Impregnated cathode and method of manufacturing same, electron gun and electron tube

Information

  • Patent Grant
  • 6425793
  • Patent Number
    6,425,793
  • Date Filed
    Thursday, September 28, 2000
    23 years ago
  • Date Issued
    Tuesday, July 30, 2002
    21 years ago
Abstract
An impregnated cathode and a method of manufacturing the same are provided for suppressing emission of unwanted electrons and particles generated from an excess electron emitting substance so as to achieve a steady electron emission characteristic. The impregnated cathode is placed directly beneath an electron emission hole of a first grid. The impregnated cathode is made up of a first sintered porous element whose surface functions as an electron emitting region and a second sintered porous element whose surface is a peripheral region other than the electron emitting region. The porosity of the first sintered porous element is greater than that of the second sintered porous element. Not only the first sintered porous element having the electron emitting region but also the second sintered porous element corresponding to the region around the electron emitting region is impregnated with the electron emitting substance. In addition, the amount of the electron emitting substance per unit volume contained in the first sintered porous element is greater than that contained in the second sintered porous element.
Description




BACKGROUND OF THE INVENTION




1. Field of the Invention




The present invention relates to an impregnated cathode made of a porous element of a refractory metal and so on impregnated with an electron emitting substance (emitter) such as barium oxide (BaO) and a method of manufacturing the same, an electron gun and an electron tube.




2. Description of the Related Art




An impregnated cathode is used for an electron gun of a cathode-ray tube such as a picture tube and a display tube or an electron gun of an electron tube such as an image pickup tube and a high-frequency oscillator tube. Electrons (thermoelectrons) are emitted from the impregnated cathode.




The factors that determine the performance of such an impregnated cathode include a cathode cutoff voltage characteristic and a grid emission characteristic. It is important to reduce variations in the cathode cutoff voltage. The cathode cutoff voltage depends on the distance between the cathode and the first grid, the distance between the first and second grids, the thickness of the first and second grids, the aperture diameter of the first and second grids and so on. The grid emission is a symptom in which unintended emission of electrons occurs from excess barium and the like deposited on the grids (G


1


, G


2


and so on). The grid emission is thus required to be reduced. In order to suppress unintended emission of electrons while maintaining the cathode cutoff voltage characteristic, it is required to increase the porosity in the electron emission region (working area) of the surface of the sintered porous element making up the impregnated cathode. At the same time, it is required to reduce the porosity rate or eliminate the pores in the other region so as to prevent the electron emitting substance for impregnation from being excessively vaporized through the region other than the electron emitting region.




Related-art impregnated cathodes are largely categorized into those of a single structure and those of a dual structure. The single-structure cathode only consists of a sintered porous element made of a refractory metal such as tungsten (W). The dual-structure cathode (such as the one disclosed in Japanese Patent Application Laid-open Sho 60-62034 [1985]) includes the electron emission region made of a porous sintered body and the region surrounding the electron emitting region made of a nonporous refractory metal. The two regions are fixed to each other through welding, for example.




However, such related-art impregnated cathodes have the following problems. It is difficult to make desired local variations of the porosity of the single-structure cathode made of a sintered porous element only. It is therefore extremely difficult to obtain the impregnated cathode whose impregnation amount of electron emitting substance is controlled as desired. If the cathode is impregnated with an ample amount of electron emitting substance so as to achieve a stable electron emission characteristic, barium (Ba) or barium oxide (BaO) as an electron emitting substance may evaporate and deposit onto the first or second grid during an operation of the cathode. As a result, the distance between the cathode and the first grid, and the distance between the first and second grids change and the cathode cutoff voltage drifts. Furthermore, it is impossible to reduce the grid emission.




On the other hand, in the dual-structure cathode made of a sintered porous element and a nonporous refractory metal, the refractory metal does not function as a storage of the electron emitting substance since the refractory metal is not capable of being impregnated with the electron emitting substance. Consequently, it is impossible to keep a sufficient amount of electron emission substance in the cathode for achieving a stable electron emission characteristic. The electron emission characteristic is thereby reduced and the life of the cathode is shortened. Another problem is that the manufacturing process is complicated and costs rise.




SUMMARY OF THE INVENTION




It is an object of the invention to provide an impregnated cathode and a method of manufacturing the same that suppress emission of unwanted electrons and particles generated from an excess electron emitting substance so as to achieve a steady electron emission characteristic and a long life of the cathode.




It is another object of the invention to provide an electron gun and an electron tube, each comprising such an impregnated cathode and having a steady characteristic.




An impregnated cathode of the invention is made of a conductive porous element having an electron emitting region and a peripheral region other than the electron emitting region and impregnated with an electron emitting substance in a surface thereof. The porous element has such a configuration that a porosity of part corresponding to the electron emitting region and a porosity of part corresponding to the peripheral region are different from each other. To be specific, the porosity of the part corresponding to the electron emitting region is greater than the porosity of the part corresponding to the peripheral region.




Another impregnated cathode of the invention has such a configuration that the porous element includes a nonporous surface in the peripheral region other than the electron emitting region.




Still another impregnated cathode of the invention has such a configuration that the porous element is made of a plurality of porous elements whose porosities are different from one another combined with one another, sintered and fixed to one another.




A method of manufacturing an impregnated cathode of the invention includes the steps of: separately fabricating a plurality of conductive porous elements whose porosities are different from one another; fixing the porous elements to one another and integrating the porous elements with one another; and having the porous elements each impregnated with an electron emitting substance.




Another method of manufacturing an impregnated cathode of the invention includes the steps of: separately fabricating a first conductive porous element and a second conductive porous element whose porosity is lower than that of the first porous element, the second porous element having a concave capable of accommodating the first porous element; having the concave of the second porous element filled with an electron emitting substance; and fixing the first porous element into the concave of the second porous element filled with the electron emitting substance and having the electron emitting substance diffused into the first and second porous elements.




