The present invention relates to delta sigma modulators and more specifically to parallel delta sigma modulator architectures for improved power conversion efficiency in power amplifiers.
A radio frequency power amplifier (RF power amplifier) is a type of electronic amplifier that converts a low-power radio-frequency signal into a higher power signal. There are many classes of power amplifiers which are used to distinguish the electrical characteristics and methods of operation of the power amplifiers. Accordingly, the classes of power amplifiers are mainly lumped into two basic groups. The first are the classically controlled conduction angle amplifiers forming the more common amplifier classes of A, B, AB and C, which are defined by the length of their conduction state over some portion of the output waveform, such that the output stage transistor operation lies somewhere between being “fully-ON” and “fully-OFF”.
The second set of amplifiers are the newer so-called “switching” amplifier classes of D, E, F, G, S, T among others, which use digital circuits and pulse width modulation (PWM) to constantly switch the signal between “fully-ON” and “fully-OFF” driving the output hard into the transistors saturation and cut-off regions.
Different types of power amplifier architectures may include different types of components. For example, the type S power amplifiers convert analogue input signals into digital square wave pulses by a delta sigma modulator, and amplifies them to increases the output power before finally being filtered by a band pass filter.
In particular, delta sigma modulation is a method for encoding analog signals into digital signals as found in an analog to digital (ADC) converter. Delta sigma modulation may also be used to transfer high bit-count low frequency digital signals into lower bit-count higher frequency digital signals as found in digital to analog (DAC) operation. This technique is popular in modern electronic components such as converters, frequency synthesizers, switched-mode power supplies and motor controllers, due to its cost efficiency and reduced circuit complexity.
In addition, delta sigma modulators may reduce noise using noise shaping and increase signal resolution using filtering. In noise shaping, noise is filtered by a noise shaping filter. This means that the noise is reduced inside frequencies of interest and increased outside the frequencies of interest. As a result, the resolution of the signal is increased. In delta sigma modulators, noise shape filtering may be performed at an over-sampled rate. The noise shaping is achieved by subtracting estimated in-band noise from an input signal of the delta sigma modulator. The estimated in-band noise subtraction is done through the feed-back path in the modulator. A post noise shaping filter can be placed after the modulator that cuts the noise from outside the frequency of interest which, in turn increases the signal's resolution.
As such, delta sigma modulators can provide a less complex and cost efficient manner to perform Analog to Digital (A/D) and Digital to Analog (D/A) conversion in many electronic components including, but not limited to ADCs, DACs, frequency synthesizers, switch-mode power supplies, and motor controllers.
Systems and methods in accordance with embodiments of the invention use parallel delta sigma modulators for improved power conversion efficiency in power amplifiers. In accordance with one embodiment, a parallel delta sigma modulator includes a signal demultiplexer configured to receive an input signal and to demultiplex the input signal into several streams of symbols at symbol boundaries; several delta sigma modulators, where each delta sigma modulator is configured to receive a stream of symbols from the several streams of symbols and to generate a delta sigma modulated output; and a signal multiplexer configured to receive several delta sigma modulated outputs from the several delta sigma modulators and to multiplex together the several delta sigma modulated outputs into a pulse train.
In a further embodiment, the input signal is an orthogonal frequency—division multiplexing (OFDM) modulated signal.
In a further embodiment again, the OFDM signal includes several symbols and the signal demultiplexer demultiplexes the input signal using the several symbols and the signal multiplexer multiplexes the several delta sigma modulated outputs using the several symbols.
In another embodiment, the input signal is selected from the group consisting of a complex base-band signal, an RF signal, and a WiFi base-band signal.
In yet another embodiment, the delta sigma modulator includes a switch-mode power amplifier configured to receive the pulse train for signal amplification.
In still another embodiment, the delta sigma modulator includes a frequency up-converter configured to receive the pulse train.
In yet another embodiment again, a clock frequency of a delta sigma modulator in the several delta sigma modulators is an integer divider of the pulse train output frequency
In a further embodiment, each delta sigma modulator in the several delta sigma modulators includes a noise shaping filter that is un-constrained.
