A portion of the disclosure of this patent document contains material which is subject to copyright protection. The copyright owner has no objection to the facsimile reproduction by anyone of the patent document or the patent disclosure, as it appears in the Patent and Trademark Office patent files or records, but otherwise reserves all copyright rights whatsoever.
Pick and place machines are generally used to manufacture electronic circuit boards. A blank printed circuit board is usually supplied to the pick and place machine, which then picks electronic components from component feeders, and places such components upon the board. The components are held upon the board temporarily by solder paste, or adhesive until a subsequent step in which the solder paste is melted, or the adhesive is fully cured.
Pick and place machine operation is challenging. Since machine speed corresponds with throughput, the faster the pick and place machine runs, the less costly the manufactured board. Additionally, placement accuracy is extremely important. Many electrical components, such as chip capacitors and chip resistors are relatively small and must be accurately placed on equally small placement locations. Other components, while larger, have a significant number of leads or conductors that are spaced from one another at a relatively fine pitch. Such components must also be accurately placed to ensure that each lead is placed upon the proper pad. Thus, not only must the machine operate extremely fast, but it must also place components extremely accurately.
In order to enhance the quality of board manufacture, fully or partially populated boards are generally inspected after the placement operation(s), both before and after solder reflow, in order to identify components that are improperly placed or missing or any of a variety of errors that may occur. Automatic systems that perform such operation(s) are highly useful in that they help identify component placement problems prior to solder reflow allowing substantially easier rework or identify defective boards after reflow that are candidates for rework. One example of such a system is sold under the trade designation Model KS 200 available from CyberOptics Corporation of Golden Valley, Minn. This system can be used to identify such problems as alignment and rotation errors; missing and flipped components; billboards; tombstones; component defects; incorrect polarity; and wrong components. Identification of errors pre-reflow provides a number of advantages. Rework is easier; closed-loop manufacturing control is facilitated; and less work in-process exists between error generation and remedy. While such systems provide highly useful inspection, they do consume plant floor-space as well as programming time maintenance efforts and the like.
One relatively recent attempt to provide the benefits of after-placement inspection located within a pick a place machine itself is disclosed in U.S. Pat. No. 6,317,972 to Asai et al. That reference reports a method for mounting electric components where an image of a mounting location is obtained prior to component placement, and compared with an image of the mounting location after component placement to inspect the placement operation at the component level.
While the disclosure of Asai et al. marks one attempt to employ in-machine component level inspection, there remains much work to be done. For example, the disclosure of Asai et al. is primarily related to turret-style pick and place machines, where the placement position does not move in the x and y directions, but simply moves up and down. In such systems, relatively large and heavy imaging systems can be provided proximate the nozzle(s), image a plurality of placement events and still have little, or no, adverse impact on placement machine speed or design layout. In contrast, on gantry-style pick and place machines (given relatively little attention by Asai et al.) the nozzle moves in at least one of the x and y directions. Thus, optics intended to image a plurality of placement events also move in x and/or y. Accordingly, the size and mass (inertial load) of the optical system itself can be prohibitive of on-head use in gantry-style machines. Further, since the head of a gantry-style pick and place machine is moving in x and/or y, it is important to minimize the size of the optical system to reduce the possibility that it will collide with other portions of the pick and place machine.
For pick and place machines having heads that move in x and/or y, increased mass is an issue because of the increased inertia. Achieving a certain machine throughput is dependent, in part, on the head's acceleration. Given a certain motive power provided by the electromechanical system of the pick and place machine, increased mass causes decreased acceleration.
Size, that is volume and/or shape of the optical system attached to the moving head, can also be a problem for a number of reasons. One reason is that the head may be designed so as to just fit in its environment as it moves about its workspace without colliding with anything. Adding something that protrudes beyond the spatial envelope of the existing head structure must be done with care and consideration of the possibility of physical conflict. Another reason that the size and/or shape of the head can become a problem is that there are generally a relatively large number of cables, tubes, motors, and other structures mounted to the head. Adding something that may conflict with assembly or maintenance of the machine is generally disfavored.
