| Number | Name | Date | Kind |
|---|---|---|---|
| 3329541 | Mears | Jul 1967 | |
| 3574013 | Frantzen | Apr 1971 | |
| 3839108 | Leinkram | Oct 1974 | |
| 3973965 | Suzuki | Aug 1976 | |
| 4021276 | Cho | May 1977 | |
| 4303466 | Thoms | Dec 1981 |
| Entry |
|---|
| "Nozzle Arrays in Mesa Structures Etched in Single Crystal Silicon", IBM Tech. Disclosure Bulletin, vol. 19, (No. 6), pp. 2249-2250 11/76. |