In still a further embodiment again, each delta sigma modulator outputs a three level signal (−1, 0, 1) that drives a switch-mode power amplifier (PA), where a ‘1’ means the switch-mode PA outputs a positive voltage pulse, a ‘−1’ means the switch-mode PA outputs a negative voltage pulse, and a ‘0’ means the PA is off.
In another embodiment again, an output of a delta sigma modulator in the several delta sigma modulators drives a linear amplifier, wherein the output is selected from the group consisting of a constant amplitude signal and a zero state signal, wherein the zero state signal turns off amplitude.
In a still further embodiment, an output of a delta sigma modulator in the several delta sigma modulators drives a switch-mode power amplifier (PA), wherein the output includes several discrete signal levels.
In another embodiment further, a delta sigma modulator design is un-constrained and the equivalent oversample ratio of the delta sigma modulator is increased by N, where N equals the number of parallel delta sigma modulators.
In one embodiment, a switch-mode power amplifier system includes: a signal encoder including a delta sigma modulator; a switch-mode power amplifier; a reconstruction filter; where the delta sigma modulator includes: a signal demultiplexer configured to receive an input signal and to demultiplex the input signal into a plurality of streams of symbols at symbol boundaries; a plurality of delta sigma modulators, where each delta sigma modulator is configured to receive a stream of symbols from the plurality of streams of symbols and to generate a delta sigma modulated output; and a signal multiplexer configured to receive a plurality of delta sigma modulated outputs from the plurality of delta sigma modulators and to multiplex together the plurality of delta sigma modulated outputs into a pulse train.
In a further embodiment, the input signal is an orthogonal frequency—division multiplexing (OFDM) modulated signal.
In a further embodiment still, the OFDM signal comprises a plurality of symbols; and the signal demultiplexer demultiplexes the input signal using the plurality of symbols and the signal multiplexer multiplexes the plurality of delta sigma modulated outputs using the plurality of symbols.
In still a further embodiment, the input signal is selected from the group consisting of a complex base-band signal, an RF signal, and a WiFi base-band signal.
In yet a further embodiment, the switch mode power amplifier system includes a frequency up-converter configured to receive the pulse train.
In another embodiment, a clock frequency of a delta sigma modulator in the plurality of delta sigma modulators is an integer divider of the pulse train output frequency.
In another embodiment, each delta sigma modulator in the several delta sigma modulators includes a noise shaping filter that is un-constrained.
In still another embodiment, each delta sigma modulator outputs a three level signal (−1, 0, 1) that drives the switch-mode power amplifier (PA), wherein a ‘1’ means the switch-mode PA outputs a positive voltage pulse, a ‘−1’ means the switch-mode PA outputs a negative voltage pulse, and a ‘0’ means the PA is off.
In yet another further embodiment, an output of a delta sigma modulator in the several delta sigma modulators drives the switch-mode power amplifier (PA), wherein the output includes a plurality of discrete signal levels.
In still a further embodiment, a delta sigma modulator design is un-constrained and the equivalent oversample ratio of the delta sigma modulator is increased by N, where N equals the number of parallel delta sigma modulators.
In one embodiment, a linear power amplifier system includes: a signal encoder comprising a delta sigma modulator; a linear power amplifier (PA); a reconstruction filter; where the delta sigma modulator includes: a signal demultiplexer configured to receive an input signal and to demultiplex the input signal into several streams of symbols at symbol boundaries; several delta sigma modulators, where each delta sigma modulator is configured to receive a stream of symbols from the several streams of symbols and to generate a delta sigma modulated output; and a signal multiplexer configured to receive several delta sigma modulated outputs from the several delta sigma modulators and to multiplex together the several delta sigma modulated outputs into a pulse train; and where an output of a delta sigma modulator in the several delta sigma modulators drives the linear power amplifier (PA), wherein the output includes a plurality of discrete signal levels.