Still another method of manufacturing an impregnated cathode of the invention includes the steps of: fabricating a conductive porous element including part corresponding to an electron emitting region and part corresponding to a peripheral region other than the electron emitting region in a surface of the porous element; grinding the part corresponding to the peripheral region of the porous element to form a nonporous surface; and having the porous element impregnated with an electron emitting substance.




Still another method of manufacturing an impregnated cathode of the invention includes the steps of: separately fabricating a first conductive porous element and a second conductive porous element whose porosity is lower than that of the first porous element, the second porous element having a concave capable of accommodating the first porous element; grinding a surface of the second porous element to form a nonporous surface; and fixing the first porous element into the concave of the second porous element and having the first and second porous elements each impregnated with an electron emitting substance.




Still another method of manufacturing an impregnated cathode includes the steps of: molding a plurality of conductive substances and fabricating a plurality of porous elements; provisionally sintering each of porous elements so that the shrinkage factors thereof are different from one another; sintering the porous elements combined with one another and fixing the porous elements to one another; and having the porous elements each impregnated with an electron emitting substance.




An electron gun of the invention includes a grid with an electron emission hole and an impregnated cathode made of a conductive porous element having an electron emitting region at least larger than the electron emission hole and a peripheral region other than the electron emitting region and impregnated with an electron emitting substance. The porous element of the impregnated cathode has such a configuration that a porosity of part corresponding to the electron emitting region and a porosity of part corresponding to the peripheral region are different from each other.




Another electron gun of the invention further includes a nonporous surface in the peripheral region in the surface of the porous element.




An electron tube of the invention comprises an electron gun including a grid with an electron emission hole and an impregnated cathode made of a conductive porous element having an electron emitting region at least larger than the electron emission hole and a peripheral region other than the electron emitting region and impregnated with an electron emitting substance. The porous element of the impregnated cathode has such a configuration that a porosity of part corresponding to the electron emitting region and a porosity of part corresponding to the peripheral region are different from each other.




Another electron tube of the invention further includes a nonporous surface in the peripheral region in the surface of the porous element.




In the impregnated cathode, the electron gun and the electron tube of the invention, the porosity of part corresponding to the electron emitting region of the porous element and the porosity of part corresponding to the peripheral region are different from each other. To be specific, the porosity of the part corresponding to the electron emitting region is greater than the porosity of the part corresponding to the peripheral region. As a result, the amount of the electron emitting substance contained in the part corresponding to the electron emitting region is different from the amount contained in the part corresponding to the peripheral region. Emission of electrons from the electron emitting region is therefore steadily performed. With the nonporous surface provided in the peripheral region other than the electron emitting region, evaporation of unwanted electron emitting substances and so on is suppressed and deposition thereof onto the grid is suppressed.




According to the other impregnated cathode, electron gun and electron tube of the invention, the nonporous surface provided in the peripheral region of the porous element suppresses emission of electron emitting substances from the peripheral region.




According to still the other impregnated cathode of the invention, the shrinkage factors of the plurality of porous elements are different from one another. As a result, no clearance is formed in the interface between the sintered porous elements during manufacturing. Emission of electrons from the electron emitting region is thereby steadily performed.




According to the method of manufacturing an impregnated cathode of the invention, the plurality of porous elements whose porosities are different from one another are fabricated in advance and the porous elements are then impregnated with the electron emitting substance. The impregnated cathode wherein the distribution of the electron emitting substance varies is thereby obtained.




According to the other method of manufacturing an impregnated cathode of the invention, the electron emitting substance fed into the concave of the second porous element is diffused into the first and second porous elements and the porous elements are impregnated with the electron emitting substance.




According to still the other method of manufacturing an impregnated cathode of the invention, the peripheral region of the porous element is ground to form the nonporous surface for suppressing emission of electron emitting substances and so on.




According to still the other method of manufacturing an impregnated cathode of the invention, the impregnated cathode is manufactured wherein the distribution of the electron emitting substance contained in the electron emitting region is different from that in the peripheral region and the nonporous surface is provided in the peripheral region.




According to still the other method of manufacturing an impregnated cathode of the invention, the plurality of porous elements whose shrinkage factors are different from one another are fabricated in advance and the porous elements are then fixed to one another by sintering.




Other and further objects, features and advantages of the invention will appear more fully from the following description.











BRIEF DESCRIPTION OF THE DRAWINGS





FIG. 1

is a cross section of an impregnated cathode of a first embodiment of the invention.




FIG.


2


A and

FIG. 2B

are cross sections for illustrating a method of manufacturing the impregnated cathode of the first embodiment of the invention.




FIG.


3


A and

FIG. 3B

are cross sections for illustrating another method of manufacturing the impregnated cathode of the first embodiment of the invention.





FIG. 4

is a cross section of a cathode-ray tube using the impregnated cathode shown in FIG.


1


.





FIG. 5

is a cross section of an electron gun using the impregnated cathode shown in FIG.


1


.





FIG. 6

is a cross section of an impregnated cathode of a second embodiment of the invention.




FIG.


7


A and

FIG. 7B

are cross sections for illustrating a method of manufacturing the impregnated cathode of the second embodiment of the invention.





FIG. 8

is a cross section of an impregnated cathode of a third embodiment of the invention.





FIG. 9

is a cross section of an electron gun using the impregnated cathode of a fourth embodiment of the invention.





FIG. 10A

, FIG.


10


B and

FIG. 10C

are cross sections for illustrating a method of manufacturing the impregnated cathode of the fourth embodiment of the invention.





FIG. 11

is a cross section of an impregnated cathode of a fifth embodiment of the invention.





FIG. 12A

,

FIG. 12B

, FIG.


12


C and

FIG. 12D

are cross sections for illustrating a method of manufacturing the impregnated cathode of the fifth embodiment of the invention.





FIG. 13

is a cross section of an impregnated cathode of a modification example of the first to fifth embodiments of the invention.





FIG. 14

is a cross section of an impregnated cathode of a modification example of the first to fifth embodiments of the invention.





FIG. 15

is a cross section of an impregnated cathode of another modification example of the first to fifth embodiments of the invention.