Given the relatively high speed at which component placement occurs, the acquisition of before and after images must take place in relatively fleeting instants. For example, the before-placement image is recorded immediately (typically a few milliseconds) prior to placement; and the after-placement image is also recorded immediately (typically a few milliseconds) after placement. The timing of these image acquisitions is intended to minimize the effects of any system motion during the placement operations. However, real-world limitations on the physical system will always introduce, at least to some extent, relative motion occurring between acquisition of the before-placement image and that of the after-placement image. Providing improved image analytics to address, characterize and ameliorate these movements will facilitate higher-speed operation with better accuracy.
The present invention includes a method of determining a location of a component on a workpiece. A before-placement standard image is acquired of an intended placement location on a standard workpiece. Then, a standard component is placed upon the standard workpiece and the placement is verified. An after-placement standard image is acquired and a standard difference image is created from the before and after standard images. Then, a before-placement test image is acquired of an intended placement location on the workpiece. A component is then placed upon the workpiece, and after-placement test image is acquired. A test difference image is created from the before and after test images. A first offset is calculated between the before standard difference image and the before test image. Then, the test difference is transformed based on the first offset to generate a difference test image (DTR) that is registered to the standard difference image. The standard difference image is correlated to the registered difference test image (DTR) to generate a registration offset indicative of placement efficacy.
a-5c illustrate a method of analyzing before and after images in a component placement machine in accordance with an embodiment of the present invention.
Although embodiments of the present invention will be described with respect to a gantry-style pick and place machine, those skilled in the art will recognize that embodiments of the present invention are applicable to other forms of pick and place machines.
As illustrated in
Each of devices 300, 302 also preferably includes non-structured illuminator 306 and structured illuminator 308. While non-structured illuminators 306 are illustrated as disposed on each of devices 300, 302, it may be possible, in some embodiments, to provide a single non-structured illuminator mounted separately.
The system illustrated in
A structured illumination image can be acquired from each image acquisition device to provide three-dimensional image information of the intended component placement location prior to component placement. In the event that each image acquisition device uses its own structured illuminator, the image acquisition devices should acquire their respective images sequentially such that structured illumination from one image acquisition device does not interfere with that of the other. However, if suitable structured illuminators are used, such that the structured illumination from each illuminator can be disambiguated in processing, then the image acquisition devices can each acquire their respective structured illumination images simultaneously.
At step 354, the nozzle, such as nozzle 210, places the component in its intended placement location. At step 356, devices 300, 302 again obtain a stereovision image of the placement location, post placement. Optionally, at step 358, structured illuminators 308 can be energized to impart structured illumination upon component 304 as it sits in its intended placement location. Devices 300, 302 can then optionally obtain yet another set of stereovision images while the intended placement location is illuminated with structured illumination (block 359). Optional steps 358 and 359 facilitate the generation of a three-dimensional reference point image of the intended placement location, post placement.
