This disclosure, in general, relates to integrated circuit sensors operating at high data rates, such as used in DNA sequencing technologies, and configurations of transmitters on integrated circuits to support such data rates.
A variety of types of sensors have been used in the detection of chemical and/or biological processes. One type is a chemically-sensitive field effect transistor (chemFET). A chemFET includes a gate, a source, a drain separated by a channel region, and a sensitive area, such as a surface on the gate adapted for contact with a fluid, coupled to the channel region. The operation of the chemFET is based on the modulation of channel conductance caused by changes, such as changes in voltage, at the sensitive area which can be due to a chemical and/or biological reaction occurring in the fluid, for example. The modulation of the channel conductance can be sensed to detect and/or determine characteristics of the chemical and/or biological reaction that cause changes at the sensitive area. One way to measure the channel conductance is to apply appropriate bias voltages to the source and drain, and measure a resulting current flowing through the chemFET. A method of measuring channel conductance can include driving a known current through the chemFET and measuring a resulting voltage at the source or drain.
An ion-sensitive field effect transistor (ISFET) is a type of chemFET that includes an ion-sensitive layer at the sensitive area. The presence of ions in a fluid containing an analyte alters the surface potential at the interface between the ion-sensitive layer and the analyte fluid which can be due to the protonation or deprotonation of surface charge groups caused by the ions present in the fluid (i.e. an analyte solution). The change in surface potential at the sensitive area of the ISFET affects the gate voltage of the device, and thereby channel conductance, which change can be measured to indicate the presence and/or concentration of ions within the solution. Arrays of ISFETs can be used for monitoring chemical and/or biological reactions, such as DNA sequencing reactions based on the detection of ions present, generated, or used during the reactions. (See, for example, U.S. Pat. No. 7,948,015 to Rothberg et al., filed Dec. 14, 2007, which is incorporated by reference herein in its entirety.) More generally, large arrays of chemFETs or other types of sensors and detectors can be employed to detect and measure static and/or dynamic amounts or concentrations of a variety of analytes in a variety of processes. For example, the processes can be chemical and/or biological reactions, cell or tissue cultures or monitoring neural activity, nucleic acid sequencing, etc.
Many transmitters for high-speed links to connect with a reader capable of receiving the data can be used to provide high data rates sourced from a single sensor chip comprising large arrays of chemFETs using. However, difficulties can arise in implementation of large numbers of transmitters on a single chip, so that data integrity may be compromised or the data rates desired are not achieved. It may be desirable to provide a technology supporting very high data rates for use in integrated circuits comprising large high-speed data sources, such as the ISFET arrays and other sensor technologies used in DNA sequencing.
Technology is described herein which can improve the integrity of data transmission from a device that includes a data source on a substrate that produces data at high data rate, such as a large array of ISFETs in a DNA sequencing sensor chip.
To support high data rate in one aspect of the technology described, a plurality of transmitters may be disposed in pairs around the substrate, and configured to receive streams of data from the data source in parallel. The transmitters in the plurality of transmitters are configured to transmit the corresponding streams of data on respective output pads using a corresponding local transmit clock. The local transmit clocks are produced using a plurality of clock multipliers, such as phase locked loops, placed on the substrate and linked across short distances to the corresponding pair of transmitters adjacent to the clock multiplier. A reference clock distribution circuit may be disposed on the substrate, to distribute a reference clock having a reference frequency to the plurality of clock multipliers. Clock multipliers in the plurality provide the corresponding local transmit clocks with a transmit clock frequency that may be a multiple of the reference clock frequency.
The clock multipliers can comprise phase locked loops with low pass filters, configured to reject jitter in the reference clock. In one example, the plurality of transmitters includes at least 20 transmitters capable of transmission at data rates greater than 1 Gb per second, and such transmitters are configured in at least 10 pairs. In another example, an integrated circuit includes 24 transmitters capable of transmission of data rates greater than 5 Gb per second, for a total throughput of 120 Gb per second or higher.
In another aspect of the technology described herein, an integrated circuit employing the plurality of transmitters can comprise a plurality of power domains. A clock multiplier on the integrated circuit may be deployed in a power domain that may be separate from the transmitter to which it is coupled. The transmitter may be deployed in a power domain separate from the data source on the integrated circuit. In embodiments in which the data source includes an array of analog sensors, such as ISFETs, the data source can include an analog power domain and a digital power domain. Thus, one aspect of the technology described herein includes a clock multiplier in an individual power domain on an integrated circuit having a clock signal line connected to one or more transmitters in a power domain, or power domains, separate from that of the clock multiplier. As described above, in one embodiment, the integrated circuit includes a plurality of pairs of transmitters with one clock multiplier per pair. In other embodiments, one clock multiplier in an individual power domain may provide a transmit clock to more than two transmitters in a separate transmitter power domain.
In embodiments, all the clock multipliers in a plurality of clock multipliers may be deployed in individual power domains, which are separate from the plurality of power domains used for the sensor array, the transmitters and other peripheral circuitry on the substrate. The individual power domains for the clock multipliers can have separate ground and power pads on the chip, for connection to external power and ground sources.
The power pads and ground pads used for the plurality of power domains may be arranged on the device in a repeating order, in support of the plurality of transmitter pairs and clock multipliers.
A transmitter pair configuration is described for an integrated circuit. The transmitter pair configuration may be deployed on an integrated circuit that comprises a substrate and reference clock distribution circuitry. A plurality of pairs of transmitters may be disposed on the substrate, where each pair in the plurality comprises a first transmitter and a second transmitter disposed on the substrate in a transmitter power domain. Also, each pair of transmitters includes a clock multiplier disposed between the first and second transmitters. The clock multiplier in each pair is connected to the reference clock distribution circuitry which produces a local transmit clock for the pair of transmitters. The clock multiplier may be disposed on the substrate in an individual power domain, separate from the transmitter power domain.
Other aspects and advantages of the present technology may be seen on review of the drawings, the detailed description and the claims, which follow.
A detailed description of embodiments of the sensor technology and components thereof is provided with reference to
As shown in
Microwell array 107 includes an array of reaction regions which are operationally associated with corresponding sensors in the sensor array. For example, each reaction region may be coupled to one sensor or more than one sensor suitable for detecting an analyte or reaction property of interest within that reaction region. Microwell array 107 may be integrated in integrated circuit device 100, so that microwell array 107 and the sensor array are part of a single device or chip. Flow cell 101 can have a variety of configurations for controlling the path and flow rate of reagents 114 over microwell array 107.
Array controller 124 provides bias voltages and timing and control signals to integrated circuit device 100 for reading the sensors of the sensor array. Array controller 124 also provides a reference bias voltage the reference electrode 108 to bias reagents 114 flowing over microwell array 107.
Array controller 124 may also include a reader to collect output signals from the sensors of the sensor array through output ports on integrated circuit device 100 via bus 127, which comprises a plurality of high-speed serial channels for example, carrying sample data at speeds on the order of 100 gigabits per second or greater. In one example, twenty four serial channels, each of which nominally operates at 5 Gb per second, are implemented in the bus 127. A reference clock 128 may be coupled with the device 100 to provide a stable reference clock for use in controlling high-speed serial channels. In embodiments described herein, the reference clock 128 can operate at relatively low frequencies, on the order of 100 MHz or 200 MHz. Alternatively, the reference clock may operate at data rates desired to support the high-speed serial channels. Array controller 124 can include a data processing system, with a reader board including a set of field programmable gate arrays (FPGAs), having a plurality of receivers in support of the transmitters on the device 100. Array controller 124 can include memory for storage of data and software applications, a processor for accessing data and executing applications, and components that facilitate communication with the various components of the system in
The values of the output signals of the sensors can indicate physical and/or chemical parameters of one or more reactions taking place in the corresponding reaction regions in microwell array 107. For example, in some exemplary embodiments, the values of the output signals may be processed using the techniques disclosed in Rearick et al., U.S. patent application Ser. No. 13/339,846, filed Dec. 29, 2011, and in Hubbell, U.S. patent application Ser. No. 13/339,753, filed Dec. 29, 2011, which are all incorporated by reference herein in their entirety. User interface 129 can display information about flow cell 101 and the output signals received from sensors in the sensor array on integrated circuit device 100. User interface 129 can also display instrument settings and controls, and allow a user to enter or set instrument settings and controls.
Array controller 124 can collect and analyze the output signals of the sensors related to chemical and/or biological reactions occurring in response to the delivery of reagents 114. The system can also monitor and control the temperature of integrated circuit device 100 so that reactions take place and measurements are made at a known predetermined temperature. The system may be configured to let a single fluid or reagent contact reference electrode 108 throughout an entire multi-step reaction during operation. Valve 112 may be shut to prevent any wash solution 110 from flowing into passage 109 as reagents 114 are flowing. Although the flow of wash solution may be stopped, there can still be uninterrupted fluid and electrical communication between reference electrode 108, passage 109, and microwell array 107. The distance between reference electrode 108 and the junction between passages 109 and 111 may be selected so that little or no amount of the reagents flowing in passage 109, which may diffuse into passage 111, will reach reference electrode 108. In some embodiments, wash solution 110 may be selected as being in continuous contact with reference electrode 108, which may be especially useful for multi-step reactions using frequent wash steps.
The integrated circuit device 200 includes a large number of serial ports supporting connection to a massively parallel reader 211 via a set of serial channels 210. The reagent flow 206, coupled with a large array of ISFETs, presents a complex electrical and mechanical environment in which such a massively parallel communication system can operate with high integrity.
In some embodiments, other types of sensor arrays may be used in systems like that of
Sensor 350 is representative of the sensors in the sensor array. In the illustrated example, sensor 350 is a chemically-sensitive field effect transistor (chemFET), more specifically an ion-sensitive field effect transistor (ISFET) in this example. Sensor 350 includes floating gate structure 318 having sensor plate 320 coupled to reaction region 301 by electrode 307 which can have a surface adapted for contact with an electrolyte (an ionic conducting liquid). Sensor plate 320 is the uppermost floating gate conductor in floating gate structure 318. In the illustrated example, floating gate structure 318 includes multiple patterned layers of conductive material within layers of dielectric material 319. Sensor 350 also includes conduction terminals including source/drain region 321 and source/drain region 322 within semiconductor substrate 354. Source/drain region 321 and source/drain region 322 comprise doped semiconductor material having a conductivity type different from the conductivity type of substrate 354. For example, source/drain region 321 and source/drain region 322 can comprise doped P-type semiconductor material, and the substrate can comprise doped N-type semiconductor material. Channel region 323 separates source/drain region 321 and source/drain region 322. Floating gate structure 318 overlies channel region 323, and is separated from substrate 354 by gate dielectric 352. Gate dielectric may be silicon dioxide, for example. Alternatively, other suitable dielectrics may be used for gate dielectric 352 such as, for example materials with higher dielectric constants, silicon carbide (SiC), silicon nitride (Si3N4), Oxynitride, aluminum nitride (AlN), hafnium dioxide (HfO2), tin oxide (SnO2), cesium oxide (CeO2), titanium oxide (TiO2), tungsten oxide (WO3), aluminum oxide (Al2O3), lanthanum oxide (La2O3), gadolinium oxide and others, and any combination thereof.
In some embodiments, sensor 350 includes electrode 307 overlying and in communication with an uppermost floating gate conductor in the plurality of floating gate conductors. Upper surface 308 of electrode 307 defines a bottom surface of a reaction region for the sensor. Upper surface 308 of electrode 307 can act as the sensor surface of the sensitive area for sensor 350. Electrode 307 can comprise one or more of a variety of different materials to facilitate sensitivity to particular ions. For example, silicon nitride or silicon oxynitride, as well as metal oxides such as silicon oxide, aluminum or tantalum oxides, generally provide sensitivity to hydrogen ions, whereas sensing materials comprising polyvinyl chloride containing valinomycin provide sensitivity to potassium ions. Materials sensitive to other ions such as sodium, silver, iron, bromine, iodine, calcium, hydroxide, phosphate, and nitrate can also be used. In the illustrated example, electrode 307 is shown as a single layer of material. More generally, the electrically electrode can comprise one or more layers of a variety of electrically conductive materials, such as metals or ceramics, or any other suitable conductive material or mixture of materials, depending upon the implementation. The conductive material may be any suitable metallic material or alloy thereof, or may be any suitable ceramic material, or a combination thereof. Examples of metallic materials include aluminum, copper, nickel, titanium, silver, gold, platinum, hafnium, lanthanum, tantalum, tungsten, iridium, zirconium, palladium, or any suitable material or combination thereof. Examples of ceramic materials include one of titanium nitride, titanium aluminum nitride, titanium oxynitride, tantalum nitride, or any suitable combination thereof. In some embodiments, an additional sensing material (not shown) is deposited on upper surface 308 of electrode 307. In some embodiments, the electrode may be titanium nitride, and titanium oxide or titanium oxynitride may be grown on the upper surface 308 during manufacturing and/or during exposure to fluids during use. Whether an oxide is formed on the upper surface depends on the conductive material used, the manufacturing processes performed, and/or the conditions under which the sensor is operated. The electrode may be formed in various shapes (width, height, etc.) depending on the materials and/or etch techniques and/or fabrication processes etc. used during the manufacture process.
In some embodiments, reactants, wash solutions, and other reagents can move in and out of reaction region 301 by diffusion mechanism. Sensor 350 is responsive to (and can generate an output signal related to) charge 324 proximate to electrode 307. For example, when the sensor is coupled to an electrolyte, the sensor may be responsive to an electrolytic potential at the sensor surface. The responsiveness of the sensor can relate to the amount of charge that is present proximate to the electrode 307. The presence of charge 324 in an analyte solution can alter the surface potential at the interface between the analyte solution and upper surface 308 of electrode 307. For example, the surface potential may be altered by protonation or deprotonation of surface groups caused by the ions present in the analyte solution. In another example, the charge of surface functionality or absorbed chemical species may be altered by analytes in solution. Changes in the amount of charge present can cause changes in the voltage on floating gate structure 318, which in turn can cause an effective change in the threshold voltage of the transistor of sensor 350. The potential at the interface may be measured by measuring the current in channel region 323 between source region 321 and drain region 322. As a result, sensor 350 may be used directly to provide a current-based output signal on an array line connected to source region 321 or drain region 322, or indirectly with additional circuitry to provide a voltage-based output signal. Charge may be more highly concentrated near the bottom of reaction region 301. Accordingly, in some embodiments variations in the dimensions of the electrode can have an effect on the amplitude of the signal detected in response to charge 324.
In some embodiments, reactions carried out in reaction region 301 may be analytical reactions to identify or determine characteristics or properties of an analyte of interest. Such reactions can generate directly or indirectly products/byproducts that affect the amount of charge adjacent to electrode 307. If such products/byproducts are produced in small amounts or rapidly decay or react with other constituents, multiple copies of the same analyte may be analyzed in reaction region 301 at the same time in order to increase the output signal generated. In some embodiments, multiple copies of an analyte may be attached to solid phase support 312, either before or after being deposited into reaction region 301. Solid phase support 312 may be a particle, a microparticle, a nanoparticle. In some embodiments, the analyte may be attached to a bead which may be solid or porous and can further comprise a gel, or the like, or any other suitable solid support that may be introduced to a reaction region. In some embodiments, copies of an analyte may be located in a solution proximal to a sensor of a reaction region. Alternatively, copies of an analyte can bind directly to the surface of the sensor to capture agents includes the material on the surface or if there are pores on the surface (for example, copies of an analyte can bind directly to electrode 307). The solid phase support may be of varied size, for example, in a range of 100 nm to 10 micrometers. Further, the solid support may be positioned in the opening at various places. For a nucleic acid analyte, multiple, connected copies may be made by rolling circle amplification (RCA), exponential RCA, polymerase chain reaction (PCR) or like techniques, to produce an amplicon without the need of a solid support.
