Claims
- 1. A method of removal of contamination in an enclosed system by virtue of the re-circulation and sweep of a purge gas, comprising:
- (a) passing a purge gas through at least one dual rotor, multi-lobed, rotary gas compressor through an inlet thereof to the outlet thereof:
- (b) said step (a) comprising providing heat-generation to the gas through mechanical molecular agitation of gas molecules passing through at least one said rotary gas compressor;
- (c) sweeping the heated gas through the enclosed system;
- (d) said re-circulation and sweeping of the heated gas in the system breaking the forces that hold moisture and particles to chamber walls of the enclosed system, whereby moisture is desorbed into the gas and contaminant particles are entrained in the viscous gas flow;
- (e) said step of sweeping contaminants by virtue of the system having a configuration with a physical geometry and a delta change in pressure;
- (f) said step of sweeping introducing dry, dry gas into the re-circulation path while opening the viscous gas flow containing the contaminant particles to a vacuum, said physical geometry of the configuration having the heavier contaminated gas and particulates exhaust directly to the vacuum pump simply by virtue of taking the most direct straight path, said gas being exhausted directly out of the compressor into a conduit chamber where the straight path of the conduit chamber is connected to an open, vacuum isolation valve acting as a low-pressure straight-line exit for the contamination gas;
- (g) filtering the purge gas so that the purge gas which has a high velocity is circulated and cleaned of captured contamination while returning clean purge gas to a process chamber.
- 2. A method of heating gas, comprising:
- (a) passing a gas through at last one rotary gas compressor from the inlet thereof to the outlet thereof:
- (b) said step (a) comprising providing heat-generation to the gas through mechanical molecular agitation of gas molecules passing through the at least one rotary gas compressor;
- (c) said step (b) comprising controlling the following parameters of the at least one rotary gas compressor in order to enhance the heat-generation capability of the at least one rotary gas compressor: Controlling the gas pressure and molecular density inside the at least one rotary gas compressor from the inlet thereof to the outlet thereof; and controlling the amount of dwell-time of the gas molecules inside the at least one rotary gas compressor by restricting the flow of the gas at at least one of the inlet and outlet.
- 3. The method of heating gas according to claim 2, wherein said step (c) further comprises re-circulating the gas exiting from the outlet of the at least one rotary gas compressor through the at least one rotary gas compressor a plurality of times until the desired gas temperature of the gas from the outlet of the rotary gas compressor is attained.
- 4. The method of heating gas according to claim 2, wherein said step (c) further comprises minimizing the pressure differential between the inlet and the outlet of the at least one the rotary gas compressor in order to achieve heat generation with minimal energy consumption.
- 5. The method of heating gas according to claim 2, wherein said step (a) comprises operating the at least one rotary gas compressor at a pressure from between vacuum-pressure operation and positive-pressure operation.
- 6. The method of heating gas according to claim claim 2, further comprising:
- (d) directing the heated exhaust gas exiting from the outlet of the at least one gas compressor to a location where the heat from the exhaust gas is used for performing work;
- (e) returning the exhaust gas from the location where the heat performed work back to the inlet of the at least one gas compressor for re-heating the gas as it passes through the at least one gas compressor form the inlet thereof to the outlet thereof.
- 7. The method of heating gas according to claim 6, further comprising repeating said steps (d) and (e) a plurality of times, whereby the re-circulated exhaust gas is heated for each pass-through from the inlet to the outlet of the at leat one gas compressor.
- 8. A method of heating using a gas compressor system, which gas compressor system comprises a roots-type rotary gas compressor having an inlet and an outlet, said gas-compressor system comprising gas introducing means for introducing a gas, said method comprising:
- (a) introducing gas into the gas compressor system until the desired volume has been introduced;
- (b) directing the gas to the inlet of the roots-type rotary gas compressor so that the gas passes through the roots-type gas compressor;
- (c) directing the gas exiting from the outlet of the rotary roots-type gas compressor to a location utilizing the heat thereof;
- (d) said step (c) comprising preventing fluid communication between the outlet of the roots-type gas compressor and the exhaust of the gas compressor system;
- said step (b) heating the gas;
- wherein said step (c) comprises directing the gas exiting from the outlet of the rotary roots-type gas compressor along a conduit to the location where the heat from the exhaust gas is used.
- 9. The method of heating using a gas compressor system, according to claim 8, wherein said step (b) comprises directing the gas to the inlet of a dual rotor, multi-lobed, roots-type rotary compressor.
CROSS REFERENCE TO RELATED APPLICATION
This is a divisional of application Ser. No. 08/877,981 filed on Jun. 18, 1997 now U.S. Pat. No. 5,906,055 which is a continuation of application Ser. No. 08/092,778, filed on Jul. 19, 1993 now U.S. Pat. No. 5,678,759.
US Referenced Citations (2)
| Number |
Name |
Date |
Kind |
|
5341768 |
Pope |
Aug 1994 |
|
|
5439358 |
Weinbrecht |
Aug 1995 |
|
Divisions (1)
|
Number |
Date |
Country |
| Parent |
877981 |
Jun 1997 |
|
Continuations (1)
|
Number |
Date |
Country |
| Parent |
092778 |
Jul 1993 |
|