Device 302 produces images 322, 324 and 326 similar to that described above with respect to device 300, but from a different view such that stereovision images are facilitated. Specifically, image 322 is preferably acquired simultaneously with or substantially simultaneously with the acquisition of image 320. Similarly, images 324 and 326 are acquired at substantially the same time as images 316 and 314, respectively. The two structured illumination images 320 and 322 taken from the different views of devices 300, 302, respectively, can be combined to provide three dimensional reference point image 328. Additionally, the gray-scale images obtained by device 302 can be combined to provide gray-scale delta image 330. The three dimensional reference point image 328 is used to correct each of the gray-scale delta images 318 and 330 for perspective, thereby forming first and second view gray-scale delta images with corrected perspectives, 332 and 334, respectively. The perspective-corrected gray-scale images 332 and 334 can then be used for a number of component placement inspections. Examples of such inspections can include absence/presence inspection, as indicated at block 336; pattern/character recognition as indicated at block 338, part geometry analysis as indicated at block 340, and image symmetry analysis as indicated at block 342. Pattern/character recognition 338 on the component 304 itself facilitates verification of the correct type and value of component 304, as indicated at block 344. Additionally, by analyzing part geometry, x, y and rotational (θ) registration can be measured and verified, as indicated at block 346. Finally, analyzing image symmetry, as indicated at block 342, can provide a convenient approach to analyze component polarity as indicated at block 348. Verifying the placement of a component on a printed circuit board can be done by acquiring before-placement and after-placement images of a location on the circuit board where the component is expected to be placed, and then subtracting one image from the other. The part of the image that does not change between the before and after pictures is thereby suppressed and artifacts of the newly placed component are clearly present in the resulting image. The before-placement and after-placement images are not generally perfectly aligned, however, due to mechanical vibration, inaccurate mechanical motion, or because the printed circuit board and/or cameras are in motion when the images are acquired. When the two images (before and after) are not aligned, artifacts appear in the resulting differenced image which may be a false indicator that the component is present. One technique to estimate the misalignment of the two images is using correlation (e.g. normalized gray-scale correlation). However, correlation only works if orthogonal edges are present in the template (area of the image being correlated). If no edges are present or edges in only one direction are present, the correlation will not produce a unique (x, y) location for alignment.
Preferably, the correlation of the before-placement image with the after-placement image is done using the entire field of view (FOV) of the images. This is especially so when most of the information-containing features (edges, typically) are the same. This is the case when the placed component takes up only a small fraction of the field of view. Alternatively, a region of interest (ROI) can be established that encompasses all or most of the placed component. Then, that region can be excluded from the images prior to performing the correlation. The actual correlation can be effected via a number of known methods. Such methods include, but are not limited to, normalized grayscale correlation (NGC) and “smart” correlation algorithms such as VsFind. More often, a simple translation of one image relative to the other is enough to produce a very high correlation. Small differences, attributed to the warping of the workpiece can appear as slight rotations and can be accommodated with more sophisticated scaling and/or morphing during the correlation search.
Another technique that can be used to improve correlation is the identification of features in the images that are fixed and thus able to provide an internal reference. Accordingly, for comparing two images of substantially the same field of view, constant background features common to both images can be used to “co-register” the images. These fixed features provide the internal reference, in each image, to a common coordinate system. The exact position of the background feature(s) is not significant, the only requirement is that such feature(s) maintain a constant relationship relative to one another from image to image. Not only translation and rotation, but relative warping and stretching can be determined provided there are sufficient background features. Typical background features include printed circuit board pads, traces, artwork, vias and solder paste deposits. The utility of any of such features depends on the degree to which they are believed to be constant from image to image. These fixed printed circuit board features, such as lands and traces, are consistently located relative to each other. Accordingly, they are effectively traceable back to the fiducial reference frame. Intended component placement locations are usually determined based on the detected position of fiducials. Accordingly, this reference indicates how near to its intended site a component was placed. Further, solder paste deposits can also be used as fixed internal reference points. Component placement success may depend on proper contact with solder on the placement site provided that the solder is registered well enough to the workpiece. This reference may then be a more practical approach given variations in solder paste position on pads. Circuit features and solder paste are evident in all regions of a printed circuit board subject to component placement.
Vision systems, such as those used in accordance with embodiments of the present invention, may be able to pick good locations for templates if CAD data were available and the vision system knew where on the board it was looking relative to the CAD description. Alternatively, if the vision system could be taught off-line by being shown every possible field of view, the vision system could pre-determine good locations or templates. However, if neither of these conditions is true, then the vision system needs to quickly determine good template locations during run-time.
One aspect of embodiments of the present invention provides an efficient computational method for determining good locations in one image for selecting a template for correlation in another image. The method is illustrated in
At block 522, the size of the image is reduced by summing 4×4 neighborhoods of scores. (In other words, a pyramid image is built). Alternatively, an additive boxcar filter can be applied on the image with a 4×4 or larger aperture size. Finally, at block 524, the resulting image of scores is scanned for high scores. The high scores indicate good locations in the original image that can be used as correlation templates. Since the component will be placed somewhere in the central part of the image, the search for high scores should be restricted to be outside of the central part of the image. (In fact, all of the above processing can avoid the central area of the image for the sake of efficiency.)
