Image measuring system, image measuring method and image measuring program

Abstract

An image measuring system comprises a measurement point acquire, a measurement direction calculator, a synthesized direction calculator operative to calculate a synthesized direction resulted from synthesis of movement directions before and after the measurement point, a fore/aft-running point calculator operative to calculate a forerunning point at a position spaced a certain distance backward in the synthesized direction from the measurement point and to calculate an aft-running point at a position spaced a certain distance forward in the synthesized direction from the measurement point, a way point calculator operative to calculate a plurality of way points arranged on a path smoothly connecting the aft-running point to the forerunning point, and a measurement path setter operative to set a measurement path following the synthesized directions and passing through the calculated way points and the measurement points.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is an external perspective view illustrative of a configuration of an image measuring system according to an embodiment of the invention.

FIG. 2 is a functional block diagram of a computer in the measuring system.

FIG. 3 is a flowchart illustrative of a procedure of setting measurement paths in the measuring system.

FIG. 4 shows part of the measurement in the system.

FIG. 5 shows part of the measurement in the system.

FIG. 6 shows part of the measurement in the system.

FIG. 7 shows part of the measurement in the system.

FIG. 8 shows part of the measurement in the system.

FIG. 9 shows part of the measurement in the system.

FIG. 10 shows an example of setting measurement paths in the system.

FIG. 11 shows an example of setting measurement paths in the system.

FIG. 12 shows an example of setting measurement paths in the system.

FIG. 13 illustrates a measurement in a standard stop mode.

FIG. 14 illustrates a measurement in a nonstop measurement mode.

Claims

1. An image measuring system for moving an imaging means relative to a measurement stage that supports an object to be measured and taking in instantaneous image information about the object without making a stop of the imaging means at any of a plurality of measurement locations, thereby performing image measuring, the system comprising: a measurement point acquirer operative to acquire measurement points;a movement direction calculator operative to acquire a shortest path connecting between the measurement points and to calculate a movement direction on the shortest path;a synthesized direction calculator operative to calculate a synthesized direction resulted from synthesis of movement directions before and after the measurement point;a fore/aft-running point calculator operative to calculate a forerunning point at a position spaced a certain distance backward in the synthesized direction from the measurement point from which the synthesized direction is calculated and to calculate an aft-running point at a position spaced a certain distance forward in the synthesized direction from the measurement point from which the synthesized direction is calculated;a way point calculator operative to calculate a plurality of way points arranged on a path smoothly connecting the aft-running point to the forerunning point related to a measurement point located one point posterior in a measurement sequence to the measurement point from which the aft-running point is calculated, such that the path follows the synthesized direction at both points; anda measurement path setter operative to set a measurement path following the synthesized directions and passing through the calculated way points and the measurement points.

2. The image measuring system according to claim 1, wherein the distance between adjacent way points and the angular difference between adjacent way points about a cardinal point at a certain position are determined in relation to the distance between adjacent measurement points and the moving speed of the imaging means.

3. The image measuring system according to claim 1, wherein the measurement point and the forerunning point have a distance longer than the distance between the measurement point and the aft-running point.

4. The image measuring system according to claim 1, wherein the path containing the way points is shaped arc.

5. An image measuring method for moving an imaging means relative to a measurement stage that supports an object to be measured and taking in instantaneous image information about the object without making a stop of the imaging means at any of a plurality of measurement locations, thereby performing image measuring, the method comprising: a measurement point acquisition step of acquiring measurement points;a movement direction calculation step of acquiring a shortest path connecting between the measurement points and calculating a movement direction on the shortest path;a synthesized direction calculation step of calculating a synthesized direction resulted from synthesis of movement directions before and after the measurement point;a fore/aft-running point calculation step of calculating a forerunning point at a position spaced a certain distance backward in the synthesized direction from the measurement point from which the synthesized direction is calculated and calculating an aft-running point at a position spaced a certain distance forward in the synthesized direction from the measurement point from which the synthesized direction is calculated;a way point calculation step of calculating a plurality of way points arranged on a path smoothly connecting the aft-running point to the forerunning point related to a measurement point located one point posterior in a measurement sequence to the measurement point from which the aft-running point is calculated, such that the path follows the synthesized direction at both points; anda measurement path setting step of setting a measurement path following the synthesized directions and passing through the calculated way points and the measurement points.

6. The image measuring method according to claim 5, wherein the distance between adjacent way points and the angular difference between adjacent way points about a cardinal point at a certain position are determined in relation to the distance between adjacent measurement points and the moving speed of the imaging means.

7. The image measuring method according to claim 5, wherein the measurement point and the forerunning point have a distance longer than the distance between the measurement point and the aft-running point.

8. The image measuring method according to claim 5, wherein the path containing the way points is shaped arc.

9. A computer executable, image measuring program for moving an imaging means relative to a measurement stage that supports an object to be measured and taking in instantaneous image information about the object without making a stop of the imaging means at any of a plurality of measurement locations, thereby performing image measuring, the program comprising: a measurement point acquisition step of acquiring measurement points;a movement direction calculation step of acquiring a shortest path connecting between the measurement points and calculating a movement direction on the shortest path;a synthesized direction calculation step of calculating a synthesized direction resulted from synthesis of movement directions before and after the measurement point;a fore/aft-running point calculation step of calculating a forerunning point at a position spaced a certain distance backward in the synthesized direction from the measurement point from which the synthesized direction is calculated and calculating an aft-running point at a position spaced a certain distance forward in the synthesized direction from the measurement point from which the synthesized direction is calculated;a way point calculation step of calculating a plurality of way points arranged on a path smoothly connecting the aft-running point to the forerunning point related to a measurement point located one point posterior in a measurement sequence to the measurement point from which the aft-running point is calculated, such that the path follows the synthesized direction at both points; anda measurement path setting step of setting a measurement path following the synthesized directions and passing through the calculated way points and the measurement points.

10. The image measuring program according to claim 9, wherein the distance between adjacent way points and the angular difference between adjacent way points about a cardinal point at a certain position are determined in relation to the distance between adjacent measurement points and the moving speed of the imaging means.

11. The image measuring program according to claim 9, wherein the measurement point and the forerunning point have a distance longer than the distance between the measurement point and the aft-running point.

12. The image measuring program according to claim 9, wherein the path containing the way points is shaped arc.