FIG. 16

is a cross section of an impregnated cathode of still another modification example of the first to fifth embodiments of the invention.





FIG. 17

is a cross section of an impregnated cathode of still another modification example of the first to fifth embodiments of the invention.











DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS




Preferred embodiments of the invention will now be described in detail with reference to the accompanying drawings.




First Embodiment





FIG. 4

shows a cross section of part of an example of a cathode-ray tube including an impregnated cathode of a first embodiment of the invention. The cathode-ray tube incorporates an electron gun


300


including the impregnated cathode and comprises a panel


301


made of glass and a funnel


302


made of glass. The panel


301


and the funnel


302


are sealed with each other with a sealant such as frit glass so as to maintain the inside of the panel


301


and the funnel


302


at a high vacuum. A phosphor screen


303


is provided inside the panel


301


. A color selector (an aperture grill)


304


is installed behind the phosphor screen


303


. The base of the funnel


302


is a long and narrow neck


305


in which the electron gun


300


mentioned above is placed. Three electron beams of red, blue and green, for example, emitted from the electron gun


300


are each deflected by a deflection yoke


306


and applied to phosphors of the respective colors of the phosphor screen


303


through the color selector


304


.





FIG. 5

is a schematic view of the electron gun


300


. The electron gun


300


has a cathode unit


100


and a grid group


200


including a first grid


5


and a second grid


6


. The cathode unit


100


has an impregnated cathode


1


A that will be described in detail below; a cap


2


made of a refractory metal such as molybdenum (Mo) or tantalum (Ta); a sleeve


3


made of tantalum, for example, and having a thickness of 20 μm; and a heater


4


made of a heating wire of pure tungsten (W) or an alloy of tungsten with 2 to 3 percent of rhenium (Re). The impregnated cathode


1


A is fitted to the cap


2


and fastened to the sleeve


3


by means of the cap


2


. The heater


4


is placed inside the sleeve


3


. An electron emitting substance


1




a


is heated to 1000° C., for example, by the heater


4


and thereby activated and emits electrons through electron emission holes (beam holes)


5




a


and


6




a


. The sleeve


3


is incorporated in the cathode-ray tube through any of various supporting methods (not shown).




In the electron gun


300


, the temperature of the cathode unit


100


is heated up to about 1000° C. by the heater


4


and electrons (thermoelectrons) are emitted from the electron emitting substance


1




a


. Of the emitted electrons, those passing through the electron emission hole


5




a


of the first grid


5


and the electron emission hole


6




a


of the second grid


6


are effective electrons. The effective electrons are outputted as electron beams and applied to the phosphor screen


303


shown in

FIG. 4

as described above.




Referring to FIG.


1


and

FIG. 2

, the specific configuration of the impregnated cathode


1


A and a method of manufacturing the cathode will now be described. The impregnated cathode


1


A is made up of two kinds of conductive porous elements whose porosities are different from each other. The porous elements may be both formed through pressing a refractory metal, for example, such as tungsten whose grain diameter is about 5 μm and then heating and sintering the metal. The porous elements will be called sintered porous elements in the following description.




The impregnated cathode


1


A is placed directly beneath the electron emission hole


5




a


of the first grid


5


and the electron emission hole


6




a


of the second grid


6


. The impregnated cathode


1


A is made up of a sintered porous element


10


as a first porous element whose surface functions as an electron emitting region


10




a


and a sintered porous element


11


as a second porous element whose surface is a peripheral region other than the electron emitting region. The sintered porous element


10


takes a cylindrical shape whose diameter is slightly greater than that of each of the electron emission holes


5




a


and


6




a


of the first grid


5


and the second grid


6


, respectively. The sintered porous element


11


has a concave


11




a


in which the sintered porous element


10


is placed. The sintered porous element


10


being fitted and fixed to the concave


11




a


, the surfaces of the sintered porous elements


10


and


11


are both in one plane.




The porosity of the sintered porous element


10


is greater than that of the sintered porous element


11


. It is preferable that the porosity of the sintered porous element


10


falls within the range between 16 and 32 percent. This is because the electron emitting substance with which the porous element


10


is impregnated is excessively vaporized and lost in a short time if the porosity of the sintered porous element


10


is more than 32 percent and the life of the cathode is thereby reduced. In contrast, if the porosity is less than 16 percent, it is impossible to introduce the electron emitting substance to the sintered porous element and a supply of electron emitting substance to the surface of the cathode during operation is suppressed. The electron emission characteristic is thereby reduced.




Each vacancy in the sintered porous elements


10


and


11


is impregnated with any of barium oxide (BaO), a mixture of barium oxide, calcium oxide (CaO), and aluminum oxide (Al


2


O


3


), and so on as the electron emitting substance


1




a.






In the impregnated cathode


1


A, not only the sintered porous element


10


having the electron emitting region


10




a


but also the sintered porous element


11


corresponding to the region around the electron emitting region


10




a


is impregnated with the electron emitting substance


1




a


. In addition, the porosity of the electron emitting region


10




a


is greater than that of the sintered porous element


11


. Consequently, the amount of the electron emitting substance la per unit volume contained in the sintered porous element


10


is greater than the one contained in the sintered porous element


11


. As a result, emission of effective electrons from the electron emitting region


10




a


is performed steadily in a good condition. Furthermore, emission of unwanted electrons from the region other than the electron emitting region


10




a


is suppressed. Deposition of substances produced through evaporation of the electron emitting substance


1




a


onto the first grid


5


and the second grid


6


is suppressed as well. The characteristics such as the cathode cutoff voltage are thus maintained. The grid emission is reduced as well. The life of the electron gun is thereby increased.




The impregnated cathode


1


A may be manufactured through the following steps.




FIG.


