Head chip and head unit

Information

  • Patent Grant
  • 6491383
  • Patent Number
    6,491,383
  • Date Filed
    Thursday, May 24, 2001
    23 years ago
  • Date Issued
    Tuesday, December 10, 2002
    22 years ago
Abstract
A head chip and a head unit, in which manufacturing cost is reduced and also manufacturing steps are simplified, are provided. In a head chip 10 in which: partition walls 12 made of piezoelectric ceramic are arranged on two upper and lower sheets of a first board 11 and a second board 16 with predetermined intervals; chambers 13 are defined between the respective partition walls 12; a driver voltage is applied to electrodes 14 provided on the side surfaces of the partition walls 12 to change the capacity in ink flow paths; and the ink filled in the ink flow paths is jetted from nozzle openings, the first board 11 and the second board 16 are formed of a dielectric material; wiring lines 15 which are electrically conducted to the electrodes 14 and elongated to the outside of the end portions of the partition walls 12 in the longitudinal direction, are provided on the surface of any one of the first board 11 and the second board 16; and further the wiring lines 15 include an inorganic conductive film 15a as the lowermost layer and metal films 15b and 15c formed thereon.
Description




BACKGROUND OF THE INVENTION




1. Field of the Invention




The present invention relates to a method for manufacturing a head chip which is mounted on an ink-jet type recording apparatus applicable to, for example, a printer and a facsimile.




2. Description of the Related Art




Conventionally, an ink-jet type recording apparatus is known in the technical field, in which a recording head for jetting ink droplets from a plurality of nozzles is employed to record characters and/or images on a recording medium. In such an ink-jet type recording apparatus, the recording head positioned opposite to the recording medium is provided on a head holder, and this head holder is mounted on a carriage so as to be scanned along a direction perpendicular to a transport direction of the recording medium.




In

FIG. 12

, there is shown an exploded/perspective view of one example of such a recording head.

FIGS. 13A and 13B

are sectional view of a major portion of this recording head.

FIG. 13A

is a sectional view of the recording head taken along the longitudinal direction of side walls.

FIG. 13B

is a sectional view of the recording head taken along the thickness direction of side walls. A plurality of grooves


102


are arranged in a piezoelectric ceramic plate


101


in a parallel manner. The respective grooves


102


are separated from each other by side walls


103


. One end portion of each of the grooves


102


in the longitudinal direction is elongated up to one end surface of the piezoelectric ceramic plate


101


, whereas the other end portion is not elongated up to the other end surface of this piezoelectric ceramic plate, and a depth thereof gradually becomes shallow. Also, an electrode


105


used to apply a driving electric field is formed on surfaces of both the side walls


103


on the opening side within each of the grooves


102


along the longitudinal direction.




A cover plate


107


is jointed via an adhesive agent


109


to the grooves


102


of the piezoelectric ceramic plate


101


on the opening side. This cover plate


107


has an ink chamber


111


that constitutes a concave portion which is communicated to the shallow other end portion of each of the grooves


102


and an ink supply port


112


that is penetrated through a bottom portion of this ink chamber


111


along a direction opposite to the direction of the grooves


102


.




A nozzle plate


115


is jointed on an end surface of a joint member made by the piezoelectric ceramic plate


101


and the cover plate


107


, at which the grooves


102


are opened. Nozzle openings


117


are formed in the nozzle plate


115


at such positions located opposite to the respective grooves


102


.




It should be noted that a wiring board


120


is fixed on such a surface of the piezoelectric ceramic plate


101


, which is located opposite to the nozzle plate


115


and also opposite to the cover plate


107


. A wiring line


122


which is electrically connected to each of the electrodes


105


by employing a bonding wire


121


or the like is formed on the wiring board


120


. A driver voltage may be applied via this wiring line


122


to the electrode


105


.




In the recording head constituted in this manner, when ink is filled from the ink supply port


112


into the respective grooves


102


and a predetermined driving electric field is applied via the electrode


105


to the side walls


103


on both sides of a predetermined groove


102


, the side walls


103


are deformed, so that a capacity formed within this predetermined groove


102


is change. As a result, the ink filled inside the grooves


102


may be jetted from the nozzle opening


117


.




