a driving electric field is formed on surfaces of both the side walls
103
on the opening side within each of the grooves
102
along the longitudinal direction.
A cover plate
107
is jointed via an adhesive agent
109
to the grooves
102
of the piezoelectric ceramic plate
101
on the opening side. This cover plate
107
has an ink chamber
111
that constitutes a concave portion which is communicated to the shallow other end portion of each of the grooves
102
and an ink supply port
112
that is penetrated through a bottom portion of this ink chamber
111
along a direction opposite to the direction of the grooves
102
.
A nozzle plate
115
is jointed on an end surface of a joint member made by the piezoelectric ceramic plate
101
and the cover plate
107
, at which the grooves
102
are opened. Nozzle openings
117
are formed in the nozzle plate
115
at such positions located opposite to the respective grooves
102
.
It should be noted that a wiring board
120
is fixed on such a surface of the piezoelectric ceramic plate
101
, which is located opposite to the nozzle plate
115
and also opposite to the cover plate
107
. A wiring line
122
which is electrically connected to each of the electrodes
105
by employing a bonding wire
121
or the like is formed on the wiring board
120
. A driver voltage may be applied via this wiring line
122
to the electrode
105
.
In the recording head constituted in this manner, when ink is filled from the ink supply port
112
into the respective grooves
102
and a predetermined driving electric field is applied via the electrode
105
to the side walls
103
on both sides of a predetermined groove
102
, the side walls
103
are deformed, so that a capacity formed within this predetermined groove
102
is change. As a result, the ink filled inside the grooves
102
may be jetted from the nozzle opening
117
.
For example, as shown in
FIG. 14
, in the case where ink is jetted from a nozzle opening
117
corresponding to a groove
102
a
, a positive driving voltage is applied to both electrodes
105
a
and
105
b
provided in the groove
102
a
, and also electrodes
105
c
and
105
d
located opposite to these electrodes
105
a
and
105
b
are grounded. As a consequence, a driving electric field directed to the groove
102
a
is effected to the side walls
103
a
and
103
b.
When this driving electric field is positioned perpendicular to the polarization direction of the piezoelectric ceramic plate
101
, both the side walls
103
a
and
103
b
are deformed along the direction of the groove
102
a
due to the piezoelectric thickness slip effect, so that the capacity defined inside the groove
102
a
is reduced to there by increase pressure. Thus, the ink may be jetted from the nozzle opening
117
.
However, since such a head chip employs a large amount of high-cost ceramic, there is a problem in that the manufacturing cost of the head chip is high.
To solve such a problem, Japanese Patent Examined Publication No. Hei 6-6375 has proposed such a head chip which is manufactured by the plate shaped board made of glass, piezoelectric ceramic plate made by arranging the pressure chambers in the array form on this plate-shaped board, and ink chamber plate made of glass.
In accordance with this head chip, since both the plate-shaped board and the ink chamber plate are made of low-cost glass materials, this head chip can be manufactured in low cost and also the manufacturing time can be shortened.
However, the above-explained head chip with employment of the glass board owns such a problem in that since the electrode for applying the voltage to the piezoelectric ceramic plate has to be formed by way of the oblique vapor deposition, the manufacturing cost is increased.
Also, when the wiring lines electrically conducted to this electrode are extracted, these wiring lines are processed by metal plating such as nickel plating or gold plating, and thereafter the metal plated-wiring lines has to be cut one by one by using a laser. Thus, there is another problem in that the process step becomes cumbersome, and the manufacturing cost is increased.
Furthermore, even when the wiring lines are directly formed on the glass board by way of the metal plating, there is another problem in that the fitting characteristic is deteriorated, and thus, the formed wiring lines may readily peel off from the glass board.
SUMMARY OF THE INVENTION
The present invention has been made to solve such problems, and therefore, has an object to provide a method of manufacturing a head chip, while manufacturing cost is reduced, and also a manufacturing step is simplified.
In order to solve the above problems, according to a first aspect of the present invention, there is provided a head chip in which: partition walls made of piezoelectric ceramic are arranged on two upper and lower sheets of a first board and a second board with predetermined intervals; chambers are defined between the respective partition walls; a driver voltage is applied to electrodes provided on side surfaces of the partition walls to change the capacity in the chambers; and the ink filled in the chambers is jetted from nozzle openings, characterized in that:
the first board and the second board are formed of a dielectric material, and also wiring lines, which are electrically conducted to the electrodes and elongated to the outside of the end portions of the partition walls in the longitudinal direction, are provided on the surface of either one of the first board and the second board; and
Further, the wiring lines include an inorganic conductive film as the lowermost layer and metal films formed thereon.
