Number | Name | Date | Kind |
---|---|---|---|
4966646 | Zdeblick | Oct 1990 | |
4978338 | Melsky et al. | Dec 1990 | |
5224843 | van Lintel | Jul 1993 | |
5323051 | Adams et al. | Jun 1994 | |
5495978 | Muth | Mar 1996 |
Number | Date | Country |
---|---|---|
WO 9625619 | Aug 1996 | FRX |
0 502 222 | Mar 1991 | DEX |
0 552 466 | Dec 1992 | DEX |
0 540 071 | Sep 1992 | GBX |
Entry |
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"Review Packaging of Microfabricated Devices and Systems"--Wen H. Ko (Elsevier--Materials Chemistry and Physics 42 (1995) p. 169-175). |