Another efficient technique for determining template locations without a priori knowledge of the placement location is based on the difference image signature itself. A well-isolated and repeatable difference image signature of the placed component provides a reliable and easily extracted template for NGC or other correlation searches of subsequent difference images. Accordingly, the before-placement and after-placement images can simply be correlated in accordance with any of the above-described techniques, then a difference image can be generated from the correlated before-placement and after-placement images. This difference image can be used directly as a template for subsequent example or can be adjusted slightly, such as generating a small window about the component, or any other suitable manipulation. Subsequent examples of placed components of the same type in similar orientations will generate a relatively high correlation score. Because the difference images contain little besides the single placed component, other instances of similar components in similar orientations will be suppressed. The difference image template can be used to locate the difference image signature of the placed component in subsequent difference images. Provided the changes in position in the image are sheer translation and shift are relatively modest, correlation methods will lock onto the signature reasonably well. Transnational shifts will be reasonably accurate and rotational changes that effect the appearance of the signature will diminish the correlation, but will be reasonably accurate over small angles. Correlation using difference image templates is believed to have far fewer image features to deal with and is targeted upon the proper component.
a-5c illustrate a method of analyzing before and after images in a component placement machine in accordance with an embodiment of the present invention. Method 400 begins at block 402 where a vision system within the component placement machine acquires a before placement standard image (BS). Block 402 occurs during setup or calibration of the component placement machine when a known placement condition exists. Similarly, at block 404, the machine acquires an after placement standard image (AS). This “standard” placement is generated with respect to a “standard” component (meaning it is not generally part of the lot being manufactured) on a “standard workpiece” that is checked before the inspection of components placed during manufacture occurs. Further, this standard placement is verified as accurate by means external to the machine, such as a technician, or via other suitable methods.
At block 406, the before-placement standard image (BS) is correlated, via any suitable methods described above, with the after-placement standard image to generate an offset that relates two images together. For example, if movement of the workpiece occurred between the acquisition of the before and after images, the offset would theoretically indicate a vector representative of such movement.
At block 408, the offset is used to transform the after-placement image (AS) into an after-placement image that is registered to the before-placement standard image, This registered after-placement image is indicated as after-placement registered (ASR). At block 410, the before-placement standard image (BS) is subtracted from the after-placement registered image (ASR) to generate a standard difference image (DS).
Method 400 continues in
At block 426, the offset vector determined during block 424 is used to transform image (AT) into an after-placement image (ATR) that is registered to before-placement image (BT). At block 428, image BT is subtracted from the registered after-placement image (ATR) to generate difference test image (DT).
Method 400 continues in
At block 446, search image BSs is correlated to test image BTs to generate an offset vector relating the two. The offset vector is used in block 448 to transform the difference test image (DT) into a difference test image that is registered (DTR) to difference standard image DS.
At block 450, the ROI is applied to the difference standard image DS to generate a difference image component search template DSs. Then, at block 452, the difference image component search template DSs is correlated to the difference image test image (DTR). Finally, at block 454 the offset vector determined from the correlation performed in block 452 is provided by the placement machine. This offset vector is related to the registration offset of the placed component with respect to the standard, and thus provides a measure of placement efficacy.
In block 549a, areas known to always change between the two images, such as the nozzle and reflections of the nozzle, are masked out of the thresholded image. This masking is accomplished by drawing filled black polygons in an otherwise white mask image over the regions known to change. The known-changed mask image is then ANDed with the thresholded image. Optionally, if component data including the length, width, and height of the component are available, in block 549b, the system generates a white mask covering the two-dimensional projection at the image plane of the volume expected to be occupied by the part in an otherwise black image. This masking is accomplished by drawing a white filled polygon in an otherwise black mask image over the region where the part will be placed. The expected part mask image is then ANDed with the thresholded image.
