Heat insulating unit for substrate processing apparatus

Information

  • Patent Grant
  • D788705
  • Patent Number
    D788,705
  • Date Filed
    Thursday, February 18, 2016
    8 years ago
  • Date Issued
    Tuesday, June 6, 2017
    7 years ago
Abstract
Description


FIG. 1 is a front and top perspective view of a heat insulating unit for substrate processing apparatus showing my new design;



FIG. 2 is a front elevational view thereof;



FIG. 3 is a rear elevational view thereof;



FIG. 4 is a left side elevational view thereof;



FIG. 5 is a right side elevational view thereof;



FIG. 6 is a top plan view thereof; and,



FIG. 7 is a bottom plan view.


Claims
  • We claim the ornamental design for a heat insulating unit for substrate processing apparatus, as shown (and described).
Priority Claims (1)
Number Date Country Kind
2015-018407 Aug 2015 JP national
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