Patent Grant
7055937
1. Field of the Invention
The present invention relates to a heat generating resistant element film adapted for constituting an electrothermal converting member as generating means for discharging thermal energy for an ink jet apparatus, which discharges ink by an ink jet method for recording or printing a character, a symbol, or an image onto a recording medium constituted of a paper, a plastic sheet, a cloth or another article, an ink jet head substrate and an ink jet apparatus utilizing an electrothermal converting member utilizing such heat generating resistant element film, and a producing method therefor.
2. Related Background Art
An ink jet apparatus has a configuration for discharging a functional liquid for recording etc. (hereinafter representatively called “ink”) from a discharge port onto a recording medium thereby executing a recording of a character, a symbol, an image etc., or an application of a component contained in the ink onto various surfaces, and has a feature capable of a high-speed recording of a high-definition image by discharging the ink as a small liquid droplet from the discharge port at a high speed. In particular, an ink jet apparatus of a type utilizing an electrothermal converting member as energy generation means for generating an energy to be utilized for ink discharge, and executing the ink discharge utilizing a bubble generation in the ink by the thermal energy generated by such electrothermal converting member, is recently attracting attention as it is adapted for achieving a higher definition in the image, a higher speed in recording, a compactization of a recording head and an apparatus, and a color capability (for example, U.S. Pat. No. 4,723,129 and U.S. Pat. No. 4,740,796.
A general configuration of a principal part of a heat substrate to be used in constructing an ink jet apparatus is shown in
The ink jet recording head shown in
Also each ink flow path 1003 is formed by adjoining a top plate integrally bearing plural flow path walls 1008 under a relative alignment with the electrothermal converting members etc., on the substrate 1004, for example, by image processing. Each ink flow path 1003 communicates, at an end opposite to the discharge port 1001 thereof, with a common liquid chamber 1009, which stores ink supplied from an ink tank. (not shown).
The ink supplied to the common liquid chamber 1009 is guided therefrom to each ink flow path 1003, and is retained therein by forming a meniscus in the vicinity of the discharge port 1001. In this state, the electrothermal converting element 1002 is selectively driven to cause rapid heating and boiling, by the thermal energy generated therein, of the ink on the heat action surface, thereby discharging the ink by an impact force in such situation.
As shown in
The heat generating resistant element to be employed in the recording head of the ink jet apparatus having the aforementioned structure is generally different from the heat generating resistant element employed in a thermal print head.
This is because, in a thermal print head, an electric power of about 1 W within a period of 1 msec is applied to the heat generating resistant element, while, in an ink jet head, an electric power of 3 to 4 W within a period for example of 7 μsec is applied to the heat generating resistant element, in order to gasify the ink within a short time. Since such electric power is several times larger than the electric power applied to the thermal print head, the heat generating resistant element of the ink jet head tends to be subjected to a thermal stress within a shorter time in comparison with that of the thermal print head.
Therefore, in consideration of the discharge and the driving method specific to the ink jet head and different from those in the thermal print head, a matching design (film thickness, heater size, shape etc.) is required for the heat generating resistant element and it is known that the heat generating resistant element employed in the thermal print head is not immediately applicable to the ink jet head.
In the ink jet recording apparatus, a higher functionality such as a higher image quality and a higher recording speed is recently requested increasingly, as explained in the foregoing. Among these requirements, a higher image quality can be achieved by a method of decreasing the size of the heater (heat generating resistant element) thereby reducing a discharge amount per dot and thus reducing the dot size.
Also for achieving a higher recording speed, there can be employed a driving method with a shorter pulse than in the prior drive, thereby increasing the drive frequency.
However, in order to drive the heater with a high frequency in a configuration of a reduced heater size for achieving a higher image quality, it is necessary to increase the sheet resistance.
Now reference is made to
As will be apparent from the relationship between the driving conditions and the size of the heat generating resistant element in
Thus the Japanese Patent Application Laid-Open No. H10-114071 discloses a configuration of constituting a heat generating resistant element of the ink jet head with a thin film of TaxSiyNz with x=20–80 at. %, y=3–25 at. % and z=10–60 at. % thereby enabling a heat generating resistance property of a high resistance adapted for a small dot and realizing an energy saving when applied to an ink jet recording head.
Among the properties required for the heat generating resistant element to be employed in the ink jet head, in addition to a high resistance, a durability is also an important property to be satisfied at the same time.