For example, as shown in

FIG. 14

, in the case where ink is jetted from a nozzle opening


117


corresponding to a groove


102




a


, a positive driving voltage is applied to both electrodes


105




a


and


105




b


provided in the groove


102




a


, and also electrodes


105




c


and


105




d


located opposite to these electrodes


105




a


and


105




b


are grounded. As a consequence, a driving electric field directed to the groove


102




a


is effected to the side walls


103




a


and


103




b.


When this driving electric field is positioned perpendicular to the polarization direction of the piezoelectric ceramic plate


101


, both the side walls


103




a


and


103




b


are deformed along the direction of the groove


102




a


due to the piezoelectric thickness slip effect, so that the capacity defined inside the groove


102




a


is reduced to there by increase pressure. Thus, the ink may be jetted from the nozzle opening


117


.




However, since such a head chip employs a large amount of high-cost ceramic, there is a problem in that the manufacturing cost of the head chip is high.




To solve such a problem, Japanese Patent Examined Publication No. Hei 6-6375 has proposed such a head chip which is manufactured by the plate shaped board made of glass, piezoelectric ceramic plate made by arranging the pressure chambers in the array form on this plate-shaped board, and ink chamber plate made of glass.




In accordance with this head chip, since both the plate-shaped board and the ink chamber plate are made of low-cost glass materials, this head chip can be manufactured in low cost and also the manufacturing time can be shortened.




However, the above-explained head chip with employment of the glass board owns such a problem in that since the electrode for applying the voltage to the piezoelectric ceramic plate has to be formed by way of the oblique vapor deposition, the manufacturing cost is increased.




Also, when the wiring lines electrically conducted to this electrode are extracted, these wiring lines are processed by metal plating such as nickel plating or gold plating, and thereafter the metal plated-wiring lines has to be cut one by one by using a laser. Thus, there is another problem in that the process step becomes cumbersome, and the manufacturing cost is increased.




Furthermore, even when the wiring lines are directly formed on the glass board by way of the metal plating, there is another problem in that the fitting characteristic is deteriorated, and thus, the formed wiring lines may readily peel off from the glass board.




SUMMARY OF THE INVENTION




The present invention has been made to solve such problems, and therefore, has an object to provide a method of manufacturing a head chip, while manufacturing cost is reduced, and also a manufacturing step is simplified.




In order to solve the above problems, according to a first aspect of the present invention, there is provided a head chip in which: partition walls made of piezoelectric ceramic are arranged on two upper and lower sheets of a first board and a second board with predetermined intervals; chambers are defined between the respective partition walls; a driver voltage is applied to electrodes provided on side surfaces of the partition walls to change the capacity in the chambers; and the ink filled in the chambers is jetted from nozzle openings, characterized in that:




the first board and the second board are formed of a dielectric material, and also wiring lines, which are electrically conducted to the electrodes and elongated to the outside of the end portions of the partition walls in the longitudinal direction, are provided on the surface of either one of the first board and the second board; and




Further, the wiring lines include an inorganic conductive film as the lowermost layer and metal films formed thereon.




According to a second aspect of the present invention, in the first aspect of the present invention, there is provided a head chip characterized in that the dielectric material is glass.




According to a third aspect of the present invention, in the first or second aspect of the present invention, there is provided a head chip characterized in that the inorganic conductive film is made of at least one sort of material selected from the group consisting of ITO, SnO


2


, ZnO, and ATO.




According to a fourth aspect of the present invention, in the first or second aspects of the present invention, there is provided a head chip characterized in that the inorganic conductive film is elongated between one of the first board and the second board and end portions of the partition walls in the width direction, and also end portion of the elongated inorganic conductive film in the width direction and the electrodes are electrically conducted to each other.




According to a fifth aspect of the present invention, in the fourth aspect of the present invention, there is provided a head chip characterized in that the thickness of the inorganic conductive film is set to be equal to or less than 3 μm.




According to a sixth aspect of the present invention, in the first or second aspects of the present invention, there is provided a head chip characterized in that the electrodes and the metal films are formed by selective electroless plating.