2


A and

FIG. 2B

are cross sections of the impregnated cathode


1


A of the embodiment of the invention each in the respective manufacturing steps. As shown in

FIG. 2A

, the sintered porous element


10


in the cylindrical shape, for example, whose porosity falls within the range between 16 and 32 percent, for example, and the sintered porous element


11


, having the concave


11




a


, whose porosity is lower than that of the sintered porous element


10


are separately manufactured. The sintered porous elements


10


and


11


are each formed through pressing tungsten whose grain diameter is about 5 μm, for example, to form pellets and then heating and sintering the tungsten. The porosity is adjusted by controlling the pressure and the sintering temperature and duration. The sintered porous elements


10


and


11


are then fixed to each other. The fixing is performed by placing the sintered porous element


10


in the concave


11




a


of the sintered porous element


11


and fixing the sintered porous elements


10


and


11


to each other by sintering, press-fitting or welding.




Next, as shown in

FIG. 2B

, the sintered porous elements


10


and


11


are impregnated for about three minutes with the electron emitting substance


1




a


of barium oxide or a mixture of barium oxide, calcium oxide and aluminum oxide in a vacuum or in a hydrogen atmosphere by heating at about 1700° C., for example. The impregnated cathode


1


A shown in

FIG. 1

is thereby obtained.




According to the manufacturing method of the embodiment thus described, the two sintered porous elements


10


and


11


whose porosities are different from each other are fixed to each other. The sintered porous elements


10


and


11


are then impregnated with the electron emitting substance


1




a


. The impregnated cathode


1


A wherein the amount of the electron emitting substance


1




a


per unit volume partly varies is thereby easily manufactured.




FIG.


3


A and

FIG. 3B

are cross sections of the impregnated cathode


1


A shown in

FIG. 1

each in the respective manufacturing steps of another manufacturing method. Like numerals are assigned to the components similar to those shown in FIG.


2


A and FIG.


2


B. As shown in

FIG. 3A

, the sintered porous elements


10


and


11


whose porosities are different from each other are separately manufactured as in the method described above (FIG.


2


A). The concave


11




a


of the sintered porous element


11


is then filled with the electron emitting substance


1




a.






Next, as shown in

FIG. 3B

, the porous elements


10


and


11


are fixed to each other by a method such as placing the porous element


10


in the concave


11




a


of the porous element


11


and sintering the elements


10


and


11


. The electron emitting substance


1




a


is then diffused into the porous elements


10


and


11


by heating at about 1700° C. (impregnation temperature), for example. The impregnated cathode


1


A shown in

FIG. 1

is thereby obtained.




According to the manufacturing method of the impregnated cathode


1


A thus described, the two sintered porous elements


10


and


11


whose porosities are different from each other are fixed to each other so that the amount of the electron emitting substance


1




a


per unit volume is adjusted. In addition, the concave


11




a


of the sintered porous element


11


is filled with the electron emitting substance


1




a


before fixing the porous elements


10


and


11


to each other. As a result, the difference is reduced between the amount of the electron emitting substance


1




a


intended for impregnation and the amount actually introduced to the porous elements


10


and


11


.




Second Embodiment




A second embodiment of the invention will now be described. Like numerals are assigned to the components similar to those of the first embodiment and detailed descriptions thereof are omitted.





FIG. 6

is a cross section of an impregnated cathode


1


B of the second embodiment. Basically, as in the first embodiment, the impregnated cathode


1


B is placed directly beneath the electron emission hole


5




a


of the first grid


5


and the electron emission hole


6




a


of the second grid


6


. The impregnated cathode


1


B is made up of a sintered porous element


20


as a first porous element whose surface functions as an electron emitting region


20




a


and a sintered porous element


21


as a second porous element whose surface is a peripheral region other than the electron emitting region. In the second embodiment, in contrast to the first embodiment, the surface of the sintered porous element


21


is ground with alumina (Al


2


O


3


) or diamond (C) powder so that the pores of the sintered element are destroyed to form a nonporous surface


21




a.






Since the surface of the sintered porous element


21


of the impregnated cathode


1


B is ground so as to form the nonporous surface


21




a


, the nonporous surface


21




a


is not impregnated with the electron emitting substance such as barium oxide. In addition, the nonporous surface


21




a


suppresses evaporation of barium oxide staying in the sintered porous element


21


and reduced barium from the surface. Consequently, as in the first embodiment, emission of effective electrons from the electron emitting region


20




a


is performed steadily in a good condition, regardless of the porosities of the sintered porous elements


20


and


21


. Deposition of barium oxide and reduced barium onto the first grid


5


and the second grid


6


is suppressed as well. The porosity of the sintered porous element


21


is preferably 27 percent or below. In the second embodiment, the ratio between the porosity of the sintered porous element


20


and that of the sintered porous element


21


may be arbitrarily determined.




FIG.


7


A and

FIG. 7B

are cross sections showing the manufacturing steps of the impregnated cathode


1


B. As shown in

FIG. 7A

, the sintered porous elements


20


and


21


are separately manufactured as in the first embodiment. The surface of the sintered porous elements


21


is then ground with alumina or diamond powder to form the non-porous surface


21




a


. Next, as in the first embodiment, the sintered porous elements


20


and


21


are fixed to each other. As shown in

FIG. 7B

, the sintered porous elements


20


and


21


are impregnated with the electron emitting substance


1




a


such as barium oxide. The impregnated cathode


1


B shown in

FIG. 6

is thereby obtained.




Third Embodiment





FIG. 8

is a cross section of an impregnated cathode


1


C of a third embodiment of the invention. The impregnated cathode


1


C is made up of a sintered porous element


10


as a first porous element having an electron emitting region


10




a


and a sintered porous element


31


as a second porous element having a nonporous surface


31




a


, the porous elements


10


and


31


being integrated with each other. The porosity of the sintered porous element


31


is lower than that of the sintered porous element


10


. As in the first embodiment, the porosity of the sintered porous element


10


falls within the range between 16 and 32 percent. As in the second embodiment, the porosity of the sintered porous element


31


is preferably 27 percent or below.




The impregnated cathode


1


C may be manufactured by separately forming the sintered porous elements


10


and


31


whose porosities are different from each other and grinding the surface of the sintered porous element


31


as in the second embodiment to form the nonporous surface


31




a


. The sintered porous elements


10


and


31


are then impregnated with the electron emitting substance


1




a.