In various exemplary embodiments, the methods, and systems described herein can advantageously be used to process and/or analyze data and signals obtained from a biological reaction, including amplification or electronic or charged-based nucleic acid sequencing. In electronic or charged-based sequencing (such as pH-based sequencing), a nucleotide incorporation event may be determined by detecting ions (e.g., hydrogen ions) that are generated as natural products of polymerase-catalyzed nucleotide extension reactions. The detection of a nucleotide incorporation event may be used to sequence a sample or template nucleic acid, which may be a fragment of a nucleic acid sequence of interest, for example, and which may be directly or indirectly attached as a clonal population to a solid support. In some embodiments, the solid support can be a particle or a microparticle. In some embodiments, the nucleic acid sequence can be attached to a bead. The sample or template nucleic acid may be operably associated to a primer and polymerase and may be subjected to repeated cycles or “flows” of deoxynucleoside triphosphate (“dNTP”) addition (which may be referred to herein as “nucleotide flows”) from which nucleotide incorporations can result and washing. The primer may be annealed to the sample or template so that the primer's 3′ end may be extended by a polymerase whenever dNTPs complementary to the next base in the template are added. Based on the known sequence of nucleotide flows and on measured output signals of the sensors indicative of ion concentration during each nucleotide flow, the identity of the type, sequence and number of nucleotide(s) associated with a sample nucleic acid present in a reaction region coupled to a sensor may be determined.
An upper set of analog-to-digital converter (ADC) circuits 403U is coupled to the upper set of column bias/select circuits 402U. An upper register array 404U is coupled to the upper set of analog-to-digital converter circuits 403U. The upper register array 404U may be configured to provide a plurality of streams of digital data through serializers (e.g. 511, 512) to corresponding transmitters (e.g. 405-23, 405-22). Each of the transmitters is coupled to a corresponding pair (a pair for D[23], a pair for D[22]) of output pads, which in turn are connected to transmission lines (not shown).
Likewise, a lower set of analog-to-digital converter circuits 403L is coupled to the lower set of column bias and select circuits 402L. A lower register array 404L is coupled to the lower set of analog-to-digital converter circuits 403L. The lower register array 404L may be configured to provide a plurality of streams of digital data through serializers (e.g. 501, 502) to corresponding transmitters (e.g. 405-0, 405-1). Each of the transmitters is coupled to a corresponding pair (D[0], D[1]) of output pads, which in turn are connected to transmission lines (not shown).
The configurations described herein support a device having a large number of gigabit per second transmitters, such as at least 20 transmitters capable of transmission at a data rate greater than 1 Gb per second, and configured in at least 10 pairs. Large numbers of gigabit per second transmitters present a context in which a class of implementation problems arises which not apparent in configurations with small numbers of transmitters. For one example, the device includes 24 transmitters capable of transmitting data at 5 Gb per second each, or faster, supporting throughput from a high speed data source of 120 Gb per second or more.
Supporting peripheral circuitry including a sequencer 532, a digital-to-analog converter 533, a gray code generator 534, and bias circuitry 535 are coupled to the upper circuitry. Also, supporting circuitry including a sequencer 522, a digital-to-analog converter 523, a gray code generator 524, and bias circuitry 525 are coupled to the lower circuitry. The chip includes a serial peripheral interface (SPI) control block 540 to support the serial ports on the device, and a fuse array 541 used in configuration of the device.
In one example operating technique, sequencer logic 522, 532 causes the circuitry to perform a frame sensing sequence. In a frame sequencing sequence, a row of ISFETs in each of the upper and lower halves of the array may be selected and biased using the upper/lower column bias/select circuits 402U/402L so that a current that may be a function of the charge in that corresponding sensor well may be produced on each column line. The upper/lower analog-to-digital converter circuits 403U/403L receive a ramp signal from the digital-to-analog converter 533, 523, and produce an output signal when the current on the corresponding column line matches the level of the ramp signal. The gray code generator 524, 534 may be sampled in response to the output signal, and the results are stored in the upper/lower register array 404U/404L. Data in the register array 404U/404L are assembled into packets, and applied in a plurality of digital data streams to the transmitters on the chip.
The illustrated part of the circuitry in
Each phase locked loop/low pass filter, 406-0, 406-11, is coupled with corresponding phase locked loop control block 503, 513 which stores parameters used to control and calibrate phase locked loop. This pattern may be repeated across the 24 transmitters on the chip, so that there are 12 phase locked loop blocks, and 24 transmitters. The transmitters are grouped into pairs which are coupled to individual phase locked loops. The phase locked loops are disposed on the substrate between the transmitters, so that the transmission distance from the phase locked loop to the transmitter using the clock produced in the phase locked loop may be small.
As illustrated, each of the phase locked loops 406-0, 406-11 is coupled to an individual power pad VDDP and an individual ground pad GNDP. Also, the individual power pad VDDP and the individual ground pad GNDP for each phase locked loop are disposed on the chip adjacent the phase locked loop, and between the output pads for the transmitter on the left, and the output pads for the transmitter on the right in the corresponding transmitter pair.
The individual power pad VDDP and the individual ground pad GNDP are connected to an off-chip voltage supply, which may be configured with bypass capacitors and other circuitry, to create a low noise power configuration for the phase locked loop circuits, and to reduce coupling of noise between the high-frequency phase locked loop circuits and other circuits on the substrate 400. A low-speed reference clock (not shown, see
A duty cycle correction circuit, such as that used for element 993, or used in the DCC chain 571 described with reference to
Three power domains are implemented in the transmitter pair configuration shown in
The reference clock RCLK is coupled to the phase locked loop from clock distribution circuitry, like that described above. A system clock SCLK is coupled to the transmitter control blocks 620, 621, and PLL control block 622. The system clock can operate nominally at the same frequency as the reference clock in some embodiments, but may be a different frequency. The phase locked loop 612 operates as a clock multiplier, producing a high speed, local transmit clock on line 650.
In one example, the system clock and reference clock operate at 125 MHz. The high-speed, local transmit clock may be produced at 2.5 GHz (20× multiplication). The transmitters in this example transmit on both the rising and falling edges of the local transmit clock, resulting in a transmission rate of 5 Gb per second. In a chip having 24 transmitters operating at 5 Gb per second, a throughput of 120 Gb per second may be achieved.
High data integrity of the transmitted data is supported using techniques including distribution of a low-speed reference clock, the configuration of the phase locked loops in individual power domains, the placement of the phase locked loops between corresponding pairs of transmitters, and local use of the locally produced high-speed transmit clocks.
The differential clock on lines 720 may be supplied to a synchronizer circuit (sync) 701, a serializer circuit (serializer) 702, a pre-driver 703, and an off-chip driver 704. The output of the off-chip driver is connected to the pads OUTP and OUTN, which are in turn connected to a transmission line. The synchronizer circuit 701 also receives the system clock (sys clk), and produces a synchronized system clock for the serializer 702. The data stream from the register arrays are applied in this example in 20 bit packets to the serializer 702. The output of the serializer may be applied to the pre-driver 703, and then off chip via the off-chip driver 704.
A variety of control parameters are coupled to the various blocks in the phase locked loop 800. Parameters “fast, lock, slow” are provided from the phase and frequency detector 801 to control circuitry. Charge pump bias parameters bias_CP<3:0> are applied to the charge pump 802. Low pass filter parameters C1<5:0> and C2<4:0> are applied to the low pass filter 803. VCO control parameters band_ctl<3:0> are applied to the ring VCO 804. The phase locked loop may be digitally controlled using basic phase locked loop management for calibration and configuration, driven by link control logic on the reader board in one example. In other embodiments, phase locked loop calibration and configuration may be locally driven, or a combination of local and remote operations may be utilized.
The low pass filter in the phase locked loop may be configured with a transfer function that rejects jitter in the reference clock. This may be implemented in the charge pump and filter circuitry in the loop as it operates on the output of the phase and frequency detector nominally at the frequency of the reference clock.
The analog power domain includes power pads labeled GNDA, VDDA on each of the four corners of the substrate 400. The analog power domain includes a power bus including a trace 411V connected to the VDDA power pads (e.g. 420V in the lower left), and a trace 411G connected to the GNDA power pads (e.g. 420G in the lower left). Traces 411V and 411G are configured on the device as the inside power traces, and surround the analog core of the device, which includes the sensor array 401, and portions of the other circuitry.
The digital power domain includes power pads labeled GNDD, VDDD distributed in pairs around the perimeter of the chip, including one pair between each transmitter. The digital power domain includes a power bus including a trace 412V connected to the VDDD power pads, and a trace 412G connected to the GNDD power pads. The traces 412V and 412G are placed on the device just outside the analog power domain traces 411V and 411G, and are placed adjacent digital circuitry surrounding the analog core of the chip.
The transmitter power domain includes power pads labeled GNDO, VDDO distributed in pairs around the perimeter of the chip, with one pair for every transmitter. Each pair of transmitter power domain power pads includes a GNDO pad on one side of the corresponding transmitter, and a VDDO pad on the opposite side of the corresponding transmitter. The transmitter power domain includes a power bus including trace 413V connected to the VDDO power pads and a trace 413G connected to the GNDO power pads. The traces 413V and 413G are configured on the device just outside the digital power domain traces 412V and 412G, and are placed for distribution of power supply voltages to the transmitters on the perimeter of the chip.
In this example, each phase locked loop may be disposed in an individual power domain. Thus, for the chip including 12 phase locked loops (or other clock multipliers) coupled with 24 transmitters, there are 12 clock multiplier power domains. Each local clock multiplier power domain includes a pair of power pads labeled GNDP, VDDP in the figure. The power pads GNDP and VDDP are disposed between the output pads for the transmitters. Thus, the power pads GNDP and VPPD for the phase locked loop 406-0 are disposed between the output pads for serial channel D[0] and the output pads for serial channel D[1]. Each local clock multiplier power domain includes a power trace and a ground trace confined to the phase locked loop circuitry. Thus, phase locked loop 406-0 includes a power trace 414V and a ground trace 414G. Likewise, phase locked loop 406-7 in
As may be seen from
The circuits in each power domain, in addition to having separate power traces, and separate power and ground pads, are isolated electrically from one another. This isolation may be implemented using deep n-well technology for example, in which the active regions of the circuitry are implemented within one or more doped wells separated from the bulk substrate by a deep n-well. The deep n-well may be biased using a selected power supply voltage so that it remains reversed biased relative to the substrate and relative to the active region during operation. In this manner, noise produced in the ground and power circuitry is not coupled directly into the circuitry of other power domains via the substrate.
Some or all of the power domains may be isolated using other technologies, such as by formation of the active regions in semiconductor layers deposited over layers of insulating material, so the insulating material electrically separates the active regions from the substrate.
The pattern of power pads and output pads includes a set of 14 pads for each transmitter pair disposed around the substrate in a repeating sequence. The order from right to left for the set of 14 pads for the transmitter pair including transmitters 405-2 and 405-3, and phase locked loop 406-1 of the pads in this example is as follows: transmitter power domain ground pad GNDO, output pad pair D[2], transmitter power domain power pad VDDO, digital power domain power pad VDDD, digital power domain ground pad GNDD, local clock multiplier power pad VDDP, local clock multiplier ground pad GNDP, transmitter power domain ground pad GNDO, output pad pair D[3], transmitter power domain power pad VDDO, digital power domain power pad VDDD and digital power domain ground pad GNDD.
As mentioned above, in some embodiments one clock multiplier may be associated with only one transmitter, or with groups of more than two transmitters, as suits a particular need. One clock multiplier may be configured to provide a transmit clock to one or more transmitters, where the one or more transmitters are in a separate power domain than the power domain of the clock multiplier. A configuration in transmitter pairs can provide an advantage in that the length of a transmission line carrying the transmit clock from the clock multiplier to the adjacent transmitters in the transmitter pair may be configured locally and have short and uniform transmission paths, without traversing circuitry other than the clock multiplier and the connect transmitter.
Referring to
Referring to
ESD protection circuits 910, 911, 912, and 913 are connected on one terminal to the power trace 411V connected to VDDA for the analog power domain. Circuit 910 is connected on its opposing terminal to the power trace 412V connected to VDDD in the digital power domain. Circuit 911 is connected on its opposing terminal to the power trace 413V connected to VDDO in the transmitter power domain.
A similar pattern may be distributed around the chip, so that circuit 912 is connected on its opposing terminal to the power trace 413V connected to VDDO in the transmitter power domain. Circuit 913 is connected on its opposing terminal to the power trace 412V connected to VDDD in the digital power domain.
A second tier of ESD circuits includes circuits 914, 915, 916 and 917, connected on one terminal to the analog ground trace 411G which is connected to the analog ground pad GNDA for the analog power domain. Circuit 914 is connected on its opposing terminal to the ground trace 412G connected to GNDD in the digital power domain. Circuit 915 may be connected on its opposing terminal to the ground trace 413G connected to GNDO in the transmitter power domain. A similar pattern may be distributed around the chip, so that circuit 916 is connected on its opposing terminal to the ground trace 413G connected to GNDO in the transmitter power domain. Circuit 917 is connected on its opposing terminal to the ground trace 412G connected to GNDD in the digital power domain.
The third tier the ESD circuits include circuits 918 and 919. Circuits 918, 919 each include one terminal coupled to the power trace 412V that is connected to VDDD in the digital power domain. Both of the circuits 918, 919 have opposing terminals connected to the power trace 413V that is connected to VDDO in the transmitter power domain.
A fourth tier of ESD circuits include circuits 920 and 921. Circuits 920 and 921 are both connected between the ground trace 412G that is connected to GNDD in the digital power domain, and the ground trace 413G that is connected to GNDO in the transmitter power domain.
Individual clock multiplier power domains are also protected by ESD circuits 926, 927 and 930. ESD circuits 926 and 927 have one terminal connected to the power trace 414V that is connected to the VDDP for the local clock multiplier power domain. Circuit 926 has an opposing terminal connected to the trace 411V that is connected to VDDA in the analog power domain. Circuit 927 has an opposing terminal connected to ground trace 413G in the transmitter power domain.
The ESD circuit 930 has one terminal connected to the ground trace 414G that is connected to GNDP of the local clock multiplier power domain, and an opposing terminal connected to the ground trace 413G that is connected to GNDO in the transmitter power domain.
Circuit 927 which is connected between a ground trace and a power trace, may be implemented using a reversed biased diode configuration in a grounded gate NMOS technology, consistent with the example given above for protection between power and ground traces.
The circuits which protect between power traces in different power domains, including the circuits 910, 911, 912, 913, 918, 919 and 926, may be implemented using a reversed biased diode configuration in a grounded gate NMOS technology, consistent with the example given above for protection between power and ground traces.
Circuits which protect between ground traces in different power domains, including the circuits 914, 915, 916, 917, 920, 921 and 930 may be implemented using back-to-back parallel diodes.