According to a seventh aspect of the present invention, in the first or second aspects of the present invention, there is provided a head chip characterized in that the electrodes and the metal films are formed of a nickel layer and a gold layer.




According to a eighth aspect of the present invention, in the first or second aspects of the present invention, there is provided a head chip characterized in that a nozzle plate having the nozzle openings is provided at the end portions of the partition walls in the longitudinal direction, at which the chambers are opened, and also an ink chamber that communicates with the respective chambers is provided on the other end portion side of the partition walls.




According to a ninth aspect of the present invention, in the eighth aspect of the present invention, there is provided a head chip characterized in that the nozzle plate is formed of a dielectric material.




According to a tenth aspect of the present invention, in the first or second aspects of the present invention, there is provided a head chip characterized in that the partition walls are formed by jointing two sheets of piezoelectric ceramic having different polarization direction in the thickness direction.




According to a eleventh aspect of the present invention, in the first or second aspects of the present invention, there is provided a head chip characterized in that the regions corresponding to the chambers are provided with concave portions in one of the first board and the second board, which is provided with the wiring lines.




According to a twelfth aspect of the present invention, in the first or second aspects of the present invention, there is provided a head chip characterized in that a driver circuit is provided with the region corresponding to the wiring lines in one of the first board and the second board, which is provided with the wiring lines.




According to a thirteenth aspect of the present invention, in the first or second aspects of the present invention, there is provided a head unit characterized in that the head unit comprises the head chip as claimed in any one of claims 1 to 12 and a head holder that mounts the head chip.




According to a fourteenth aspect of the present invention, in the thirteenth aspect of the present invention, there is provided a head unit characterized in that the head holder may detachably hold an ink cartridge in which ink is stored.




According to the present invention, while the board made of the dielectric material is employed, the inorganic conductive film, that has the better fitting characteristic with the dielectric material, is provided at the lowermost layer of the wiring line.




As a consequence, the manufacturing step can be made simple, and also the manufacturing cost can be reduced. Moreover, the wiring lines can be easily conducted to the electrodes without fail.











BRIEF DESCRIPTION OF THE DRAWINGS




In the accompanying drawings:





FIG. 1

is a perspective view showing a head chip according to an embodiment of the present invention;





FIG. 2

is a perspective sectional view indicating the head chip according to the embodiment of the present invention;





FIG. 3

is a sectional view representing the head chip according to the embodiment of the present invention, taken along a parallel-arranging direction of a chamber, and also a sectional view of the head chip, taken along a line A-A′ thereof;





FIG. 4

is a sectional view showing another example of an inorganic conductive film according to the present invention, along a longitudinal direction of the chamber;





FIG. 5

is a top view showing a manufacturing method of the head chip according to the embodiment of the present invention;





FIG. 6

is a sectional view representing the head chip corresponding to the respective manufacturing steps of

FIG. 5

along the parallel-arranging direction of the chamber;





FIG. 7

is a top view showing the manufacturing method of the head chip according to the embodiment of the present invention;





FIG. 8

is a sectional view representing the head chip corresponding to the respective manufacturing steps of

FIG. 7

along the parallel-arranging direction of the chamber;





FIG. 9

is a perspective view indicating an assembly of a unit with employment of the head chip according to the embodiment of the present invention;





FIG. 10

is a perspective view indicating an assembly of a unit with employment of the head chip according to the embodiment of the present invention;





FIG. 11

is a perspective view showing a use mode of the unit with employment of the head chip according to the embodiment of the present invention;





FIG. 12

is an exploded perspective view schematically indicating a recording head in accordance with a conventional technique;





FIG. 13

is a sectional view schematically indicating the recording head in accordance with the conventional technique; and





FIG. 14

is a sectional view schematically indicating the recording head in accordance with the conventional technique.











DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS




Hereinafter, the present invention will be described in detail with reference to embodiments.





FIG. 1

is a perspective view indicating a head chip according to an embodiment of the present invention.

FIG. 2

is a sectional perspective view of the head chip.