At block 550, optional morphological erosion operations can be performed one or more times, as indicated by the loop marked “N”. This erosion is useful for removing small objects that are the result noise or image misalignment. At block 552, another optional morphological operation is provided. Specifically, block 552 provides an optional dilation operation that can be performed one or more times, as indicated by the loop marked “M”. The dilation operations facilitate merging portions of a single object that may have been separated by the erosion operation or by features of the component which matched the background image. At block 554, connectivity analysis is performed to find objects in the image. This analysis generates many useful metrics on each of the objects in the image, such as object centroid, length, width, area, rotation etc. (Gleason, et al., “A Modular Vision System for Sensor-Controlled Manipulation and Inspection”, Proc. 9th Symposium on Industrial Robots, March 1979, pp. 57-570.) Finally, at block 556, the component placement is verified by comparing the metrics of the objects found in the images with expected object metrics. This comparison may include, but is not limited to, such metrics as centroid location, width, area, rotation, etc.
The sequence of steps 544 to 549b and 582 to 584 produces a mask image. Steps 544 to 549b were described above. Step 582 performs multiple (e.g., five) 3×3 binary dilations on the thresholded difference image. Step 584 is a large boxcar filter (typically 19×19 pixels) to blur the dilated difference image. In step 586, the blurred mask image produced by step 584 is multiplied times the “after image” acquired in step 540. This isolates the placed component in the image, erasing the non-changing parts of the image. Multiplying the blurred mask times the after image is better than simply ANDing the non-blurred mask image with the after image because ANDing the mask with the gray-scale image would produce artificial edges along the perimeter of the mask.
Step 588 places various image metrology tools such as line fitters and “rulers” or “calipers” to locate the leads of components or, in the case of BGAs where the leads (actually balls) are hidden under the part, the four sides of the component. After the leads and/or sides of the component have been located, the X, Y, theta position of the component can be computed.
Similarly, Optical Character Recognition (OCR) or correlation can be used on the image produced at block 586 for “Value/type verification”. Additional metrology tools can also be applied to the same image to determine polarity.
Although the present invention has been described with reference to preferred embodiments, workers skilled in the art will recognize that changes may be made in form and detail without departing from the spirit and scope of the invention.
This application claims priority to U.S. provisional patent application Ser. No. 60/572,067, filed May 18, 2004 entitled COMPONENT REGISTRATION MEASUREMENT; and this application is a Continuation-In-Part application of U.S. patent application Ser. No. 10/291,074, filed Nov. 8, 2002 now U.S. Pat. No. 7,239,399, entitled Pick and Place Machine with Component Placement Inspection, which application claims priority to the following prior provisional applications: Ser. No. 60/338,233 filed Nov. 13, 2001 entitled INSPECTION METHODS FOR A PICK AND PLACE MACHINE; Ser. No. 60/356,801 filed Feb. 13, 2002 entitled PICK AND PLACE MACHINE WITH COMPONENT PLACEMENT INSPECTION; and Ser. No. 60/374,964 filed Apr. 22, 2002 entitled IMPROVED INSPECTION. Each and every provisional application listed above is incorporated by reference herein in its entirety.