A manufacturing method for an integrated circuit includes forming a plurality of power domains on an integrated circuit; placing a data source comprising an analog sensor array on the substrate in an analog power domain; placing peripheral circuitry coupled to the sensor array to produce a plurality of streams of digital data using a system clock in a digital power domain; placing reference clock distribution circuitry on the substrate which distributes a reference clock having a reference frequency; placing in individual power domains a plurality of clock multipliers which produce respective local transmit clocks having transmit clock frequencies that are multiples of the reference clock frequency; routing the reference clock from the reference clock distribution circuitry to the plurality of clock multipliers; and placing a plurality of sets of transmitters on the substrate configured to receive corresponding streams of data from the data source; routing the local transmit clock from one clock multiplier in the plurality of clock multipliers to each set of transmitters.
A configuration for implementing an array of high-speed transmitters on an integrated circuit is described. Features of the implementation include local high-speed transmit clock generation, and provide a clock multiplier such as a phase locked loop, between each pair of transmitters which provides a local high-speed transmit clock over short connectors to the adjacent transmitters. Another feature of the implementation includes low-speed reference clock distribution, allowing for the distribution of the reference clock to the transmitter array at low power and low-frequency, minimizing disturbance of the transmitters from reference clock noise. Also, features of the implementation include power supply separation, providing individual power domains for the clock multiplier circuitry, separate from the transmitters, from digital circuitry and from analog circuitry on the device minimizing disturbance of the transmitter from noise arising in other portions of the chip which operate on separate clocks and introduce additional noise sources.
An integrated circuit is described which includes a substrate having a data source, with peripheral circuitry on the substrate coupled to the data source to produce a stream of digital data. To support high speed transmission of the data stream, a clock multiplier may be provided on the substrate which produces a transmit clock. The clock multiplier may be disposed in an individual power domain on the substrate to reduce noise and improve quality of the transmit clock. A transmitter may be on the substrate and configured to receive the stream of data from the data source. The transmitter is connected to transmit the stream of data on an output pad using the transmit clock. The transmitter may be disposed in a transmitter power domain on the substrate separate from the individual power domain of the clock multiplier. In other aspects of the technology, the data source and the peripheral circuitry are disposed in a power domain or power domains separate from the individual power domain. The integrated circuit can include a plurality of transmitters on the substrate connected to, and thereby sharing, the clock multiplier. In other aspects, a plurality of clock multipliers may be disposed on the substrate which produce respective local transmit clocks, in which each clock multiplier may be disposed in an individual power domains on the substrate. In this aspect, a plurality of transmitters on the subset are arranged in sets having one or more members, and wherein each set may be placed in proximity to, and connected to, one clock multiplier in the plurality of the clock multipliers.
While the claimed invention is disclosed by reference to the preferred embodiments and examples detailed above, it is to be understood that these examples are intended in an illustrative rather than in a limiting sense. It is contemplated that modifications and combinations will readily occur to those skilled in the art, which modifications and combinations will be within the spirit of the invention and the scope of the following claims.
This application is a divisional application of U.S. patent application Ser. No. 14/971,173, which claims priority to U.S. Provisional Application No. 62/093,548 filed Dec. 18, 2014. Each application identified in this section are incorporated by reference herein, each in its entirety.
Number | Name | Date | Kind |
---|---|---|---|
4086642 | Yoshida et al. | Apr 1978 | A |
4133735 | Afromowitz et al. | Jan 1979 | A |
4411741 | Janata | Oct 1983 | A |
4437969 | Covington et al. | Mar 1984 | A |
4438354 | Haque et al. | Mar 1984 | A |
4444644 | Hiramoto et al. | Apr 1984 | A |
4490678 | Kuisl et al. | Dec 1984 | A |
4641084 | Komatsu | Feb 1987 | A |
4660063 | Anthony | Apr 1987 | A |
4691167 | V'd et al. | Sep 1987 | A |
4701253 | Ligtenberg et al. | Oct 1987 | A |
4722830 | Urie et al. | Feb 1988 | A |
4743954 | Brown | May 1988 | A |
4764797 | Shaw et al. | Aug 1988 | A |
4777019 | Dandekar | Oct 1988 | A |
4822566 | Newman | Apr 1989 | A |
4863849 | Melamede | Sep 1989 | A |
4864229 | Lauks et al. | Sep 1989 | A |
4874499 | Smith et al. | Oct 1989 | A |
4893088 | Myers et al. | Jan 1990 | A |
4927736 | Mueller et al. | May 1990 | A |
4971903 | Hyman | Nov 1990 | A |
5009766 | Lauks | Apr 1991 | A |
5038192 | Bonneau et al. | Aug 1991 | A |
5082788 | Farnsworth et al. | Jan 1992 | A |
5110441 | Kinlen et al. | May 1992 | A |
5113870 | Rossenfeld | May 1992 | A |
5118607 | Bignami et al. | Jun 1992 | A |
5126022 | Soane et al. | Jun 1992 | A |
5126759 | Small et al. | Jun 1992 | A |
5132418 | Caruthers et al. | Jul 1992 | A |
5138251 | Koshiishi et al. | Aug 1992 | A |
5140393 | Hijikihigawa et al. | Aug 1992 | A |
5142236 | Maloberti et al. | Aug 1992 | A |
5151587 | Machida et al. | Sep 1992 | A |
5151759 | Vinal | Sep 1992 | A |
5164319 | Hafeman et al. | Nov 1992 | A |
5202576 | Liu et al. | Apr 1993 | A |
5284566 | Cuomo et al. | Feb 1994 | A |
5317407 | Michon | May 1994 | A |
5319226 | Sohn et al. | Jun 1994 | A |
5407854 | Baxter et al. | Apr 1995 | A |
5436149 | Barnes | Jul 1995 | A |
5439839 | Jang | Aug 1995 | A |
5466348 | Holm-Kennedy | Nov 1995 | A |
5475337 | Tatsumi | Dec 1995 | A |
5490971 | Gifford et al. | Feb 1996 | A |
5520787 | Hanagan et al. | May 1996 | A |
5554339 | Cozzette et al. | Sep 1996 | A |
5583462 | Grasshoff | Dec 1996 | A |
5587894 | Naruo | Dec 1996 | A |
5593838 | Zanzucchi et al. | Jan 1997 | A |
5600451 | Maki | Feb 1997 | A |
5627403 | Bacchetta et al. | May 1997 | A |
5631704 | Dickinson et al. | May 1997 | A |
5637469 | Wilding et al. | Jun 1997 | A |
5646558 | Jamshidi | Jul 1997 | A |
5702964 | Lee | Dec 1997 | A |
5793230 | Chu et al. | Aug 1998 | A |
5846708 | Hollis et al. | Dec 1998 | A |
5894284 | Garrity et al. | Apr 1999 | A |
5907765 | Lescouzeres et al. | May 1999 | A |
5911873 | McCarron et al. | Jun 1999 | A |
5912560 | Pasternak | Jun 1999 | A |
5922591 | Anderson et al. | Jul 1999 | A |
5923421 | Rajic et al. | Jul 1999 | A |
5944970 | Rosenblatt | Aug 1999 | A |
5958703 | Dower et al. | Sep 1999 | A |
5965452 | Kovacs | Oct 1999 | A |
6002299 | Thomsen | Dec 1999 | A |
6021172 | Fossum et al. | Feb 2000 | A |
6107032 | Kilger et al. | Aug 2000 | A |
6191444 | Clampitt et al. | Feb 2001 | B1 |
6195585 | Karunasiri et al. | Feb 2001 | B1 |
6210891 | Nyren et al. | Apr 2001 | B1 |
6255678 | Sawada et al. | Jul 2001 | B1 |
6267858 | Parce et al. | Jul 2001 | B1 |
6274320 | Rothberg et al. | Aug 2001 | B1 |
6275061 | Tomita | Aug 2001 | B1 |
6280586 | Wolf et al. | Aug 2001 | B1 |
6294133 | Sawada et al. | Sep 2001 | B1 |
6327410 | Walt et al. | Dec 2001 | B1 |
6353324 | Uber, III et al. | Mar 2002 | B1 |
6355431 | Chee et al. | Mar 2002 | B1 |
6361671 | Mathies et al. | Mar 2002 | B1 |
6372291 | Hua et al. | Apr 2002 | B1 |
6376256 | Dunnington et al. | Apr 2002 | B1 |
6384684 | Redman-White | May 2002 | B1 |
6403957 | Fodor et al. | Jun 2002 | B1 |
6406848 | Bridgham et al. | Jun 2002 | B1 |
6413792 | Sauer et al. | Jul 2002 | B1 |
6429027 | Chee et al. | Aug 2002 | B1 |
6432360 | Church | Aug 2002 | B1 |
6433386 | Yun et al. | Aug 2002 | B1 |
6459398 | Gureshnik et al. | Oct 2002 | B1 |
6465178 | Chappa et al. | Oct 2002 | B2 |
6475728 | Martin et al. | Nov 2002 | B1 |
6482639 | Snow et al. | Nov 2002 | B2 |
6485944 | Church et al. | Nov 2002 | B1 |
6490220 | Merritt et al. | Dec 2002 | B1 |
6499499 | Dantsker et al. | Dec 2002 | B2 |
6511803 | Church et al. | Jan 2003 | B1 |
6518024 | Choong et al. | Feb 2003 | B2 |
6518146 | Singh et al. | Feb 2003 | B1 |
6535824 | Mansky et al. | Mar 2003 | B1 |
6537881 | Rangarajan et al. | Mar 2003 | B1 |
6538593 | Yang et al. | Mar 2003 | B2 |
6545620 | Groeneweg | Apr 2003 | B2 |
6571189 | Jensen et al. | May 2003 | B2 |
6602702 | McDevitt et al. | Aug 2003 | B1 |
6605428 | Kilger et al. | Aug 2003 | B2 |
6613513 | Parce et al. | Sep 2003 | B1 |
6618083 | Chen et al. | Sep 2003 | B1 |
6624637 | Pechstein | Sep 2003 | B1 |
6627154 | Goodman et al. | Sep 2003 | B1 |
6654505 | Bridgham et al. | Nov 2003 | B2 |
6657269 | Migliorato et al. | Dec 2003 | B2 |
6671341 | Kinget et al. | Dec 2003 | B1 |
6682899 | Bryan et al. | Jan 2004 | B2 |
6682936 | Kovacs | Jan 2004 | B2 |
6686638 | Fischer et al. | Feb 2004 | B2 |
6700814 | Nahas et al. | Mar 2004 | B1 |
6703660 | Yitzchaik et al. | Mar 2004 | B2 |
6716629 | Hess et al. | Apr 2004 | B2 |
6762022 | Makarov et al. | Jul 2004 | B2 |
6770472 | Manalis et al. | Aug 2004 | B2 |
6787111 | Roach et al. | Sep 2004 | B2 |
6795006 | Delight et al. | Sep 2004 | B1 |
6806052 | Bridgham et al. | Oct 2004 | B2 |
6828100 | Ronaghi | Dec 2004 | B1 |
6831994 | Bridgham et al. | Dec 2004 | B2 |
6841128 | Kambara et al. | Jan 2005 | B2 |
6859570 | Walt et al. | Feb 2005 | B2 |
6871290 | Gauthier et al. | Mar 2005 | B2 |
6878255 | Wang et al. | Apr 2005 | B1 |
6888194 | Yoshino | May 2005 | B2 |
6898121 | Chien et al. | May 2005 | B2 |
6906524 | Chung et al. | Jun 2005 | B2 |
6919211 | Fodor et al. | Jul 2005 | B1 |
6926865 | Howard | Aug 2005 | B2 |
6927045 | Hadd et al. | Aug 2005 | B2 |
6929944 | Matson | Aug 2005 | B2 |
6932893 | Bech et al. | Aug 2005 | B2 |
6939451 | Zhao et al. | Sep 2005 | B2 |
6953958 | Baxter et al. | Oct 2005 | B2 |
6958216 | Kelley et al. | Oct 2005 | B2 |
6969488 | Bridgham et al. | Nov 2005 | B2 |
6998274 | Chee et al. | Feb 2006 | B2 |
7008550 | Li et al. | Mar 2006 | B2 |
7019305 | Eversmann et al. | Mar 2006 | B2 |
7022288 | Boss | Apr 2006 | B1 |
7033754 | Chee et al. | Apr 2006 | B2 |
7037687 | Williams et al. | May 2006 | B2 |
7045097 | Kovacs | May 2006 | B2 |
7049645 | Sawada et al. | May 2006 | B2 |
7060431 | Chee et al. | Jun 2006 | B2 |
7067886 | Bonges, III et al. | Jun 2006 | B2 |
7084641 | Brederlow et al. | Aug 2006 | B2 |
7085502 | Shushakov et al. | Aug 2006 | B2 |
7087387 | Gerdes et al. | Aug 2006 | B2 |
7091059 | Rhodes | Aug 2006 | B2 |
7097973 | Zenhausern | Aug 2006 | B1 |
7105300 | Parce et al. | Sep 2006 | B2 |
7106089 | Nakano et al. | Sep 2006 | B2 |
7173445 | Fujii et al. | Feb 2007 | B2 |
7190026 | Lotfi et al. | Mar 2007 | B2 |
7192745 | Jaeger | Mar 2007 | B2 |
7193453 | Wei et al. | Mar 2007 | B2 |
7211390 | Rothberg et al. | May 2007 | B2 |
7223540 | Pourmand et al. | May 2007 | B2 |
7226734 | Chee et al. | Jun 2007 | B2 |
7235389 | Lim et al. | Jun 2007 | B2 |
7238323 | Knapp et al. | Jul 2007 | B2 |
7239188 | Xu et al. | Jul 2007 | B1 |
7244559 | Rothberg et al. | Jul 2007 | B2 |
7244567 | Chen et al. | Jul 2007 | B2 |
7264929 | Rothberg et al. | Sep 2007 | B2 |
7264934 | Fuller | Sep 2007 | B2 |
7265929 | Umeda et al. | Sep 2007 | B2 |
7267751 | Gelbart et al. | Sep 2007 | B2 |
7276749 | Martin et al. | Oct 2007 | B2 |
7282370 | Bridgham et al. | Oct 2007 | B2 |
7285384 | Fan et al. | Oct 2007 | B2 |
7291496 | Holm-Kennedy | Nov 2007 | B2 |
7297518 | Quake et al. | Nov 2007 | B2 |
7298475 | Gandhi et al. | Nov 2007 | B2 |
7303875 | Bock et al. | Dec 2007 | B1 |
7317216 | Holm-Kennedy | Jan 2008 | B2 |