In a further embodiment, the input signal is an orthogonal frequency-division multiplexing (OFDM) modulated signal, where the OFDM signal includes a plurality of symbols; and the signal demultiplexer demultiplexes the input signal using the several symbols and the signal multiplexer multiplexes the several delta sigma modulated outputs using the several symbols.
Turning now to the drawings, power amplifier (PA) systems and methods for achieving high efficiency in PA architectures for RF applications in accordance with various embodiments of the invention are illustrated.
One of the most important parameters of an amplifier is its power conversion efficiency. Power conversion efficiency is a measure of how effectively an amplifier converts power drawn from a DC supply to useful signal (e.g., an RF signal) power delivered to a load. Power that is not converted to useful signal power is typically dissipated as heat; and for power amplifiers that have a low efficiency, the thermal and mechanical requirements resulting from high levels of heat dissipation are often limiting factors in their design.
As such, power amplifiers may be categorized according to the following two groups as related to their power conversion efficiency (in additional to the classes of amplifiers described above): 1) linear amplifiers, and 2) non-linear amplifiers. Linear amplifiers, as the name implies, maintain good signal linearity at the amplifier output. However, a linear amplifier typically has a lower power conversion efficiency compared to a non-linear amplifier. A non-linear amplifier can achieve high power conversion efficiency at the expense of signal linearity degradation. It is traditionally used in communication systems that transmit signals with a constant amplitude envelope such as systems that employ frequency modulation (FM). In modern communication systems that use wider bandwidth and more bandwidth efficient modulation, linearity performance is important so linear amplifiers are almost always used. On the other hand, bandwidth efficient modulation translates to higher peak to average power ratio (PAPR) for the signal. Linear PA power conversion efficiency typically degrades with the increase of signal PAPR. For example, class A PA power conversion efficiency can be estimated as 10(−PAPR/10) assuming ideal circuitry for the rest of the system. For a sinusoid signal that swings between the voltage rails, the efficiency is typically 50% (PAPR is 3 dB). For a typical LTE or WiFi signal, the PAPR can be between 8 to 10 dB. At 10 dB PAPR, the power conversion efficiency is 10%. To output 250 mW of RF power, the PA consumes 2.5 W where 2.25 W or 90% are dissipated as heat.
Several power amplifier architectures have been proposed to improve power conversion efficiency. One example is an envelope tracking power amplifier. Envelope tracking describes an approach to RF amplifier design in which the power supply voltage applied to the RF power amplifier is continuously adjusted to increase the proportion of time at which the amplifier is operating at peak efficiency with respect to the power required at each instant of transmission. An example architecture of an envelope tracking power amplifier system is illustrated in
As illustrated, the envelope tracking system 100 includes a main RF path 101 and an envelope shaping signal generation path 102. The main RF path 101 is where an in phase (I) signal 110 and quadrature (Q) signal 115 can be used to create a composite RF signal 120 that is passed to the RF amplifiers 125.
Envelope shaping signal generation path 102 is a signal chain that can generate an envelope shaping signal. It consists of several components, including magnitude calculator 140, pre-envelope gain circuit 145, envelope shaping circuit 150, post-envelope gain/offset circuit 155, and/or DAC 160, to generate a signal appropriate to the operation of the amplifier and the prevailing signal conditions.
Envelope tracking modulator/supply 170 can modulate the voltage to the power amplifier 125 so that the amplifier is operating at its maximum efficiency point.
With respect to delay balancing, the delays through the various signal paths 101 and 102 can mean that the RF signal and the envelope shaping signal each have their own delays. These delays may need to be compensated for to synchronize the RF envelope and the envelope tracking modulator/supply.