Number | Name | Date | Kind |
---|---|---|---|
3814845 | Hurlbrink, III et al. | Jun 1974 | A |
4281342 | Ueda et al. | Jul 1981 | A |
4589140 | Bishop et al. | May 1986 | A |
4776088 | Biggs et al. | Oct 1988 | A |
4805111 | Steidel | Feb 1989 | A |
4809430 | Maruyama et al. | Mar 1989 | A |
4825091 | Breyer et al. | Apr 1989 | A |
4914513 | Spigarelli et al. | Apr 1990 | A |
4978224 | Kishimoto et al. | Dec 1990 | A |
4989082 | Hopkins | Jan 1991 | A |
4999785 | Schmuter | Mar 1991 | A |
5003692 | Izumi et al. | Apr 1991 | A |
5023916 | Breu | Jun 1991 | A |
5060366 | Asai et al. | Oct 1991 | A |
5086559 | Akatsuchi | Feb 1992 | A |
5105149 | Tokura | Apr 1992 | A |
5127061 | Amir et al. | Jun 1992 | A |
5129725 | Ishizuka et al. | Jul 1992 | A |
5134665 | Jyoko | Jul 1992 | A |
5194791 | Cull | Mar 1993 | A |
5235316 | Qualizza | Aug 1993 | A |
5237622 | Howell | Aug 1993 | A |
5249349 | Kuinose et al. | Oct 1993 | A |
5278634 | Skunes | Jan 1994 | A |
5298977 | Shintani et al. | Mar 1994 | A |
5336935 | Shitanda et al. | Aug 1994 | A |
5377405 | Sakurai et al. | Jan 1995 | A |
5383270 | Iwatsuka et al. | Jan 1995 | A |
5384956 | Sakurai et al. | Jan 1995 | A |
5392360 | Weindelmayer et al. | Feb 1995 | A |
5450204 | Shigeyama et al. | Sep 1995 | A |
5461480 | Yamada et al. | Oct 1995 | A |
5467186 | Indo et al. | Nov 1995 | A |
5471310 | Spigarelli et al. | Nov 1995 | A |
5495424 | Tokura | Feb 1996 | A |
5537204 | Woodhouse | Jul 1996 | A |
5541834 | Tomigashi et al. | Jul 1996 | A |
5550583 | Amir et al. | Aug 1996 | A |
5566447 | Sakurai | Oct 1996 | A |
5589942 | Gordon | Dec 1996 | A |
5598345 | Takura | Jan 1997 | A |
5619328 | Sakurai | Apr 1997 | A |
5627913 | Spigarelli et al. | May 1997 | A |
5660519 | Ohta et al. | Aug 1997 | A |
5686994 | Tokura | Nov 1997 | A |
5719952 | Rooks | Feb 1998 | A |
5724722 | Hashimoto | Mar 1998 | A |
5739846 | Gieskes | Apr 1998 | A |
5745241 | Hashimoto | Apr 1998 | A |
5749142 | Hanamura | May 1998 | A |
5754677 | Kawada | May 1998 | A |
5835133 | Moreton et al. | Nov 1998 | A |
5839186 | Onodera | Nov 1998 | A |
5878151 | Tang et al. | Mar 1999 | A |
5900940 | Aoshima | May 1999 | A |
5903353 | Raymond | May 1999 | A |
5908282 | Onodera | Jun 1999 | A |
5911001 | Kawada | Jun 1999 | A |
5912984 | Michael et al. | Jun 1999 | A |
5949681 | Asai et al. | Sep 1999 | A |
5956149 | Suzuki et al. | Sep 1999 | A |
5969820 | Yoshii et al. | Oct 1999 | A |
5982927 | Koljonen | Nov 1999 | A |
6027019 | Kou | Feb 2000 | A |
6047084 | Kent et al. | Apr 2000 | A |
6079098 | Soellner et al. | Jun 2000 | A |
6167607 | Pryor | Jan 2001 | B1 |
6195165 | Sayegh | Feb 2001 | B1 |
6198529 | Clark et al. | Mar 2001 | B1 |
6223425 | Asai et al. | May 2001 | B1 |
6240633 | Kent et al. | Jun 2001 | B1 |
6286202 | Asai et al. | Sep 2001 | B1 |