The resistor in the ink jet head repeats heat generation by a high frequency electric power of short pulses, and a bubble is generated in the ink according to the cycles of the heat generation, thereby discharging the ink. In such state, the heat generating resistant element reaches a temperature of 600 to 700° C., and an eventual change in the resistance of the resistor in such repetition between the room temperature and the high temperature poses a serious problem in the ink discharge.
More specifically, as the ink jet head is generally driven by a constant voltage drive, a trouble is induced in case the resistance shows a large change during the drive.
For example, a decrease in the resistance significantly reduces the service life of the resistor by an excessive current, while an increase in the resistance reduces the current, eventually failing the ink discharge.
It is therefore necessary, as the durability characteristics of the resistor, that the resistor shows a minimal change in resistance even after the temperature hysteresis actually experienced by the resistor. Such durability can be predicted to a certain extent by an evaluation of a temperature coefficient of resistance (TCR characteristics) of the material.
It is known that the durability is generally better when the TCR characteristics of the resistor is very small (ideally zero). In developing a material for the resistor, it is important to simultaneously realize a high resistance and the durability characteristics. The aforementioned patent reference describes that preferable TCR characteristics can be achieved by selecting a specific resistivity at 2,500 μΩ·cm or less.
However, in the recent trend toward the higher image quality, emphasis is given to the substantial elimination of granularity, and, for this purpose, there is desired a discharge amount of the liquid droplet not exceeding 1 pl.
For achieving the ink discharge with a high driving frequency and with multiple nozzles at a discharge amount of 1 pl or less to be requested hereafter, a sheet resistance of 700 Ω/□ or higher is considered necessary, for example, for a drive voltage of 24 V, a pulse width of 1 μs, and a heater size of 17×17 μm in order to suppress a temperature increase in the head and to stabilize the discharge without decreasing the driving voltage.
However, with respect to TaSiN, the aforementioned patent reference discloses to select the specific resistivity of 2,500 μΩ·cm or less in order to obtain preferable TCR characteristics. Stated differently, in case the aforementioned TaSiN is used to attain the recently requested sheet resistance of 700 Ω/□ or higher (corresponding to specific resistivity of 3,000 μΩ·cm or higher), there will result inferior TCR characteristics and an insufficient durability.
Also in case the resistance is elevated in this manner, there also results a difficulty in productivity such as a fluctuation in the specific resistivity.
For this reason, it has become necessary to find a novel material capable of satisfying a higher resistance and a durability. The novel material is also required to be capable of providing a sufficient margin in productivity.
As a material capable of providing the aforementioned sheet resistance, Japanese Patent Publication No. H2-18651, U.S. Pat. No. 4,392,992, U.S. Pat. No. 4,510,178, U.S. Pat. No. 4,591,821 etc., disclose compositions of a CrSiN film. However, these references do not teach nor suggest at all as to which atomic composition of CrSiN film is useful as a heat generating resistant element for the electrothermal converting member of the ink jet head, and a composition capable of also satisfying the durability has not been known at all.
A principal object of the present invention is to solve aforementioned drawbacks associated with the conventional material for the heat generating resistant element of the ink jet recording head, and to provide a heat generating resistant element film adapted for use as a heat generating resistant element allowing to obtain a recorded image of a high quality over a prolonged period and a producing method therefor. Another object of the present invention is to provide an ink jet apparatus having, as a heat generating resistant element of an electrothermal converting member, a heat generating resistant element film enabling a stable ink discharge even in case of a smaller dot discharge for realizing a recorded image of a higher definition or a high-speed drive for realizing a high-speed recording, an ink jet head substrate to be employed in such configuration and a producing method therefor.
A heat generating resistant element film of the present invention is characterized in being constituted of Cr, Si and N with a following composition:
For such heat generating resistant element film, there is preferred a film formed by reactive sputtering, employing a CrSi alloy as a target in a mixed gas atmosphere including nitrogen gas and argon gas.