According to a second aspect of the present invention, in the first aspect of the present invention, there is provided a head chip characterized in that the dielectric material is glass.
According to a third aspect of the present invention, in the first or second aspect of the present invention, there is provided a head chip characterized in that the inorganic conductive film is made of at least one sort of material selected from the group consisting of ITO, SnO
2
, ZnO, and ATO.
According to a fourth aspect of the present invention, in the first or second aspects of the present invention, there is provided a head chip characterized in that the inorganic conductive film is elongated between one of the first board and the second board and end portions of the partition walls in the width direction, and also end portion of the elongated inorganic conductive film in the width direction and the electrodes are electrically conducted to each other.
According to a fifth aspect of the present invention, in the fourth aspect of the present invention, there is provided a head chip characterized in that the thickness of the inorganic conductive film is set to be equal to or less than 3 μm.
According to a sixth aspect of the present invention, in the first or second aspects of the present invention, there is provided a head chip characterized in that the electrodes and the metal films are formed by selective electroless plating.
According to a seventh aspect of the present invention, in the first or second aspects of the present invention, there is provided a head chip characterized in that the electrodes and the metal films are formed of a nickel layer and a gold layer.
According to a eighth aspect of the present invention, in the first or second aspects of the present invention, there is provided a head chip characterized in that a nozzle plate having the nozzle openings is provided at the end portions of the partition walls in the longitudinal direction, at which the chambers are opened, and also an ink chamber that communicates with the respective chambers is provided on the other end portion side of the partition walls.
According to a ninth aspect of the present invention, in the eighth aspect of the present invention, there is provided a head chip characterized in that the nozzle plate is formed of a dielectric material.
According to a tenth aspect of the present invention, in the first or second aspects of the present invention, there is provided a head chip characterized in that the partition walls are formed by jointing two sheets of piezoelectric ceramic having different polarization direction in the thickness direction.
According to a eleventh aspect of the present invention, in the first or second aspects of the present invention, there is provided a head chip characterized in that the regions corresponding to the chambers are provided with concave portions in one of the first board and the second board, which is provided with the wiring lines.
According to a twelfth aspect of the present invention, in the first or second aspects of the present invention, there is provided a head chip characterized in that a driver circuit is provided with the region corresponding to the wiring lines in one of the first board and the second board, which is provided with the wiring lines.
According to a thirteenth aspect of the present invention, in the first or second aspects of the present invention, there is provided a head unit characterized in that the head unit comprises the head chip as claimed in any one of claims 1 to 12 and a head holder that mounts the head chip.
According to a fourteenth aspect of the present invention, in the thirteenth aspect of the present invention, there is provided a head unit characterized in that the head holder may detachably hold an ink cartridge in which ink is stored.
According to the present invention, while the board made of the dielectric material is employed, the inorganic conductive film, that has the better fitting characteristic with the dielectric material, is provided at the lowermost layer of the wiring line.
As a consequence, the manufacturing step can be made simple, and also the manufacturing cost can be reduced. Moreover, the wiring lines can be easily conducted to the electrodes without fail.
BRIEF DESCRIPTION OF THE DRAWINGS
In the accompanying drawings:
FIG. 1
is a perspective view showing a head chip according to an embodiment of the present invention;
FIG. 2
is a perspective sectional view indicating the head chip according to the embodiment of the present invention;
FIG. 3
is a sectional view representing the head chip according to the embodiment of the present invention, taken along a parallel-arranging direction of a chamber, and also a sectional view of the head chip, taken along a line A-A′ thereof;
FIG. 4
is a sectional view showing another example of an inorganic conductive film according to the present invention, along a longitudinal direction of the chamber;
FIG. 5
is a top view showing a manufacturing method of the head chip according to the embodiment of the present invention;
FIG. 6
is a sectional view representing the head chip corresponding to the respective manufacturing steps of
FIG. 5
along the parallel-arranging direction of the chamber;
FIG. 7
is a top view showing the manufacturing method of the head chip according to the embodiment of the present invention;
FIG. 8
is a sectional view representing the head chip corresponding to the respective manufacturing steps of
FIG. 7
along the parallel-arranging direction of the chamber;
FIG. 9
is a perspective view indicating an assembly of a unit with employment of the head chip according to the embodiment of the present invention;
FIG. 10
is a perspective view indicating an assembly of a unit with employment of the head chip according to the embodiment of the present invention;
FIG. 11
is a perspective view showing a use mode of the unit with employment of the head chip according to the embodiment of the present invention;
FIG. 12
is an exploded perspective view schematically indicating a recording head in accordance with a conventional technique;
FIG. 13
is a sectional view schematically indicating the recording head in accordance with the conventional technique; and
FIG. 14
is a sectional view schematically indicating the recording head in accordance with the conventional technique.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
Hereinafter, the present invention will be described in detail with reference to embodiments.