FIG. 3A

is a sectional view showing a chamber along a parallel-arranging direction, and

FIG. 3B

is a sectional view of the chamber, taken along a line A-A′ of FIG.


3


A.




As shown in the figure, a plurality of chambers


13


, which are defined in a plurality of partition walls


12


made of piezoelectric ceramic by arranging in parallel the partition walls


12


with predetermined intervals, are provided on a plate-shape glass board


11


.




A piezoelectric ceramic plate is aligned and adhered to one side of the glass board


11


by an adhesive agent


26


, agent the partition walls


12


are formed by cutting out the piezoelectric ceramic plate using, for example, a disk-shape dice cutter. At this time, in order to cut out the piezoelectric ceramic plate completely, the surface of the glass board


11


is ground by the dice cutter, and concave portions


11




a


corresponding to the respective chambers


13


are formed in the glass board


11


. Of course, only the piezoelectric ceramic plate is completely cut out and the concave portions


11




a


may not be formed. Also, each of the partition walls


12


may be adhered with predetermined intervals.




This piezoelectric ceramic plate is formed by jointing two piezoelectric ceramic plates having different polarization direction in the thickness direction. Further, electrodes


14


for applying driving electric field are formed on the entire surface of the side surfaces of the partition walls


12


, which are surfaces of the respective chambers


13


.




Further, wiring lines


15


are provided on inner sides of end portions of the respective partition walls


12


in the longitudinal direction on the glass board


11


. The wiring line


15


has an inorganic conductive film


15




a


as the lowermost layer.




As the inorganic conductive film


15




a


, ITO (oxide of indium and tin), SnO


2


, ZnO, ATO (oxide of antimony and tin) or the like may be given. In this embodiment, ITO is used as the inorganic conductive film


15




a.


The wiring line


15


is formed of at least one layer of a metal film formed by selective electroless plating on the inorganic conductive film


15




a.


In this embodiment, the wiring line


15


is constituted of the inorganic conductive film


15




a


and two layers of a nickel metal film


15




b


and a gold metal film


15




c.






In addition, although the electrode


14


is constituted of the nickel metal film


15




b


and the gold metal film


15




c,


which are formed together with the wiring line


15


on the side surface of the partition wall


12


by the selective electroless plating.




Here, the inorganic conductive film


15




a


is elongated along the chambers


13


defined on both sides between the glass board


11


and the respective partition walls


12


, and the end portion of the inorganic conductive film


15




a


in the width direction is firmly in contact with the electrode


14


. Thus, electrical conduction between the electrode


14


and the wiring line


15


is realized.




In the case where the inorganic conductive film


15




a


is elongated between the glass board


11


and the partition walls


12


as described above, if the inorganic conductive film


15




a


is too thick, adhesion malfunction is easy to occur when the partition walls


12


are adhered to the glass board


11


. Thus, there is a fear that displacement, peeling, or the like occurs when the partition walls


12


are driven. Therefore, it is preferable that the inorganic conductive film


15




a


is made relatively thinner, and preferably made to 3 μm or less.




It should be noted that in this embodiment, the inorganic conductive film


15




a


elongated between the glass board


11


and the partition wall


12


is formed along the longitudinal direction of the partition wall


12


, but the present invention is not limited thereto if the inorganic conductive film


15




a


can be electrically conducted to the electrode


14


provided on the side surface of the partition wall


12


. Only a portion of the inorganic conductive film


15




a


maybe elongated along the longitudinal direction. For instance, as indicated in

FIG. 4

, the inorganic conductive film


15




a


is not elongated between the glass board


11


and the partition wall


12


, but may be alternatively provided so as to be in contact with the end surface of the partition wall


12


. In any cases, it is necessary that the electrode


14


is surely and electrically conducted with the wiring lines


15


. It should be noted that

FIG. 4

is a sectional view showing the chamber


13


along the longitudinal direction, and the electrode


14


is continued to the metal films


15




b


and


15




c


at the end portion thereof in the longitudinal direction.