7317484 | Dosluoglu et al. | Jan 2008 | B2 |
7323305 | Leamon et al. | Jan 2008 | B2 |
7335762 | Rothberg et al. | Feb 2008 | B2 |
7359058 | Kranz et al. | Apr 2008 | B2 |
7361946 | Johnson et al. | Apr 2008 | B2 |
7363717 | Ekseth et al. | Apr 2008 | B2 |
7381936 | Tan et al. | Jun 2008 | B2 |
7394263 | Pechstein et al. | Jul 2008 | B2 |
7419636 | Aker et al. | Sep 2008 | B2 |
7425431 | Church et al. | Sep 2008 | B2 |
7455971 | Chee et al. | Nov 2008 | B2 |
7462452 | Williams et al. | Dec 2008 | B2 |
7462512 | Levon et al. | Dec 2008 | B2 |
7462709 | Jaeger | Dec 2008 | B2 |
7465512 | Wright et al. | Dec 2008 | B2 |
7466258 | Akopyan et al. | Dec 2008 | B1 |
7470352 | Eversmann et al. | Dec 2008 | B2 |
7482153 | Okada et al. | Jan 2009 | B2 |
7482677 | Lee et al. | Jan 2009 | B2 |
7499513 | Tetzlaff et al. | Mar 2009 | B1 |
7515124 | Yaguma et al. | Apr 2009 | B2 |
7575865 | Leamon et al. | Aug 2009 | B2 |
7576037 | Engelhardt et al. | Aug 2009 | B2 |
7590211 | Burney | Sep 2009 | B1 |
7595883 | El Gamal et al. | Sep 2009 | B1 |
7605650 | Forbes | Oct 2009 | B2 |
7608810 | Yamada | Oct 2009 | B2 |
7609093 | Sarig et al. | Oct 2009 | B2 |
7609303 | Lee et al. | Oct 2009 | B1 |
7612817 | Tay | Nov 2009 | B2 |
7614135 | Santini, Jr. et al. | Nov 2009 | B2 |
7622294 | Walt et al. | Nov 2009 | B2 |
7667501 | Surendranath et al. | Feb 2010 | B2 |
7733401 | Takeda | Jun 2010 | B2 |
7750713 | Oh | Jul 2010 | B2 |
7785790 | Church et al. | Aug 2010 | B1 |
7821806 | Horiuchi | Oct 2010 | B2 |
7824900 | Iwadate et al. | Nov 2010 | B2 |
7842377 | Lanphere et al. | Nov 2010 | B2 |
7842457 | Berka et al. | Nov 2010 | B2 |
7859029 | Lee et al. | Dec 2010 | B2 |
7859291 | Kim | Dec 2010 | B2 |
7875440 | Williams et al. | Jan 2011 | B2 |
7884398 | Levon et al. | Feb 2011 | B2 |
7885490 | Heideman et al. | Feb 2011 | B2 |
7888708 | Yazawa et al. | Feb 2011 | B2 |
7923240 | Su | Apr 2011 | B2 |
7932034 | Esfandyarpour et al. | Apr 2011 | B2 |
7948015 | Rothberg et al. | May 2011 | B2 |
7955995 | Kakehata et al. | Jun 2011 | B2 |
7960776 | Kim et al. | Jun 2011 | B2 |
7981362 | Glezer et al. | Jul 2011 | B2 |
8012690 | Berka et al. | Sep 2011 | B2 |
8017938 | Gomez et al. | Sep 2011 | B2 |
8035175 | Shim et al. | Oct 2011 | B2 |
8052863 | Suzuki et al. | Nov 2011 | B2 |
8067731 | Matyjaszczyk et al. | Nov 2011 | B2 |
8072188 | Yorinobu et al. | Dec 2011 | B2 |
8124936 | Lagna | Feb 2012 | B1 |
8133698 | Silver | Mar 2012 | B2 |
8138496 | Li et al. | Mar 2012 | B2 |
8154480 | Shishido et al. | Apr 2012 | B2 |
8199859 | Zerbe et al. | Jun 2012 | B2 |
8217433 | Fife | Jul 2012 | B1 |
8227877 | Lee et al. | Jul 2012 | B2 |
8231831 | Hartzell et al. | Jul 2012 | B2 |
8232813 | Burdett et al. | Jul 2012 | B2 |
8247849 | Fife et al. | Aug 2012 | B2 |
8248356 | Chen | Aug 2012 | B2 |
8262900 | Rothberg et al. | Sep 2012 | B2 |
8263336 | Rothberg et al. | Sep 2012 | B2 |
8264014 | Rothberg et al. | Sep 2012 | B2 |
8269261 | Rothberg et al. | Sep 2012 | B2 |
8293082 | Rothberg et al. | Oct 2012 | B2 |
8306757 | Rothberg et al. | Nov 2012 | B2 |
8313625 | Rothberg et al. | Nov 2012 | B2 |
8313639 | Rothberg et al. | Nov 2012 | B2 |
8317999 | Rothberg et al. | Nov 2012 | B2 |
8340914 | Gatewood et al. | Dec 2012 | B2 |
8343856 | Therrien et al. | Jan 2013 | B2 |
8349167 | Rothberg et al. | Jan 2013 | B2 |
8357547 | Lee et al. | Jan 2013 | B2 |
8361713 | Bridgham et al. | Jan 2013 | B2 |
8415716 | Rothberg et al. | Apr 2013 | B2 |
8421437 | Levine | Apr 2013 | B2 |
8426898 | Rothberg et al. | Apr 2013 | B2 |
8426899 | Rothberg et al. | Apr 2013 | B2 |
8435395 | Rothberg et al. | May 2013 | B2 |
8441044 | Rothberg et al. | May 2013 | B2 |
8445194 | Drmanac et al. | May 2013 | B2 |
8445945 | Rothberg et al. | May 2013 | B2 |
8449824 | Sun | May 2013 | B2 |
8450781 | Rothberg et al. | May 2013 | B2 |
8470164 | Rothberg et al. | Jun 2013 | B2 |
8487790 | Fife et al. | Jul 2013 | B2 |
8492800 | Rothberg et al. | Jul 2013 | B2 |
8496802 | Rothberg et al. | Jul 2013 | B2 |
8502278 | Rothberg et al. | Aug 2013 | B2 |
8519448 | Rothberg et al. | Aug 2013 | B2 |
8524057 | Rothberg et al. | Sep 2013 | B2 |
8530941 | Rothberg et al. | Sep 2013 | B2 |
8535513 | Rothberg et al. | Sep 2013 | B2 |
8552771 | Jordan et al. | Oct 2013 | B1 |
8558288 | Rothberg et al. | Oct 2013 | B2 |
8575664 | Rothberg et al. | Nov 2013 | B2 |
8592153 | Bustillo et al. | Nov 2013 | B1 |
8592154 | Rearick | Nov 2013 | B2 |
8653567 | Fife | Feb 2014 | B2 |
8658017 | Rothberg et al. | Feb 2014 | B2 |
8673627 | Nobile et al. | Mar 2014 | B2 |
8685230 | Rothberg et al. | Apr 2014 | B2 |
8685298 | Rockenschaub et al. | Apr 2014 | B2 |
8728844 | Liu et al. | May 2014 | B1 |
8731847 | Johnson et al. | May 2014 | B2 |
8742469 | Milgrew | Jun 2014 | B2 |
8742472 | Rothberg et al. | Jun 2014 | B2 |
8747748 | Li et al. | Jun 2014 | B2 |
8748947 | Milgrew | Jun 2014 | B2 |
8764969 | Rothberg et al. | Jul 2014 | B2 |
8766327 | Milgrew | Jul 2014 | B2 |
8766328 | Rothberg et al. | Jul 2014 | B2 |
8786331 | Jordan et al. | Jul 2014 | B2 |
8796036 | Fife et al. | Aug 2014 | B2 |
8821798 | Bustillo et al. | Sep 2014 | B2 |
8841217 | Fife et al. | Sep 2014 | B1 |
8847637 | Guyton | Sep 2014 | B1 |
8912005 | Fife et al. | Dec 2014 | B1 |
8936763 | Rothberg et al. | Jan 2015 | B2 |
8945912 | Bashir et al. | Feb 2015 | B2 |
8962366 | Putnam et al. | Feb 2015 | B2 |
8963216 | Fife et al. | Feb 2015 | B2 |
8983783 | Johnson et al. | Mar 2015 | B2 |
9023674 | Shen et al. | May 2015 | B2 |
9149803 | Schultz et al. | Oct 2015 | B2 |
9164070 | Fife | Oct 2015 | B2 |
9201041 | Dalton et al. | Dec 2015 | B2 |
9270264 | Jordan et al. | Feb 2016 | B2 |
9389199 | Cheng et al. | Jul 2016 | B2 |
9458502 | Rothberg et al. | Oct 2016 | B2 |
9671363 | Fife et al. | Jun 2017 | B2 |
20010007418 | Komatsu et al. | Jul 2001 | A1 |
20020012933 | Rothberg et al. | Jan 2002 | A1 |
20020012937 | Tender et al. | Jan 2002 | A1 |
20020042388 | Cooper et al. | Apr 2002 | A1 |
20020081714 | Jain et al. | Jun 2002 | A1 |
20020085136 | Moon et al. | Jul 2002 | A1 |
20020150909 | Stuelpnagel et al. | Oct 2002 | A1 |
20020168678 | Williams et al. | Nov 2002 | A1 |
20030020334 | Nozu | Jan 2003 | A1 |
20030044833 | Benchikh et al. | Mar 2003 | A1 |
20030054396 | Weiner | Mar 2003 | A1 |
20030064366 | Hardin et al. | Apr 2003 | A1 |
20030068629 | Rothberg et al. | Apr 2003 | A1 |
20030108867 | Chee et al. | Jun 2003 | A1 |
20030119020 | Stevens et al. | Jun 2003 | A1 |
20030124572 | Umek et al. | Jul 2003 | A1 |
20030124599 | Chen et al. | Jul 2003 | A1 |
20030141928 | Lee | Jul 2003 | A1 |
20030141929 | Casper et al. | Jul 2003 | A1 |
20030148301 | Aono et al. | Aug 2003 | A1 |
20030152994 | Woudenberg et al. | Aug 2003 | A1 |
20030155942 | Thewes | Aug 2003 | A1 |
20030175990 | Hayenga et al. | Sep 2003 | A1 |
20030186262 | Cailloux | Oct 2003 | A1 |
20030211502 | Sauer et al. | Nov 2003 | A1 |
20030215857 | Kilger et al. | Nov 2003 | A1 |
20030224419 | Corcoran et al. | Dec 2003 | A1 |
20040002470 | Keith et al. | Jan 2004 | A1 |
20040023253 | Kunwar et al. | Feb 2004 | A1 |
20040038420 | Gelbart et al. | Feb 2004 | A1 |
20040049237 | Larson et al. | Mar 2004 | A1 |
20040053290 | Terbrueggen et al. | Mar 2004 | A1 |
20040079636 | Hsia et al. | Apr 2004 | A1 |
20040106211 | Kauer et al. | Jun 2004 | A1 |
20040121354 | Yazawa et al. | Jun 2004 | A1 |
20040130377 | Takeda et al. | Jul 2004 | A1 |
20040134798 | Toumazou et al. | Jul 2004 | A1 |
20040136866 | Pontis et al. | Jul 2004 | A1 |
20040146849 | Huang et al. | Jul 2004 | A1 |
20040175822 | Timperman | Sep 2004 | A1 |
20040185484 | Costa et al. | Sep 2004 | A1 |
20040185591 | Hsiung et al. | Sep 2004 | A1 |
20040197803 | Yaku et al. | Oct 2004 | A1 |
20050006234 | Hassibi | Jan 2005 | A1 |
20050009022 | Weiner et al. | Jan 2005 | A1 |
20050019842 | Prober et al. | Jan 2005 | A1 |
20050031490 | Gumbrecht et al. | Feb 2005 | A1 |
20050032075 | Yaku et al. | Feb 2005 | A1 |
20050040855 | Boerstler et al. | Feb 2005 | A1 |
20050042627 | Chakrabarti et al. | Feb 2005 | A1 |
20050058990 | Guia et al. | Mar 2005 | A1 |
20050093645 | Watanabe et al. | May 2005 | A1 |
20050095602 | West et al. | May 2005 | A1 |
20050106587 | Klapproth et al. | May 2005 | A1 |
20050151181 | Beintner et al. | Jul 2005 | A1 |
20050156207 | Yazawa et al. | Jul 2005 | A1 |
20050156584 | Feng | Jul 2005 | A1 |
20050181440 | Chee et al. | Aug 2005 | A1 |
20050189960 | Tajima | Sep 2005 | A1 |
20050191698 | Chee et al. | Sep 2005 | A1 |
20050202582 | Eversmann et al. | Sep 2005 | A1 |
20050206548 | Muramatsu et al. | Sep 2005 | A1 |
20050212016 | Brunner et al. | Sep 2005 | A1 |
20050221473 | Dubin et al. | Oct 2005 | A1 |
20050230245 | Morgenshtein et al. | Oct 2005 | A1 |
20050239132 | Klapproth | Oct 2005 | A1 |
20050266455 | Golovlev | Dec 2005 | A1 |
20050282224 | Fouillet et al. | Dec 2005 | A1 |
20060000772 | Sano et al. | Jan 2006 | A1 |
20060016699 | Kamahori et al. | Jan 2006 | A1 |
20060019407 | Fulton et al. | Jan 2006 | A1 |
20060024711 | Lapidus et al. | Feb 2006 | A1 |
20060035400 | Wu et al. | Feb 2006 | A1 |
20060057025 | Eversmann et al. | Mar 2006 | A1 |
20060057604 | Chen et al. | Mar 2006 | A1 |
20060141474 | Miyahara et al. | Jun 2006 | A1 |
20060154399 | Sauer et al. | Jul 2006 | A1 |
20060166203 | Tooke | Jul 2006 | A1 |
20060182664 | Peck et al. | Aug 2006 | A1 |
20060197118 | Migliorato et al. | Sep 2006 | A1 |
20060199193 | Koo et al. | Sep 2006 | A1 |
20060199493 | Hartmann et al. | Sep 2006 | A1 |
20060205061 | Roukes | Sep 2006 | A1 |
20060219558 | Hafeman et al. | Oct 2006 | A1 |
20060228721 | Leamon et al. | Oct 2006 | A1 |
20060246497 | Huang et al. | Nov 2006 | A1 |
20060266946 | Defrise et al. | Nov 2006 | A1 |
20060269927 | Lieber et al. | Nov 2006 | A1 |
20060289726 | Paulus et al. | Dec 2006 | A1 |
20070031291 | Piech et al. | Feb 2007 | A1 |
20070087401 | Neilson et al. | Apr 2007 | A1 |
20070092872 | Rothberg et al. | Apr 2007 | A1 |
20070095663 | Chou et al. | May 2007 | A1 |
20070096164 | Peters et al. | May 2007 | A1 |
20070099173 | Spira et al. | May 2007 | A1 |
20070099351 | Peters et al. | May 2007 | A1 |
20070109454 | Chou | May 2007 | A1 |
20070138028 | Chodavarapu et al. | Jun 2007 | A1 |
20070138132 | Barth | Jun 2007 | A1 |
20070172865 | Hardin et al. | Jul 2007 | A1 |
20070212681 | Shapiro et al. | Sep 2007 | A1 |
20070217963 | Elizarov et al. | Sep 2007 | A1 |
20070231824 | Chee et al. | Oct 2007 | A1 |
20070233477 | Halowani et al. | Oct 2007 | A1 |
20070247170 | Barbaro et al. | Oct 2007 | A1 |
20070262363 | Tao et al. | Nov 2007 | A1 |
20070278111 | Boussaad et al. | Dec 2007 | A1 |
20070278488 | Hirabayashi et al. | Dec 2007 | A1 |
20080003142 | Link et al. | Jan 2008 | A1 |
20080014589 | Link et al. | Jan 2008 | A1 |
20080032295 | Toumazou et al. | Feb 2008 | A1 |
20080047836 | Strand et al. | Feb 2008 | A1 |
20080063566 | Matsumoto et al. | Mar 2008 | A1 |
20080085219 | Beebe et al. | Apr 2008 | A1 |
20080096216 | Quake | Apr 2008 | A1 |
20080111161 | Sorge et al. | May 2008 | A1 |
20080121946 | Youn et al. | May 2008 | A1 |
20080136933 | Dosluoglu et al. | Jun 2008 | A1 |
20080145910 | Ward et al. | Jun 2008 | A1 |
20080164917 | Floyd et al. | Jul 2008 | A1 |
20080178692 | Jung et al. | Jul 2008 | A1 |
20080185616 | Johnson et al. | Aug 2008 | A1 |
20080204048 | Stasiak et al. | Aug 2008 | A1 |
20080205559 | Iida | Aug 2008 | A1 |
20080210931 | Truong et al. | Sep 2008 | A1 |
20080230386 | Srinivasan et al. | Sep 2008 | A1 |
20080265985 | Toumazou et al. | Oct 2008 | A1 |
20090026082 | Rothberg et al. | Jan 2009 | A1 |
20090048124 | Leamon et al. | Feb 2009 | A1 |
20090062132 | Borner | Mar 2009 | A1 |
20090079414 | Levon et al. | Mar 2009 | A1 |
20090120905 | Kohl et al. | May 2009 | A1 |
20090121258 | Kumar | May 2009 | A1 |
20090121781 | Oyama et al. | May 2009 | A1 |
20090127589 | Rothberg et al. | May 2009 | A1 |
20090127689 | Ye et al. | May 2009 | A1 |
20090149607 | Karim et al. | Jun 2009 | A1 |
20090156425 | Walt et al. | Jun 2009 | A1 |
20090170728 | Walt et al. | Jul 2009 | A1 |
20090194416 | Hsiung et al. | Aug 2009 | A1 |
20090273386 | Korobeynikov et al. | Nov 2009 | A1 |
