| Number | Name | Date | Kind |
|---|---|---|---|
| 3692027 | Ellinwood, Jr. | Sep 1972 | |
| 4870953 | DonMichael et al. | Oct 1989 | |
| 4936281 | Stasz | Jun 1990 | |
| 5059175 | Hanover et al. | Oct 1991 | |
| 5102402 | Dror et al. | Apr 1992 | |
| 5156591 | Gross et al. | Oct 1992 |
| Number | Date | Country |
|---|---|---|
| 8600519 | Jan 1986 | WOX |
| Entry |
|---|
| W. P. Robbins et al., "Linear Motion Microactuators Using Piezoelectric Thin Films", Proc. Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, Calif., Jun. 1991, pp. 55-58. |