On the other hand, a cover plate


16


formed of plate-shape glass is jointed to the partition walls


12


on the side opposite to the glass board


11


. Further,guide walls


17


made of plastic,for example, are adhered to both side surfaces of the glass board


11


and to the inner portions of the glass board


11


on the side of the end portions of the respective partition walls


12


in the longitudinal direction on the glass board


11


by the adhesive agent or the like. Then, an ink chamber


18


that communicates with the respective chambers


13


is defined by the guide walls


17


and partition walls


12


on the glass board


11


.




Further, the cover plate


16


is provided with an ink supply port


19


, which supplies ink to the ink chamber


18


defined on the glass board


11


and is bored through the cover plate


16


in the thickness direction.




It should be noted that the ink supply port


19


of the cover plate


16


is formed by sandblasting in this embodiment.




Here in this embodiment, the respective chambers


13


are divided into groups corresponding to respective colors consisting of black (B), yellow (Y), magenta (M), and cyan (C), and four ink chambers


18


and four ink supply ports


19


are provided, respectively.




Further, a nozzle plate


20


is jointed to the end surfaces of the partition walls


12


, which are formed flush with the end surface of the glass board


11


, and nozzle openings


21


are pierced in the nozzle plate


20


at the positions opposite to the respective chambers


13


.




This nozzle plate


20


may be formed by, for example, plate-shape metal, plastic, glass, or polyimide film. Further, although not shown in the figure, a water repelling film having a water repelling property is provided to the surface of the nozzle plate


20


, which is opposite to a subject to be printed, in order to prevent adhesion of ink or the like.




Furthermore, a manufacturing method of a head chip in accordance with the above embodiment will be explained in detail. It should be noted that FIG.


5


and

FIG. 7

are top views showing manufacturing steps of the head chip. FIG.


6


and

FIG. 8

are cross sectional views of the chamber


13


along the parallel-arranging direction, which correspond to the manufacturing steps of FIG.


5


and

FIG. 7

, respectively.




First, as shown in FIG.


5


A and

FIG. 6A

, an ITO film that is the inorganic conductive film


15




a


is formed on the plate-shape glass board


11


and the ITO film is patterned with a predetermined shape, here, with an interval that is slightly wider than that of the chamber


13


.




There is no limitation on the forming method of the inorganic conductive film


15




a.


For example, after the inorganic conductive film


15




a


is formed by a sputtering method, an application method or the like, it may be patterned with photolithography or the like.




In addition, if the inorganic conductive film


15




a


is too thick, adhesion malfunction occurs when the partition walls


12


are adhered to the glass board


11


in the following step. Thus, there is a fear that displacement, peeling, or the like of the partition walls


12


occurs when the partition walls


12


are driven. Therefore, it is preferable that the inorganic conductive film


15




a


is made relatively thinner, and preferably made to 3 μm or less.




Next, as shown in FIG.


5


B and

FIG. 6B

, a piezoelectric ceramic plate


22


in which surfaces other than a bonding surface are previously coated with a resist


25


is adhered onto the inorganic conductive film


15




a


by the adhesive agent


26


. This piezoelectric ceramic plate


22


is formed by jointing two sheets of piezoelectric ceramic plates


23


and


24


having different polarization direction in the thickness direction, the surfaces other than the bonding surface are coated with the resist


25


, and then, the piezoelectric ceramic plate


22


is adhered to the glass board


11


by the adhesive agent


26


. It should be noted that the resist


25


may be provided after the piezoelectric ceramic plate


22


is adhered to the glass board


11


.




Thereafter, as shown in FIG.


5


C and

FIG. 6C

, the piezoelectric ceramic plate


22


is cut out to form the partition walls


12


and the chambers


13


. In this embodiment, for example, the piezoelectric ceramic plate


22


is cut out in the thickness direction with the width that is narrower by a predetermined width than the width of the inorganic conductive film


15




a


by using the disk-shape dice cutter, to thereby form the partition walls


12


and the chambers


13


.




At this time, the inorganic conductive film


15




a


is cut out to the surface of the glass board


11


in order that the inorganic conductive film


15




a


provided on the glass board


11


is not electrically conducted within the chambers


13


. Thus, the concave portions


11




a


are formed. Of course, the inorganic conductive film


15




a


may be previously patterned into the cut-out condition.