FIG. 1
is a perspective view indicating a head chip according to an embodiment of the present invention.
FIG. 2
is a sectional perspective view of the head chip.
FIG. 3A
is a sectional view showing a chamber along a parallel-arranging direction, and
FIG. 3B
is a sectional view of the chamber, taken along a line A-A′ of FIG.
3
A.
As shown in the figure, a plurality of chambers
13
, which are defined in a plurality of partition walls
12
made of piezoelectric ceramic by arranging in parallel the partition walls
12
with predetermined intervals, are provided on a plate-shape glass board
11
.
A piezoelectric ceramic plate is aligned and adhered to one side of the glass board
11
by an adhesive agent
26
, agent the partition walls
12
are formed by cutting out the piezoelectric ceramic plate using, for example, a disk-shape dice cutter. At this time, in order to cut out the piezoelectric ceramic plate completely, the surface of the glass board
11
is ground by the dice cutter, and concave portions
11
a
corresponding to the respective chambers
13
are formed in the glass board
11
. Of course, only the piezoelectric ceramic plate is completely cut out and the concave portions
11
a
may not be formed. Also, each of the partition walls
12
may be adhered with predetermined intervals.
This piezoelectric ceramic plate is formed by jointing two piezoelectric ceramic plates having different polarization direction in the thickness direction. Further, electrodes
14
for applying driving electric field are formed on the entire surface of the side surfaces of the partition walls
12
, which are surfaces of the respective chambers
13
.
Further, wiring lines
15
are provided on inner sides of end portions of the respective partition walls
12
in the longitudinal direction on the glass board
11
. The wiring line
15
has an inorganic conductive film
15
a
as the lowermost layer.
As the inorganic conductive film
15
a
, ITO (oxide of indium and tin), SnO
2
, ZnO, ATO (oxide of antimony and tin) or the like may be given. In this embodiment, ITO is used as the inorganic conductive film
15
a.
The wiring line
15
is formed of at least one layer of a metal film formed by selective electroless plating on the inorganic conductive film
15
a.
In this embodiment, the wiring line
15
is constituted of the inorganic conductive film
15
a
and two layers of a nickel metal film
15
b
and a gold metal film
15
c.
In addition, although the electrode
14
is constituted of the nickel metal film
15
b
and the gold metal film
15
c,
which are formed together with the wiring line
15
on the side surface of the partition wall
12
by the selective electroless plating.
Here, the inorganic conductive film
15
a
is elongated along the chambers
13
defined on both sides between the glass board
11
and the respective partition walls
12
, and the end portion of the inorganic conductive film
15
a
in the width direction is firmly in contact with the electrode
14
. Thus, electrical conduction between the electrode
14
and the wiring line
15
is realized.
In the case where the inorganic conductive film
15
a
is elongated between the glass board
11
and the partition walls
12
as described above, if the inorganic conductive film
15
a
is too thick, adhesion malfunction is easy to occur when the partition walls
12
are adhered to the glass board
11
. Thus, there is a fear that displacement, peeling, or the like occurs when the partition walls
12
are driven. Therefore, it is preferable that the inorganic conductive film
15
a
is made relatively thinner, and preferably made to 3 μm or less.
