The dashed-dot-dashed lines represent the boundary lines of the claimed design.
The broken lines shown in the drawings represent portions of the heater for semiconductor thermal process that form no part of the claimed design.
The dashed-dot-dashed lines represent the boundary lines of the claimed design.
The broken lines shown in the drawings represent portions of the heater for semiconductor thermal process that form no part of the claimed design.
Number | Date | Country | Kind |
---|---|---|---|
2015-021292 | Sep 2015 | JP | national |
Number | Name | Date | Kind |
---|---|---|---|
1140145 | Finger | May 1915 | A |
2173217 | Thomsen | Sep 1939 | A |
2205496 | Schneider | Jun 1940 | A |
2610884 | Enderle | Sep 1952 | A |
3484070 | Zukowska | Dec 1969 | A |
D244903 | Hildebrand | Jul 1977 | S |
5324920 | Nakao | Jun 1994 | A |
D404016 | Ishii | Jan 1999 | S |
D405428 | Ishii | Feb 1999 | S |
D410438 | Ishii | Jun 1999 | S |
6023091 | Koch | Feb 2000 | A |
D424527 | Ishii | May 2000 | S |
D425871 | Ishii | May 2000 | S |
D426521 | Ishii | Jun 2000 | S |
D428858 | Ishii | Aug 2000 | S |
D429224 | Ishii | Aug 2000 | S |
D450801 | Fundak | Nov 2001 | S |
D484283 | Lam | Dec 2003 | S |
6737613 | Yamaguchi | May 2004 | B2 |
D502631 | Burke | Mar 2005 | S |
7027722 | Uemori | Apr 2006 | B2 |
7350756 | Woltmann | Apr 2008 | B2 |
D574166 | Kaisler | Aug 2008 | S |
D579885 | Sato | Nov 2008 | S |
D703578 | Madrid | Apr 2014 | S |
D706161 | Madrid | Jun 2014 | S |
D711771 | Madrid | Aug 2014 | S |
D739293 | Penrod | Sep 2015 | S |