Heater for semiconductor thermal process

Information

  • Patent Grant
  • D795209
  • Patent Number
    D795,209
  • Date Filed
    Thursday, March 10, 2016
    8 years ago
  • Date Issued
    Tuesday, August 22, 2017
    7 years ago
  • US Classifications
    Field of Search
    • US
    • D13 179
    • D13 182
    • D15 144
    • D15 1441
    • D15 199
    • D30 151
    • D30 152
    • D11 130
    • 414 935-941
    • 414 217000
    • 414 147000
    • 392 407000
    • 392 409000
    • 392 416000
    • 392 418000
    • 219 385000
    • 219 624000
    • 219 630000
    • 219 638000
    • CPC
    • H01L21/67
    • H01L21/67011
    • H01L21/02
    • H01L21/02002
    • H01L21/67098
    • H01L21/67109
    • H01L21/00
    • H01L23/34
    • H01L23/345
    • H01L23/3677
    • C23C16/4586
    • C23C16/46
    • C23C16/466
    • C23C16/481
    • C30B13/20
    • H05B6/36
    • H05B6/362
    • H05B6/44
  • International Classifications
    • 1303
    • Term of Grant
      15Years
Abstract
Description


FIG. 1 is a front, top, right side perspective view of a heater for semiconductor thermal process showing our new design;



FIG. 2 is a front elevational view thereof;



FIG. 3 is a rear elevational view thereof;



FIG. 4 is a left side elevational view thereof;



FIG. 5 is a right side elevational view thereof;



FIG. 6 is a top plan view thereof; and,



FIG. 7 is a bottom plan view thereof.


Claims
  • The ornamental design for a heater for semiconductor thermal process, as shown and described.
Priority Claims (1)
Number Date Country Kind
2015/021290 Sep 2015 JP national
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