Heater for semiconductor thermal process

Information

  • Patent Grant
  • D793975
  • Patent Number
    D793,975
  • Date Filed
    Thursday, March 10, 2016
    8 years ago
  • Date Issued
    Tuesday, August 8, 2017
    7 years ago
  • US Classifications
    Field of Search
    • US
    • D13 179
    • D13 182
    • D15 144
    • D15 1441
    • D15 199
    • D30 151
    • D30 152
    • D11 130
    • 414 935-941
    • 414 217000
    • 414 147000
    • 392 407000
    • 392 409000
    • 392 416000
    • 392 418000
    • 219 385000
    • 219 624000
    • 219 630000
    • 219 638000
    • CPC
    • H01L21/67
    • H01L21/67011
    • H01L21/02
    • H01L21/02002
    • H01L21/67098
    • H01L21/67109
    • H01L21/00
    • H01L23/34
    • H01L23/345
    • H01L23/3677
    • C23C16/4586
    • C23C16/46
    • C23C16/466
    • C23C16/481
    • C30B13/20
    • H05B6/36
    • H05B6/362
    • H05B6/44
  • International Classifications
    • 1303
    • Term of Grant
      15Years
Abstract
Description


FIG. 1 is a front, bottom, right side perspective view of a heater for semiconductor thermal process showing our new design;



FIG. 2 is a front elevational view thereof;



FIG. 3 is a rear elevational view thereof;



FIG. 4 is a left side elevational view thereof;



FIG. 5 is a right side elevational view thereof;



FIG. 6 is a top plan view thereof; and,



FIG. 7 is a bottom plan view thereof.


The dashed-dot-dashed lines represent the boundary lines of the claimed design.


The broken lines shown in the drawings represent portions of the heater for semiconductor thermal process that form no part of the claimed design.


Claims
  • The ornamental design for a heater for semiconductor thermal process, as shown and described.
Priority Claims (1)
Number Date Country Kind
2015-021292 Sep 2015 JP national
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