High Speed Uv and Electron Resist System

Information

  • NSF Award
  • 8018036
Owner
  • Award Id
    8018036
  • Award Effective Date
    10/1/1980 - 43 years ago
  • Award Expiration Date
    3/31/1983 - 41 years ago
  • Award Amount
    $ 274,741.00
  • Award Instrument
    Standard Grant

High Speed Uv and Electron Resist System

  • Program Officer
    name not available
  • Min Amd Letter Date
    9/29/1980 - 43 years ago
  • Max Amd Letter Date
    10/25/1982 - 41 years ago
  • ARRA Amount

Institutions

  • Name
    Gca Corporation
  • City
    Bedford
  • State
    MA
  • Country
    United States
  • Postal Code
    01730

Investigators

  • First Name
    Gershon
  • Last Name
    Goldberg
  • Start Date
    10/1/1980 12:00:00 AM

FOA Information

  • Name
    Materials Research
  • Code
    106000
  • Name
    Engineering-Metallurgy & Material
  • Code
    57