TREA

Higher temperature vented susceptor

Follow

Information

  • Patent Grant
  • D958764
  • Patent Number
    D958,764
  • Date Filed
    Tuesday, May 4, 2021
    5 years ago
  • Date Issued
    Tuesday, July 26, 2022
    4 years ago
  • US Classifications
    Field of Search
    • US
    • D13 182
    • D13 199
    • D25 199
    • 438 006000
    • 438 067000
    • 438 107000
    • 438 149000
    • 257 625000
    • 118 715000
    • 118 720000
    • 118 724000
    • 118 725000
    • 118 728000
    • 118 729000
    • 204 192100
    • 204 298010
    • CPC
    • C23C16/46
    • C23C16/463
    • C23C16/466
    • C23C16/458
    • C23C16/4581
    • C23C16/4582
    • C23C16/4583
    • C23C16/4587
    • C23C16/481
    • C23C16/50
    • C23C14/50
    • C23C14/505
    • H01L21/67005
    • H01L21/67011
    • H01L21/67063
    • H01L21/67098
    • H01L21/67103
    • H01L21/67109
    • H01L21/67115
  • International Classifications
    • 1303
    • Term of Grant
      15Years
Information
Abstract
Description


FIG. 1 is a front perspective view of a higher temperature vented susceptor, showing our new design;



FIG. 2 is a back perspective view thereof;



FIG. 3 is a left side view thereof; and,



FIG. 4 is a right side view thereof.


The dash-dash lines in FIGS. 1-4 form no part of the claimed design.


