Image display apparatus

Abstract

A simple method was needed for dividing up the electron emitter electrodes into individual supply electrodes. An insulator partition wall was formed on the same layer and parallel to the supply electrode for supplying power to the electron emitter electrode, an electron emitter electrodes formed across the entire surface of the image display area, a side surface of the partition wall was sliced, condensation and solubility diffusion performed by heat treatment, ablation performed by irradiating the upper surface of the silicon partition wall with a laser, Joule thermal sealing/cutting performed by conducting electricity across the scanning lines enclosing the silicon partition wall in order to slice the electron emitter electrode.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a plane view drawing showing an example of the image display apparatus utilizing an MIM type thin film electron source of this invention;

FIG. 2 is a drawing illustrating the operating principle of the thin film electron source;

FIG. 3 is a drawing showing the method for manufacturing the thin film electron source for the first embodiment of this invention;

FIG. 4 is a drawing showing a continuation of the method in FIG. 3 for manufacturing the thin film electron source of this invention;

FIG. 5 is a drawing showing a continuation of the method in FIG. 4 for manufacturing the thin film electron source of this invention;

FIG. 6 is a drawing showing a continuation of the method in FIG. 5 for manufacturing the thin film electron source of this invention;

FIG. 7 is a drawing showing a continuation of the method in FIG. 6 for manufacturing the thin film electron source of this invention;

FIG. 8 is a drawing showing a continuation of the method in FIG. 7 for manufacturing the thin film electron source of this invention;

FIG. 9 is a drawing showing a continuation of the method in FIG. 8 for manufacturing the thin film electron source of this invention;

FIG. 10 is a drawing showing conditions for dry etching of partition walls in the thin film type electron source of this invention;

FIG. 11 is a continuation of FIG. 10 showing the method for manufacturing the thin film type electron source of this invention;

FIG. 12 is a continuation of FIG. 11 showing the method for manufacturing the thin film type electron source of this invention;

FIG. 13 is a continuation of FIG. 12 showing the method for manufacturing the thin film type electron source of this invention;

FIG. 14 is a drawing showing the resistance across the scanning lines of the thin film type electron source of this invention;

FIG. 15 is a continuation of FIG. 14 showing the method for manufacturing the thin film type electron source of this invention;

FIG. 16 is a drawing showing resistance across the scanning lines isolated by heating solubility in this invention;

FIG. 17 is drawings showing the method for isolation by laser irradiation in this invention;

FIG. 18 is a drawing showing the method for isolating by conducting electricity across the scanning lines of this invention;

FIG. 19 is a drawing showing another example of the positional relation between the scanning electrode and the partition wall of this invention;

FIG. 20 is a drawing showing another example of the positional relation between the scanning electrode and the partition wall of this invention;

FIG. 21 is a drawing showing another example of the positional relation between the scanning electrode and the partition wall of this invention.

Claims

1. An image display apparatus including an electron source array containing thin film electron emitter electrodes for emitting electrons from an electron emitter electrode, and a fluorescent surface installed facing the electron source array, wherein an insulation partition wall is formed on the same layer and parallel to the supply electrode, between multiple supply electrodes for supplying power to the electron emitter electrodes, installed parallel to and at the same height on the interlayer insulation film laminated on the signal electrode, andwherein the electron emitter electrodes formed across the entire surface of the image display are electrically isolated by the partition wall into individual supply electrodes.

2. The image display apparatus according to claim 1, wherein the partition wall material is an insulating element or an insulated semiconductor.

3. The image display apparatus according to claim 2, wherein the insulating element of the partition wall material is silicon nitride.

4. The image display apparatus according to claim 2, wherein the partition wall material for the insulated semiconductor is an intrinsic semiconductor, or is an inactive impurity-doped semiconductor.

5. The image display apparatus according to claim 4, wherein the insulated semiconductor is non-doped silicon or is insulated silicon doped with inert boron or phosphorous.

6. The image display apparatus according to claim 3, wherein the underlayer for the partition wall of silicon nitride functioning as the interlayer insulation film is silicon oxide, or silicon oxynitride.

7. The image display apparatus according to claim 5, wherein the underlayer for the partition wall of silicon functioning as the interlayer insulation film is silicon nitride, silicon oxide, or silicon oxynitride.

8. The image display apparatus according to claim 1, wherein the partition wall is isolated from a supply electrode adjacent on one side, connected to the other supply electrode, and only the side surface of the partition wall is exposed.

9. The image display apparatus according to claim 1, wherein the partition wall is isolated from a supply electrode adjacent on one side, is covered at the other supply electrode, and forms an undercut on the side surface of that other supply electrode.

10. The image display apparatus according to claim 1, wherein the supply electrode is tapered relative to the interlayer isolation film surface.

11. The image display apparatus according to claim 9, wherein the supply electrode is a two-layer structure including a thin upper layer with a small taper angle to the interlayer insulation film surface covering one side surface of a thick lower layer with a large taper angle; and power is supplied from the side with the small taper angle, and an undercut is formed on the side surface with the large taper angle.

12. The image display apparatus according to claim 1, wherein the taper angle of partition side wall surface on the interlayer insulation film surface the interlayer insulation film surface on the partition side wall surface is a larger taper angle than the supply electrode on the interlayer insulation film on the supply electrode.

13. The image display apparatus according to claim 1, wherein the supply electrode is aluminum or is an aluminum alloy containing aluminum as the main element.

14. The manufacturing method for an image display apparatus according to claim 1, wherein the partition wall is selectively etched and formed by dry etching on the interlayer insulation film.

15. The manufacturing method for an image display apparatus according to claim 1, wherein the supply electrodes electrically isolated on both sides of the partition wall by severing the electron emitter electrodes by utilizing the steep step differential of the partition wall.

16. The manufacturing method for an image display apparatus according to claim 1, wherein the supply electrodes are electrically isolated on both sides of the partition wall by using heat treatment to condense the surface of the partition wall.

17. The manufacturing method for an image display apparatus according to claim 1, wherein the supply electrodes are electrically isolated on both sides of the partition wall by causing a phase transformation reaction in the electron emitter electrodes with the silicon partition wall by heat treatment to cause absorption diffusion.

18. The manufacturing method and wiring correction method for an image display apparatus according to claim 1, wherein the supply electrodes are electrically isolated on both sides of the partition wall by electrical conduction by applying a voltage across two supply electrodes interposed between a partition wall and, thermally cutting the high resistance section of the electron emitter electrode of the partition wall overhang by Joule's heat.

19. The manufacturing method and wiring correction method for an image display apparatus according to claim 1, wherein each of the supply electrodes are electrically isolated by irradiating a laser beam onto the electron emitter electrodes on the partition wall and, thermally cutting the electron emitter electrodes by ablation.