An ink jet head substrate of the present invention, constituted of a substrate bearing an electrothermal converting member having a heat generator resistor for generating, by a current supply, thermal energy to be utilized for ink discharge, is characterized in that the heat generating resistant element is a heat generating resistant element film constituted of Cr, Si and N with a following composition:
In such substrate, the heat generating resistant element film preferably has a thickness within a range from 300 to 8.00 Å. Also the aforementioned electrothermal converging member can have a configuration including a pair of electrodes for current supply to the heat generating resistant element member. The substrate also includes a heat action surface for causing the thermal energy to act on ink, and such heat action surface is preferably constituted of a protective layer covering the heat generating resistant element. There may also be assumed a configuration including a plurality of the heat generating resistant elements. Further, in the substrate, the heat generating resistant element film is preferably formed by a reactive sputtering, employing a CrSi alloy as a target in a mixed gas atmosphere including nitrogen gas and argon gas.
In another embodiment of the present invention, an ink jet head including an ink discharge port for discharging ink, an ink flow path communicating with the ink discharge port and having a heat action surface for causing thermal energy, to be utilized for ink discharge from the ink discharge port, to act on the ink, and an electrothermal converting member having a heat generating resistant element for generating the thermal energy by a current supply, is characterized in that the heat generating resistant element is a heat generating resistant element film constituted of Cr, Si and N with a following composition:
An ink jet apparatus of the present invention, including an ink jet head for discharging ink, and means which provides the ink jet head with a recording signal, is characterized in that the ink jet head has the aforementioned configuration.
Such apparatus can have a configuration provided with a carriage for mounting the aforementioned ink jet head, and can employ a heat generating resistant element film therein formed by a reactive sputtering, employing a CrSi alloy as a target in a mixed gas atmosphere including nitrogen gas and argon gas.
A producing method for the heat generating resistant element film of the aforementioned composition of the present invention is characterized in forming, on a predetermined surface of a substrate, the heat generating resistant element film by a reactive sputtering, employing a CrSi alloy as a target in a mixed gas atmosphere including nitrogen gas and argon gas. The method may further include, after the film forming step, a heat treatment step for the film.
A producing method for the ink jet head substrate of the present invention is a method for producing the ink jet head substrate of the aforementioned configuration, characterized in including a step of forming the heat generating resistant element film by a reactive sputtering, employing a CrSi alloy as a target in a mixed gas atmosphere including nitrogen gas and argon gas. Also this method may further include, after the film forming step, a heat treatment step for the film.
A producing method for the ink jet apparatus of the present invention is a method for producing an ink jet apparatus of the aforementioned configuration, characterized in including a step of forming the heat generating resistant element film by a reactive sputtering, employing a CrSi alloy as a target in a mixed gas atmosphere including nitrogen gas and argon gas. Also this method may further include, after the film forming step, a heat treatment step for the film.
A CrSi-based material is already known as a material for constituting the heat generating resistant element for the thermal head, but there has not been obtained a knowledge as to which elementary configuration and atom number composition of such material provide a heat generating resistant element adequate for the electrothermal converting member of the ink jet head capable of attaining the objects of the present invention. The present inventors have obtained a new knowledge that the aforementioned objects of the present invention can be attained by adding N as an elementary component to Cr and Si, and adopting the aforementioned specified atomic number composition, thereby having made the present invention.
According to the present invention, there can be provided a heat generating resistant element film as a material for the heat generating resistant element, which has an excellent thermal response in a drive utilizing a relatively short pulse, is capable of providing a high sheet resistance and is adapted for a further miniaturization of the heater size. Also by employing such heat generating resistant element film in a heat generating resistant element of the electrothermal converting member, it is possible to provide an ink jet apparatus, an ink jet head to be employed therein and a substrate for constituting such ink jet head, capable of enabling stable ink discharge even in case of a smaller dot for a higher definition of the recorded image or a high-speed drive for a high-speed recording, and reducing the electric current consumption in the drive thereby contributing to energy saving.
As explained in the foregoing, a heat generating resistant element film of the present invention, particularly a plurality of heat generating resistant element for generating thermal energy to be utilized for ink discharge, is constituted of a film of a material represented by CrSiN, having a composition of Cr: 15 to 20 at. %, Si: 40 to 60 at. % and N: 20 to 45 at. %.
The heat generating resistant element of the ink jet recording head of the present invention can maintain desired durability even in case of a drive with a short pulse, thereby providing a recorded image of a high quality over a prolonged period. Positive and very small TCR characteristics are considered to significantly contribute to such performance.
The ink jet recording head of the present invention provides effects of enabling a heat generating resistance property of a high resistance suitable for a smaller dot, and realizing a high energy efficiency thereby suppressing the heat generation and enabling energy saving.
