The present application claims priority from Japanese application JP 2005-069630 filed on Mar. 11, 2005, the content of which is hereby incorporated by reference into this application.
The present invention relates to an image display device. In particular, the invention relates to an image display device, which is also called a flat panel display of emissive type using thin-film type electron source array.
A type of image display device (field emission display; FED) has been developed, which uses emission type electron sources in micro-size and of integratable type, also called thin-film type electron sources. In this type of image display device, electron source is divided to emission type electron source and hot electron type electron source, etc. Those belonging to the former group include: Spindt type electron source, surface conduction type electron source, carbon nano-tube type electron source. Those belong to the latter group include: MIM (metal-insulator-metal) type with a metal layer, an insulator layer, and a metal layer laminated on each other, MIS (metal-insulator-semiconductor) type with a metal layer, an insulator layer, and a semiconductor layer laminated on each other, and thin-film type electron source such as metal-insulator-semiconductor-metal type.
The MIM type is described in the Patented Reference 1, for instance. As the metal-insulator-semiconductor type, MOS type is described in the Non-Patented Reference 1. As the metal-insulator-semiconductor-metal type, HEED type is disclosed in the Non-Patented Reference 2 and others. EL type is described in the Non-Patented Reference 3, and porous silicon type is disclosed in the Non-Patented Reference 4 and others.
The MIM type electron source is disclosed, for instance, in the Patented Reference 2. The structure and the operation of the MIM type electron source are as follows: An insulation layer is interposed between a top electrode and a bottom electrode. By applying voltage between the top electrode and the bottom electrode, electrons near Fermi level in the bottom electrode pass through potential barrier by the tunneling phenomena and are injected to a conduction band of the insulation layer, which serves as an electron accelerator. The electrons are turned to hot electrons and flow into the conduction band of the top electrode. Among these electrons, those reaching the surface of the top electrode and having energy of higher than the work function φ of the top electrode are emitted into vacuum space.
In the image display device using this type of thin-film type electron sources, electron sources are often destroyed due to unexpected electric charge or discharge during the manufacturing process or the display operation. In particular, the electron sources positioned on the outermost periphery of the display region are often destroyed. When electron sources are destroyed, display defect occurs, and all electron sources connected to data line may fall into display failure.
It is an object of the present invention to provide an image display device, free of display defects and having high reliability, by which it is possible to prevent the destruction of the electron sources as described above.
To attain the above object, the present invention provides a dummy potential fixing electrode, which does not contribute to image display and is similar to data line or scan line, on the outermost periphery of the display region. This potential fixing electrode is connected to an electrode with low impedance and constant potential.
The electric charge injected during the manufacturing process is absorbed by the dummy potential fixing electrode on the outermost periphery of the display region, and the electron sources for display operation are protected from destruction.
Detailed description will be given below on an embodiment of the present invention referring to the drawings. In the following, description will be given on a MIM (metal-insulator-metal) type electron source (cathode) as an example, while the invention can be applied in the same manner to the other type of thin-film type cathode.
The bottom electrode 11, serving as data line, is directly provided above and below the cathode substrate 10 or it is driven by data line driving circuits 50U and 50D connected with a flexible printed board. The data line driving circuits 50U and 50D comprise data line driving circuit chips DD1, DD2, DD3, DD4, . . . corresponding respectively to the bottom electrode 11. The scan line bus 21 is driven by scan line driving circuits 60L and 60R directly arranged on left and right of the cathode substrate 10 or connected with the flexible printed board. The scan line driving circuits 60L and 60R comprise scan line driving circuit chips SD1, SD2, SD3, SD4, . . . corresponding respectively to the scan line buss 21. The data line bus line and the scan line bus of the image display device are designed as both-side driving type, while bus lines of unilateral driving on one side or both sides are also known.
The electron source ELS is designed in laminated structure and comprises the bottom electrode 11, a tunneling insulator 12, serving as an electron accelerator, which is formed through anodic oxidation of the surface of the bottom electrode 11, and the top electrode 13. Electric current to the top electrode 13 is supplied via the scan line bus 21. A region where the electron sources ELS are arranged in form of matrix is referred as a display region AR.
In
In this arrangement, the potential fixing electrodes 11D1 and 11D2 and the potential fixing electrodes 21D1 and 21D2 provided on outer periphery of the display region are led to the data line driving circuits 50U and 50D and the scan line driving circuits 60L and 60R via the flexible printed board 90 and are connected to a constant power source of each driving circuit.