6317972 | Asai et al. | Nov 2001 | B1 |
6332536 | Easton | Dec 2001 | B2 |
6334840 | Asai et al. | Jan 2002 | B1 |
6404847 | Ueki et al. | Jun 2002 | B1 |
6408090 | Salomon et al. | Jun 2002 | B1 |
6478533 | Davis, III | Nov 2002 | B2 |
6506614 | Strassmann | Jan 2003 | B1 |
6522777 | Paulsen et al. | Feb 2003 | B1 |
6538244 | Skunes | Mar 2003 | B1 |
6538750 | Fishbaine et al. | Mar 2003 | B1 |
6549647 | Skunes et al. | Apr 2003 | B1 |
6583884 | Rudd et al. | Jun 2003 | B2 |
6608320 | Skunes et al. | Aug 2003 | B1 |
6616263 | Allen et al. | Sep 2003 | B2 |
6622054 | Okuda et al. | Sep 2003 | B1 |
6681151 | Weinzimmer et al. | Jan 2004 | B1 |
6718626 | Kawada | Apr 2004 | B2 |
6738505 | Prince | May 2004 | B1 |
6744499 | Skunes et al. | Jun 2004 | B2 |
6748649 | Okuda et al. | Jun 2004 | B2 |
6762847 | Duquette et al. | Jul 2004 | B2 |
6778878 | Kou | Aug 2004 | B1 |
6801652 | Stanzl et al. | Oct 2004 | B1 |
6807725 | Asai et al. | Oct 2004 | B2 |
6891967 | Prince | May 2005 | B2 |
6966235 | Paton | Nov 2005 | B1 |
6987530 | McConica | Jan 2006 | B2 |
7029224 | Kubo et al. | Apr 2006 | B2 |
7043824 | Suhara et al. | May 2006 | B2 |
7083082 | Byskov et al. | Aug 2006 | B2 |
7239399 | Duquette et al. | Jul 2007 | B2 |
20010033386 | Kranz et al. | Oct 2001 | A1 |
20010040117 | Easton | Nov 2001 | A1 |
20020014003 | Asai et al. | Feb 2002 | A1 |
20020031279 | Shimizu | Mar 2002 | A1 |
20020053133 | Suhara et al. | May 2002 | A1 |
20020069395 | Fujiwara et al. | Jun 2002 | A1 |
20020078580 | Haugen et al. | Jun 2002 | A1 |
20020099466 | Diggin et al. | Jul 2002 | A1 |
20020112064 | Eastvold | Aug 2002 | A1 |
20020124391 | Kawai et al. | Sep 2002 | A1 |
20020133940 | Kadomatsu et al. | Sep 2002 | A1 |
20020143423 | Huber et al. | Oct 2002 | A1 |
20030027363 | Kodama | Feb 2003 | A1 |
20030029033 | Hidese et al. | Feb 2003 | A1 |
20030098426 | Hayata | May 2003 | A1 |
20030110610 | Duquette et al. | Jun 2003 | A1 |
20030111494 | Lin et al. | Jun 2003 | A1 |
20030125895 | Kawai et al. | Jul 2003 | A1 |
20030159515 | Tonomura | Aug 2003 | A1 |
20030219330 | Lyndaker et al. | Nov 2003 | A1 |
20030225547 | Paradies | Dec 2003 | A1 |
20040094594 | Liebeke | May 2004 | A1 |
20040119987 | Madsen et al. | Jun 2004 | A1 |
20040135884 | Saeki | Jul 2004 | A1 |
20040163243 | Noda et al. | Aug 2004 | A1 |
20040184653 | Baer et al. | Sep 2004 | A1 |
20040186616 | Overman et al. | Sep 2004 | A1 |
20050077340 | Nagafuku et al. | Apr 2005 | A1 |
20050097035 | Likas et al. | May 2005 | A1 |
20050115060 | Kondo | Jun 2005 | A1 |
20050117797 | Gaida | Jun 2005 | A1 |
20050123187 | Bushman et al. | Jun 2005 | A1 |
20050125993 | Madsen et al. | Jun 2005 | A1 |
20050137979 | Rekeweg et al. | Jun 2005 | A1 |
20050161498 | Byskov et al. | Jul 2005 | A1 |
20050210832 | Tassin et al. | Sep 2005 | A1 |