Further, when the partition walls


12


are formed, since the piezoelectric ceramic plate


22


is cut out with the width that is narrower by a predetermined width than the width of the inorganic conductive film


15




a,


the inorganic conductive film


15




a


remains between both end portions in the width direction of the partition walls


12


and the glass board


11


along the longitudinal direction, and the side surfaces are exposed. The inorganic conductive films


15




a


formed on both sides of the respective chambers


13


are continuous with the inorganic conductive films


15




a


that become the wiring lines


15


at the rear of the partition walls


12


as shown in FIG.


6


C.




Next, as shown in FIG.


7


A and

FIG. 8A

, a starting catalyst containing palladium, platinum or the like is adsorbed over the entire surfaces of both the partition walls


12


and the inorganic conductive films


15




a,


namely surfaces other than the surface of the glass board


11


. Thereafter, the nickel metal film


15




b


and the gold metal film


15




c


are formed by selective electroless plating.




The wiring line


15


of three layers, that is constituted of the inorganic conductive film


15




a,


the nickel metal film


15




b


and the gold metal film


15




c,


is formed at the rear of the partition wall


12


by this selective electroless plating, and the two layers of the nickel metal film


15




b


and the gold metal film


15




c


are formed over the entire surface of the partition wall


12


. Further, the metal films


15




b


and


15




c


provided over the entire surface of the partition wall


12


are electrically conducted to the inorganic conductive film


15




a


provided between the partition wall


12


and the glass board


11


at the exposed side surface.




Next, as shown in FIG.


7


B and

FIG. 8B

, the resist


25


, which is formed on both the upper surface of the partition wall


12


and both end surfaces of the partition wall


12


in the longitudinal direction, and also unnecessary metal films


15




b


and


15




c


formed on the resist


25


are lifted off. As a result, such an electrode


14


, which is not short-circuited on both the side surfaces of the partition wall


12


and which is constructed of two layers made of the nickel metal film


15




b


and the gold metal film


15




c,


is formed on the side surface of the partition wall


12


.




As previously explained, both the metal films


15




b


and


15




c


which constitute the electrode


14


formed in this manner are electrically conducted with the inorganic conductive film


15




a


on the exposed side surfaces thereof. In other words, the electrode


14


is mutually and electrically conducted via the inorganic conductive film


5




a


to the wiring line


15


.




Thereafter, as indicated in

FIG. 1

to

FIG. 3

, the guide wall


17


made of plastic is fixed on the rear portion of each of the partition walls


12


, and also both the end surfaces of the glass board


11


along the parallel-arranging direction of the partition walls


12


by using the adhesive agent or the like, so that the ink chamber


18


is defined on the glass board


11


. Then, the cover plate


16


is fixed by using the adhesive agent or the like on the side opposite to the glass board


11


of the partition wall


12


, and also the nozzle plate


20


having a plate shape, in which the nozzle openings


21


are pierced, is fixed on the side end surface of the partition wall


12


of the glass board


11


with respect to each of the chambers


43


. Then, the outer shape of the resultant head chip is processed by dicing, and thus, a head chip


10


may be manufactured.




As explained above, in this embodiment, the inorganic conductive film


15




a


is patterned on the glass board


11


, and the selective electroless plating is performed on this inorganic conductive film


15




a.


As a result, the wiring lines


15


can be readily manufactured, and also the fitting characteristic between the glass board


11


and the wiring lines


15


can be improved.




Also, since the electrode


14


can be formed at the same time when the wiring lines


15


are formed, the entire manufacturing steps can be made simpler, and further, the manufacturing cost can be reduced.




Further, the manufacturing cost can be reduced by using a large amount of low-cost glass.




Furthermore, driving principle etc. of the head chip


10


are as described in the prior art, and therefore, the description thereof is omitted here.





FIG. 9

is an exploded perspective view indicating a head chip unit on which the above-explained head chip


10


is mounted.