In the impregnated cathode


1


C, the porosity of the sintered porous element


10


is greater than that of the sintered porous element


31


. Consequently, the amount of the electron emitting substance


1




a


per unit volume contained in the porous element


10


is greater than that in the porous element


31


. As a result, emission of effective electrons is performed steadily in a good condition. Furthermore, emission of unwanted electrons from the sintered porous element


31


is suppressed since the surface of the sintered porous element


31


is the nonporous surface


31




a


. Deposition of substances produced through evaporation of the electron emitting substance


1




a


onto the first grid


5


and the second grid


6


is suppressed as well.




Fourth Embodiment





FIG. 9

is a schematic view of an electron gun


400


including an impregnated cathode of a fourth embodiment of the invention. The electron gun


400


may be applied to the cathode-ray tube shown in

FIG. 4

mentioned above. The configuration of the electron gun


400


is similar to that of the electron gun


300


of the first embodiment except that the impregnated cathode


1


A is replaced with an impregnated cathode


1


D. Like numerals are assigned to the components similar to those of the electron gun


300


and detailed descriptions thereof are omitted.





FIG. 10C

shows only the impregnated cathode


1


D in the electron gun


400


shown in FIG.


9


. The impregnated cathode


1


D is placed directly beneath the electron emission hole


5




a


of the first grid


5


and the electron emission hole


6




a


of the second grid


6


. The impregnated cathode


1


D is made up of a sintered porous element


40


of a conductive material such as tungsten (W) or molybdenum (Mo). That is, the impregnated cathode


1


D is made of a single-piece structure, in contrast to the impregnated cathodes


1


A to


1


C.




The sintered porous element


41


has a cylindrical shape, for example. The diameter thereof is 1.6 mm, for example. The surface of the sintered porous element


41


is made of an electron emitting region


41




a


and a nonporous surface


41




b


other than the electron emitting region


41




a


. The diameter of the electron emitting region


41




a


may be 0.9 mm, for example, that is, slightly greater than that of each of the electron emission holes


5




a


and


6




a


of the first grid


5


and the second grid


6


, respectively.




As in the second and third embodiment, the nonporous surface


41




b


is ground with alumina, diamond powder or abrasive paper so that the pores of the sintered element are destroyed.




The porosity of the sintered porous element


41


preferably falls within the range between 16 and 32 percent. The reason is the same as the reason described in the first embodiment.




Each vacancy in the sintered porous element


41


is impregnated with any of barium oxide (BaO), a mixture of barium oxide, calcium oxide (CaO), and aluminum oxide (Al


2


O


3


), and so on as the electron emitting substance


1




a.






In the impregnated cathode


1


D, the pores of the sintered element are destroyed in the nonporous surface


41




b


and the nonporous surface


41




a


is not impregnated with the electron emitting substance


1




a


. In addition, emission of unwanted electrons from the nonporous surface


41




b


is suppressed. Consequently, emission of effective electrons from the electron emitting region


20




a


is performed steadily in a good condition. Deposition of the electron emitting substance


1




a


onto the first grid


5


and the second grid


6


is suppressed as well. Furthermore, since the whole sintered porous element


41


is impregnated with the electron emitting substance


1




a


, the amount of the electron emitting substance


1




a


sufficient for obtaining the steady electron emission characteristic is maintained in the cathode.




Referring to

FIG. 10A

, FIG.


10


B and

FIG. 10C

, a method of manufacturing the impregnated cathode


1


D will now be described.




As shown in

FIG. 10A

, tungsten powder whose grain diameter is 3 μm, a binder made of an organic compound, for example, and water are mixed by a stirrer to form slurry. Using the slurry, granulated powder of about 50 μm is made by the spray dryer method, for example. The granulated powder is fed into a mold, pressed with a pressure of 5 tons/cm


2


, and heated in a hydrogen-reducing atmosphere, for example, to remove the binder. The granulated powder is further heated for three hours at a temperature of 1800° C., for example, in a hydrogen atmosphere or an inert gas atmosphere to sinter the granulated powder. The cylindrical sintered porous element


41


is thereby obtained. The sintered porous element


41


has a step


42


in the shape of concave, for example, and includes the electron emitting region


41




a


on the surface thereof.




The porosity of the sintered porous element


41


is controlled by the pressure and the sintering temperature and duration. The porosity is constant throughout the sintered porous element


41


and may be 25 percent, for example. The thickness of the sintered porous element


41


may be 0.65 mm. The diameter of the step


42


may be 0.9 mm. The step height may be 0.05 mm.




As shown in

FIG. 10B

, the surface of the sintered porous element


41


other than the electron emitting region


41




a


is ground with fine abrasive paper of number 2000, for example, to destroy the pores of the sintered element and form the nonporous surface


41




b


. It is preferable that the surface is ground so that the step between the electron emitting region


41




a


and the nonporous surface


41




b


is 10 μm or below. It is more preferable that the step is 5 μm or below. This is because the step of more than 10 μm makes the electron emission characteristic unsteady and makes it difficult to correctly align the distance between the impregnated cathode


1


D and the first grid


5


for assembling the electron gun


400


. The sintered porous element


41


may be ground with alumina or diamond powder instead of abrasive paper. Alternatively, a plurality of the sintered porous elements


41


may be placed on a disk-shaped jig and ground by a rotary lapping machine.




Next, the sintered porous element


41


is impregnated with the electron emitting substance


1




a


of barium oxide (BaO) or a mixture of barium oxide, calcium oxide (CaO) and aluminum oxide in a vacuum or in a hydrogen atmosphere by heating and melting. The impregnated cathode


1


D shown in

FIG. 10C

is thereby obtained.