It should be noted that in this embodiment, the inorganic conductive film
15
a
elongated between the glass board
11
and the partition wall
12
is formed along the longitudinal direction of the partition wall
12
, but the present invention is not limited thereto if the inorganic conductive film
15
a
can be electrically conducted to the electrode
14
provided on the side surface of the partition wall
12
. Only a portion of the inorganic conductive film
15
a
maybe elongated along the longitudinal direction. For instance, as indicated in
FIG. 4
, the inorganic conductive film
15
a
is not elongated between the glass board
11
and the partition wall
12
, but may be alternatively provided so as to be in contact with the end surface of the partition wall
12
. In any cases, it is necessary that the electrode
14
is surely and electrically conducted with the wiring lines
15
. It should be noted that
FIG. 4
is a sectional view showing the chamber
13
along the longitudinal direction, and the electrode
14
is continued to the metal films
15
b
and
15
c
at the end portion thereof in the longitudinal direction.
On the other hand, a cover plate
16
formed of plate-shape glass is jointed to the partition walls
12
on the side opposite to the glass board
11
. Further,guide walls
17
made of plastic,for example, are adhered to both side surfaces of the glass board
11
and to the inner portions of the glass board
11
on the side of the end portions of the respective partition walls
12
in the longitudinal direction on the glass board
11
by the adhesive agent or the like. Then, an ink chamber
18
that communicates with the respective chambers
13
is defined by the guide walls
17
and partition walls
12
on the glass board
11
.
Further, the cover plate
16
is provided with an ink supply port
19
, which supplies ink to the ink chamber
18
defined on the glass board
11
and is bored through the cover plate
16
in the thickness direction.
It should be noted that the ink supply port
19
of the cover plate
16
is formed by sandblasting in this embodiment.
Here in this embodiment, the respective chambers
13
are divided into groups corresponding to respective colors consisting of black (B), yellow (Y), magenta (M), and cyan (C), and four ink chambers
18
and four ink supply ports
19
are provided, respectively.
Further, a nozzle plate
20
is jointed to the end surfaces of the partition walls
12
, which are formed flush with the end surface of the glass board
11
, and nozzle openings
21
are pierced in the nozzle plate
20
at the positions opposite to the respective chambers
13
.
This nozzle plate
20
may be formed by, for example, plate-shape metal, plastic, glass, or polyimide film. Further, although not shown in the figure, a water repelling film having a water repelling property is provided to the surface of the nozzle plate
20
, which is opposite to a subject to be printed, in order to prevent adhesion of ink or the like.
Furthermore, a manufacturing method of a head chip in accordance with the above embodiment will be explained in detail. It should be noted that FIG.
5
and
FIG. 7
are top views showing manufacturing steps of the head chip. FIG.
6
and
FIG. 8
are cross sectional views of the chamber
13
along the parallel-arranging direction, which correspond to the manufacturing steps of FIG.
5
and
FIG. 7
, respectively.
First, as shown in FIG.
5
A and
FIG. 6A
, an ITO film that is the inorganic conductive film
15
a
is formed on the plate-shape glass board
11
and the ITO film is patterned with a predetermined shape, here, with an interval that is slightly wider than that of the chamber
13
.
There is no limitation on the forming method of the inorganic conductive film
15
a.
For example, after the inorganic conductive film
15
a
is formed by a sputtering method, an application method or the like, it may be patterned with photolithography or the like.
In addition, if the inorganic conductive film
15
a
is too thick, adhesion malfunction occurs when the partition walls
12
are adhered to the glass board
11
in the following step. Thus, there is a fear that displacement, peeling, or the like of the partition walls
12
occurs when the partition walls
12
are driven. Therefore, it is preferable that the inorganic conductive film
15
a
is made relatively thinner, and preferably made to 3 μm or less.
Next, as shown in FIG.
5
B and
FIG. 6B
, a piezoelectric ceramic plate
22
in which surfaces other than a bonding surface are previously coated with a resist
25
is adhered onto the inorganic conductive film
15
a
by the adhesive agent
26
. This piezoelectric ceramic plate
22
is formed by jointing two sheets of piezoelectric ceramic plates
23
and
24
having different polarization direction in the thickness direction, the surfaces other than the bonding surface are coated with the resist
25
, and then, the piezoelectric ceramic plate
22
is adhered to the glass board
11
by the adhesive agent
26
. It should be noted that the resist
25
may be provided after the piezoelectric ceramic plate
22
is adhered to the glass board
11
.
Thereafter, as shown in FIG.
