This application claims priority under 35 USC .sctn. 119 (e) (1) of provisional application number 60/034,171, filed Jan. 2, 1997.
Number | Name | Date | Kind |
---|---|---|---|
5045486 | Chittipeddi et al. | Sep 1991 | |
5420079 | Onishi et al. | May 1995 | |
5482876 | Hsieh et al. | Jan 1996 | |
5607879 | Wuu et al. | Mar 1997 | |
5610099 | Stevens et al. | Mar 1997 |
Entry |
---|
Local Oxidation of Silicon and its Application in Semiconductor-Device Technology*), by J.A. Appels, E. Kooi, M.M. Paffen, J.J.H. Schatorje and W.H.C.G. Verkuylen, Philips Res. Repts 25, (1970), pp. 118-132, *) This paper corresponds to a paper presented by the authors at the 3rd conference on Solid State Devices, Exeter (England), Sep. 1969. |
"VLSI Technology", S.M. Sze, pp. 466, McGraw-Hill Book Co. (1983). |