Number | Name | Date | Kind |
---|---|---|---|
3692027 | Ellinwood, Jr. | Sep 1972 | |
4870953 | DonMichael et al. | Oct 1989 | |
4936281 | Stasz | Jun 1990 | |
5059175 | Hanover et al. | Oct 1991 | |
5102402 | Dror et al. | Apr 1992 | |
5156591 | Gross et al. | Oct 1992 |
Number | Date | Country |
---|---|---|
8600519 | Jan 1986 | WOX |
Entry |
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W. P. Robbins et al., "Linear Motion Microactuators Using Piezoelectric Thin Films", Proc. Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, Calif., Jun. 1991, pp. 55-58. |