A heat generating resistant element film of the present invention is constituted of Cr, Si and N with a following composition:
The heat generating resistant element film may also include, within an extent that the desired characteristics are not affected, an element of a trace amount other than the aforementioned elements, namely may be a film in which a sum of Cr, Si and N is substantially 100 at. %. For example, a proportion of the summed number of atoms (Cr+Si+N) in the total number of atoms constituting the material is preferably 99.5 at. % or higher and more preferably 99.9 at. % or higher.
More specifically, a surface or an interior of the film may be oxidized or may incorporate a gas in a reaction area upon exposure to the air or in the course of preparation, for example, by sputtering, but the effect is not deteriorated by such slight oxidation or fetching of gas such as Ar on the surface or in the interior. Examples of such impurity includes Ar and at least one element selected from O, C, Si, B, Na and Cl.
The heat generating resistant element film of the present invention is more preferably constituted of Cr, Si and N with a following composition:
In case of use as a heat generating resistant element of an electrothermal converting member of an ink jet head, the heat generating resistant element film preferably has a thickness from 200 to 1,000 Å, more preferably 300 to 800 Å.
The heat generating resistant element film, having the composition defined by the aforementioned atomic %, shows a significantly improved sheet resistance, and can secure a satisfactory stability in drive, when employed as a heat generating resistant element of the electrothermal converting member of the ink jet head. The heat generating resistant element film having the aforementioned composition can provide, because of a high sheet resistance, a satisfactory drive state with a given power consumption, particularly with a smaller current, and has advantageous characteristics in the standpoints of energy saving and application to a compact ink jet apparatus employing a battery of a small current. Also it is improved in a response to an input signal (discharge instruction signal) to the electrothermal converting member, thereby stably obtaining a bubble generating state necessary for the discharge.
The heat generating resistant element film of the aforementioned composition can be utilized for constituting an ink jet head and a substrate to be used therein, and can further provide an ink jet apparatus utilizing these.
An example of the configuration of such ink jet head includes a configuration explained above by
The ink jet head substrate has a basic configuration having a protective layer on a heat generating resistant element. In such case, though the heat conducting efficiency to the ink is somewhat lost, there can be obtained an ink jet head further improved in the durability of the electrothermal converting member and in the resistance change in the heat generating resistant element by an electrochemical reaction. Based on such standpoint, the protective layer is preferably has a total thickness within a range of 1,000 Å to 5 μm. A preferred example of the protective layer is constituted of an Si-containing insulation layer such as of SiO2 or SiN provided on the heat generating resistant element and a Ta layer so provided on such layer as to form a heat action surface.
The ink jet head substrate of the present invention at least includes a configuration provided, on a substrate, with an electrothermal converting member having a heat generating resistant element for generating, by a current supply, thermal energy to be utilized for ink discharge, and further includes at least either of a pair of electrodes connected to the heat generating resistant element and a protective layer covering at least the heat generating resistant element.
In the configuration shown in
An ink jet head can be obtained by forming at least an ink flow path as shown in
In the configuration shown in
The ink jet head of the present invention preferably has a configuration having an ink discharge structural unit, including the discharge port, the ink flow path and the heat generating resistant element, in plural units as shown in
In such so-called full-line type ink jet head in which the discharge ports are arranged corresponding to the width the recording area of the recording material, namely an ink jet head having 1,000 or more, particularly 2,000 or more discharge ports, a fluctuation in the resistance in the heat generating portions within a single ink jet head affects the uniformity in the volume of droplets discharged from the discharge ports, thus leading to an unevenness in image density. However, the heat generating resistant element of the present invention is capable of obtaining a desired specific resistivity under satisfactory control and an extremely small fluctuation of the resistance within a single ink jet head, thereby resolving the aforementioned drawback in a significantly improved state.
As explained in the foregoing, the heat generating resistant element of the present invention is meaningful in the recent trend that a higher speed (for example, a print speed of 30 cm/sec or higher, or even 60 cm/sec or higher) and a higher density are requested for the recording and the number of the discharge ports of the ink jet head correspondingly increases.