20050235913 | Prentice et al. | Oct 2005 | A1 |
20050268460 | Case | Dec 2005 | A1 |
20050276464 | Duquette et al. | Dec 2005 | A1 |
20060016066 | Gaida et al. | Jan 2006 | A1 |
20060075631 | Case et al. | Apr 2006 | A1 |
20060174480 | Kawada | Aug 2006 | A1 |
20070003126 | Case et al. | Jan 2007 | A1 |
20070010969 | Madsen et al. | Jan 2007 | A1 |
Number | Date | Country |
---|---|---|
1317926 | Oct 2001 | CN |
1438836 | Aug 2003 | CN |
19801978 | Jul 1999 | DE |
0 664 666 | Aug 1997 | EP |
0 932 331 | Jul 1999 | EP |
0 948 250 | Oct 1999 | EP |
0 959 654 | Nov 1999 | EP |
1014438 | Dec 1999 | EP |
1 152 604 | Nov 2001 | EP |
1 343 363 | Sep 2003 | EP |
2 317 496 | Mar 1998 | GB |
62298750 | Dec 1987 | JP |
63090707 | Apr 1988 | JP |
63275200 | Nov 1988 | JP |
01309190 | Dec 1988 | JP |
02076080 | Mar 1990 | JP |
02235399 | Sep 1990 | JP |
04031974 | Feb 1992 | JP |
05251897 | Sep 1993 | JP |
06053694 | Feb 1994 | JP |
06201532 | Jul 1994 | JP |
5-37918 | Sep 1994 | JP |
6-249629 | Sep 1994 | JP |
6-249630 | Sep 1994 | JP |
6-310899 | Nov 1994 | JP |
07037063 | Feb 1995 | JP |
07183697 | Jul 1995 | JP |
7-77319 | Aug 1995 | JP |
7-336099 | Dec 1995 | JP |
8032291 | Feb 1996 | JP |
8-111598 | Apr 1996 | JP |
9-021609 | Jan 1997 | JP |
9-023097 | Jan 1997 | JP |
09193515 | Jul 1997 | JP |
9-205299 | Aug 1997 | JP |
9-210626 | Aug 1997 | JP |
9-214198 | Aug 1997 | JP |
9-223898 | Aug 1997 | JP |
9-246799 | Sep 1997 | JP |
10136962 | May 1998 | JP |
11168300 | Jun 1999 | JP |
9-293998 | Sep 1999 | JP |
11285925 | Oct 1999 | JP |
2000-022392 | Jan 2000 | JP |
2000-114692 | Apr 2000 | JP |
2000339456 | Dec 2000 | JP |
2000349499 (A) | Dec 2000 | JP |
2003152392 | May 2001 | JP |
2001-165860 | Jun 2001 | JP |
2001-168600 | Jun 2001 | JP |
2001168594 | Jun 2001 | JP |
2001177836 | Jun 2001 | JP |
2003-243898 | Feb 2002 | JP |
2003243899 | Aug 2002 | JP |
2002271099 | Sep 2002 | JP |
20038295 | Jan 2003 | JP |
2003-504746 | Feb 2003 | JP |
2003-092495 | Mar 2003 | JP |
2003-304095 | Oct 2003 | JP |
2005285840 | Mar 2004 | JP |
9622673 | Jul 1996 | WO |
WO 9824293 | Jun 1998 | WO |
9841078 | Sep 1998 | WO |
WO 9949713 | Sep 1999 | WO |
WO 0019794 | Apr 2000 | WO |
WO 0019800 | Apr 2000 | WO |
WO 0026640 | May 2000 | WO |
WO 0038494 | Jun 2000 | WO |
WO 0167831 | Sep 2001 | WO |
WO 0246713 | Jun 2002 | WO |
WO 0229357 | May 2003 | WO |
WO 03043400 | May 2003 | WO |
WO 2005115073 | Dec 2005 | WO |
WO 2006125102 | Nov 2006 | WO |
Number | Date | Country | |
---|---|---|---|
20050276464 A1 | Dec 2005 | US |
Number | Date | Country | |
---|---|---|---|
60572067 | May 2004 | US | |
60338233 | Nov 2001 | US | |
60356801 | Feb 2002 | US | |
60374964 | Apr 2002 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 10291074 | Nov 2002 | US |
Child | 11131926 | US |