As illustrated in

FIG. 9

, a driver circuit


31


such as an integrated circuit for driving the head chip


10


is directly connected to the wiring line


15


, and this driver circuit


31


is mounted on the glass board


11


of the head chip


10


. Also, a base plate


33


made of aluminum is assembled on the side of the glass board


11


, and a head cover


34


is assembled on the side of the cover plate


16


in the head chip


10


. The base plate


33


is fixed to the head cover


34


such that an engaging shaft


34




a


of the head cover


34


is engaged with an engaging hole


33




a


of the base plate


33


, and the head chip


10


is sandwiched by both the base plate


33


and the head cover


34


. An ink conducting path


35


is formed on the head cover


34


, and this ink conducting path


35


is communicated with each of the ink supply ports


19


of the cover plate


16


.




Also, such a head chip unit


40


may be assembled with, for example, a tank holder, which detachably holds an ink cartridge, to be used.





FIG. 10A

shows an example of such a tank holder.

FIG. 10B

shows the tank holder


41


and the head chip unit


40


which is assembled with the tank holder


41


. The tank holder


41


shown in

FIG. 10

is formed to have substantially a box shape whose one surface is opened, and an ink cartridge (not shown) may be detachably held. A coupling portion


42


is provided on an upper surface of a bottom wall, and is coupled to the ink supply port


19


corresponding to an opening portion formed in the bottom portion of the ink cartridge. A plurality of the coupling portions


42


are provided with respect to each of color ink, for instance, black (B) ink, yellow (Y) ink, magenta (M) ink, and cyan (C) ink. An ink flow path (not shown) is formed inside the coupling portion


42


, and a filter


43


is provided at a tip portion of the coupling portion


42


which constitutes an opening of this ink flow path. The ink flow path forced inside the coupling portion


42


is communicated to the rear surface of the bottom wall. The respective ink flow paths are communicated to a head coupling port


46


which is opened in the partition wall of a flow path board


45


via an ink flow path (not shown) which is provided within the flow path board


45


provided on the side of the rear surface of the tank holder


41


. This head coupling port


46


is opened on the side of the side surface of the tank holder


41


, and a head chip unit holding portion


47


which holds the above-described head chip unit


40


is provided on the bottom portion of this partition wall. In the head chip unit holding portion


47


, there are provided a surrounding wall


48


and an engaging shaft


49


. The surrounding wall


48


surrounds the driver circuit


31


provided on the glass board


11


, and is formed into substantially a U-shape and positioned in an upright manner. The engaging shaft


49


is engaged with an engaging hole


40




a


formed in the base plate


33


of the head chip unit


40


provided inside the surrounding wall


48


.




As a consequence, the head chip unit


40


is mounted on this head chip unit holding portion


47


, so that a head unit


50


can be completed. At this time, the ink conducting path


35


formed in the head cover


34


is coupled to the head coupling port


46


of the flow path board


45


. As a result, the ink which is conducted from the ink cartridge via the coupling portion


42


of the tank holder


41


is conducted via the ink flow path formed in the flow path board


45


into the ink conducting path


35


of the head chip unit


40


, so that this ink is filled into both the ink chamber


18


and the chambers


13


.




Such a head unit


50


is mounted on, for instance, a carriage of an ink-jet type recording apparatus to be used.

FIG. 11

schematically shows an example of a use mode of the head unit


50


.




As shown in

FIG. 11

, a carriage


61


is movably mounted on one pair of guider ails


62




a


and


62




b


along a shaft direction. This carriage


61


is transported by way of a timing belt


65


which is suspended between a pulley


64




a,


that is provided on one end side of the guide rail


62


, and is coupled to a carriage driving motor


63


, and another pulley


64




b


that is provided on the other side of this guide rail


62


. A pair of transfer rollers


66


and


67


are provided along the guide rails


62




a


and


62




b


on both sides in a direction perpendicular to the transport direction of the carriage


6


l. These transfer rollers


66


and


67


are used to transport a recording medium “S” located below the carriage


61


along a direction perpendicular to the transport direction of this carriage


61


.




The above-explained head unit


50


is mounted on the carriage


61


, and the above-explained ink cartridge may be detachably mounted on this head unit


50


.