5
C and
FIG. 6C
, the piezoelectric ceramic plate
22
is cut out to form the partition walls
12
and the chambers
13
. In this embodiment, for example, the piezoelectric ceramic plate
22
is cut out in the thickness direction with the width that is narrower by a predetermined width than the width of the inorganic conductive film
15
a
by using the disk-shape dice cutter, to thereby form the partition walls
12
and the chambers
13
.
At this time, the inorganic conductive film
15
a
is cut out to the surface of the glass board
11
in order that the inorganic conductive film
15
a
provided on the glass board
11
is not electrically conducted within the chambers
13
. Thus, the concave portions
11
a
are formed. Of course, the inorganic conductive film
15
a
may be previously patterned into the cut-out condition.
Further, when the partition walls
12
are formed, since the piezoelectric ceramic plate
22
is cut out with the width that is narrower by a predetermined width than the width of the inorganic conductive film
15
a,
the inorganic conductive film
15
a
remains between both end portions in the width direction of the partition walls
12
and the glass board
11
along the longitudinal direction, and the side surfaces are exposed. The inorganic conductive films
15
a
formed on both sides of the respective chambers
13
are continuous with the inorganic conductive films
15
a
that become the wiring lines
15
at the rear of the partition walls
12
as shown in FIG.
6
C.
Next, as shown in FIG.
7
A and
FIG. 8A
, a starting catalyst containing palladium, platinum or the like is adsorbed over the entire surfaces of both the partition walls
12
and the inorganic conductive films
15
a,
namely surfaces other than the surface of the glass board
11
. Thereafter, the nickel metal film
15
b
and the gold metal film
15
c
are formed by selective electroless plating.
The wiring line
15
of three layers, that is constituted of the inorganic conductive film
15
a,
the nickel metal film
15
b
and the gold metal film
15
c,
is formed at the rear of the partition wall
12
by this selective electroless plating, and the two layers of the nickel metal film
15
b
and the gold metal film
15
c
are formed over the entire surface of the partition wall
12
. Further, the metal films
15
b
and
15
c
provided over the entire surface of the partition wall
12
are electrically conducted to the inorganic conductive film
15
a
provided between the partition wall
12
and the glass board
11
at the exposed side surface.
Next, as shown in FIG.
7
B and
FIG. 8B
, the resist
25
, which is formed on both the upper surface of the partition wall
12
and both end surfaces of the partition wall
12
in the longitudinal direction, and also unnecessary metal films
15
b
and
15
c
formed on the resist
25
are lifted off. As a result, such an electrode
14
, which is not short-circuited on both the side surfaces of the partition wall
12
and which is constructed of two layers made of the nickel metal film
15
b
and the gold metal film
15
c,
is formed on the side surface of the partition wall
12
.
As previously explained, both the metal films
15
b
and
15
c
which constitute the electrode
14
formed in this manner are electrically conducted with the inorganic conductive film
15
a
on the exposed side surfaces thereof. In other words, the electrode
14
is mutually and electrically conducted via the inorganic conductive film
5
a
to the wiring line
15
.
Thereafter, as indicated in
FIG. 1
to
FIG. 3
, the guide wall
17
made of plastic is fixed on the rear portion of each of the partition walls
12
, and also both the end surfaces of the glass board
11
along the parallel-arranging direction of the partition walls
12
by using the adhesive agent or the like, so that the ink chamber
18
is defined on the glass board
11
. Then, the cover plate
16
is fixed by using the adhesive agent or the like on the side opposite to the glass board
11
of the partition wall
12
, and also the nozzle plate
20
having a plate shape, in which the nozzle openings
21
are pierced, is fixed on the side end surface of the partition wall
12
of the glass board
11
with respect to each of the chambers
43
. Then, the outer shape of the resultant head chip is processed by dicing, and thus, a head chip
10
may be manufactured.
As explained above, in this embodiment, the inorganic conductive film
15
a
is patterned on the glass board
11
, and the selective electroless plating is performed on this inorganic conductive film
15
a.
As a result, the wiring lines
15
can be readily manufactured, and also the fitting characteristic between the glass board
11
and the wiring lines
15
can be improved.
Also, since the electrode
14
can be formed at the same time when the wiring lines
15
are formed, the entire manufacturing steps can be made simpler, and further, the manufacturing cost can be reduced.
Further, the manufacturing cost can be reduced by using a large amount of low-cost glass.
Furthermore, driving principle etc. of the head chip
10
are as described in the prior art, and therefore, the description thereof is omitted here.
