Heater for semiconductor manufacturing apparatus

Information

  • Patent Grant
  • D797690
  • Patent Number
    D797,690
  • Date Filed
    Tuesday, September 15, 2015
    9 years ago
  • Date Issued
    Tuesday, September 19, 2017
    7 years ago
  • US Classifications
    Field of Search
    • US
    • D07 407
    • D07 408
    • D13 102
    • D13 103
    • D13 110
    • D13 118
    • D13 123
    • D13 154
    • D13 156
    • D13 173
    • D13 184
    • D13 199
    • D14 230
    • D14 233
    • D15 140
    • D23 314
    • D23 386
    • D23 415
    • D23 417-419
    • D23 499
    • CPC
    • H01L21/00
    • H01L21/67
    • H05B1/02
    • H05B3/26
    • H05B3/44
    • F27D11/00
    • C23C16/45
    • C23C16/46
    • C23C16/52
  • International Classifications
    • 1303
    • Term of Grant
      15Years
Abstract
Description


FIG. 1 is a top plan view of a heater for semiconductor manufacturing apparatus according to our new design;



FIG. 2 is a bottom plan view thereof;



FIG. 3 is a front view thereof;



FIG. 4 is a back view thereof;



FIG. 5 is a left side view thereof; and,



FIG. 6 is a right side view thereof.


Claims
  • The ornamental design for a heater for semiconductor manufacturing apparatus, as illustrated and described.
Priority Claims (1)
Number Date Country Kind
2015-005626 Mar 2015 JP national
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Non-Patent Literature Citations (1)
Entry
Cast Aluminum Solutions, dated Aug. 23, 2011, [online], [site visited Apr. 27, 2017]. Available from Internet, <URL: http://www.castaluminumsolutions.com/capabilities.htm>.