20090299138 | Mitsuhashi | Dec 2009 | A1 |
20100007326 | Nakazato | Jan 2010 | A1 |
20100026814 | Shimoda | Feb 2010 | A1 |
20100039146 | Park et al. | Feb 2010 | A1 |
20100052765 | Makino | Mar 2010 | A1 |
20100079165 | Bertin et al. | Apr 2010 | A1 |
20100105373 | Kanade | Apr 2010 | A1 |
20100133547 | Kunze et al. | Jun 2010 | A1 |
20100137143 | Rothberg et al. | Jun 2010 | A1 |
20100156454 | Weir | Jun 2010 | A1 |
20100176463 | Koizumi et al. | Jul 2010 | A1 |
20100244106 | Parker et al. | Sep 2010 | A1 |
20100273166 | Garcia | Oct 2010 | A1 |
20100301398 | Rothberg et al. | Dec 2010 | A1 |
20110037121 | Lee et al. | Feb 2011 | A1 |
20110062972 | Je et al. | Mar 2011 | A1 |
20110114827 | Yamaoka et al. | May 2011 | A1 |
20110165557 | Ah et al. | Jul 2011 | A1 |
20110169056 | Wey et al. | Jul 2011 | A1 |
20110181253 | Isham et al. | Jul 2011 | A1 |
20110236263 | Sawada et al. | Sep 2011 | A1 |
20110262903 | Davidson et al. | Oct 2011 | A1 |
20110263463 | Rothberg et al. | Oct 2011 | A1 |
20110275522 | Rothberg et al. | Nov 2011 | A1 |
20110281737 | Rothberg et al. | Nov 2011 | A1 |
20110281741 | Rothberg et al. | Nov 2011 | A1 |
20110287945 | Rothberg et al. | Nov 2011 | A1 |
20110299337 | Parris et al. | Dec 2011 | A1 |
20120000274 | Fife | Jan 2012 | A1 |
20120001056 | Fife et al. | Jan 2012 | A1 |
20120001236 | Fife | Jan 2012 | A1 |
20120001237 | Fife et al. | Jan 2012 | A1 |
20120001615 | Levine | Jan 2012 | A1 |
20120001646 | Bolander et al. | Jan 2012 | A1 |
20120001685 | Levine et al. | Jan 2012 | A1 |
20120001779 | Fife et al. | Jan 2012 | A1 |
20120012900 | Lee et al. | Jan 2012 | A1 |
20120013392 | Rothberg et al. | Jan 2012 | A1 |
20120022795 | Johnson et al. | Jan 2012 | A1 |
20120034607 | Rothberg et al. | Feb 2012 | A1 |
20120045368 | Hinz et al. | Feb 2012 | A1 |
20120045844 | Rothberg et al. | Feb 2012 | A1 |
20120055811 | Rothberg et al. | Mar 2012 | A1 |
20120055813 | Rothberg et al. | Mar 2012 | A1 |
20120056248 | Fife | Mar 2012 | A1 |
20120060587 | Babcock et al. | Mar 2012 | A1 |
20120061255 | Rothberg et al. | Mar 2012 | A1 |
20120061256 | Rothberg et al. | Mar 2012 | A1 |
20120061733 | Rothberg et al. | Mar 2012 | A1 |
20120065093 | Rothberg et al. | Mar 2012 | A1 |
20120067723 | Rearick et al. | Mar 2012 | A1 |
20120071363 | Rothberg et al. | Mar 2012 | A1 |
20120077256 | Fife | Mar 2012 | A1 |
20120085660 | Rothberg et al. | Apr 2012 | A1 |
20120088682 | Rothberg et al. | Apr 2012 | A1 |
20120129703 | Rothberg et al. | May 2012 | A1 |
20120129732 | Rothberg et al. | May 2012 | A1 |
20120135870 | Rothberg et al. | May 2012 | A1 |
20120143531 | Davey et al. | Jun 2012 | A1 |
20120154018 | Sugiura | Jun 2012 | A1 |
20120161207 | Homyk et al. | Jun 2012 | A1 |
20120168307 | Fife | Jul 2012 | A1 |
20120173159 | Davey et al. | Jul 2012 | A1 |
20120228136 | Levine | Sep 2012 | A1 |
20120228159 | Levine | Sep 2012 | A1 |
20120249192 | Matsushita | Oct 2012 | A1 |
20120261274 | Rearick et al. | Oct 2012 | A1 |
20120264621 | Hubbell et al. | Oct 2012 | A1 |
20120265474 | Rearick et al. | Oct 2012 | A1 |
20120286771 | Rothberg et al. | Nov 2012 | A1 |
20120326213 | Bustillo et al. | Dec 2012 | A1 |
20120326767 | Milgrew | Dec 2012 | A1 |
20120329043 | Milgrew | Dec 2012 | A1 |
20120329192 | Bustillo et al. | Dec 2012 | A1 |
20130001653 | Milgrew et al. | Jan 2013 | A1 |
20130009214 | Bustillo et al. | Jan 2013 | A1 |
20130027594 | Krymski | Jan 2013 | A1 |
20130056353 | Nemirovsky et al. | Mar 2013 | A1 |
20130105868 | Kalnitsky et al. | May 2013 | A1 |
20130135018 | Kuo et al. | May 2013 | A1 |
20130189790 | Li et al. | Jul 2013 | A1 |
20130210128 | Rothberg et al. | Aug 2013 | A1 |
20130210182 | Rothberg et al. | Aug 2013 | A1 |
20130210641 | Rothberg et al. | Aug 2013 | A1 |
20130217004 | Rothberg et al. | Aug 2013 | A1 |
20130217587 | Rothberg et al. | Aug 2013 | A1 |
20130281307 | Li et al. | Oct 2013 | A1 |
20130324421 | Rothberg et al. | Dec 2013 | A1 |
20130341734 | Merz | Dec 2013 | A1 |
20140080717 | Li et al. | Mar 2014 | A1 |
20140148345 | Li et al. | May 2014 | A1 |
20140234981 | Zarkesh-Ha et al. | Aug 2014 | A1 |
20140235452 | Rothberg et al. | Aug 2014 | A1 |
20140235463 | Rothberg et al. | Aug 2014 | A1 |
20140308752 | Chang et al. | Oct 2014 | A1 |
20140364320 | Rothberg et al. | Dec 2014 | A1 |
20140367748 | Dalton et al. | Dec 2014 | A1 |
20150091581 | Sohbati et al. | Apr 2015 | A1 |
20150097214 | Chen et al. | Apr 2015 | A1 |
20160178568 | Cheng et al. | Jun 2016 | A1 |
20170038334 | Barbee et al. | Feb 2017 | A1 |
20170059514 | Hoffman | Mar 2017 | A1 |
20170102356 | Lin et al. | Apr 2017 | A1 |
Number | Date | Country |
---|---|---|
1582334 | Feb 2005 | CN |
1585896 | Feb 2005 | CN |
1703623 | Nov 2005 | CN |
1826525 | Aug 2006 | CN |
101669026 | Mar 2010 | CN |
101676714 | Mar 2010 | CN |
102203282 | Sep 2011 | CN |
102301228 | Dec 2011 | CN |
102484267 | May 2012 | CN |
4232532 | Apr 1994 | DE |
4430811 | Sep 1995 | DE |
19512117 | Oct 1996 | DE |
102004044299 | Mar 2006 | DE |
102008012899 | Sep 2009 | DE |
0223618 | May 1987 | EP |
1371974 | Dec 2003 | EP |
1432818 | Jun 2004 | EP |
1542009 | Jun 2005 | EP |
1557884 | Jul 2005 | EP |
1669749 | Jun 2006 | EP |
1870703 | Dec 2007 | EP |
1975246 | Oct 2008 | EP |
2307577 | Apr 2011 | EP |
2457851 | Sep 2009 | GB |
2461127 | Jul 2010 | GB |
S5870155 | Apr 1983 | JP |
S62237349 | Oct 1987 | JP |
H02250331 | Oct 1990 | JP |
H02310931 | Dec 1990 | JP |
H0580115 | Apr 1993 | JP |
H1078827 | Mar 1998 | JP |
2000055874 | Feb 2000 | JP |
2002221510 | Aug 2002 | JP |
2002272463 | Sep 2002 | JP |
2003279532 | Oct 2003 | JP |
2003322633 | Nov 2003 | JP |
2004500033 | Jan 2004 | JP |
2004510125 | Apr 2004 | JP |
2004271384 | Sep 2004 | JP |
2004343441 | Dec 2004 | JP |
2005077210 | Mar 2005 | JP |
2005515475 | May 2005 | JP |
2005207797 | Aug 2005 | JP |
2005218310 | Aug 2005 | JP |
2006138846 | Jun 2006 | JP |
2006284225 | Oct 2006 | JP |
2007512810 | May 2007 | JP |
2007243003 | Sep 2007 | JP |
2008215974 | Sep 2008 | JP |
2010513869 | Apr 2010 | JP |
2011525810 | Sep 2011 | JP |
2012506557 | Mar 2012 | JP |
100442838 | Aug 2004 | KR |
100455283 | Nov 2004 | KR |
200510714 | Mar 2005 | TW |
200946904 | Nov 2009 | TW |
WO-1989009283 | Oct 1989 | WO |
WO-1990005910 | May 1990 | WO |
WO-1998013523 | Apr 1998 | WO |
WO-1998046797 | Oct 1998 | WO |
WO-9937819 | Jul 1999 | WO |
WO-2001020039 | Mar 2001 | WO |
WO-2001042498 | Jun 2001 | WO |
WO-2001047804 | Jul 2001 | WO |
WO-2001081896 | Nov 2001 | WO |
WO-2002077287 | Oct 2002 | WO |
WO-2002086162 | Oct 2002 | WO |
WO-2003073088 | Sep 2003 | WO |
WO-2003092325 | Nov 2003 | WO |
WO-2004017068 | Feb 2004 | WO |
WO-2004040291 | May 2004 | WO |
WO-2004048962 | Jun 2004 | WO |
WO-2004081234 | Sep 2004 | WO |
WO-2005015156 | Feb 2005 | WO |
WO-2005022142 | Mar 2005 | WO |
WO-2005043160 | May 2005 | WO |
WO-2005047878 | May 2005 | WO |
WO-2005054431 | Jun 2005 | WO |
WO-2005062049 | Jul 2005 | WO |
WO-2005073706 | Aug 2005 | WO |
WO-2005084367 | Sep 2005 | WO |
WO-2005090961 | Sep 2005 | WO |
WO-2006005967 | Jan 2006 | WO |
WO-2006022370 | Mar 2006 | WO |
WO-2006056226 | Jun 2006 | WO |
WO-2007002204 | Jan 2007 | WO |
WO-2007086935 | Aug 2007 | WO |
WO-2008007716 | Jan 2008 | WO |
WO-2008058282 | May 2008 | WO |
WO-2008076406 | Jun 2008 | WO |
WO-2008107014 | Sep 2008 | WO |
WO-2008133719 | Nov 2008 | WO |
WO-2009012112 | Jan 2009 | WO |
WO-2009014155 | Jan 2009 | WO |
WO-2009041917 | Apr 2009 | WO |
WO-2009074926 | Jun 2009 | WO |
WO-2009081890 | Jul 2009 | WO |
WO-2009158006 | Dec 2009 | WO |
WO-2010008480 | Jan 2010 | WO |
WO-2010047804 | Apr 2010 | WO |
WO-2010138182 | Dec 2010 | WO |
WO-2010138186 | Dec 2010 | WO |
WO-2010138188 | Dec 2010 | WO |
WO-2012003359 | Jan 2012 | WO |
WO-2012003363 | Jan 2012 | WO |
WO-2012003368 | Jan 2012 | WO |
WO-2012003380 | Jan 2012 | WO |
WO-2012006222 | Jan 2012 | WO |
WO-2012046137 | Apr 2012 | WO |
WO-2012152308 | Nov 2012 | WO |
WO-2014077783 | May 2014 | WO |
Entry |
---|
Ahmadian et al., “Single-nucleotide polymorphism analysis by pyrosequencing”, Analytical and Biochemistry, vol. 280, 2000, pp. 103-110. |
Akiyama et al., “Ion-Sensitive Field-Effect Transistors with Inorganic Gate Oxide for pH Sensing”, IEEE Transactions on Electron Devices, vol. 29, No. 12, 1982, pp. 1936-1941. |
AU2011226767, Search Information Statement, dated Oct. 26, 2011, pp. 1-3. |
Bandettini et al., “Processing Strategies for Time-Course Data Sets in Functional MRI of the Human Brain,” MRM, vol. 30, 1993, pp. 161-172. |
Bandiera et al., “A fully electronic sensor for the measurement of cDNA hybridization kinetics”, Biosensors & Bioelectronics, vol. 22, Nos. 9-10, Apr. 15, 2007, pp. 2108-2114. |
Barbaro et al., “A Charge-Modulated FET for Detection of Biomolecular Processes: Conception, Modeling, and Simulation”, IEEE Transactions on Electron Devices, vol. 53, No. 1, 2006, pp. 158-166. |
Barbaro et al., “A CMOS, Fully Integrated Sensor for Electronic Detection of DNA Hybridization”, IEEE Electronic Device Letters, vol. 27, No. 7, 2006, pp. 595-597. |
Barbaro et al., “Fully electronic DNA hybridization detection by a standard CMOS biochip”, Sensors and Actuators B: Chemical, vol. 118, 2006, pp. 41-46. |
Bashford et al., “Automated bead-trapping apparatus and control system for singlemolecule DNA sequencing”, Optics Express, vol. 16, No. 5, Mar. 3, 2008, pp. 3445-3455. |
Baumann et al., “Microelectronic sensor system for microphysiological application on living cells”, Sensors and Actuators B: Chemical, vol. 55, No. 1, Apr. 1999, pp. 77-89. |
Bausells et al., “Ion-sensitive field-effect transistors fabricated in a commercial CMOS technology”, Sensors and Actuators B: Chemical, vol. 57, Nos. 1-3, 1999, pp. 56-62. |
Beer et al., “Anion Recognition and Sensing: The State of the Art and Future Perspectives”, Angewandte Chemie International Edition, vol. 40, No. 3, Feb. 2001, pp. 487-516. |
Bergveld, “ISFET, Theory and Practice”, IEEE Sensor Conference, Toronto, Oct. 2003, pp. 1-26. |
Bergveld, “Thirty years of Isfetology What happened in the past 30 years and what may happen in the next 30 years”, Sensors and Actuators B: Chemical, vol. 88, No. 1, Jan. 2003, pp. 1-20. |
Besselink et al., “ISFET Affinity Sensor”, Chapter 12 in Methods in Biotechnology, Affinity Biosensors: Techniques and Protocols, vol. 7, 1998, pp. 173-185. |
Bobrov et al., “Chemical sensitivity of an ISFET with Ta2O5 membrane in strong acid and alkaline solutions”, Sensors and Actuators B: Chemical, vol. 3, No. 1, Jan. 1991, pp. 75-81. |
Bockelmann et al., “Detecting DNA by field effect transistor arrays”, Proceedings of the 2006 IFIP International Conference on Very Large Scale Integration, 2006, pp. 164-168. |
Bousse et al., “A process for the combined fabrication of ion sensors and CMOS circuits”, IEEE Electron Device Letters, vol. 9, No. 1, Jan. 1988, pp. 44-46. |
Bousse et al., “Zeta potential measurements of Ta2O5 and SiO2 thin films” Journal of Colloid and Interface Science, vol. 147, No. 1, Nov. 1991, pp. 22-32. |
Chan et al., “An Integrated ISFETs Instrumentation System in Standard CMOS Technology”, IEEE Journal of Solid-State Circuits, vol. 45, No. 9, Sep. 2010, pp. 1923-1934. |
Chen et al., “Silicon-based nanoelectronic field-effect pH sensor with local gate control”, Applied Physics Letter, vol. 89, Nov. 2006, pp. 223512-1-223512-3. |
Chen et al., “Nanoscale field effect transistor for biomolecular signal amplification”, Applied Physics Letter, vol. 91, No. 24, Nov. 2007, pp. 243511-1-243511-3. |
Chin et al., “Titanium Nitride Membrane Application to Extended Gate Field Effect Transistor pH Sensor Using VLSI Technology”, Japanese Journal of Applied Physics, vol. 40, Part 1, No. 11, Nov. 2001, pp. 6311-6315. |
Chou et al., “Simulation of Ta2O5-gate ISFET temperature characteristics”, Sensor and Actuators B: Chemical, vol. 71, Nos. 1-2, Nov. 2000, pp. 73-76. |
Chou et al., “Letter to the Editor on Simulation of Ta2O5-gate ISFET temperature characteristics”, Sensors and Actuators B: Chemical, vol. 80, 2001, pp. 290-291. |