Also in an ink jet head of a configuration in which a functional element is structurally incorporated in a surface of an ink jet head substrate as disclosed in U.S. Pat. No. 4,429,321, it is one of the important points to form electric circuits of the entire ink jet head exactly as designed thereby facilitating to maintain the function of the functional element in a normal state, and the heat generating resistant element of the present invention is also extremely effective in this point. This is because, as explained in the foregoing, the heat generating resistant element of the present invention is capable of obtaining a desired specific resistivity under satisfactory control and an extremely small fluctuation of the resistance within a single ink jet head, whereby the electric circuits of the entire ink jet head can be formed exactly as designed.
In addition, the heat generating resistant element of the present invention is extremely effective in an ink jet head of a disposable cartridge type in which an ink tank, storing the ink to be supplied to the heat action surface, is integrally provided, in a detachable manner if necessary. The ink jet head of such type is required to realize a low running cost of an entire ink jet apparatus in which such ink jet head is to be mounted, and the heat generating resistant element of the present invention can be so constructed as to come into direct contact with the ink, as explained in the foregoing, to achieve a satisfactory heat transmission efficiency to the ink, thereby reducing the electric power consumption in the entire apparatus and easily meeting the aforementioned requirement.
It may also be utilized not only for generating the thermal energy to be utilized for ink discharge, but also as a heater provided if necessary for heating a desired portion within the ink jet head, and is particularly preferably employed in case such heater comes into direct contact with the ink.
An ink jet recording apparatus capable of high-speed recording and image recording of high image quality can be obtained by mounting the ink jet head of the aforementioned configuration in a main body of the apparatus and providing the ink jet head with a signal from the main body of the apparatus.
In the foregoing, there has been explained an apparatus of a type in which the ink jet head is mounted on the carriage and executes a scanning motion relative to the recording medium, but the ink jet head and the ink jet apparatus of the present invention may also be constructed as an apparatus of pen type in which the ink jet head and the ink tank are integrally constructed. Also the ink jet head may be provided with an ink chamber, for containing the ink to be supplied to the ink flow path, if necessary in common to plural ink flow paths, and a full-color image can be recorded by supplying the ink chambers with inks of respectively different colors, for example, cyan, magenta, yellow and if necessary black colors. Also the ink tank storing the ink may be integrated with the ink jet head as explained before, or detachably connected with the ink jet head. Otherwise, it may be detachably connected, if necessary, to a portion other than the ink jet head of the ink jet apparatus.
In the above-described configurations, portions other than the heat generating resistant element can be formed with materials and methods already known.
The heat generating resistant element film of the present invention can be prepared by various film forming methods as a film having the aforementioned composition and satisfying the predetermined characteristics. Among these methods, there is preferred reactive sputtering, particularly magnetron sputtering employing a high frequency (RF) power supply or a direct current (DC) power supply as the power source.
For example, a heat generating resistant element film can be prepared on a substrate by reactive sputtering employing a CrSi alloy as a target in a mixed gas atmosphere including nitrogen gas and argon gas.
In
A film formation with the apparatus shown in
At first, with an unrepresented exhaust pump and through an exhaust valve 4007, the film forming chamber 4009 is evacuated to 1×10−5 to 1×10−6 Pa. Then a mixed gas of argon gas and nitrogen gas is introduced, through a mass flow controller (not shown), into the film forming chamber 4009 through a gas introducing aperture 4010. In this state, the internal heater 4005 and the external heater 4008 are so regulated that the substrate and the atmosphere reach predetermined temperatures.
Then an electric power is applied from the power supply 4006 to the target 4001 to induce a sputtering discharge, and the shutter 4011 is adjusted to form a film on the substrate 4004. Film forming conditions in this operation are so regulated as to obtain the aforementioned composition.
The heat generating resistant element film formed on the substrate is preferably subjected further to a heat treatment. The heat treatment may be executed in the sputtering apparatus in continuation, or as a post step in another apparatus.
This heat treatment generates an intermetallic compound constituted of CrSi2 in CrSiN constituting the heat generating resistant element film, and can achieve a further improvement in the durability because such intermetallic compound is thermally stable and has a small TCR. Based on these facts, the composition ratio of Cr and Si is preferably close to 1:2. It is estimated that the specific resistivity is increased by an inclusion N in such state. The heat generating resistant element constituted of such heat generating resistant element film can provide a desired durability and a high energy efficiency even in case of continuous drive with short pulses and with a small heater size, thereby enabling energy saving by suppressing heat generation and providing a recorded image of a high quality. Thus formed heat generating resistant element film can be shaped by various patterning methods, such as a method of executing a dry etching in a state where a portion to be left is covered with a resist material, thereby eliminating an unnecessary portion from the substrate.
