High Force Micro-Actuator Using TiNi Shape Memory Alloy

Information

  • NSF Award
  • 9022440
Owner
  • Award Id
    9022440
  • Award Effective Date
    7/1/1991 - 33 years ago
  • Award Expiration Date
    12/31/1993 - 31 years ago
  • Award Amount
    $ 249,334.00
  • Award Instrument
    Standard Grant

High Force Micro-Actuator Using TiNi Shape Memory Alloy

This is a Phase II SBIR research activity. Its goal is to define the processing requirements for combining shape-memory film technology with silicon micro-fabrication. This will be done by focusing on development of a microvalve. Questions raised in Phase I will be addressed, structures will be fabricated on silicon and film actuators tested, a valve design test bed will be constructed and a variety of valve configurations examined, and silicon based microvalves will be fabricated over a range of sizes.

  • Program Officer
    Ritchie B. Coryell
  • Min Amd Letter Date
    7/17/1991 - 33 years ago
  • Max Amd Letter Date
    11/13/1995 - 29 years ago
  • ARRA Amount

Institutions

  • Name
    TiNi Alloy Company
  • City
    San Leandro
  • State
    CA
  • Country
    United States
  • Address
    1619 Neptune Drive
  • Postal Code
    945777316
  • Phone Number
    5104839676

Investigators

  • First Name
    A. David
  • Last Name
    Johnson
  • Email Address
    david@tinialloy.com
  • Start Date
    7/1/1991 12:00:00 AM

FOA Information

  • Name
    Problem-Oriented
  • Code
    300000
  • Name
    Engineering-Electrical
  • Code
    55

Program Element

  • Text
    SMALL BUSINESS PHASE II
  • Code
    5373

Program Reference

  • Text
    SOLID-STATE&MICROSTRUCTURE RES
  • Code
    1456
  • Text
    SMALL BUSINESS PHASE II
  • Code
    5373