While achieving good power conversion efficiency, there are several drawbacks for the envelope tracking PA architecture, including the following:
Recently, switch-mode PA architectures (e.g., classes D, E, F, and S, among others) have emerged to be a popular choice for high power conversion efficiency PA design. A switch-mode PA may be compatible with digital signal processing and ideally 100% efficient with a tuned output load. An example of a switch-mode PA system is illustrated in
As illustrated in
Switch-mode PAs (class-D) have been very popular at audio frequencies, achieving close to its theoretically 100% conversion efficiency in real world applications. Audio frequencies are generally lower than the frequencies of RF transmissions and the typical Class-D PA switches at a few MHz. On the other hand, RF amplifiers in the microwave frequency range typically operate in the multi-GHz frequencies. As such, new classes of switch-mode PAs (e.g., classes E, F, and S, among others) have been developed to achieve faster switching speed.
Achieving multi-GHz switching frequencies can be challenging for several reasons. First, switch-mode power amplifiers generally need to switch at a frequency that is at least three times that of the output frequency band and often switch at frequencies exceeding 10 GHz. With advances of Gallium nitrate (GaN) processes, switching speed of these magnitudes have been made possible. Several companies, including Qorvo, Inc. and Northrop Grumman Corporation offer GaN power transistor switches that can switch at frequencies exceeding multiple 10s of GHz at voltages up to 65V. Furthermore, a band-pass delta sigma modulator may need to run at a switching frequency at least two times that of the output frequency.
An error feedback architecture can be a popular implementation choice for delta sigma modulation (e.g. for the purposes of performing digital to analog conversion). As discussed further below, such delta sigma modulators are not capable of switching at GHz frequencies.
As illustrated in
U.S. patent application Ser. No. 15/470,805 entitled “Systems and Methods for Fast Delta Sigma Modulation Using Parallel Path Feedback Loops”, filed Mar. 27, 2017 discloses interpolated filter architectures for delta sigma modulator noise shaping filters, the disclosure of which is herein incorporated by reference in its entirety. Using an interpolated filter as the noise shaping filter may allow for a parallel implementation for the delta sigma modulator at a lower clock speed. Most any arbitrary high-speed delta sigma modulator can be implemented using the parallel architectures described in accordance with many embodiments of the invention, as described in detail below. However, limiting the noise shaping filter choice to an interpolated filter can be a major constraint for delta sigma modulator designs as it may be difficult to design a noise shaping filter with both wide bandwidth and sharp rejection using the interpolated filter architectures.
Accordingly, many embodiments of the invention provide a parallel delta sigma modulator architecture implementation without an interpolated filter constraint on the noise shaping filter. Signal modulation structures for parallel implementation are described in detail below.
Parallel Delta Sigma Modulator Architectures
Existing device technology typically limits switch-mode PA switching speeds to about 10 GHz. This limits the operation frequency of the switch-mode PA to be a few GHz, whereas newer standards such as 5G are already exploring millimeter wave frequency up to 100 GHz for more bandwidth. Accordingly, many embodiments of the delta sigma modulator can be extended to include a frequency up-converter in order to allow operation in frequencies above 10 GHz. The frequency up-converted signal may be amplified by a linear PA (class-A, A/B, B, and C). Given that the post delta sigma modulator signal in accordance with many embodiments of the invention has a much lower PAPR or more favorable amplitude distribution than the source signal, the PA efficiency can be significantly improved.
In many embodiments, the parallel delta sigma modulation architecture can be applied to most all PA classes (e.g., class A, A/B, B, C, D, E, F, S, among others) that amplify orthogonal frequency—division multiplexing (OFDM) signals. Delta sigma modulation can be an effective way to reduce high PAPR resulting from OFDM modulation without degrading the error vector magnitude (EVM) of the transmitted signal. Every dB reduction in PAPR can translate to a 1 dB improvement in PA efficiency. Accordingly, implementations of parallel delta sigma modulation architectures in accordance with certain embodiments of the invention can provide about a 3 dB reduction in PAPR or 100% improvement in PA efficiency.
Parallel Delta Sigma Modulator Architectures for OFDM
Most modern wideband communication systems are based on OFDM and its variants. For example, a 4G LTE downlink utilizes OFDMA and the uplink is SC-FDMA. Likewise, most all high speed WiFi technologies, including standards 802.11a, 802.11n, 802.11ac among others, are based on OFDM. OFDM is also used in cable and terrestrial systems as well as many emerging communication standards.