In the following embodiments of the present invention will be explained by examples. However, the present invention is not limited to examples to be explained in the following, but is applicable to a resistor film to be utilized for other application as long as the objects of the present invention can be attained.
(Evaluation of Production Stability of Film)
An evaluation was made on the production stability of a CrSiN film. Film formations were conducted by varying a nitrogen partial pressure under main sputtering conditions with a target composition of Cr30Si70 (at. %), a power of 350 W and a gas pressure of 0.5 Pa, and there was determined a relationship between the nitrogen partial pressure and the specific resistivity (as to the sputtering apparatus, reference is to be made to
The CrSiN film is disclosed, for example, in Japanese Patent Publication No. H2-18651, U.S. Pat. Nos. 4,392,992, 4,510,178, 4,591,821 etc., but these references do not teach nor suggest at all as to which atomic composition is useful as a heat generating resistant element for the electrothermal converting member of the ink jet head.
<Evaluation of Ink Jet Head Substrate>
(Preparation of Substrate of Configuration Shown in
At first, on a silicon substrate 2001, a heat accumulation layer 2002 of a thickness of 1.8 μm was formed by thermal oxidation, and an SiO2 film, as an interlayer film 2003 serving also as a heat accumulation layer, was formed with a thickness of 1.2 μm by plasma CVD. Then, with the apparatus shown in
This operation was executed with gas flow rates of Ar gas: 64 sccm, and N2 gas: 20 sccm, a power of 350 W charged to the target Cr30Si70, an atmospheric temperature of 200° C. and a substrate temperature of 200° C. Also as a metal wiring 2005 for heating the heat generating resistant element layer 2004 in the heat action surface 2008, an Al—Cu film was formed by sputtering with a thickness of 5,500 Å.
It was then patterned by a photolithographic process to form a heat action surface 2008 of 15×40 μm (planar size) where the Al—Cu layer was eliminated. As a protective film 2006, an SiN film was formed with a thickness of 1 μm by plasma CVD. In the present example, the substrate was maintained at 400° C. for about 1 hour also for heat treatment. Finally, as an anticavitation layer 2007, a Ta film was formed with a thickness of 2,000 Å by sputtering, thereby completing the substrate of the present invention. The heat generating resistant element layer of the aforementioned configuration had a sheet resistance of 910 Ω□. The TCR characteristics were about 40 ppm/° C.
Also in an RBS composition analysis, the CrSiN had a composition ratio of Cr: 20 at. %, Si: 42 at. % and N: 38 at. % (RBS is a common quantitative analysis for a film composition and means Rutherford back scattering).
A substrate of Comparative Example 1 was obtained in the same manner as in Example 1, except that the heat generating resistant element layer 2004 was changed in a following manner. In the apparatus shown in
Evaluation was made on following items, on the substrates obtained in Example 1 and Comparative Example 1.
A bubble generating voltage Vth for ink discharge was determined with the substrates prepared in Example 1 and Comparative Example 1. Also a current was measured in a drive employing a driving voltage of 1.2 Vth (1.2 times of the bubble generating voltage Vth) and a driving pulse width of 2 μsec.
Example 1 provided Vth=36 V and a current of 16 mA, while Comparative Example 1 provided Vth=24 V and a current of 35 mA.
In the comparison of the substrates of Example 1 and Comparative Example 1 of the present invention based on these results, the current was about ½ in comparison with that in Comparative Example. In an actual head, since there are plural heat generating resistant elements to be driven at the same time, the electric power consumption becomes far smaller than in Comparative Example, thus providing an energy saving effect.
(Durability)
Also an evaluation was made on durability against thermal stress by breaking pulses, by driving the heat generating resistant element under following conditions.
Principal Test-Conditions:
Drive frequency: 15 kHz, drive pulse width: 1 μsec, drive voltage: bubble generating voltage×1.2. As a result, Example 1 and Comparative Example 1 did not show breakage up to 4.0×E9 (4.0×109) pulses. These results indicate that the substrate embodying the present invention can sufficient withstand the short pulse drive.
Also a similar evaluation was made on Comparative Example 2 prepared in the following manner.