In the embodiment thus described, the sintered porous element


41


having the step


42


is formed and the step


42


is then ground to form the nonporous surface


41




b


. The sintered porous element


41


is then impregnated with the electron emitting substance


1




a


. As a result, the impregnated cathode ID allows emission of effective electrons from the electron emitting region


20




a


to be performed steadily in a good condition. Deposition of the electron emitting substance la onto the first grid


5


and the second grid


6


is suppressed as well. The impregnated cathode


1


D is easily manufactured at low cost.




Fifth Embodiment





FIG. 11

is a cross section of an impregnated cathode


1


E of a fifth embodiment of the invention. The impregnated cathode


1


E may be incorporated in the electron gun


300


shown in FIG.


5


. The impregnated cathode


1


E is placed directly beneath the electron emission hole


5




a


of the first grid


5


and the electron emission hole


6




a


of the second grid


6


, being incorporated in the electron gun


300


.




The impregnated cathode


1


E is made of two conductive porous elements whose shrinkage factors are different from each other. For example, the impregnated cathode


1


E is made of a sintered porous element


50


as a first porous element whose surface functions as an electron emitting region


50




a


and a sintered porous element


51


as a second porous element whose surface is a peripheral region other than the electron emitting region and whose shrinkage factor is greater than that of the porous element


50


.




The sintered porous element


50


may be 0.895 mm in diameter and 0.33 mm in thickness and take a cylindrical shape with a diameter slightly greater than that of each of the electron emission holes


5




a


and


6




a


of the first grid


5


and the second grid


6


, respectively. The sintered porous element


51


has a concave


51




a


in which the sintered porous element


50


is placed. The surface of the sintered porous element


51


other than the concave


51




a


is ground and the pores are destroyed to form a nonporous surface


51




b


. The sintered porous element


51


may be 1.440 mm in diameter and 0.6 mm in thickness. The sintered porous element


50


being fitted and fixed to the concave


51




a


of the porous element


50


by sintering, the surfaces of the sintered porous elements


50


and


51


are both in one plane.




The porosity of the sintered porous element


50


preferably falls within the range between 16 and 32 percent. This is because the electron emitting substance with which the porous element


50


is impregnated is excessively vaporized and lost in a short time if the porosity of the sintered porous element


50


is more than 32 percent and the life of the cathode is thereby reduced. In contrast, if the porosity is less than 16 percent, it is impossible to introduce the electron emitting substance to the sintered porous element and a supply of electron emitting substance to the surface of the cathode during operation is suppressed. The electron emission characteristic is thereby reduced.




Each vacancy in the sintered porous elements


50


and


51


is impregnated with any of barium oxide, a mixture of barium oxide, calcium oxide, and aluminum oxide, and so on as the electron emitting substance


1




a.






Referring to

FIG. 12A

,

FIG. 12B

, FIG.


12


C and

FIG. 12D

, a method of manufacturing the impregnated cathode


1


E will now be described.




As shown in

FIG. 12A

, the sintered porous element


50


and the sintered porous element


51


with the concave


51




a


are each formed. The sintered porous element


50


may have a density of 14.5 g/cm


3


, a diameter of 0.895 mm, a thickness of 0.330 mm. The sintered porous element


51


may have a density of 13.4 g/cm


3


, a diameter of 1.471 mm, a thickness of 0.640 mm and has a shrinkage factor greater than that of the sintered porous element


50


. To form both sintered porous elements


50


and


51


, a refractory metal (such as tungsten powder whose grain diameter is 3 μm), a binder made of an organic compound, for example, and water are mixed by a stirrer to form slurry. Using the slurry, granulated powder of about 50 μm is made by the spray dryer method, for example. To form the sintered porous element


50


, the granulated powder is fed into a mold, pressed with a pressure of 5 tons/cm


2


, and heated at a temperature of 1800° C. in a hydrogen atmosphere for three hours, for example, so that the granulated powder is sintered (provisional sintering). To form the sintered porous element


51


, the granulated powder is fed into a mold, pressed with a pressure of 2 tons/cm


2


, and heated in a hydrogen atmosphere for three hours at a temperature of 1700° C., for example, so that the granulated powder is sintered provisional sintering). The concave


51




a


is formed to have a diameter of 0.916 mm, for example, so that the diameter is greater than that of the sintered porous element


50


.




The densities of the sintered porous elements


50


and


51


are controlled by varying the pressure for molding.




Next, the surface of the sintered porous element


51


is ground with fine abrasive paper of number 2000, for example, to destroy the pores of the sintered element and form the nonporous surface


51




b


. The thickness of the sintered porous element


51


is reduced, compared to the thickness before grinding, down to 0.610 mm, for example. As in the fourth embodiment, the sintered porous element


51


may be ground with alumina, diamond powder or by a lapping machine instead of abrasive paper.




As shown in

FIG. 12B

, the sintered porous element


50


is inserted to the concave


51




a


of the sintered porous element


51


. The sintered porous elements


50


and


51


are heated at a temperature of 1800° C. in a hydrogen atmosphere for three hours, for example, and sintered (finish sintering). The sintered porous elements


50


and


51


are thereby fixed to and integrated with each other (a fixing step).




The sintered porous element


50


shrinks by 9.1 percent in diameter and 7.9 percent in thickness, for example. The sintered porous element


51


shrinks by 10.5 percent in diameter and 10.3 percent in thickness, for example. That is, the shrinkage factor of the sintered porous element


50


is lower than that of the sintered porous element


51


. The shrinkage factors are adjusted by controlling the densities of the sintered porous elements


50


and


51


previously described or by controlling the temperature (for sintering) and the heating duration (sintering duration).




As shown in

FIG. 12C

, the surfaces of the sintered porous elements


50


and


51


are in one plane and the sintered porous element


50


is fitted to the concave


51




a


of the sintered porous element


51


with no clearance. The fixed sintered porous element


50


and the concave


51




a


are 0.882 mm in diameter and 0.30 mm in thickness (height), for example. The fixed sintered porous element


51


is 1.440 mm in diameter and 0.600 mm in thickness, for example.