First, the cyclic prefix can serve as a guard interval, whereby it eliminates the inter-symbol interference from a previous symbol. Also, as a repetition of the end of the symbol, it can allow the linear convolution of a frequency-selective multipath channel to be modelled as circular convolution, which in turn may be transformed to the frequency domain using a discrete Fourier transform. This approach allows for simple frequency-domain processing, such as channel estimation and equalization.
Power amplifiers in accordance with many embodiments of the invention incorporate a parallel delta sigma modulator architecture for improved power conversion efficiency. An example of a parallel delta sigma modulator architecture that can be employed in a power amplifier in accordance with an embodiment of the invention is illustrated in
The outputs of these delta sigma modulators 630 are multiplexed together using signal multiplexer 640 into one pulse train 650. This pulse train 650 can be fed into the switch-mode PA for signal amplification. In the parallel implementation illustrated in
The noise shaping filter
One skilled in the art will appreciate that the parallel delta sigma modulator architecture illustrated in
In many embodiments, the switch-mode PA design may be utilized with a variety of communication technologies, including WiFi standards 802.11a, 802.11n, 802.11ac, among others. An example of a WiFi switch-mode PA design in accordance with an embodiment of the invention is illustrated in
In many embodiments, the parallel delta sigma modulation architecture can also be applied at a base-band signal. Performing delta sigma modulation in the base-band may allow for higher frequency conversion such that the final modulated signal can be significantly higher (e.g., higher than 10 GHz). A parallel delta sigma modulator with base-band signal input in accordance with an embodiment of the invention is illustrated in
In many embodiments, the PA architecture may use a frequency up-converter to increase power conversion efficiency. An example of a PA architecture that utilizes a frequency up-converter in accordance with an embodiment of the invention is illustrated in
An example of an output of the delta sigma modulator illustrated in
In many embodiments, the parallel delta sigma modulation architecture can be applied to a variety of different applications. An example of an application of the parallel delta sigma modulation architecture in the RF band in accordance with an embodiment of the invention is illustrated in
The various high efficiency power amplifier architectures described above have many advantages over existing PA designs. In particular, the parallel delta sigma modulation architectures of many embodiments makes possible very high-speed delta sigma modulation on the RF signal itself. This enables switch-mode PA designs for multi-GHz band. Furthermore, in many embodiments there is a ‘0’ state in the multi-level delta sigma output which turns off the PA to save power. Combined with tuned output loading, a switch-mode PA in accordance with many embodiments of the invention can approach 100% efficiency.
Likewise, a switch-mode PA in accordance with many embodiments of the invention is feed-forward and thus there is no feedback monitoring needed as in, for example, an envelope tracking PA architecture. Accordingly, the design complexity of many embodiments of the switch-mode PA can be reduced significantly.
In addition, in many embodiments, the parallel delta sigma modulation architecture can be paired with a frequency up-converter to generate higher frequency output. The delta sigma modulator in accordance with many embodiments of the invention can output either ‘0’ or a constant amplitude signal. Having a constant amplitude signal may allow a linear PA to operate at its peak efficiency. The ‘0’ state may allow the PA to shut off and save power. In many embodiments of the invention, using a delta sigma architecture with a tuned class-B PA, the power conversion efficiency can approach the peak efficiency of a class-B amplifier or 78%.
In many embodiments, the parallel delta sigma modulation architecture can be paired with a PAPR reduction block to get lower PAPR ratio. In many embodiments, the delta sigma modulator can suppress in-band noise at the expense of out-of-band noise growth. This may allow higher noise tolerance from the PAPR reduction and reduces the final PAPR ratio. This power conversion efficiency gain from PAPR reduction can be applied to PAs of any class appropriate to the requirements of a given application.
