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3-049104 | Feb 1991 | JPX |
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3885855 | Gross | May 1975 | |
4188444 | Landau | Feb 1980 | |
4239819 | Holzl | Dec 1980 | |
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4668365 | Foster et al. | May 1987 | |
4690871 | Gordon | Sep 1987 | |
4847157 | Goodman et al. | Jul 1989 | |
5079089 | Ito et al. | Jan 1992 |
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59-143372 | Aug 1984 | JPX |
63-206333 | Aug 1988 | JPX |
64-314163 | Dec 1989 | JPX |
2233534 | Sep 1990 | JPX |
558763 | Feb 1975 | CHX |
Entry |
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Schoenholtz et al "Plasma-Enhanced Deposition of Silicon Oxynitride Films" Thin Solid Films, 148 (1987) pp. 285-291. |