Chung et al., “ISFET interface circuit embedded with noise rejection capability”, Electronics Letters, vol. 40, No. 18, e-pub, 2 Pages Sep. 2, 2004, pp. 1115-1116. |
Chung et al., “ISFET performance enhancement by using the improved circuit techniques”, Sensors and Actuators B: Chemical, vol. 113, No. 1, Jan. 2006, pp. 555-562. |
Chung et al., “New ISFET interface circuit design with temperature Compensation”, CiteSeerx—URL: http://citeseerx.ist.psu.edu/viewdoc/download?doi=10.1.1.95.2321&rep=rep1-&type=pdf, 2006, pp. 1. |
Chung et al., “New ISFET Interface Circuit Design with Temperature Compensation”, Microelectronics Journal, vol. 37, No. 10, Oct. 1, 2006, pp. 1105-1114. |
Chung et al., “Temperature compensation electronics for ISFET readout applications”, Biomedical Circuits and Systems, IEEE International Workshop Singapore, Dec. 1, 2004, pp. 305-308. |
Dahl et al., “Circle-to-circle amplification for precise and sensitive DNA analysis,” Proceedings of the National Academy of Sciences, vol. 101, No. 13, Mar. 2004, pp. 4548-4553. |
Dazhong et al., “Research of CMOS Biosensor IC for Extracellular Electrophysiological Signal Recording and pH value Measuring”, Solid-State and Integrated-Circuit Technology, 9th International Conference, NJ USA, Oct. 20, 2008, pp. 2557-2560. |
Definition of “MOSFET” provided by the University of Cambridge as evidenced by the online dictionary at yourdictionary.com [retrieved on Nov. 3, 2013].< url:<url:<ahref=“http://www.doitpoms.ac.uk/tlplib/semiconductors=”“mosfet.php?printable=”1“”=“”>www.doitpoms.ac.uk/tlplib/semiconductors=“”mosfet.php?printable=“1”<url:<url:<ahref=“http://www.doitpoms.ac.uk/tlplib.”>www.doitpoms.ac.uk/tlplib</url:<a></url:<a>. |
Defintion of “Operational Amplfier” from wikipedia.org; [retrieved on Dec. 20, 2013]. Retrieved from the Internets URL:en/wikipedia.org/wiki/Operational.sub.--amplfier. |
Dorf, “The Electrical Engineering Handbook”, University of California, Davis, CRC Press, 2 edition, Chapter 3—Linear Circuit Analysis, Jun. 25, 2004, pp. 3-1 to 3-66. |
Eastman Kodak Company, “Image Sensor Solutions-Full-Frame CCD Image Sensor Performance Specification”, http://www.physics.csbsju.edu/370/photometry/manuals/kaf-1001e.pdf, Feb. 19, 2001. |
Eijkel et al., “Measuring Donnan-related phenomena using a solid-state ion sensor and a concentration-step method”, Journal of Membrane Science, vol. 127, May 1997, pp. 203-221. |
Eijkel, “Potentiometric detection and characterization of adsorbed protein using stimulus-response measurement techniques”, Thesis, Sep. 3, 1955, pp. 1-147; pp. 160-192. |
Eltoukhy et al., “A 0.18um CMOS 10-6 lux bioluminescence detection system-on-chip”, 2004 IEEE Inti Solid States Conference. Digest of Technical Papers. Session 12, Microsystems/12.3, Feb. 17, 2004. pp. 1-3. |
Eltoukhy et al., “A. 0.18-um CMOS Bioluminescence Detection Lab-on-Chip”, IEEE Journal of Solid-State Circuits, vol. 41, No. 3, Apr. 2006, pp. 651-662. |
EP09798251.6, Extended Search Report, dated Aug. 27, 2013, 6 pages. |
EP09822323.3, Extended Search Report, dated May 27, 2015, 8 pages. |
EP10780930.3, Search Report, dated Jun. 15, 2015, 3 pages. |
EP10857377.5, Search Report, dated Jun. 26, 2015, 3 pages. |
EP11801437.2, Extended Search Report, dated Jul. 25, 2013, 10 pages. |
EP11801437.2, “LT00349EP Examination Notification” dated Feb. 12, 2015, 8 pages. |
EP11801439.8, Extended Search Report, dated Mar. 7, 2014, 9 pages. |
EP11804218.3, Extended Search Report, dated Jul. 11, 2013, 3 pages. |
EP11827128.7, Search Report, datd Aug. 1, 2013, 5 pages. |
EP13161312.7, Extended Search Report, dated Oct. 15, 2013, 8 pages. |
EP13163995.7, “EP Office Action dated Jul. 9, 2014”. |
EP13163995.7, Extended Search Report, dated Aug. 20, 2013, 6 pages. |
EP13164768.7, Extended Search Report, dated Aug. 20, 2013, 6 pages. |
EP13174555.6, Extended Search Report, dated Dec. 4, 2013, 8 pages. |
EP13174555.6, Search Report, dated Nov. 21, 2013, 5 pages. |
EP13177039.8, Search Report, dated Nov. 21, 2013, 9 pages. |
EP13177590.0, “European Examination Notification” dated Sep. 8, 2014, 9 pages. |
EP13177590.0, Search Report, dated Nov. 20, 2013, 5 pages. |
EP14152861.2, Search Report, dated Jul. 7, 2014, 5 pages. |
EP15170247.9, Search Report, dated Nov. 10, 2015, 4 pages. |
EP17167536.6, Search Report, dated Nov. 7, 2017, 13 pages. |
EP7867780.4 Examination Report dated Jul. 3, 2012. |
Eriksson et al., “Pyrosequencing™ Technology at Elevated Temperature” Electrophoresis, vol. 25, No. 1, Jan. 2004, pp. 20-27. |
Esfandyarpour et al., “Gate-controlled microfluidic chamber with magnetic bead for DNA sequencing-by-synthesis technology”, Proc 5th Inti Conf Nanochannels, Microchannels and Minichannels, Puebla, Mexico, Jun. 18-20, 2007, pp. 1-5. |
Eversmann et al., “A 128.times.128 CMOS Biosensor Array for Extracellular Recording of Neural Activity”, IEEE J. Solid-State Circ., vol. 38, No. 12, Dec. 12, 2003, pp. 2306-2317. |
Faramarzpour et al., “CMOS-Based Active Pixel for Low-Light Level Detection: Analysis and Measurements”, IEEE Trans Electron Devices, vol. 54, No. 12, Dec. 2007, pp. 3229-3237. |
Finn et al., “Towards an Optimization of FET-Based Bio-Sensors”, European Cells and Materials, vol. 4, Sup 2, 2002, pp. 21-23. |
Fraden, “Handbook of Modern Sensors-Physics, Designs, and Applications”, 17.3.2 CHEMFET Sensors, 1996, pp. 499-501. |
Fritz et al., “Electronic detection of DNA by its intrinsic molecular charge”, Proceedings of the National Academy of Sciences, vol. 99, No. 22, Oct. 29, 2002, pp. 14142-14146. |
Gardner et al., “Enhancing electronic nose performance by sensor selection using a new integer-based genetic algorithm approach”, Sensors and Actuators B: Chemical, vol. 106, No. 1, Apr. 2005, pp. 114-121. |
GB0811656.8, Search Report, dated Mar. 12, 2010. |
GB0811656.8, Search Report, dated Sep. 21, 2009. |
GB0811657.6, “Examination Report” dated Jun. 30, 2010. |
GB0811657.6, Search Report, dated Oct. 26, 2009. |
Gracia et al., “Test Structures for ISFET Chemical Sensors”, IEEE Proceedings of the 1992 International Conference on Microelectronic Test Structures, vol. 5, 1992, pp. 156-159. |
Hammond et al., “A System-on-Chip Digital pH Meter for Use in a Wireless Diagnostic Capsule”, IEEE Transactions on Biomedical Engineering, vol. 52, No. 4, May 2005, pp. 687-694. |
Hammond et al., “Design of a Single-Chip pH Sensor Using a Conventional 0.6-.mu.m CMOS Process”, IEEE Sensors Journal, vol. 4, No. 6, 2004, pp. 706-712. |
Hammond et al., “Encapsulation of a liquid-sensing microchip using SU-8 photoresist”, MicroElectronic Engineering, vols. 73-74, Jun. 2004, pp. 893-897. |
Hammond et al., “Genomic sequencing and analysis of a Chinese Hamster ovary cell line using Illumina sequencing technology”, BMC Genomics, vol. 12, No. 67, Jan. 2011, pp. 1-8. |
Hammond et al., “Performance and system-on-chip integration of an unmodified CMOS ISFET”, Sensors and Actuators B: Chemical, vols. 111-112, Nov. 2005, pp. 254-258. |
Han “Label-free detection of biomolecules by a field-effect transistor microarray biosensor with bio-functionalized gate surfaces,” Masters Dissertation, RWTH Aachen University, 2006, pp. 1-63. |
Hanshaw et al., “An indicator displacement system for fluorescent detection of phosphate oxyanions under physiological conditions”, Tetrahedron Letters, vol. 45, No. 47, Nov. 15, 2004, pp. 8721-8724. |
Hara et al., “Dynamic response of a Ta2O5-gate pH-sensitive field-effect transistor”, Sensors Actuators B: Chemical, vol. 32, No. 2, May 1996, pp. 115-119. |
Hermon et al., “Miniaturized bio-electronic hybrid for chemical sensing applications”, Tech Connect News, Apr. 22, 2008, pp. 1. |
Hideshima et al., “Detection of tumor marker in blood serum using antibody-modified field effect transistor with optimized BSA blocking”, Sensors and Actuations B: Chemical, vol. 161, No. 1, Jan. 2012, pp. 146-150. |
Hijikata et al., “Identification of a Single Nucleotide Polymorphism in the MXA Gene Promoter (T/T at nt-88) Correlated with the Response of Hepatitis C Patients to Interferon”, Intervirology, vol. 43, No. 2, 2000, pp. 124-127. |
Hizawa et al., “32.times.32 pH Image Sensors for Real Time Observation of Biochemical Phenomena”, Transducers & Eurosensors '07, 14th Intl. Conf. on Solid-State, Actuators and Microsystems, Lyon, France, Jun. 10-14, 2007, pp. 1311-1312. |
Hizawa, et al., “Sensing Characteristics of Charge Transfer Type pH Sensor by Accumulative Operation”, IEEE Sensors, EXCO, Daegu, Korea, Oct. 22-25, 2006, pp. 144-147. |
Hizawa et al., “Fabrication of a two-dimensional pH image sensor using a charge transfer technique”, Sensors and Actuators B: Chemical, vol. 117, No. 2, Oct. 2006, pp. 509-515. |
Ingebrandt et al., “Label-free Detection of DNA using Field-Effect Transistors”, Physica status solidi A, vol. 203, No. 14, Nov. 2006, pp. 3399-3411. |
“Single-ended and differential amplfiers” from allaboutcircuits.com; [retrieved on Dec. 20, 2013]. Retrieved from the Internet: :< URL:allaboutcircuits.com/vol.sub.--3/chpt.sub.--8.2.html>. |
Izuru, “Kojien”, published by Owanami, Fourth Edition, 1991, pp. 2683. |
Jakobson et al., “Low frequency noise and drift in Ion Sensitive Field Effect Transistors”, Sensors Actuators B: Chemical, vol. 68, Nos. 1-3, Aug. 2000, pp. 134-139. |
Ji et al., “A CMOS contact imager for locating individual cells”, IEEE International Symposium on Circuits and Systems, 2006, pp. 3357-3360. |
Ji et al., “Contact Imaging: Simulation and Experiment”, IEEE Trans Circuits Systems-I: Regular Papers, vol. 54, No. 8, 2007, pp. 1698-1710. |
Kim et al., “An FET-type charger sensor for highly sensitive detection of DNA sequence”, Biosensors & Bioelectronics, vol. 20, No. 1, Jul. 30, 2004, pp. 69-74. |
Klein, “Time effects of ion-sensitive field-effect transistors”, Sensors and Actuators, vol. 17, Nos. 1-2, May 1989, pp. 203-208. |
Koch et al., “Protein detection with a novel ISFET-based zeta potential analyzer”, Biosensors & Bioelectronics, vol. 14, No. 4, Apr. 1999, pp. 413-421. |
Krause et al., “Extended Gate Electrode Arrays for Extracellular Signal Recordings”, Sensors and Actuators B: Chemical, vol. 70, Nos. 1-3, Nov. 2000, pp. 101-107. |
Kruise et al., “Detection of protein concentrations using a pH-step titration method”, Sensors Actuators B: Chemical, vol. 44, Nos. 1-3, Oct. 1997, pp. 297-303. |
Leamon et al., “A Massively Parallel PicoTiterPlate Based Platform for Discrete Picoliter-Scale Polymerase Chain Reactions”, Electrophoresis, vol. 24, No. 21, Nov. 24, 2003, pp. 3769-3777. |
Leamon et al., “Cramming More Sequencing Reactions onto Microreactor Chips”, Chemical Reviews, vol. 107, No. 8, Aug. 2007, pp. 3367-3376. |
Lee et al. “An Enhanced Glucose Biosensor Using Charge Transfer Techniques” Biosensors & Bioelectronics, vol. 24, No. 4, Dec. 2008, pp. 650-656. |
Lee et al., “Ion-sensitive Field-Effect Transistor for Biological Sensing”, Sensors, vol. 9, No. 9, 2009, pp. 7111-7131. |
Li et al., “Sequence-Specific Label-Free DNA Sensors based on Silico Nanowires”, Nano Letters, vol. 4, No. 2, Jan. 2004, pp. 245-247. |
“Libraries, Templates, Examples” from Edrawsoft.com; [retrieved on Dec. 20, 2013]. Retrieved from the Internets URL:www.edrawsoft.com/circuits.php>. |
Lin et al., “Practicing the Novolac deep-UV portable conformable masking technique”, Journal of Vacuum Science and Technology, vol. 19, No. 4, 1981, pp. 1313-1319. |
Liu et al., “An ISFET based sensing array with sensor offset compensation and pH sensitivity enhancement”, IEEE International Symposium on Circuits and Systems, Jun. 2, 2010, pp. 2283-2286. |
Lohrengel et al., “A new microcell or microreactor for material surface investigations at large current densities”, Electrochimica Acta, vol. 4 9, Nos. 17-18, Jul. 2004, pp. 2863-2870. |
Lui et al., “A Test Chip for ISFET/CMNOS Technology Development”, IEEE International Conference on Microelectronic Test Structures, vol. 9, 1996, pp. 123-128. |
Maki et al., “Nanowire-transistor based ultra-sensitive DNA methylation detection”, Biosensors & Bioelectronics, vol. 23, No. 6, Jan. 2008, pp. 780-787. |
Margulies et al., “Genome Sequencing in Microfabricated High-Density Picolitre Reactors”, Nature, vol. 437, No. 15, 2005, pp. 376-380. |
