Claims
- 1. A ceramic nut for use in securing a hollow tube and a configured male threaded member having a cylindrical shaped end together for transporting high temperature fluids between the hollow tube and configured male threaded member in semiconductor processing applications, comprising:
- a. a ceramic nut including a body, a top surface and a bottom surface;
- b. a generally inner threaded lower interior portion of said ceramic nut for receiving a male threaded member;
- c. a hole in said top surface of said nut;
- d. a geometrically configured cylindrical inner upper portion of said ceramic nut which has a diameter slightly smaller than the minimum diameter of said inner threaded lower interior portion and extending from said inner threaded lower interior portion to a location adjacent said hole, said cylindrical inner upper portion being of a diameter larger than said hole for receiving a hollow tube and securing the hollow tube to a cylindrical shaped end of a male threaded member; and
- e. said ceramic nut made from a material selected from the group consisting of 90-99 percent aluminum oxide, zirconia (ZrO.sub.2), and silicon carbide (SiC).
CROSS REFERENCES TO APPLICATIONS
This application is a continuation of application whose Ser. No. is 07/769,778, entitled HIGH TEMPERATURE CERAMIC NUT, filed Oct. 2, 1991 now U.S. Pat. No. 5,332,271 with Robert W. Grant, Richard E. Novak and James S. Molinaro listed as patent inventors.
US Referenced Citations (10)
Continuations (1)
|
Number |
Date |
Country |
Parent |
769778 |
Oct 1991 |
|