In the embodiment as described above, the potential fixing electrodes are provided on all of four sides on outer periphery of the display region, while these can be provided on each of the adjacent two sides, and also on two sides running in parallel or only on one side to attain the same effect.
Next, description will be given on detailed arrangement of the cathode substrate of the image display device of the present invention and on the manufacturing process as shown in
After film deposition, the bottom electrode 11 in form of stripe is produced by patterning process and etching process (
Next, the field insulator (also called protection insulator) 14 and the tunneling insulator 12 are formed to limit the electron emission region and to prevent electrostatic focusing to the edge of the bottom electrode 11. First, a portion on the bottom electrode 11 as shown in
Next, in order to arrange the scan line bus to supply electric current to the interlayer insulator 15 and to the top electrode 13 and to spacers (to be described later), a metal film is formed by sputtering method, for instance, which serves as a spacer electrode to electrically connect the spacer to the scan line bus (
Then, the metal upper layer 18 is processed by patterning and etching processes to have a stripe-like form perpendicularly crossing the bottom electrode 11. For the etching, wet etching using aqueous solution of cerium diammonium nitrate is adopted (
Next, as shown in
Then, the electron emission region is opened by processing of the interlayer insulator 15. The electron emission region is formed on a part of the intersection in a space interposed between one bottom electrode 11 within sub-pixel and the two upper bus electrodes perpendicularly crossing the bottom electrode 11. For the etching, dry etching using an etching agent with CF4 or SF6 as main component can be adopted (
Finally, film deposition for the top electrode 13 is performed. For this film deposition, sputtering method is adopted. As the top electrode 13, a laminated film of Ir, Pt and Au is used, and film thickness is set to 6 nm, for instance. In this case, the top electrode 13 is cut off by an eave structure, which is formed by retraction of the metal lower layer 16 on one of the two scan line buss to sandwich the electron emission region (right side in the cross-sectional view along the line B-B′ in
On the cathode substrate 10, the following components are formed: the bottom electrode 11 comprising data line (signal electrode line) to connect to the data line driving circuit 50, the metal lower layer 16, the metal intermediate layer 17, and the metal upper layer 18 comprising data lines and scan lines (3-layer scan line bus) 21 to be connected to the scan line driving circuit 60, the field insulator 14 and other functional films (to be described later). The cathode (electron emission region, electron source) is connected to the top bus electrode, and it is formed on the top electrode (not shown) laminated on the bottom electrode 11 via the insulation layer. From the insulation layer (tunneling insulator 12) formed on thin layer of the insulation layer, electrons are emitted.
On the other hand, on inner surface of the display side substrate 10, there are provided a light shielding layer to promote contrast of the display image, a black matrix 120, a red phosphor 111, a green phosphor 112, and a blue phosphor 113. For example, Y2O2S:Eu can be used for the red phosphor (P22-R). ZnS:Cu, Al can be used for the green phosphor (P22-G), and ZnS:Ag, Cl can be used for the blue phosphor (P22-B). The cathode substrate 10 and the phosphor substrate are maintained at a predetermined spacing with a spacer 30 made of glass plate or ceramic plate interposed between them. A frame glass (sealing frame; not shown) is provided on outer periphery of the display region, and inner portion is sealed under vacuum condition.
The spacer 30 is placed above the scan line 21 of the cathode substrate 10, and it is arranged so that it is hidden under the black matrix of the phosphor substrate. The bottom electrode 11 is connected to the data line driving circuit 50, and the scan electrode 21 to make up the scan line bus is connected to the scan line driving circuit 60.
In this cathode structure, the wiring of aluminum or aluminum alloy of low resistance (e.g. Al—Nd) is sandwiched by chromium or chromium alloy having heat resistant property and anti-oxidation property to form scan line bus with laminated structure. As a result, the top electrode 13 can be processed self-coordinatedly in the display region. Also, it is possible to form the scan line bus, which is not deteriorated even through the sealing process. This makes it possible to suppress voltage drop by wiring resistance of the display device.
In the MIM electron source shown in
Number | Date | Country | Kind |
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2005-069630 | Mar 2005 | JP | national |
Number | Date | Country |
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7-65710 | Mar 1995 | JP |
10-153979 | Jun 1998 | JP |
Number | Date | Country | |
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20060202605 A1 | Sep 2006 | US |