Hexcell channel arrangement for use in a boat for a deposition apparatus

Information

  • Patent Grant
  • D760180
  • Patent Number
    D760,180
  • Date Filed
    Friday, February 21, 2014
    10 years ago
  • Date Issued
    Tuesday, June 28, 2016
    8 years ago
  • US Classifications
    Field of Search
    • US
    • D13 182
    • 118 500000
    • 118 728000
    • 118 729000
    • 156 345530
    • 279 128000
    • 361 234000
    • 451 287000
    • 451 288000
    • 451 289000
    • CPC
    • B05B13/0285
    • B05B13/0292
    • B05B13/0221
    • B05B13/0228
    • B05B13/0235
    • B05B13/0242
    • C23C14/50
    • C23C14/505
    • C23C16/4585
    • C23C16/4587
    • C23C16/4588
    • C23C16/4581
    • C23C16/4582
    • C23C16/4584
    • C23C16/4583
    • B05C13/00
    • B05C13/02
    • B05C13/025
    • H01L21/6836
    • H01L21/6838
    • B24B37/27
    • B24B37/30
    • B24B37/26
    • B24B37/04
    • B24B53/12
    • B24B53/14
  • International Classifications
    • 1303
    • Term of Grant
      14Years
Abstract
Description


FIG. 1 is a perspective view of a hexcell channel arrangement for use in a boat for a deposition apparatus showing our new design;



FIG. 2 is a top view thereof;



FIG. 3 is a cross sectional view thereof, taken along line 3-3 of FIG. 2;



FIG. 4 is a cross sectional view thereof, taken along line 4-4 of FIG. 2; and,



FIG. 5 is a bottom view thereof.


The dash-dot-dashed broken lines represent the boundary lines of the claimed design and the even dashed broken lines represent unclaimed subject matter that forms no part of the claimed design. All surfaces not shown form no part of the claimed design.


Claims
  • The ornamental design for a hexcell channel arrangement for use in a boat for a deposition apparatus, as shown and described.
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