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High Speed Uv and Electron Resist System
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Information
NSF Award
8018036
Owner
GCA CORPORATION
Award Id
8018036
Award Effective Date
10/1/1980 - 44 years ago
Award Expiration Date
3/31/1983 - 41 years ago
Award Amount
$ 274,741.00
Award Instrument
Standard Grant
Information
Content
Organizations
Impact
Timeline
High Speed Uv and Electron Resist System
Program Officer
name not available
Min Amd Letter Date
9/29/1980 - 44 years ago
Max Amd Letter Date
10/25/1982 - 42 years ago
ARRA Amount
Institutions
Name
Gca Corporation
City
Bedford
State
MA
Country
United States
Postal Code
01730
Investigators
First Name
Gershon
Last Name
Goldberg
Start Date
10/1/1980 12:00:00 AM
FOA Information
Name
Materials Research
Code
106000
Name
Engineering-Metallurgy & Material
Code
57