Number | Name | Date | Kind |
---|---|---|---|
3496336 | Hingorany et al. | Feb 1970 | |
3568127 | Aimi | Mar 1971 | |
3978315 | Martin et al. | Aug 1976 | |
4100524 | Kirsch | Jul 1978 | |
4104421 | Maher et al. | Aug 1978 | |
4203025 | Nakatani et al. | May 1980 | |
4259564 | Ohkubo et al. | Mar 1981 | |
4261764 | Narayan | Apr 1981 | |
4298786 | Marciniec | Nov 1981 | |
4314230 | Cardinal et al. | Feb 1982 | |
4378489 | Chabinsky et al. | Mar 1983 | |
4464420 | Taguchi et al. | Aug 1984 | |
4471005 | Cheng et al. | Sep 1984 | |
4517449 | Chazan et al. | May 1985 | |
4548662 | Chazan et al. | Oct 1985 | |
4659912 | Derbyshire | Apr 1987 | |
4701427 | Boecker et al. | Oct 1987 | |
4707909 | Blanchard | Nov 1987 | |
4766409 | Mandai | Aug 1988 | |
4772488 | Pinch et al. | Sep 1988 | |
4777022 | Boldfish et al. | Oct 1988 | |
4777060 | Mayr et al. | Oct 1988 | |
4778649 | Niino et al. | Oct 1988 | |
4780248 | Donohue et al. | Oct 1988 | |
4785279 | Wetzel | Nov 1988 | |
4788045 | Colombet et al. | Nov 1988 | |
4788523 | Robbins | Nov 1988 | |
4791078 | Saito et al. | Dec 1988 | |
4799983 | Desai | Jan 1989 | |
4806739 | Kojima et al. | Feb 1989 | |
4814586 | Grise | Mar 1989 | |
4819128 | Florian et al. | Apr 1989 | |
4822983 | Bremner et al. | Apr 1989 | |
4830876 | Dietrich et al. | May 1989 | |
4839227 | Hoopman | Jun 1989 | |
4845839 | Brown | Jul 1989 | |
4848348 | Craighead | Jul 1989 | |
4849251 | Tanaka | Jul 1989 | |
4879653 | Ogata et al. | Dec 1988 | |
4883947 | Murase et al. | Nov 1989 | |
4885661 | Yokotani et al. | Dec 1989 | |
4889961 | Carlson | Dec 1989 | |
4889974 | Auding et al. | Dec 1989 | |
4895771 | Souter et al. | Jan 1990 | |
4899126 | Yamada | Feb 1990 | |
4904526 | Koskenmaki | Feb 1990 | |
4908599 | Breen et al. | Mar 1990 | |
4914417 | Matsui et al. | Apr 1990 | |
4919744 | Newman | Apr 1990 | |
4930045 | Carlson et al. | May 1990 | |
4985176 | Watanabe et al. | Jan 1991 | |
4987108 | Takagi et al. | Jan 1991 | |
5060671 | Counts et al. | Oct 1991 | |
5093894 | Deevi et al. | Mar 1992 | |
5095921 | Losee et al. | Mar 1992 | |
5164699 | Smith et al. | Nov 1992 | |
5176771 | Bravo et al. | Jan 1993 | |
5199791 | Kasanami et al. | Apr 1993 | |
5268558 | Youssef et al. | Dec 1993 |
Number | Date | Country |
---|---|---|
0160761 | Nov 1985 | EPX |
0438862 | Jul 1991 | EPX |
64-17386 | Jan 1989 | JPX |
2148079 | May 1985 | GBX |
2148676 | May 1985 | GBX |
2168381 | Jun 1986 | GBX |
Entry |
---|
J. B. Blum, "Sol-Gel Processing of Ceramics for Microelectronic Applications," International Journal for Hybrid Microelectronics, vol. 8, No. 3, Sep. 1985. |