A substrate of Comparative Example 2 was obtained in the same manner as in Example 1, except that the heat generating resistant element layer 2004 was changed in a following manner. In the apparatus shown in
The thus prepared substrate of Comparative Example 2 showed a breakage far before 4.0×E9 (4.0×109) pulses, thus indicating an insufficient durability though the resistance was sufficient.
In the present invention, as a CrSiN film having a high resistance and a stability in resistance, the heat generating resistant element film is constituted of Cr, Si and N with a following composition:
It is estimated that the durability becomes insufficient in case Cr<15 at. % and N>45 at. %, and the resistance becomes insufficient in case Cr>20 at. %, Si>60 at. % and N<20 at. %.
Following evaluation was conducted in order to confirm these points.
<Evaluation of characteristics for Ink Jet>
Also in order to evaluate the characteristics as a heat generating resistant element for a substrate for an ink jet recording head, there were prepared ink jet recording heads having a CrSiN film formed by the film forming method as in the foregoing example with the apparatus shown in
A substrate of a sample for the evaluation of the ink jet characteristics in the present example was an Si substrate as in Example 1, or an Si substrate in which a driving IC was already prepared therein.
In case of the Si substrate, an SiO2 heat accumulating layer 2002 (
Then an interlayer insulation film 2003 of Sio2 with a thickness of 1.2 μm was formed by sputtering or CVD. Then a heat generating resistant element layer 2004 was formed by sputtering with a CrSi target. There were employed a power of 350 W charged into the target, gas flow rates of the conditions of Example 1 and a substrate temperature of 200° C.
Then, as an electrode wiring 2005, an Al—Si film was formed of 5,500 Å by sputtering. Then it was patterned by a photolithographic process to form a heat action portion 2008 of 20×20 μm where the Al—Si film was eliminated. Then, as a protective film 2006, a SiN insulator of a thickness of 1 μm was formed by plasma CVD. Also in this case, the substrate:temperature was maintained at 400° C. for about 1 hour as heat treatment. Then, as an anticavitation layer 2007, a Ta film was formed with a thickness of 2,300 Å by sputtering, and an ink jet substrate of the present invention as shown in
A CST test was executed with thus prepared substrate.
CST Evaluation
Sample 1: Cr14Ai51N35 (target composition ratio: Cr/Si=22.5/77.5, specific resistivity: 4,500 μΩcm);
Sample 2: Cr17Ai47N36 (target composition ratio: Cr/Si=27.5/72.5, specific resistivity: 4,500 μΩcm);
Sample 3: Cr22Ai58N20 (target composition ratio: Cr/Si=30.0/70.0, specific resistivity: 1,400 μΩcm);
Sample 4: Cr18Ai50N32 (target composition ratio: Cr/Si=27.5/72.5, specific resistivity: 3,000 μΩcm).
As will be apparent from
A CST test was executed similarly on samples with following composition ratios obtained by suitable conditional changes.
Sample 5: Cr18Ai42N40 (ρ: 4,500 μΩcm);
Sample 6: Cr20Ai42N38 (ρ: 4,100 μΩcm);
Sample 7: Cr17Ai55N28 (ρ: 2,200 μΩcm);
Sample 8: Cr: 22, Si: 5 2, N: 26% (target composition ratio:Cr/Si=30.0/70.0, ρ: 1,200 μΩcm);
Sample 9: Cr: 23, Si: 62, N: 15% (target composition ratio:Cr/Si=27.5/72.5, ρ: 1,500 μΩcm);
Sample 10: Cr: 15, Si: 40, N: 45% (target composition ratio: Cr/Si=27.5/72.5, ρ: 6,000 μΩcm).
As a result, the samples 5, 6 and 7 corresponding to the examples of the present invention showed a sufficient resistance and a resistance change rate of 10% or less at 1.0×109 pulses.
On the other hand, the samples 8 and 9 did not have a desired resistance, and showed breakage before 1.0×109 pulses. The sample 10 had a desired resistance, but showed breakage before 1.0×109 pulses, thus indicating an insufficient durability.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2002-380582 | Dec 2002 | JP | national |
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| Number | Date | Country |
|---|---|---|
| 10-114071 | May 1998 | JP |
| Number | Date | Country | |
|---|---|---|---|
| 20040179084 A1 | Sep 2004 | US |