In many embodiments, the parallel delta sigma modulation architecture allows parallel computation of the feedback path and thus is able to achieve faster effective speed with parallelization. In several embodiments, the parallel delta sigma modulation architecture also takes advantage of the guard interval between OFDM symbols in the OFDM modulation. Multiple delta sigma processors can be used to process multiple OFDM symbols at the same time. Furthermore, in many embodiments, the delta sigma modulator may no longer be limited by the device delay of the feedback path. Accordingly, the number of computations can be the same as serial computation with no overhead for parallelization.
In many embodiments, the parallel delta sigma modulation architecture can achieve very high-speed delta sigma modulator speed with application in direct-RF conversion, switched-mode PA, and PAPR reduction, among various other applications. Although the present invention has been described in certain specific aspects, many additional modifications and variations would be apparent to those skilled in the art. It is therefore to be understood that the present invention may be practiced otherwise than specifically described, including various changes in the implementation. Thus, embodiments of the present invention should be considered in all respects as illustrative and not restrictive.
This application claims priority under 35 U.S.C. 119(e) to U.S. Provisional Patent Application Ser. No. 62/425,035, entitled “Switch-mode Power Amplifier (PA) Architecture for RF Application”, filed Nov. 21, 2016 and U.S. Provisional Patent Application Ser. No. 62/427,641, entitled “Switch-mode Power Amplifier (PA) Architecture for RF Application” filed Nov. 29, 2016, and that are hereby incorporated by reference in their entirety as if set forth herewith.
Number | Name | Date | Kind |
---|---|---|---|
5682161 | Ribner et al. | Oct 1997 | A |
6724249 | Nilsson | Apr 2004 | B1 |
7176820 | Fuller et al. | Feb 2007 | B1 |
8294605 | Pagnanelli | Oct 2012 | B1 |
8949699 | Gustlin | Feb 2015 | B1 |
10020818 | Yu et al. | Jul 2018 | B1 |
20010022555 | Lee et al. | Sep 2001 | A1 |
20020053986 | Brooks et al. | May 2002 | A1 |
20020057214 | Brooks et al. | May 2002 | A1 |
20020061086 | Adachi et al. | May 2002 | A1 |
20020093442 | Gupta et al. | Jul 2002 | A1 |
20030128143 | Yap et al. | Jul 2003 | A1 |
20030137359 | Patana et al. | Jul 2003 | A1 |
20030174080 | Brooks et al. | Sep 2003 | A1 |
20030179121 | Gupta et al. | Sep 2003 | A1 |
20030227401 | Yang et al. | Dec 2003 | A1 |
20040032355 | Melanson et al. | Feb 2004 | A1 |
20040066321 | Brooks et al. | Apr 2004 | A1 |
20040081266 | Adachi et al. | Apr 2004 | A1 |
20040108947 | Yang et al. | Jun 2004 | A1 |
20040228416 | Anderson et al. | Nov 2004 | A1 |
20040233084 | Brooks et al. | Nov 2004 | A1 |
20040233085 | Fukuda et al. | Nov 2004 | A1 |
20040252038 | Robinson et al. | Dec 2004 | A1 |
20050001750 | Lo et al. | Jan 2005 | A1 |
20050012649 | Adams et al. | Jan 2005 | A1 |
20050030212 | Brooks et al. | Feb 2005 | A1 |