Marshall et al., “DNA chips: an array of possibilities”, Nature Biotechnology, vol. 16, No. 1, Jan. 1998, pp. 27-31. |
Martinoia et al., “A behavioral macromodel of the ISFET in Spice”, Sensors and Actuators B: Chemical, vol. 62, No. 3, Mar. 2000, pp. 182-189. |
Martinoia et al., “Development of ISFET Array-Based Microsystems for Bioelectrochemical measurements of cell populations”, Biosensors & Bioelectronics, vol. 16, Nos. 9-12, Dec. 2001, pp. 1043-1050. |
Matsuo et al. “Charge Transfer Type pH Sensor with Super High Sensitivity” 14th International Conference on Solid-State Sensors Actuators and Microsystems, France, Jun. 10-14, 2007, pp. 1881-1884. |
Matula, “Electrical Resistivity of Copper, Gold, Palladium, and Silver”, Journal of Physical and Chemical Reference Data, vol. 8, No. 4, 1979, pp. 1147-1298. |
Medoro et al., “A Lab-on-Chip for Cell Detection and Manipulation”, IEEE Sensors Journal, vol. 3, No. 3, 2003, pp. 317-325. |
Meyburg et al., “N-Channel field-effect transistors with floating gates for extracellular recordings”, Biosensors and Bioelectronics, vol. 21, No. 7, Jan. 15, 2006, pp. 1037-1044. |
Milgrew et al., “A 16×16 CMOS proton camera array for direct extracellular imaging of hydrogen-ion activity”, IEEE Inti Solid-State Circuits Conference, Session 32:24, 2008, pp. 590-591, 638. |
Milgrew et al., “A large transistor-based sensor array chip for direct extracellular imaging”, Sensors and Actuators B: Chemical, vols. 111-112, Nov. 2005, pp. 347-353. |
Milgrew et al., “A Proton Camera Array Technology for Direct Extracellular Ion Imaging”, IEEE International Symposium on Industrial Electronics, 2008, pp. 2051-2055. |
Milgrew et al., “Matching the transconductance characteristics of Cmos ISFET arrays by removing trapped charge”, IEEE Transactions on Electronic Devices, vol. 55, No. 4, 2008, pp. 1074-1079. |
Milgrew et al., “Microsensor Array Technology for Direct Extracellular Imaging”, Dept Electronic and EE, University of Glasgow, Apr. 5, 2006, pp. 1-23. |
Milgrew et al., “The Development of Scalable Sensor Arrays Using Standard CMOS Technology”, Sensors and Actuators B: Chemical, vol. 103, Nos. 1-2, Sep. 2004, pp. 37-42. |
Milgrew et al., “The fabrication of scalable multi-sensor arrays using standard CMOS technology”, IEEE Custom Integrated Circuits Conference, 2003, pp. 513-516. |
Miyahara et al., “Biochip Using Micromachining Technology”, Journal of Institute of Electrostatics, Japan, vol. 27, No. 6, 2003, pp. 268-272. |
Miyahara et al., “Direct Transduction of Primer Extension into Electrical Signal Using Genetic Field Effect Transistor”, Micro Total Analysis Systems, vol. 1, Proceedings of UTAS 2004, 8th International Conference on Miniaturized Systems for Chemistry and Life Sciences, Malmo, Sweden, Sep. 26-30, 2004, pp. 303-305. |
Miyahara et al., “Potentiometric Detection of DNA Molecules Using Field Effect Transistor”, the Japan Society of Applied Physics, No. 3, 2003, pp. 1180, 30A-S2. |
Morgenshtein et al., “Wheatstone-Bridge readout interface for ISFET/REFET applications”, Sensors and Actuators B: Chemical, vol. 98, No. 1, Mar. 2004, pp. 18-27. |
Moriizumi, “Biosensors”, Oyo Buturi (monthly publication of the Japan Society of Applied Physics), vol. 54, No. 2, Feb. 10, 1985, pp. 98-114. |
Naidu et al., “Introduction to Electrical Engineering”, Chapter 1—Fundamental Concepts of Electricity, McGraw Hill Education (India) Private Limited, 1995, pp. 1-10. |
Nakazato, “An Integrated ISFET Sensor Array”, Sensors, Nov. 2009, vol. 9, No. 11, ISSN:1424-8220, [online], Internet, URL, http://www.mdpi.com/1424-8220/9/11/8831/pdf, Nov. 2009, pp. 8831-8851. |
Nakazato et al., “28p-Y-7 ISFET sensor array integrated circuits based on the standard CMOS process”, The 55th annual meeting of the Japan Society of Applied Physics, Book of Abstracts, Mar. 27, 2008, p. 70. |
Neaman, “Electronic Circuit Analysis and Design”, McGraw Hill Higher Education, 2nd Edition, Chapter 6-Basic FET Amplifiers, (reference will be uploaded in 2 parts due to size) part 1 of 2, Dec. 1, 2000, pp. 313-345. |
Neaman, “Electronic Circuit Analysis and Design”, McGraw Hill Higher Education, 2nd Edition, Chapter 6—Basic FET Amplifiers, (reference will be uploaded in 2 parts due to size) part 2 of 2, Dec. 1, 2000, pp. 346-381. |
Nishiguchi et al., “Si nanowire ion-sensitive field-effect transistors with a shared floating gate”, Applied Physics Letters, vol. 94, Apr. 2009, pp. 163106-1 to 163106-3. |
Nyren et al., “Enzymatic Method for Continuous Monitoring of Inorganic Pyrophosphate Synthesis”, Analytical Biochemistry, vol. 151, No. 2, Dec. 1985, pp. 504-509. |
Oelßner et al., “Encapsulation of ISFET sensor chips”, Sensors Actuators B: Chemical, vol. 105, No. 1, Feb. 2005, pp. 104-117. |
Oelßner et al., “Investigation of the dynamic response behavior of ISFET pH sensors by means of laser Doppler velocimetry (LDV)”, Sensors and Actuators B: Chemical, vol. 27, Nos. 1-3, Jun. 1995, pp. 345-348. |
Offenhausser et al., “Field-Effect transistor array for monitoring electrical activity from mammalian neurons in culture”, Biosensors & Bioelectronics, vol. 12, No. 8, Jan. 1997, pp. 819-826. |
Ohno et al., “Electrolyte-Gated Graphene Field-Effect Transistors for Detecting pH and Protein Adsorption”, Nano Letters, vol. 9, No. 9, Jul. 28, 2009, pp. 3318-3322. |
Palan et al., “New ISFET sensor interface circuit for biomedical applications”, Sensors and Actuators B: Chemical, vol. 57, Nos. 1-3, Sep. 1999, pp. 63-68. |
Park et al., “ISFET glucose sensor system with fast recovery characteristics by employing electrolysis”, Sensors and Actuators B: Chemical, vol. 83, Nos. 1-3, Mar. 15, 2002, pp. 90-97. |
Patolsky et al., “Nanowire-Based Biosensors”, Analytical Chemistry, vol. 78, No. 13, Jul. 1, 2006, pp. 4261-4269. |
PCT/JP2005/001987, Search Report, dated Apr. 5, 2005. |
PCT/JP2005/015522, Preliminary Report on Patentability, dated Mar. 19, 2007. |
PCT/JP2005/015522, Search Report, dated Sep. 27, 2005. |
PCT/US2007/025721, Declaration of Non-Establishmentof International Search Report, dated Jul. 15, 2008. |
PCT/US2007/025721, Preliminary Report and Written Opinion on Patentability, dated Jun. 16, 2009. |
PCT/US2007/025721 Written Opinion dated Jun. 16, 2009. |
PCT/US2009/003766, Preliminary Report on Patentability, dated Jan. 5, 2011. |
PCT/US2009/003766, Search Report and Written Opinion, dated Apr. 8, 2010. |
PCT/US2009/003797, Search Report and Written Opinion, dated Mar. 12, 2010. |
PCT/US2009/005745, Preliminary Report on Patentability, dated Apr. 26, 2011. |
PCT/US2009/005745, Search Report and Written Opinion, dated Dec. 11, 2009. |
PCT/US2010/001543, Preliminary Report on Patentability, dated Nov. 29, 2011. |
PCT/US2010/001543, Search Report and Written Opinion, dated Oct. 13, 2010. |
PCT/US2010/001553, Preliminary Report on Patentability, dated Dec. 8, 2011. |
PCT/US2010/001553, Search Report and Written Opinion, dated Jul. 28, 2010. |
PCT/US2010/048835, Preliminary Report on Patentability, dated Mar. 19, 2013. |
PCT/US2010/048835, Search Report and Written Opinion, dated Dec. 16, 2010. |
PCT/US2011/042655, Search Report and Written Opinion, dated Oct. 21, 2011. |
PCT/US2011/042660, Search Report, dated Nov. 2, 2011. |
PCT/US2011/042665, Search Report, dated Nov. 2, 2011. |
PCT/US2011/042668, Preliminary Report on Patentability, dated Mar. 26, 2013. |
PCT/US2011/042668, Search Report, dated Oct. 28, 2011. |
PCT/US2011/042669, Search Report and Written Opinion, dated Jan. 9, 2012. |
PCT/US2011/042683, Preliminary Report on Patentability, dated Jun. 4, 2013. |
PCT/US2011/042683, Search Report and Written Opinion, dated Feb. 16, 2012. |
PCT/US2012/058996, Search Report and Written Opinion, dated Jan. 22, 2013. |
PCT/US2012/071471, Preliminary Report on Patentability, dated Jun. 24, 2014. |
PCT/US2012/071471, Search Report and Written Opinion, dated Apr. 24, 2013. |
PCT/US2012/071482, Preliminary Report on Patentability, dated Jun. 24, 2014. |
PCT/US2012/071482, Search Report and Written Opinion, dated May 23, 2013. |
PCT/US2013/022129, Preliminary Report on Patentability, dated Jul. 22, 2014. |
PCT/US2013/022129, Search Report and Written Opinion, dated Aug. 9, 2013. |
PCT/US2013/022140, Preliminary Report on Patentability, dated Jul. 22, 2014. |
PCT/US2013/022140, Search Report and Written Opinion, dated May 2, 2013. |
PCT/US2014/020887, Preliminary Report, dated Sep. 15, 2015, 8 pages. |
PCT/US2014/020887, Search Report and Written Opinion, dated May 30, 2014. |
PCT/US2014/020892, Search Report and Written Opinion, dated Jun. 3, 2014. |
PCT/US2014/040923, Preliminary Report on Patentability, dated Dec. 15, 2015. |
PCT/US2014/040923, Search Report and Written Opinion, dated Sep. 1, 2014. |
PCT/US2015/006623, International Preliminary Report on Patentability, dated Jun. 29, 2017, 1-13. |
PCT/US2015/066023, Search Report and Written Opinion, dated Mar. 14, 2016. |
PCT/US2015/066052, Preliminary Report on Patentability, dated Jun. 29, 2017, 1-16. |
PCT/US2015/066052, Search Report and Written Opinion, dated Apr. 7, 2016. |
PCT/US2015/066110, Preliminary Report on Patentability, dated Jun. 20, 2017, 1-8. |
PCT/US2015/066110, Search Report and Written Opinion, dated Mar. 17, 2016. |
Poghossian et al., “Functional testing and characterization of ISFETs on wafer level by means of a micro-droplet cell”, Sensors, vol. 6, No. 4, Apr. 2006, pp. 397-404. |
Pollack et al., “Genome-wide analysis of DNA copy-number changes using cDNA microarrays”, Nature Genetics, vol. 23, No. 1, Sep. 1999, pp. 41-46. |
Pourmand et al., “Direct electrical detection of DNA synthesis”, Proceedings of the National Academy of Sciences, vol. 103, No. 17, Apr. 2006, pp. 6466-6470. |
Pouthas et al., “Spatially resolved electronic detection of biopolymers”, Physical Review, vol. 70, No. 3, Sep. 2004, pp. 031906-1-031906-8. |
Premanode et al., “A composite ISFET readout circuit employing current feedback”, Sensors Actuators B: Chemical, vol. 127, No. 2, Nov. 2007, pp. 486-490. |
Premanode et al., “A novel, low power biosensor for real time monitoring of creatinine and urea in peritoneal dialysis”, Sensors and Actuators B: Chemical, vol. 120, No. 2, Jan. 2007, pp. 732-735. |
Premanode et al., “Drift Reduction in Ion-Sensitive FETs using correlated double sampling”, Electronics Letters, vol. 43, No. 16, Aug. 2, 2007, pp. 857-859. |
Premanode et al., “Ultra-low power precision ISFET readout using global current feedback”, Electronic Letters, vol. 42, No. 22, Oct. 26, 2006, pp. 1264-1265. |
Purushothaman et al., “Protons and single nucleotide polymorphism detection: A simple use for the Ion Sensitive Field Effect Transistor”, Sensors and Actuators B: Chemical, vol. 114, No. 2, Apr. 2006, pp. 964-968. |
Purushothaman et al., “Towards Fast Solid State DNA Sequencing”, IEEE ISCAS Proceedings, Circuits and Systems, vol. 4, 2002, pp. IV-169-IV-172. |
Rodriguez-Villegas, “Solution to trapped charge in FGMOS transistors”, Electronics Letters, vol. 39, No. 19, Oct. 2003, pp. 1416-1417. |
Ronaghi et al., “A Sequencing Method Based on Real-Time Pyrophosphate”, Science, vol. 281, No. 5375, Jul. 1998, pp. 363-365. |
Rothberg et al., “An integrated semiconductor device enabling non-optical genome sequencing”, Nature, vol. 475, No. 7356, Jul. 21, 2011, pp. 348-352. |
Sakata et al., “Cell-based field effect devices for cell adhesion analysis”, Intl. Conf. on Microtechnologies in Medicine and Biology, May 9-12, 2006, Okinawa, Japan, 2006, pp. 177-179. |
Sakata et al., “Detection of DNA recognition events using multi-well field effect transistor”, Biosensors & Bioelectronics, vol. 21, 2005, pp. 827-832. |
Sakata et al., “Detection sensitivity of genetic field effect transistor combined with charged nanoparticle-DNA conjugate”, Intl. Conf. on Microtechnologies in Medicine and Biology, May 9-12, 2005, Okinawa, Japan, 2006, pp. 97-100. |
Sakata et al., “Direct detection of single nucleotide polymorphism using genetic field effect transistor”, International Microprocesses and Nanotechnology Conference. Oct. 26-29, 2004. Osaka, Japan. Digest of Papers Microprocesses and Nanotechnology 2004. pp. 226-227. |
