Number | Name | Date | Kind |
---|---|---|---|
6171922 | Maghsoudnia | Jan 2001 | B1 |
6211032 | Redford et al. | May 2001 | B1 |
Entry |
---|
Grebene, “Thin-Film Processes”, Bipolar and MOS Analog Integrated Circuit Design, John Wiley & Sons, Inc., pp. 22-26, (1984). |
Hamilton et al, “Photolithography”, Basic Integrated Circuit Engineering, McGraw-Hill Book Company, pp. 8-12, (1975). |
Sze, “Rapid Thermal Annealing”, VLSI Technology, Second Edition, McGraw-Hill Book Company, pp. 359-362, (1988). |