20050057385 | Gupta et al. | Mar 2005 | A1 |
20050062627 | Jelonnek et al. | Mar 2005 | A1 |
20050063505 | Dubash et al. | Mar 2005 | A1 |
20050088327 | Yokoyama et al. | Apr 2005 | A1 |
20050093726 | Hezar et al. | May 2005 | A1 |
20050116850 | Hezar et al. | Jun 2005 | A1 |
20050128111 | Brooks et al. | Jun 2005 | A1 |
20050156767 | Melanson et al. | Jul 2005 | A1 |
20050156768 | Melanson et al. | Jul 2005 | A1 |
20050156771 | Melanson et al. | Jul 2005 | A1 |
20050162222 | Hezar et al. | Jul 2005 | A1 |
20050207480 | Norsworthy et al. | Sep 2005 | A1 |
20050266805 | Jensen et al. | Dec 2005 | A1 |
20050285685 | Frey et al. | Dec 2005 | A1 |
20060028364 | Rivoir et al. | Feb 2006 | A1 |
20060038708 | Luh et al. | Feb 2006 | A1 |
20060044057 | Hezar et al. | Mar 2006 | A1 |
20060109153 | Gupta et al. | May 2006 | A1 |
20060115036 | Adachi et al. | Jun 2006 | A1 |
20060164276 | Luh et al. | Jul 2006 | A1 |
20060290549 | Laroia et al. | Dec 2006 | A1 |
20070001776 | Li et al. | Jan 2007 | A1 |
20070013566 | Chuang et al. | Jan 2007 | A1 |
20070018866 | Melanson et al. | Jan 2007 | A1 |
20070035425 | Hinrichs et al. | Feb 2007 | A1 |
20070080843 | Lee et al. | Apr 2007 | A1 |
20070126618 | Tanaka et al. | Jun 2007 | A1 |
20070152865 | Melanson et al. | Jul 2007 | A1 |
20070165708 | Darabi et al. | Jul 2007 | A1 |
20070279034 | Roh et al. | Dec 2007 | A1 |
20080062022 | Melanson et al. | Mar 2008 | A1 |
20080062024 | Maeda et al. | Mar 2008 | A1 |
20080100486 | Lin et al. | May 2008 | A1 |
20080180166 | Gustat et al. | Jul 2008 | A1 |
20080191713 | Hauer et al. | Aug 2008 | A1 |
20080198050 | Akizuki et al. | Aug 2008 | A1 |
20080211588 | Frey et al. | Sep 2008 | A1 |
20080272945 | Melanson et al. | Nov 2008 | A1 |
20080272946 | Melanson et al. | Nov 2008 | A1 |
20090083567 | Kim et al. | Mar 2009 | A1 |
20090096649 | Ferri et al. | Apr 2009 | A1 |
20090220219 | McLeod et al. | Sep 2009 | A1 |
20090309774 | Hamashita et al. | Dec 2009 | A1 |
20100045498 | Liu et al. | Feb 2010 | A1 |
20100052960 | Lakdawala et al. | Mar 2010 | A1 |
20100074368 | Karthaus et al. | Mar 2010 | A1 |
20100164773 | Clement et al. | Jul 2010 | A1 |
20100214143 | Nakamoto et al. | Aug 2010 | A1 |
20100219999 | Oliaei et al. | Sep 2010 | A1 |
20100225517 | Aiba et al. | Sep 2010 | A1 |
20100283648 | Niwa et al. | Nov 2010 | A1 |
20100295715 | Sornin et al. | Nov 2010 | A1 |
20110006936 | Lin et al. | Jan 2011 | A1 |
20110050472 | Melanson et al. | Mar 2011 | A1 |
20110149155 | Lin et al. | Jun 2011 | A1 |
20110299642 | Norsworthy et al. | Dec 2011 | A1 |
20120063519 | Oliaei et al. | Mar 2012 | A1 |
20120161864 | Lee | Jun 2012 | A1 |
20120194369 | Galton et al. | Aug 2012 | A1 |
20120200437 | Moue et al. | Aug 2012 | A1 |
20120242521 | Kinyua et al. | Sep 2012 | A1 |
20120275493 | Fortier et al. | Nov 2012 | A1 |
20120280843 | Tsai et al. | Nov 2012 | A1 |
20120286982 | Kajita et al. | Nov 2012 | A1 |
20130068019 | Takase et al. | Mar 2013 | A1 |
20130099949 | Wagner et al. | Apr 2013 | A1 |
20130169460 | Obata et al. | Jul 2013 | A1 |
