Number | Name | Date | Kind |
---|---|---|---|
2664852 | Chadsey, Jr. | Jan 1954 | |
2665226 | Godley, 2nd et al. | Jan 1954 | |
2996037 | Eng | Aug 1961 | |
3016873 | Baer et al. | Jan 1962 | |
4230068 | Itoh et al. | Oct 1980 | |
4438368 | Abe et al. | Mar 1984 | |
4552791 | Hahn | Nov 1985 | |
4573429 | Cobbs et al. | Mar 1986 | |
4697974 | Eltoukhy | Oct 1987 | |
4752426 | Cho | Jun 1988 | |
4765273 | Anderle | Aug 1988 | |
4824545 | Arnold et al. | Apr 1989 | |
4888199 | Felts et al. | Dec 1989 | |
4975168 | Ohno et al. | Dec 1990 | |
5308649 | Babacz | May 1994 | |
5308950 | Ramm et al. | May 1994 | |
5374314 | Babacz | Dec 1994 | |
5378510 | Thomas et al. | Jan 1995 | |
5521351 | Mahoney | May 1996 | |
5558720 | Sarraf et al. | Sep 1996 | |
5565248 | Plester et al. | Oct 1996 | |
5651867 | Kokaku et al. | Jul 1997 | |
5662741 | Ehrich | Sep 1997 | |
5704983 | Thomas et al. | Jan 1998 |
Number | Date | Country |
---|---|---|
1521421 | Dec 1969 | DE |
3239131 | Apr 1984 | DE |
4305721 | Jul 1994 | DE |
4343042 | Mar 1995 | DE |
4412906 | Jul 1995 | DE |
0460796-A2 | Dec 1991 | EP |
0535810-A1 | Apr 1993 | EP |
0785291 | Jul 1997 | EP |
2139647 | Nov 1984 | GB |
2263472 | Jul 1993 | GB |
57-169088 | Oct 1982 | JP |
61-104075 | May 1986 | JP |
63-243264 | Oct 1988 | JP |
63-312968 | Dec 1988 | JP |
2-118064 | May 1990 | JP |
8-092764 | Apr 1996 | JP |
Entry |
---|
“Reactive Deposition of Insulating Compound Layers by Pulse Magnetron Sputtering” by Fraunhofer-Institut, Aug. 1996 Film Deposition Techniques, pp. 250-271. |
“Glass” by J.H. Adams et al., vol. 12, pp. 555-627. |