Next, as shown in

FIG. 12D

, the sintered porous elements


50


and


51


are impregnated with the electron emitting substance


1




a


of barium oxide or a mixture of barium oxide, calcium oxide and aluminum oxide in a vacuum or in a hydrogen atmosphere by heating and melting. The impregnated cathode


1


E shown in

FIG. 11

is thereby obtained.




According to the fifth embodiment thus described, the sintered porous elements


50


and


51


are integrated with each other by sintering. As a result, the sintered porous elements


50


and


51


will not be damaged while being integrated. The yields during manufacturing will be therefore dramatically improved.




Since no clearance is formed in the interface between the sintered porous elements


50


and


51


, there is no possibility that the electron emitting substance


1




a


remains in such clearance and seeps out of the surface of the impregnated cathode


1


E or a great amount of the electron emitting substance


1




a


instantaneously evaporates while the cathode is heated. As a result, the electron emission characteristic is improved and the life of the impregnated cathode is increased.




EXAMPLES




First Example




Practical examples of the invention will now be described. The electron gun


300


comprising the impregnated cathode


1


A having the configuration described in the first embodiment will be described in a first example below.




Tungsten whose grain diameter was about 5 μm was pressed to form pellets and heated at a temperature of 1800° C. and sintered. The sintered porous element


10


whose porosity was 20 percent and the sintered porous element


11


whose porosity was 15 percent were thereby formed. Next, the sintered porous element


10


was press-fitted into the concave


11




a


of the sintered porous element


11


and the sintered porous elements


10


and


11


were impregnated with barium oxide as the electron emitting substance for about three minutes by heating at a temperature of about 1700° C. The impregnated cathode


1


A was thereby obtained.




The amounts of barium oxide contained in the sintered porous elements


10


and


11


of the impregnated cathode


1


A thus obtained were measured. Assuming that the amount contained in the sintered porous element


10


was 100 percent, the amount contained in the sintered porous elements


11


was 55 percent. That is, the amount of particles including barium emitted from the sintered porous element


10


towards the first grid was reduced to about half the amount obtained in a cathode of related art.




The impregnated cathode


1


A being incorporated in a cathode-ray tube, a reliability test for 2000 to 5000 hours was performed, that is, the cathode cutoff voltage and grid emission were determined. The result was that the drift of the cathode cutoff voltage was reduced to a fourth of the drift of the related-art cathode and the amount of the grid emission was reduced to a fourth of the amount of the related-art cathode. The reduction rate of the pulse emission characteristic determined in the reliability test was low and favorable. As a result, the impregnated cathode


1


A and the electron gun


300


obtained in the example exhibited excellent reliability in reducing the cathode cutoff voltage, the grid emission and so on and had the excellent electron emission characteristic.




Second Example




An example of the electron gun


400


comprising the impregnated cathode


1


D having the configuration described in the fourth embodiment will now be described.




Tungsten powder whose grain diameter is 3 μm, an organic binder, and water were mixed by a stirrer to form slurry. Using the slurry, granulated powder of about 50 μm was made by the spray dryer method. The granulated powder was fed into a mold, pressed with a pressure of 5 tons/cm


2


, and heated in a hydrogen-reducing atmosphere to remove the organic binder. The granulated powder was further heated at a temperature of 1800° C. in a vacuum for three hours. The cylindrical sintered porous element


41


was thereby obtained. The sintered porous element


41


had the step


42


of 0.9 mm in diameter and 0.05 mm in step height on the surface thereof. The porosity of the sintered porous element


41


measured was 25 percent.




The step


42


was ground with abrasive paper of number 2000 so that the surface of the sintered porous element


41


was nearly flat. The sintered porous element


41


whose surface was made up of the electron emitting region


41




a


and the nonporous surface


41




b


were thereby obtained. The surface of the sintered porous element


41


being observed by a scanning electron microscope (SEM), the pores of the sintered element of the nonporous surface


41




b


were found to be destroyed and lost.




Next, the sintered porous element


41


was impregnated with the electron emitting substance


1




a


of a mixture of barium carbonate (BaCO


3


), calcium carbonate (CaCO


3


) and aluminum oxide (Al


2


O


3


) whose mole ratio was 4:1:1 in a vacuum by heating and melting. The impregnated cathode


1


D was thereby obtained. The electron gun


400


was assembled with the impregnated cathode


1


D and installed in the cathode-ray tube.




To compare with the impregnated cathode of the example of the invention, a cylindrical sintered porous element whose surface was flat, that is, having no concave was made and an impregnated cathode was formed under conditions similar to those of the example of the invention except that the surface was not ground. An electron gun was assembled with the impregnated cathode and installed in a cathode-ray tube.




Using the cathode-ray tubes of the example of the invention and the comparison example, a reliability test for 5000 hours was performed. The result was that the drift of the cathode cutoff voltage obtained with the cathode-ray tube of the example of the invention was 20 percent or below of the drift obtained with the cathode-ray tube of the comparison example. With the cathode-ray tube of the example of the invention, generation of the grid emission was prevented as well. Furthermore, the cathode-ray tubes of the example of the invention and the comparison example were disassembled after the test and the amount of deposits such as barium on the surfaces of the first and second grids were observed. The amount of deposits found in the cathode-ray tube of the example of the invention was 20 percent or below of that found in the cathode-ray tube of the comparison example. As a result, the cathode-ray tube and the electron gun obtained in the example of the invention exhibited excellent reliability in reducing the cathode cutoff voltage, the grid emission and so on and had the excellent electron emission characteristic.




Third Example




An example of an electron gun comprising the impregnated cathode IE having the configuration described in the fifth embodiment will now be described.




Tungsten powder whose grain diameter was 3 μm, an organic binder, and water were mixed by a stirrer to form slurry. Using the slurry, granulated powder of about 50 μm was made by the spray dryer method.




The granulated powder was fed into a mold, pressed with a pressure of 5 tons/cm


2


to mold and heated at a temperature of 1800° C. in a hydrogen atmosphere for three hours to sinter the granulated powder and form the sintered porous element


50


. The sintered porous element


50


had a density of 14.5 g/cm


3


, a diameter of 0.895 mm, and a thickness of 0.330 mm.