20130259103 | Jensen et al. | Oct 2013 | A1 |
20140028374 | Zare-Hoseini et al. | Jan 2014 | A1 |
20140035769 | Rajaee et al. | Feb 2014 | A1 |
20140070969 | Shu | Mar 2014 | A1 |
20140113575 | Mitani et al. | Apr 2014 | A1 |
20140286467 | Norsworthy et al. | Sep 2014 | A1 |
20140307825 | Ostrovskyy et al. | Oct 2014 | A1 |
20140320325 | Muthers et al. | Oct 2014 | A1 |
20140368365 | Quiquempoix et al. | Dec 2014 | A1 |
20150002325 | Lin | Jan 2015 | A1 |
20150009054 | Ono et al. | Jan 2015 | A1 |
20150036766 | Elsayed et al. | Feb 2015 | A1 |
20150061907 | Miglani | Mar 2015 | A1 |
20150084797 | Singh et al. | Mar 2015 | A1 |
20150109157 | Caldwell et al. | Apr 2015 | A1 |
20150116138 | Li et al. | Apr 2015 | A1 |
20150146773 | Ma et al. | May 2015 | A1 |
20150171887 | Okuda | Jun 2015 | A1 |
20150341159 | Norsworthy et al. | Nov 2015 | A1 |
20150349794 | Line | Dec 2015 | A1 |
20160013805 | Maehata | Jan 2016 | A1 |
20160049947 | Adachi | Feb 2016 | A1 |
20160050382 | Rizk et al. | Feb 2016 | A1 |
20160065236 | Ahmed et al. | Mar 2016 | A1 |
20160149586 | Roh et al. | May 2016 | A1 |
20160336946 | Ho et al. | Nov 2016 | A1 |
20160344404 | Miglani et al. | Nov 2016 | A1 |
20160359499 | Bandyopadhyay | Dec 2016 | A1 |
20160373125 | Pagnanelli et al. | Dec 2016 | A1 |
20170033801 | Lo et al. | Feb 2017 | A1 |
20170041019 | Miglani et al. | Feb 2017 | A1 |
20170045403 | Zanbaghi et al. | Feb 2017 | A1 |
20170093407 | Kim et al. | Mar 2017 | A1 |
20170102248 | Maurer et al. | Apr 2017 | A1 |
20170134055 | Ebrahimi et al. | May 2017 | A1 |
20170163295 | Talty et al. | Jun 2017 | A1 |
20170170839 | Zhao et al. | Jun 2017 | A1 |
20170170840 | Zhao | Jun 2017 | A1 |
20170184645 | Sawataishi | Jun 2017 | A1 |
20170222652 | Adachi | Aug 2017 | A1 |
20170222658 | Miglani et al. | Aug 2017 | A1 |
20170250662 | Cope et al. | Aug 2017 | A1 |
20170276484 | Marx et al. | Sep 2017 | A1 |
20170288693 | Kumar et al. | Oct 2017 | A1 |
Number | Date | Country |
---|---|---|
2016063038 | Apr 2016 | WO |
2018094380 | May 2018 | WO |
Entry |
---|
International Search Report and Written Opinion for International Application No. PCT/US2017/062744, Search completed Jan. 17, 2018, dated Feb. 5, 2018, 13 Pgs. |
Aigner et al., “Advancement of MEMS into RF-Filter Applications”, International Electron Devices Meetings, IEDM '02, Dec. 8-11, 2002, pp. 897-900. |
Lam, “A Review of the Recent Development of MEMS and Crystal Oscillators and Their Impacts on the Frequency Control Products Industry”, Invited Paper, 2008 IEEE International Ultrasonics Symposium, Beijing, Nov. 2-5, 2008, 11 pages. |
Piazza et al., “Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators”, Journal of Microelectromechanical Systems, Dec. 2006, vol. 15, No. 6, pp. 1406-1418. |
International Preliminary Report on Patentability for International Application PCT/US2017/062744, Report issed May 21, 2019, dated May 31, 2019, 8 Pgs. |
Number | Date | Country | |
---|---|---|---|
20180145700 A1 | May 2018 | US |
Number | Date | Country | |
---|---|---|---|
62427641 | Nov 2016 | US | |
62425035 | Nov 2016 | US |