FIG. 9
is an exploded perspective view indicating a head chip unit on which the above-explained head chip
10
is mounted.
As illustrated in
FIG. 9
, a driver circuit
31
such as an integrated circuit for driving the head chip
10
is directly connected to the wiring line
15
, and this driver circuit
31
is mounted on the glass board
11
of the head chip
10
. Also, a base plate
33
made of aluminum is assembled on the side of the glass board
11
, and a head cover
34
is assembled on the side of the cover plate
16
in the head chip
10
. The base plate
33
is fixed to the head cover
34
such that an engaging shaft
34
a
of the head cover
34
is engaged with an engaging hole
33
a
of the base plate
33
, and the head chip
10
is sandwiched by both the base plate
33
and the head cover
34
. An ink conducting path
35
is formed on the head cover
34
, and this ink conducting path
35
is communicated with each of the ink supply ports
19
of the cover plate
16
.
Also, such a head chip unit
40
may be assembled with, for example, a tank holder, which detachably holds an ink cartridge, to be used.
FIG. 10A
shows an example of such a tank holder.
FIG. 10B
shows the tank holder
41
and the head chip unit
40
which is assembled with the tank holder
41
. The tank holder
41
shown in
FIG. 10
is formed to have substantially a box shape whose one surface is opened, and an ink cartridge (not shown) may be detachably held. A coupling portion
42
is provided on an upper surface of a bottom wall, and is coupled to the ink supply port
19
corresponding to an opening portion formed in the bottom portion of the ink cartridge. A plurality of the coupling portions
42
are provided with respect to each of color ink, for instance, black (B) ink, yellow (Y) ink, magenta (M) ink, and cyan (C) ink. An ink flow path (not shown) is formed inside the coupling portion
42
, and a filter
43
is provided at a tip portion of the coupling portion
42
which constitutes an opening of this ink flow path. The ink flow path forced inside the coupling portion
42
is communicated to the rear surface of the bottom wall. The respective ink flow paths are communicated to a head coupling port
46
which is opened in the partition wall of a flow path board
45
via an ink flow path (not shown) which is provided within the flow path board
45
provided on the side of the rear surface of the tank holder
41
. This head coupling port
46
is opened on the side of the side surface of the tank holder
41
, and a head chip unit holding portion
47
which holds the above-described head chip unit
40
is provided on the bottom portion of this partition wall. In the head chip unit holding portion
47
, there are provided a surrounding wall
48
and an engaging shaft
49
. The surrounding wall
48
surrounds the driver circuit
31
provided on the glass board
11
, and is formed into substantially a U-shape and positioned in an upright manner. The engaging shaft
49
is engaged with an engaging hole
40
a
formed in the base plate
33
of the head chip unit
40
provided inside the surrounding wall
48
.
As a consequence, the head chip unit
40
is mounted on this head chip unit holding portion
47
, so that a head unit
50
can be completed. At this time, the ink conducting path
35
formed in the head cover
34
is coupled to the head coupling port
46
of the flow path board
45
. As a result, the ink which is conducted from the ink cartridge via the coupling portion
42
of the tank holder
41
is conducted via the ink flow path formed in the flow path board
45
into the ink conducting path
35
of the head chip unit
40
, so that this ink is filled into both the ink chamber
18
and the chambers
13
.
Such a head unit
50
is mounted on, for instance, a carriage of an ink-jet type recording apparatus to be used.
FIG. 11
schematically shows an example of a use mode of the head unit
50
.
As shown in
FIG. 11
, a carriage
61
is movably mounted on one pair of guider ails
62
a
and
62
b
along a shaft direction. This carriage
61
is transported by way of a timing belt
65
which is suspended between a pulley
64
a,
that is provided on one end side of the guide rail
62
, and is coupled to a carriage driving motor
63
, and another pulley
64
b
that is provided on the other side of this guide rail
62
. A pair of transfer rollers
66
and
67
are provided along the guide rails
62
a
and
62
b
on both sides in a direction perpendicular to the transport direction of the carriage
6
l. These transfer rollers
66
and
67
are used to transport a recording medium “S” located below the carriage
61
along a direction perpendicular to the transport direction of this carriage
61
.
The above-explained head unit
50
is mounted on the carriage
61
, and the above-explained ink cartridge may be detachably mounted on this head unit
50
.