Claims
  • The ornamental design for a higher temperature vented susceptor, as shown and described.
US Referenced Citations (131)
Number Name Date Kind
3407783 Capita Oct 1968 A
3549847 Clark et al. Dec 1970 A
3641974 Yamada et al. Feb 1972 A
3796182 Rosler Mar 1974 A
4499354 Hill et al. Feb 1985 A
4522149 Garbis et al. Dec 1985 A
4560420 Lord Dec 1985 A
4710428 Tamamizu et al. Dec 1987 A
4821674 deBoer et al. Apr 1989 A
4958061 Wakabayashi et al. Dec 1990 A
4978567 Miller Dec 1990 A
4986215 Yamada et al. Jan 1991 A
4990374 Keeley et al. Jul 1991 A
5033407 Mizuno et al. Sep 1991 A
5044943 Bowman et al. Sep 1991 A
5071670 Kelly Dec 1991 A
5074017 Toya et al. Dec 1991 A
5098198 Nulman et al. Mar 1992 A
5108792 Anderson et al. Apr 1992 A
5119540 Kong et al. Jun 1992 A
5119541 Ohmi et al. Jun 1992 A
5121531 Severns et al. Jun 1992 A
5156820 Wong et al. Oct 1992 A
5188501 Tomita et al. Feb 1993 A
5199483 Bahng Apr 1993 A
5200157 Toya et al. Apr 1993 A
5242501 McDiarmid Sep 1993 A
5292554 Sinha et al. Mar 1994 A
5298465 Levy Mar 1994 A
5304248 Cheng et al. Apr 1994 A
5306699 Eddy Apr 1994 A
5308645 Zachman et al. May 1994 A
5332442 Kubodera et al. Jul 1994 A
5343938 Schmidt Sep 1994 A
5354715 Wang et al. Oct 1994 A
5356486 Sugarman et al. Oct 1994 A
5370739 Foster et al. Dec 1994 A
5383971 Selbrede Jan 1995 A
5393349 Ohkase Feb 1995 A
5403401 Haafkens et al. Apr 1995 A
5421893 Perlov Jun 1995 A
5427620 deBoer et al. Jun 1995 A
5444217 Moore et al. Aug 1995 A
5455069 Lee Oct 1995 A
5456757 Aruga et al. Oct 1995 A
5461214 Peck et al. Oct 1995 A
5467220 Xu Nov 1995 A
5492566 Sumnitsch Feb 1996 A
5514439 Sibley May 1996 A
5527393 Sato et al. Jun 1996 A
5549756 Sorensen et al. Aug 1996 A
5551985 Brors et al. Sep 1996 A
5558717 Zhao et al. Sep 1996 A
5584936 Pickering et al. Dec 1996 A
5588827 Muka Dec 1996 A
5620525 van de Ven et al. Apr 1997 A
5645646 Beinglass et al. Jul 1997 A
5656093 Burkhart et al. Aug 1997 A
5683518 Moore et al. Nov 1997 A
5690742 Ogata et al. Nov 1997 A
5700725 Hower et al. Dec 1997 A
5738165 Imai Apr 1998 A
5761023 Lue et al. Jun 1998 A
5800622 Takemi et al. Sep 1998 A
5803977 Tepman et al. Sep 1998 A
5834737 Hirose et al. Nov 1998 A
D404370 Kimura Jan 1999 S
5895530 Shrotriya et al. Apr 1999 A
5938850 Arami et al. Aug 1999 A
5960159 Ikeda et al. Sep 1999 A
6001183 Gurary et al. Dec 1999 A
6020212 Mathis Feb 2000 A
6077357 Rossman et al. Jun 2000 A
6086680 Foster et al. Jul 2000 A
6090212 Mahawili Jul 2000 A
6093252 Wengert et al. Jul 2000 A
6167834 Wang et al. Jan 2001 B1
6293749 Raaijmakers et al. Sep 2001 B1
6325858 Wengert et al. Dec 2001 B1
6331023 Goodwin et al. Dec 2001 B1
6343183 Halpin et al. Jan 2002 B1
6394797 Sugaya et al. May 2002 B1
6402850 Beinglass et al. Jun 2002 B1
6464790 Sherstinsky et al. Oct 2002 B1
6608287 Halpin et al. Aug 2003 B2
6634882 Goodman Oct 2003 B2
6709267 Hawkins et al. Mar 2004 B1
D496008 Takahashi et al. Sep 2004 S
6893507 Goodman et al. May 2005 B2
7033445 Keeton et al. Apr 2006 B2
D525127 Cogley et al. Jul 2006 S
D600223 Aggarwal et al. Sep 2009 S
7601224 Foree Oct 2009 B2
7602224 Foree Oct 2009 B2
7648579 Goodman et al. Jan 2010 B2
7722441 Goela May 2010 B2
7740703 Hasegawa Jun 2010 B2
8088225 Goodman et al. Jan 2012 B2
8366830 Nakamura et al. Feb 2013 B2
8394229 Aggarwal et al. Mar 2013 B2
8801857 Aggarwal et al. Aug 2014 B2
D743357 Vyne Nov 2015 S
9558985 Wang et al. Jan 2017 B2
D784276 Tiner et al. Apr 2017 S
9633889 Cuvalci et al. Apr 2017 B2
10068791 Parsey, Jr. Sep 2018 B2
D830981 Jeong et al. Oct 2018 S
10376916 Ranish Aug 2019 B2
D864134 Watarai et al. Oct 2019 S
D914620 Rokkam Mar 2021 S
11018047 Rokkam et al. May 2021 B2
D920936 Rokkam Jun 2021 S
20020011211 Halpin Jan 2002 A1
20020043337 Goodman et al. Apr 2002 A1
20030000472 Lim et al. Jan 2003 A1
20030049580 Goodman Mar 2003 A1
20040060512 Waldhauer et al. Apr 2004 A1
20040229002 Davis et al. Nov 2004 A1
20050092439 Keeton et al. May 2005 A1
20050284372 Murugesh et al. Dec 2005 A1
20060057826 De Boer Mar 2006 A1
20090280248 Goodman et al. Nov 2009 A1
20100031884 Aggarwal et al. Feb 2010 A1
20100107974 Givens et al. May 2010 A1
20130109192 Hawkins et al. May 2013 A1
20160133504 Chu et al. May 2016 A1
20180094350 Verghese et al. Apr 2018 A1
20190355612 Sakurai Nov 2019 A1
20200234996 Rokkam et al. Jul 2020 A1
20200373187 Singu et al. Nov 2020 A1
20210125853 Rathi et al. Apr 2021 A1
Foreign Referenced Citations (30)
Number Date Country
0339279 Nov 1989 EP
0448346 Mar 1991 EP
0445596 Sep 1991 EP
0634785 Jan 1995 EP
0669640 Aug 1995 EP
0766289 Apr 1997 EP
0840358 May 1998 EP
2181458 Apr 1987 GB
7-58039 Mar 1995 JP
2000-269310 Sep 2000 JP
2002-184843 Jun 2002 JP
2002-526915 Aug 2002 JP
2003-124167 Apr 2003 JP
2006-228802 Aug 2006 JP
2007-502022 Feb 2007 JP
D1422195 Aug 2014 JP
D1547357 Apr 2016 JP
D1570747 Feb 2018 JP
D1570748 Feb 2018 JP
10-1999-0069084 Sep 1999 KR
1999-0069091 Sep 1999 KR
100460338 Nov 2004 KR
10-2007-0098025 Oct 2007 KR
D111900 Jul 2006 TW
D136587 Aug 2010 TW
D184695 Aug 2017 TW
D191199 Jun 2018 TW
WO 9630713 Oct 1996 WO
WO 9708743 Mar 1997 WO
WO 2010016964 Feb 2010 WO
Non-Patent Literature Citations (1)
Entry
“Shaping the Future in Semiconductor Processing.” Advertisement for Morton International, Inc., Ceramic Solutions. vol. 73, No. 7, Jul. 1994: advertisements (circa 1993).
Divisions (1)
Number Date Country
Parent 29677173 Jan 2019 US
Child 29782159 US