Sakata et al., “Direct Detection of Single-Base Extension Reaction Using Genetic Field Effect Transistor”, Proc, of 3rd Ann. Intl. IEEE EMBS Special Topic Conf. on Microtechnologies in Medicine and Biology, Kahuku, Oahu, HI, May 12-15, 2005, pp. 219-222. |
Sakata et al., “Direct transduction of allele-specific primer extension into electrical signal using genetic field effect transistor”, Biosensors & Bioelectronics, vol. 22, 2007, pp. 1311-1316. |
Sakata et al., “DNA Analysis Chip Based on Field-Effect Transistors”, Japanese Journal of Applied Physics, vol. 44, No. 4B, 2005, pp. 2854-2859. |
Sakata et al., “DNA Sequencing Based on Intrinsic Molecular Charges”, Angewandte Chemie International, vol. 118, 2006, pp. 2283-2286. |
Sakata et al., “DNA Sequencing Based on Intrinsic Molecular Charges”, Angewandte Chemie International, vol. 45, No. 14, Mar. 27, 2006, pp. 2225-2228. |
Sakata et al., “DNA Sequencing Using Genetic Field Effect Transistor”, 13th International Conference on Solid-State sensors, Actuators and Microsystems, vol. 2, Jun. 5-9, 2005, Seoul, Korea, pp. 1676-1679. |
Sakata et al., “Immobilization of oligonucleotide probes on Si3N4 surface and its application to genetic field effect transistor”, Materials Science and Engineering: C, vol. 24, Nos. 6-8, Dec. 2004, pp. 827-832. |
Sakata et al., “Potential Behavior of Biochemically Modified Gold Electrode for Extended-Gate Field-Effect Transistor”, Japanese Journal of Applied Physics, vol. 44, Part 1, No. 4S, Apr. 2005, pp. 2860-2863. |
Sakata et al., “Potential response of genetic field effect transistor to charged nanoparticle-DNA conjugate”, International Microprocesses and Nanotechnology Conference. Oct. 25-28, 2005. Tokyo, Japan. Digest of Papers Microprocesses and Nanotechnology 2005. pp. 42-43. |
Sakata et al., “Potentiometric Detection of Allele Specific Oligonucleotide Hybridization Using Genetic Field Effect Transistor”, Micro Total Analysis Systems, vol. 1,8th Intl. Conf. on Miniaturized Systems for Chemistry and Life Sciences, Sep. 26-30, 2004, Malmo, Sweden, pp. 300-302. |
Sakata et al., “Potentiometric Detection of DNA Molecules Hybridization Using Gene Field Effect Transistor and Intercalator”, Materials Research Society Symposium Proceedings, vol. 782, Micro- and Nanosystems, Boston, Massachusetts, Jan. 2003, pp. 393-398. |
Sakata et al., “Potentiometric Detection of DNA Using Genetic Transistor”, Denki Gakkai Kenkyukai Shiryo Chemical Sensor Kenkyukai, CHS-03-51-55, 2003, pp. 1-5. |
Sakata et al., “Potentiometric Detection of Single Nucleotide Polymorphism by Using a Genetic Field-effect transistor”, ChemBioChem, vol. 6, No. 4, Apr. 2005, pp. 703-710. |
Sakurai et al., “Real-Time Monitoring of DNA Polymerase Reactions by a Micro ISFET pH Sensor”, Analytical Chemistry, vol. 64, No. 17, Sep. 1992, pp. 1996-1997. |
Salama, “CMOS luminescence detection lab-on-chip: modeling, design, and characterization”, Thesis, Presented at Stanford University, 2005, pp. ii-78. |
Salama, “Modeling and simulation of luminescence detection platforms”, Biosensors & Bioelectronics, vol. 19, No. 11, Jun. 15, 2004, pp. 1377-1386. |
Sawada et al., “A novel fused sensor for photo- and ion-sensing”, Sensors and Actuators B: Chemical, vol. 106, No. 2, May 2005, pp. 614-618. |
Sawada et al., “Highly sensitive ion sensors using charge transfer technique”, Sensors and Actuators B: Chemical, vol. 98, No. 1, Mar. 2004, pp. 69-72. |
Schasfoort et al., “A new approach to immunoFET operation”, Biosensors & Bioelectronics, vol. 5, No. 2, 1990, pp. 103-124. |
Schasfoort et al., “Field-effect flow control for microfabricated fluidic networks”, Science, vol. 286. No. 5441, Oct. 29, 1999, pp. 942-945. |
Schoning et al., “Bio FEDs (Field-Effect Devices): State-of-the-Art and New Directions”, Electroanalysis, vol. 18, Nos. 19-20, Sep. 2006, pp. 1893-1900. |
Seong-Jin et al. “Label-Free CMOS DNA Quantification With On-Chip Noise Reduction Schemes” Solid-State Sensors, Actuators and Microsystems Conference, IEEE, Jun. 10, 2013, pp. 947-950. |
SG200903992-6, Search and Examination Report, dated Jan. 20, 2011, pp. 12. |
Shah, “Microfabrication of a parellelrray DNA pyrosequencing chip”, NNIN REU Research Accomplishments, 2005, pp. 130-131. |
Shepherd et al., “A biochemical translinear principle with weak inversion ISFETs”, IEEE Trans Circuits Syst-I, vol. 52, No. 12, Dec. 2005, pp. 2614-2619. |
Shepherd et al., “A novel voltage-clamped CMOS ISFET sensor interface”, IEEE, 2007, pp. 3331-3334. |
Shepherd et al., “Towards direct biochemical analysis with weak inversion ISFETS”, Intl Workshop on Biomedical, 2004, pp. S1.5-5-S1.5-8. |
Shepherd et al., “Weak inversion ISFETs for ultra-low power biochemical sensing and real-time analysis”, Sensors Actuators B, vol. 107, 2005, pp. 468-473. |
Shi et al., “Radical Capillary Array Electrophoresis Microplace and Scanner for High-Performance Nucleic Acid Analysis”, Analytical Chemistry, vol. 71, No. 23, 1999, pp. 5354-5361. |
Simonian et al., “FET based biosensors for the direct detection of organophosphate neurotoxins”, Electroanalysis, vol. 16, No. 22, 2004, pp. 1896-1906. |
Souteyrand et al., “Direct detection of the hybridization of synthetic homo-oligomer DNA sequences by field effect”, Journal of Physical Chemistry B, vol. 101, No. 15, 1997, pp. 2980-2985. |
Starodub et al., “Immunosensor for the determination of the herbicide simazine based on an ion-selective field-effect transistor”, Analytica Chimica Acta, vol. 424, No. 1, Nov. 2000, pp. 37-43. |
Takenaka et al., “DNA Sensing on a DNA Probe-Modified Electrode Using Ferrocenylnaphthalene Dimide as the Electrochemically Active Ligand”, Analytical Chemistry, vol. 72. No. 6, 2000, pp. 1334-1341. |
Temes et al., “A Tutorial Discussion of the Oversampling Method for A/D and D/A Conversion”, IEEE International Symposium on Circuits and Systems, vols. 2 of 4, 1990, 5 pages. |
Terada et al., “Further Study of Vth-Mismatch Evaluation Circuit”, f IEEE Int. Conference on Microelectronic Test Structures, vol. 17, Mar. 22, 2004, pp. 155-159. |
Thewes et al., “CMOS-based Biosensor Arrays”, Proceedings of the Design, Automation and Test in Europe Conference and Exhibition, 2005, 2 pages. |
Tokuda et al., “A CMOS image sensor with optical and potential dual imaging function for on-chip bioscientific applications”, Sensors and Actuators A: Physical, vol. 125, No. 2, Jan. 2006, pp. 273-280. |
Tomaszewski et al., “Electrical characterization of ISFETs”, Journal of Telecommunications and Information Technology, Mar. 2007, pp. 55-60. |
Toumazou et al., “Using transistors to linearise biochemistry,” Electronics Letters, vol. 43, No. 2, Jan. 18, 2007, 3 pages. |
Truman et al. “Monitoring liquid transport and chemical composition in lab on a chip systems using ion sensitive FET devices”, Lab on a Chip, vol. 6, No. 9, Jul. 2006, pp. 1220-1228. |
Unknown, “ISEFT Wikipedia article”, Wikipedia, Last modified Nov. 7, 2006. |
Unknown, “OV5640 Datasheet Product Specification”, 1/4″ color CMOS QSXGA (5 megapixel) image sensor with OmniBSI technology. May 1, 2011, p. 1, line 9 and pp. 2-7, paragraph 1. |
Uslu et al., “Labelfree fully electronic nucleic acid detection system based on a field-effect transistor device”, Biosensors and Bioelectronics, vol. 19. No. 12, Jul. 2004, pp. 1723-1731. |
Van Der Schoot et al., “The Use of a Multi-ISFET Sensor Fabricated in a Single Substrate”, Sensors and Actuators, vol. 12, No. 4, Nov.-Dec. 1987, pp. 463-468. |
Van Der Wouden et al., “Directional flow induced by synchronized longitudinal and zeta-potential controlling AC-electrical fields”, Lab Chip, vol. 6, No. 10, Oct. 2006, pp. 1300-1305. |
Van Hal et al., “A general model to describe the electrostatic potential at electrolyte oxide interfaces”, Advances in Colloid and Interface Science, vol. 69, Nos. 1-3, Dec. 1996, pp. 31-62. |
Van Kerkhof, “Development of an ISFET based heparin sensor using the ion-step measuring method”, Biosensors & Bioelectronics, vol. 8, Nos. 9-10, 1993, pp. 463-472. |
Van Kerkhof et al., “ISFET Responses on a stepwise change in electrolyte concentration at constant pH”, Sensors Actuators B: Chemical, vol. 18-19, Mar. 1994, pp. 56-59. |
Van Kerkhof et al., “The development of an ISFET-based heparin sensor,” Thesis 1994. Published Aug. 10, 1965. |
Van Kerkhof et al., “The ISFET based heparin sensor with a monolayer of protamine as affinity ligand”, Biosensors & Bioelectronics, vol. 10, Nos. 3-4, 1995, pp. 269-282. |
Vardalas, “Twists and Turns in the Development of the Transistor”, IEEE-USA Today's Engineer Online, May 2003, 6 pages. |
Voigt et al., “Diamond-like carbon-gate pH-ISFET”, Sensors and Actuators B: Chemical, vol. 44, Nos. 1-3, Oct. 1997, pp. 441-445. |
Wagner et al., “All-in-one solid-state device based on a light-addressable potentiometric sensor platform”, Sensors and Actuators B: Chemical, vol. 117, No. 2, Oct. 2006, pp. 472-479. |
Wang et al., “Label-free detection of small-molecule-protein interactions by using nanowire nanosensors”, Proceedings of the National Academy of Sciences, vol. 102, No. 9, Mar. 2005, pp. 3208-3212. |
Wilhelm et al., “pH Sensor Based on Differential Measurements on One pH-FET Chip”, Sensors and Actuators B: Chemical, vol. 4, Nos. 1-2, May 1991, pp. 145-149. |
Woias et al., “Slow pH response effects of silicon nitride ISFET sensors”, Sensors and Actuators B: Chemical, vol. 48, Nos. 1-3, May 1998, pp. 501-504. |
Woias, “Modelling the short time response of ISFET sensors”, Sensors and Actuators B: Chemical, vol. 24, Nos. 1 -3, Mar. 1995, pp. 211-217. |
Wood et al., “Base composition-independent hybridization in tetramethylammonium chloride: a method for oligonucleotide screening of highly complex gene libraries”, Proceedings of the National Academy of Sciences, vol. 82, No. 6, Mar. 1985, pp. 1585-1588. |
Wu et al., “DNA and protein microarray printing on silicon nitride waveguide surfaces”, Biosensensors & Bioelectronics, vol. 21, No. 7, Jan. 2006, pp. 1252-1263. |
Xu et al., “Analytical Aspects of FET-Based Biosensors”, Frontiers in Bioscience, vol. 10, Jan. 2005, pp. 420-430. |
Yeow et al., “A very large integrated pH-ISFET sensor array chip compatible with standard CMOS processes”, Sensor and Actuators B: Chemical, vol. 44, Nos. 1-3, Oct. 1997, pp. 434-440. |
Yoshida et al., “Development of a Wide Range pH Sensor based on Electrolyte-Insulator-Semiconductor Structure with Corrosion-Resistant Al2O3—Ta2O5 and Al2O3—ZrO2”, Journal of the Electrochemical Society, vol. 151, No. 3, 2004, pp. H53-H58. |
Yuqing et al., “Ion sensitive field effect transducer-based biosensors”, Biotechnology Advances, vol. 21, No. 6, Sep. 2003, pp. 527-534. |
Zhang et al., “32-Channel Full Customized CMOS Biosensor Chip for Extracellular neural Signal Recording”, Proc. of the 2nd Intl. IEEE EMBs Conf. on Neural Engineering, Arlington, Virginia, Mar. 16-19, 2005, pp. v-viii. |
Zhao et al., “Floating-Gate Ion Sensitive Field-Effect Transistor for Chemical and Biological Sensing”, MRS Proceedings, vol. 828, 2005, pp. 349-354. |
Zhou et al., “Quantitative detection of single nucleotide polymorphisms for a pooled sample by a bioluminometric assay coupled with modified primer extension reactions (BAMPER)”, Nucleic Acids Research, vol. 29, No. 19, Oct. 2001, (e93), 1-11. |
OmniVision Data Sheet, Product Specification, 2011, 179 pages. |
Office Action dated Apr. 18, 2019, to Taiwan Patent Application No. 10920700130. |
Rejection Decision dated Jul. 27, 2020, to Taiwan Patent Application No. 10920700130. |
“OV5640 datasheet 1/4″ color CMOS QSXGA (5 megapixel) image sensor with OmniBSI(TM) technology”, May 1, 2011 (May 2, 2011), XP055261114, 179 pages. |
Extended EP Search Report dated Nov. 12, 2021, for EP Patent Application No. 15 828 589.0. |
Number | Date | Country | |
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20200284754 A1 | Sep 2020 | US |
Number | Date | Country | |
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62093548 | Dec 2014 | US |
Number | Date | Country | |
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Parent | 14971173 | Dec 2015 | US |
Child | 16808276 | US |