IMAGE DISPLAY DEVICE

Abstract

Disclosed herein is an image display device including: plural pixels arranged two-dimensionally; and a thin film electron emitter that has a lower electrode formed of one of data lines, an electron acceleration layer formed by an anodic oxidation of a surface of the lower electrode, and an upper electrode stacked on the electron acceleration layer to emit electrons thereby provided in each of the plural pixels, in which a ratio of hydrate-alumina to the total of the hydrate-alumina and anhydrous-alumina contained in the electron acceleration layer (the anodic oxide film) arranged in each of the pixels in regulated in a range from 0.25 to 0.42.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic view for explaining example 1 of an image display device according to the invention;

FIG. 2 is an explanatory view for the principle of an MIM type electron emitter;

FIG. 3 is a view showing manufacturing steps of a thin film electron emitter of the invention;

FIG. 4 is a view succeeding to FIG. 3 showing manufacturing steps of the thin film electron emitter of the invention;

FIG. 5 is a view succeeding to FIG. 4 showing manufacturing steps of the thin film electron emitter of the invention;

FIG. 6 is a view succeeding to FIG. 5 showing manufacturing steps of the thin film electron emitter of the invention;

FIG. 7 is a view succeeding to FIG. 6 showing manufacturing steps of the thin film electron emitter of the invention;

FIG. 8 is a view succeeding to FIG. 7 showing manufacturing steps of the thin film electron emitter of the invention;

FIG. 9 is a view succeeding to FIG. 8 showing manufacturing steps of the thin film electron emitter of the invention;

FIG. 10 is a view succeeding to FIG. 9 showing manufacturing steps of the thin film electron emitter of the invention;

FIG. 11 is a view succeeding to FIG. 10 showing manufacturing steps of the thin film electron emitter of the invention;

FIG. 12 is a view for explaining the manufacturing method of a front substrate;

FIG. 13 is a view for the cross-section along the line A-A′ and the cross-section along the line B-B′ in a state of bonding a back substrate to the front substrate;

FIG. 14 is a view for explaining manufacturing steps of the image display device of the invention;

FIG. 15 is a view explaining the temperature dependence of the desorption amount of moisture in the anodic oxide film (the dehydration amount of the anodic oxide film) manufactured in the Example of the invention by conducting thermal desorption analysis for the anodic oxide film;

FIG. 16 is a view for explaining an example of a result of conducting XPS analysis for the quantification of the water content contained in the anodic oxide film of aluminum;

FIG. 17 is a view for explaining the result of calculation for the hydrate-alumina ratio in the alumina film determined by evaluation according to the analysis of FIG. 16 on every annealing process;

FIG. 18 is a view showing the result of measuring the degraded characteristic to the time of the manufactured MIM diode on every annealing process conditions; and

FIG. 19 is a view showing a correlation between the availability ratio of diodes estimated based on the result of FIG. 18 and the hydrate-alumina ratio in an alumina film calculated based on the result of FIG. 17.

Claims

1. An image display device comprising: one substrate having a number of data lines including aluminum formed in parallel with each other on an inner surface, and a number of scan lines crossing above the data lines by way of an interlayer insulating layer relative to the data lines and formed in parallel with each other, and including a thin film electron emitter array including plural electron emission portions disposed in a two-dimensional matrix formed in the vicinity of the crossing portion between the data lines and the scan lines in an image display region, andthe other substrate disposed being opposed to the inner surface of the one substrate and having a fluorescence surface including plural phosphors at the opposing inner surface thereof that emit light upon excitation by electrons emitted from the thin film electron emitter array, whereinthe thin film electron emitter has an electron acceleration layer using the data line as a lower electrode and includes an anodic oxide film formed by anodizing the surface of the data lines, and an upper electrode that is stacked covering the electron accelerator and constitutes an electron emission electrode,the anodic oxide film constituting the electron acceleration layer has a hydrate-alumina component and an anhydrous-alumina component in the film, andthe ratio of the hydrate-alumina component to the total for the hydrate-alumina component and the anhydrous alumina ingredient is within a range from 0.25 to 0.42.

2. The image display device according to claim 1, wherein the upper electrode constituting the electron emission electrode of the thin film electron emitter includes a conductive thin film formed so as to cover the entire surface of the image display region at the layer above the scan line, and electrically connected with the scan lines which is electrically separated between adjacent scan lines.

3. The image display device according to claim 1, wherein the thin film electron emitters are placed at the portions nearer to one side in the lateral direction of the scan lines.

4. The image display device according to claim 2, wherein the thin film electron emitter is constituted above the anodic oxide film constituting the electron acceleration layer placed in the opened portion of the interlayer insulating layer for insulating the data lines and the scan lines with the conductive thin film being as the electron emission electrode.

5. The image display device according to claim 1, wherein spacers for controlling the distance between the one substrate and the other substrate are placed at portions nearer to the side of the scan lines opposite to the electron emitter portions in the lateral direction thereof.

6. The image display device according to claim 1, wherein the scan lines includes a stacked structure containing pure aluminum, aluminum alloy, chromium, or at least two layers thereof, and the upper electrode is a single layer of noble metal or two or more stacked layers of the noble metals.

7. The image display device according to claim 6, wherein the aluminum alloy is an alloy of aluminum and neodymium.

8. The image display device according to claim 6, wherein the noble metal is one of iridium, platinum and gold.