The invention relates to a hollow fiber spinning nozzle in accordance with the preamble of claim 1.
Hollow fiber spinning nozzles are already known which serve the manufacture of polymeric hollow fiber membranes. As shown in
It is therefore the object of the invention to provide hollow fiber spinning nozzles with which fine capillary membranes can also be manufactured, with the production tolerances being minimized and the manufacturing process for these hollow fiber spinning nozzles being made much cheaper.
This object is solved in accordance with the invention by the combination of the features of claim 1. A completely innovative manner of construction is thus provided for hollow fiber spinning nozzles, since the invention moves away from conventional metal working and uses methods of microstructure technology. In accordance with the invention, at least two plate-shaped bodies structured by means of microstructure technology are namely assembled to form the hollow fiber spinning nozzle. A second non-structured plate is preferably joined onto a first plate formed by means of microstructure technology in this process, with the second plate only being structured after attachment to the first plate. The plates are areally connected to one another. A plurality of advantages are opened up by the new production method. First, a substantially smaller dimensioning of the nozzle structure can be realized by means of microstructure technology. Moreover, a substantially higher precision can be realized with respect to the nozzle structure. This precision comes about in that the nozzle structure arises in one step. It is only restricted by the precision of the underlying lithography mask which is used in microstructure technology. Such lithography masks can, however, be produced extremely precisely with tolerances of 100 nm. A further advantage of the method in accordance with the invention lies in the substantially lower production costs of the spinning nozzles.
Special aspects of the invention result from the dependent claims following the main claim.
Generally, all materials of microstructure technology can naturally be used for the realization of the hollow fiber spinning nozzles in accordance with the invention, provided they can be anisotropically etched and bonded. However, mono-crystalline silicon, gallium arsenide (GaAs) or germanium can particularly advantageously be used.
In accordance with a particular embodiment of the invention, a hollow fiber spinning nozzle consists of two plates, with the mass supply passages, a mass flow homogenization zone, a coagulation agent/support agent supply bore and a needle stub being cut out in the first plate, while a nozzle structure having a mass annular gap and a needle with a coagulation agent/support agent bore being cut out in the second plate.
Alternatively, a design is also feasible in which the second plate additionally contains the mass supply passages and the mass flow homogenization zone. These elements and the needle stub are omitted on the first plate there. A particular feature of this design is that the needle of the spinning nozzle is only connected to the first plate at an end face.
These preferred aspects for a hollow fiber spinning nozzle, with which a simple capillary hollow fiber membrane can be manufactured, advantageously have the following dimensions:
A further preferred aspect of the invention consists of three plates, with the first plate including supply passages, a homogenization zone and a needle stub with a central supply bore, a second plate which adjoins the first plate has supply passages, a homogenization zone and a further needle stub with a concentric ring passage and a needle extension, and wherein a third plate which in turn adjoins the second plate has a nozzle structure consisting of a central bore and two concentric annular gaps. Capillary membranes with co-extruded double layers can be manufactured by means of this hollow fiber spinning nozzle in accordance with the invention.
An alternative embodiment results in that the hollow fiber spinning nozzle is made up of three single plates, with the first plate having a central supply bore, a second plate adjoining the first plate having parallel supply passages and homogenization zones arranged with respect to these as well as a needle stub with a concentric ring passage and a central bore and with the third plate adjoining the second plate having a nozzle structure consisting of a central bore and two concentric annular gaps.
The outer diameter of the multi-passage hollow fiber spinning nozzle is advantageously smaller than 1 mm. The outer diameter of the multi-passage hollow fiber spinning nozzle is particularly advantageously smaller than or equal to 0.45 mm. A dialysis membrane with an inner diameter of 200-300 μm can be manufactured with this.
Further details and advantages of the invention result from the embodiments shown in the drawing. There are shown:
In
The design of the second plate 32 can also be seen from
In the manufacture of hollow fiber spinning nozzles by means of microstructure technology, 2 round wafer disks with diameters of 100 to 300 mm are the starting point. A plurality of spinning nozzle structures are simultaneously made from these wafers. The individual hollow fiber spinning nozzles 10 are then obtained by dividing the wafers already processed. The individual split spinning nozzles can each be given a single nozzle structure, as shown here, or also a plurality of nozzle structures in one nozzle structure compound. This is achieved in that not all nozzle structures formed on the wafer are separated from one another, but that a plurality of nozzle structures together form one multi-nozzle unit which are cut out from the wafer along their outer contour.
The manufacture of the spinning nozzles 10 starts with the two-side structuring of a first wafer which accommodates the elements 34, 36, 38, 40 of the plate 30 of the spinning nozzle 10. The structures are produced with a sequence of standard lithography processes, i.e. masks of photoresist, SiO, Si—N or similar, and standard etching processes. In the standard etching processes, in particular reactive ion etching (RIE), deep reactive ion etching (DRIE) and cryo-etching should be named. Specific deep etching processes such as DRIE and cryo-etching are particularly suitable. The lithography masks for the front side and for the rear side must be optically aligned to one another. Subsequently, the second wafer, from which the second plate should be manufactured, is bonded to the correspondingly structured first wafer. In this process, all bonding methods can be used, anodic bonding, direct bonding or similar.
However, direct bonding is particularly suitable since the highest strengths are reached and thus a good hold of the needle on the first plate is ensured. In the next step, the nozzle structure 48 with the annular gap 42 and the coagulation agent bore 46 are manufactured in a two-stage etching process. In the first step, only the deeper coagulation agent bore is driven forward. In the second step, both structures are then etch finished. Said lithography processes and etching processes area again used, with the use of the deep etching process being more advisable here than in the working of the first wafer. In the final step, the individual spinning nozzles are, as already previously described, cut out of the wafer by suitable separation processes such as wafer sawing or laser working.
Further alternative aspects of the invention will be explained with reference to
A coagulation agent bore 118 is likewise cut out in the second plate 104 and is surrounded by a further needle stub 120 and by a ring space 122. Furthermore, further supply passages 124 are cut out in the second plate 104 with a subsequent homogenization zone 126. Finally, the third plate 106 has two annular gaps 128 and 130 for the respective polymeric materials which should be co-extruded as well as a needle 132 with a coagulation agent bore 134. In the variants of
The three plates 102, 104 and 106 are in turn connected to one another to form the base body 100 by a suitable bonding process, advantageously by direct bonding. Otherwise, the manufacturing method for the hollow fiber spinning nozzle 10 in accordance with
Number | Date | Country | Kind |
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102 11 052.2 | Mar 2002 | DE | national |
Filing Document | Filing Date | Country | Kind |
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PCT/EP03/01447 | 2/13/2003 | WO |