Claims
- 1. A flash evaporator vaporization boat comprising: a graphite body having a recessed cavity and an outer surface coating composed of a high density pyrolytic boron nitride having a hexagonal crystal structure and a density above at least 2.19 gm/cc, wherein the coating is deposited by chemical vapor deposition at a temperature of between 1800° C. to 2200° C.
- 2. A flash evaporator vaporization boat as defined in claim 1 wherein said intermediate layer is composed of pyrolytic graphite.
- 3. A flash evaporator vaporization boat as defined in claim 2 wherein said intermediate layer has a thickness range of between 0.0002 and 0.001 inches.
Parent Case Info
This application is a continuation, of application Ser. No. 08/314,412, filed Sep. 28, 1994 Now ABN. This appliction is a continuation, of application Ser. No. 08/603,498, filed Feb. 20, 1996 Now ABN.
US Referenced Citations (6)
Continuations (1)
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Date |
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08/603498 |
Feb 1996 |
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Child |
08/771373 |
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Continuation in Parts (1)
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08/314412 |
Sep 1994 |
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08/603498 |
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