In accordance with such an ink-jet type recording apparatus, while the recording medium “S” is fed, the carriage


61


is scanned along the direction perpendicular to this medium feeding direction, so that both a character and an image can be recorded on this recording medium “S” by the head chip.




While the present invention has been described with the embodiment, the present invention is not limited to the construction described above.




As described above, according to the present invention, both the upper board and the lower board are formed by the dielectric material, and also, the inorganic conductive film is employed as the lowermost layer of the wiring lines which are electrically conducted to the electrode. Thus, the fitting characteristic between the wiring lines and the boards can be improved, and the manufacturing steps of the wiring lines can be made simple. Also, manufactured cost can be reduced.




Further, the inorganic conductive film is elongated between one of the upper and lower boards and the end portions of the partition walls in the width direction. Thus,the drawing out of the electrodes can be easily formed and also electrical conduction can be attained without fail.



Claims
  • 1. A head chip in which: partition walls made of piezoelectric ceramic are arranged on two upper and lower sheets of a first board and a second board with predetermined intervals; chambers are defined between the respective partition walls; a driver voltage is applied to electrodes provided on side surfaces of said partition walls to change the capacity in said chambers; and the ink filled in said chambers is jetted from nozzle openings, characterized in that:said first board and said second board are formed of a dielectric material, and also wiring lines, which are electrically conducted to said electrodes and elongated to an outside of end portions of said partition walls in a longitudinal direction, are provided on a surface of either one of said first board and said second board; and further, said wiring lines include an inorganic conductive film as a lowermost layer and metal films formed thereon.
  • 2. A head chip as claimed in claim 1, characterized in that said dielectric material is glass.
  • 3. A head chip as claimed in claim 1 or 2, characterized in that said inorganic conductive film is made of at least one sort of material selected from the group consisting of ITO, SnO2, ZnO, and ATO.
  • 4. A head chip as claimed in claim 1 or 2, characterized in that said inorganic conductive film is elongated between one of said first board and said second board and the end portions of said partition walls in a width direction, and also an end portion of the elongated inorganic conductive film in the width direction and said electrodes are electrically conducted to each other.
  • 5. A head chip as claimed in claim 4, characterized in that a thickness of said inorganic conductive film is set to be equal to or less than 3 μm.
  • 6. A head chip as claimed in claim 1 or 2, characterized in that said electrodes and said metal films are formed by selective electroless plating.
  • 7. A head chip as claimed in claim 1 or 2, characterized in that said electrodes and said metal films are formed of a nickel layer and a gold layer.
  • 8. A head chip as claimed in claim 1 or 2, characterized in that a nozzle plate having said nozzle openings is provided at the end portions of said partition walls in the longitudinal direction, at which said chambers are opened, and also an ink chamber that communicates with said respective chambers is provided on an another end portion side of said partition walls.
  • 9. A head chip as claimed in claim 8, characterized in that said nozzle plate is formed of a dielectric material.
  • 10. A head chip as claimed in claim 1 or 2, characterized in that said partition walls are formed by jointing two sheets of piezoelectric ceramic having different polarization direction in the thickness direction.
  • 11. A head chip as claimed in claim 1 or 2, characterized in that regions corresponding to said chambers are provided with concave portions in one of said first board and said second board, which is provided with said wiring lines.
  • 12. A head chip as claimed in claim 1 or 2, characterized in that a driver circuit is provided with a region corresponding to said wiring lines in one of said first board and said second board, which is provided with said wiring lines.
  • 13. A head unit characterized in that said head unit comprises the head chip as claimed in claim 1 or 2 and a head holder that mounts the head chip.
  • 14. A head unit as claim in claim 13, characterized in that said head holder may detachably hold an ink cartridge in which ink is stored.
Priority Claims (1)
Number Date Country Kind
2000-154236 May 2000 JP
US Referenced Citations (3)
Number Name Date Kind
4929060 Sugimoto et al. May 1990 A
5724187 Varaprasad et al. Mar 1998 A
6095641 Kishi Aug 2000 A
Foreign Referenced Citations (4)
Number Date Country
1029678 Aug 2000 EP
5-94639 Apr 1993 JP
10146974 Jun 1998 JP
00029217 May 2000 WO