In accordance with such an ink-jet type recording apparatus, while the recording medium “S” is fed, the carriage
61
is scanned along the direction perpendicular to this medium feeding direction, so that both a character and an image can be recorded on this recording medium “S” by the head chip.
While the present invention has been described with the embodiment, the present invention is not limited to the construction described above.
As described above, according to the present invention, both the upper board and the lower board are formed by the dielectric material, and also, the inorganic conductive film is employed as the lowermost layer of the wiring lines which are electrically conducted to the electrode. Thus, the fitting characteristic between the wiring lines and the boards can be improved, and the manufacturing steps of the wiring lines can be made simple. Also, manufactured cost can be reduced.
Further, the inorganic conductive film is elongated between one of the upper and lower boards and the end portions of the partition walls in the width direction. Thus,the drawing out of the electrodes can be easily formed and also electrical conduction can be attained without fail.
Claims
- 1. A head chip in which: partition walls made of piezoelectric ceramic are arranged on two upper and lower sheets of a first board and a second board with predetermined intervals; chambers are defined between the respective partition walls; a driver voltage is applied to electrodes provided on side surfaces of said partition walls to change the capacity in said chambers; and the ink filled in said chambers is jetted from nozzle openings, characterized in that:said first board and said second board are formed of a dielectric material, and also wiring lines, which are electrically conducted to said electrodes and elongated to an outside of end portions of said partition walls in a longitudinal direction, are provided on a surface of either one of said first board and said second board; and further, said wiring lines include an inorganic conductive film as a lowermost layer and metal films formed thereon.
- 2. A head chip as claimed in claim 1, characterized in that said dielectric material is glass.
- 3. A head chip as claimed in claim 1 or 2, characterized in that said inorganic conductive film is made of at least one sort of material selected from the group consisting of ITO, SnO2, ZnO, and ATO.
- 4. A head chip as claimed in claim 1 or 2, characterized in that said inorganic conductive film is elongated between one of said first board and said second board and the end portions of said partition walls in a width direction, and also an end portion of the elongated inorganic conductive film in the width direction and said electrodes are electrically conducted to each other.
- 5. A head chip as claimed in claim 4, characterized in that a thickness of said inorganic conductive film is set to be equal to or less than 3 μm.
- 6. A head chip as claimed in claim 1 or 2, characterized in that said electrodes and said metal films are formed by selective electroless plating.
- 7. A head chip as claimed in claim 1 or 2, characterized in that said electrodes and said metal films are formed of a nickel layer and a gold layer.
- 8. A head chip as claimed in claim 1 or 2, characterized in that a nozzle plate having said nozzle openings is provided at the end portions of said partition walls in the longitudinal direction, at which said chambers are opened, and also an ink chamber that communicates with said respective chambers is provided on an another end portion side of said partition walls.
- 9. A head chip as claimed in claim 8, characterized in that said nozzle plate is formed of a dielectric material.
- 10. A head chip as claimed in claim 1 or 2, characterized in that said partition walls are formed by jointing two sheets of piezoelectric ceramic having different polarization direction in the thickness direction.
- 11. A head chip as claimed in claim 1 or 2, characterized in that regions corresponding to said chambers are provided with concave portions in one of said first board and said second board, which is provided with said wiring lines.
- 12. A head chip as claimed in claim 1 or 2, characterized in that a driver circuit is provided with a region corresponding to said wiring lines in one of said first board and said second board, which is provided with said wiring lines.
- 13. A head unit characterized in that said head unit comprises the head chip as claimed in claim 1 or 2 and a head holder that mounts the head chip.
- 14. A head unit as claim in claim 13, characterized in that said head holder may detachably hold an ink cartridge in which ink is stored.
Priority Claims (1)
Number |
Date |
Country |
Kind |
2000-154236 |
May 2000 |
JP |
|
US Referenced Citations (3)
Number |
Name |
Date |
Kind |
4929060 |
Sugimoto et al. |
May 1990 |
A |
5724187 |
Varaprasad et al. |
Mar 1998 |
A |
6095641 |
Kishi |
Aug 2000 |
A |
Foreign Referenced Citations (4)
Number |
Date |
Country |
1029678 |
Aug 2000 |
EP |
5-94639 |
Apr 1993 |
JP |
10146974 |
Jun 1998 |
JP |
00029217 |
May 2000 |
WO |