Claims
- 1. A magnetic information storage medium comprising:
- a substrate; and
- a plurality of discrete, generally disk-shaped, spaced apart bodies of magnetic material disposed on said substrate with a density in excess of 10.sup.9 bodies/in.sup.2, each said body being magnetizable independent of its neighboring bodies and each said body having a maximum diameter of between 200 .ANG. and 500 .ANG., said bodies being formed by
- (a) providing a layer of magnetic material on said substrate, said layer being at least 100 .ANG. thick and no greater than 500 .ANG. thick, said magnetic material having uniaxial anisotropy;
- (b) providing a layer of photoresist over the layer of magnetic material;
- (c) providing a primary mask over said layer of photoresist, said primary mask being formed by an ordered array of discrete generally spherical polymeric particles having a diameter no greater than 750 .ANG.;
- (d) exposing said photoresist through said primary mask by flooding it with electrons, said polymeric particles causing generally disk-shaped regions of said layer of photoresist to remain unexposed;
- (e) removing said primary mask;
- (f) developing said photoresist to leave a plurality of discrete photoresist disks on said layer of magnetic material which form a secondary mask;
- (g) subjecting the secondarily masked magnetic film to an etchant to remove magnetic material not covered by said disks; and
- (h) stripping away the photoresist disks to leave said plurality of disk-shaped bodies of magnetic material disposed on said substrate.
- 2. A magnetic information storage medium as recited in claim 1 wherein the disk-shaped bodies are spaced at no more than 750 .ANG. center to center.
- 3. A magnetic information storage medium as recited in claim 1 wherein the disk-shaped bodies comprise a magnetic material which displays magnetic anisotropy.
- 4. A magnetic information storage medium as recited in claim 3 wherein the disk-shaped bodies are made of a magnetic material from any one of the groups consisting of TbFeCo compositions, TbDyFeCo compositions, FeZr compositions, FeTi compositions, CoPd compositions, and CoPt compositions.
- 5. A magnetic information storage medium as recited in claim 3 wherein the magnetic material is of a TbFeCo composition, with the atomic percentage of Tb being in the range of 15 to 25% and with the Fe/Co ratio being in the range of 10:1 to 1:1.
- 6. A magnetic information storage medium as recited in claim 3 wherein the magnetic material is of a FeZr composition and has an atomic percentage of Zr of about 10%.
- 7. A magnetic information storage medium as recited in claim 3 wherein the magnetic material is of a FeTi composition and has an atomic percentage of Ti of about 17%.
- 8. A magnetic information storage medium comprising:
- a substrate; and
- a plurality of discrete, spaced apart generally disk-shaped bodies of magnetic material disposed on said substrate with a density in excess of 10.sup.9 bodies/in.sup.2, each said body being magnetizable independent of its neighboring bodies and being between 200 .ANG. and 500 .ANG. in diameter, said bodies being formed of a thin film with no significant jaggedness in its edges.
- 9. A magnetic information storage medium as recited in claim 8 wherein the islands are made of a magnetic material selected from any one of the groups consisting of TbFeCo compositions, TbDyFeCo compositions, FeZr compositions, FeTi compositions, CoPd compositions, and CoPt compositions.
- 10. A magnetic information storage medium as recited in claim 9 wherein the magnetic material is of the FeZr family and has an atomic percentage of Zr of about 10%.
- 11. A magnetic information storage medium as recited in claim 9 wherein the magnetic material is of the FeTi family and has an atomic percentage of Ti of about 17%.
- 12. A magnetic information storage medium as recited in claim 9 wherein the magnetic material is of a TbFeCo composition with the atomic percentage of Tb being in the range of 15 to 25% and with the Fe/Co ratio being in the range of 10:1 to 1:1.
- 13. A magnetic information storage medium as recited in claim 9 wherein the magnetic material is of a FeZr composition and has an atomic percentage of Zr of about 10%.
- 14. A magnetic information storage medium as recited in claim 9 wherein the magnetic material is of a FeTi composition and has an atomic percentage of Ti of about 17%.
Parent Case Info
This is a continuation of application Ser. No. 07/963,562 filed on Oct. 19, 1992, now abandoned.
US Referenced Citations (4)
Foreign Referenced Citations (2)
Number |
Date |
Country |
99253 |
Mar 1992 |
JPX |
84403 |
Mar 1992 |
JPX |
Continuations (1)
|
Number |
Date |
Country |
Parent |
963562 |
Oct 1992 |
|