The granulated powder described above was fed into a mold, pressed with a pressure of 2 tons/cm


2


to mold and heated at a temperature of 1700° C. in a hydrogen atmosphere for three hours to sinter the granulated powder and form the sintered porous element


51


having the concave


51




a


. The sintered porous element


51


had a density of 13.4 g/cm


3


, a diameter of 1.471 mm, and a thickness of 0.640 mm. The diameter of the concave


51




a


was 0.916 mm.




The surface of the sintered porous element


51


was ground with abrasive paper of number 2000 to form the nonporous surface


51




b


. The thickness of the sintered porous element


51


was 0.610 mm.




Next, the sintered porous element


50


was inserted to the concave


51




a


of the sintered porous element


51


and the sintered porous elements


50


and


51


were heated at a temperature of 1800° C. in a hydrogen atmosphere for three hours to sinter. Furthermore, the sintered porous elements


50


and


51


were impregnated with the electron emitting substance


1




a


of a mixture of barium carbonate (BaCO


3


), calcium carbonate (CaCO


3


) and aluminum oxide (Al


2


O


3


) whose mole ratio was 4:1:1 in a vacuum by heating and melting. The impregnated cathode


1


E was thereby obtained. The electron gun was assembled with the impregnated cathode


1


E and installed in the cathode-ray tube.




An impregnated cathode to compare with the impregnated cathode of the example of the invention was manufactured by sintering the porous elements


50


and


51


separately by heating at a temperature of 1800° C. in a hydrogen atmosphere for three hours before inserting the porous element


50


to the concave


51




a


of the porous element


50


. The sintered porous elements


50


and


51


were then fixed to each other by press-fitting. An electron gun was assembled with the impregnated cathode and installed in a cathode-ray tube. The remainder of the conditions for the comparison example were similar to those for the example of the invention.




Using the cathode-ray tubes of the example of the invention and the comparison example, a reliability test for 5000 hours was performed. The result was that the drift of the cathode cutoff voltage obtained with the cathode-ray tube of the example of the invention was 20 percent or below of the drift obtained with the cathode-ray tube of the comparison example. With the cathode-ray tube of the example of the invention, generation of the grid emission was prevented as well. Furthermore, the cathode-ray tubes of the example of the invention and the comparison example were disassembled after the test and the amount of deposits such as barium on the surfaces of the first and second grids were observed. The amount of deposits found in the cathode-ray tube of the example of the invention was 20 percent or below of that found in the cathode-ray tube of the comparison example. As a result, the cathode-ray tube and the electron gun obtained in the example of the invention exhibited excellent reliability in reducing the cathode cutoff voltage, the grid emission and so on and had the excellent electron emission characteristic.




The invention is not limited to the embodiments and examples described so far but may be practiced in still other ways. For example, although the first and second porous elements are fixed to each other and then impregnated with the electron emitting substance from outside in the foregoing second and third embodiments, the method of the first embodiment wherein the concave of the second porous element is filled with the electron emitting substance in advance and heated and the substance is diffused may be applied to the second and third embodiments.




Although the porous elements were made of tungsten as a refractory metal in the foregoing embodiments, any other material such as molybdenum (Mo) that satisfies the following conditions is applicable. That is, the material is conductive, capable of reducing an electron emitting substance such as barium oxide, has an appropriate work function, has a melting point high enough to withstand the cathode operating temperature (about 1000° C. for an impregnated cathode) and an aging temperature (about 1200 to 1300° C.) transiently high during the step of fabricating a cathode-ray tube and so on, and is capable of forming a porous element by sintering.




Although the invention is applied to the cathode-ray tube in the foregoing embodiments, the invention may be applied to any other electron tube in general including a microwave tube.




In the foregoing embodiments, the surface of the sintered porous element having the electron emitting region and the surface of the sintered porous element around the electron emitting region are both in one plane. Alternatively, as shown in

FIG. 13

, a sintered porous element


60


in the shape of wedge whose upper part is larger in diameter than a concave


61




a


of a sintered porous element


61


may be provided. The surface of the sintered porous elements


60


and


61


thus takes the form of step.




In the foregoing embodiments, the sintered porous element around the electron emitting region has the concave. Alternatively, as shown in

FIG. 14

, a sintered porous element


71


to be the region around the electron emitting region, having a through hole


71




a


may be provided. A cylindrical sintered porous element


70


is inserted to the sintered porous element


71


. As shown in

FIG. 15

, another alternative is that a wedge-shaped sintered porous element


70


′ as described above may be inserted to the sintered porous element


71


.




Although the impregnated cathode is made of one or two sintered porous elements in the foregoing embodiments, the cathode may be made of more than two elements. As shown in

FIG. 16

, such cathode may comprise a sintered porous element


81


to be the region around the electron emitting region, having a through hole


81




a


, a sintered porous element


82


inserted to the through hole


81




a


and a sintered porous element


80


having the electron emitting region. As shown in

FIG. 17

, such cathode may comprise three sintered porous elements


80


′,


81


and


82


. The sintered porous element


80


′ having the electron emitting region takes a shape of wedge.




According to the impregnated cathode, the electron gun and the electron tube of the invention described so far, the porosity of part corresponding to the electron emitting region of the porous element and the porosity of part corresponding to the peripheral region are different from each other. As a result, emission of electrons from the electron emitting region is steadily and sufficiently performed. Emission of unwanted electrons from the region whose porosity is greater is suppressed and deposition of substances resulting from excess electron emitting substances and so on onto the grid is suppressed. The drift of cathode cutoff voltage and the grid emission are thereby reduced. Since the electron emitting region and the peripheral region are made of porous elements, the electron emitting substance is stored in any region. As a result, the characteristics of electron emission from all the surface of the temperature-limited region such as the pulse emission characteristic are maintained without reducing the life of the impregnated cathode.




According to the other impregnated cathode, electron gun and electron tube of the invention, the nonporous surface is provided in the peripheral region of the porous element. Emission of unwanted electrons from the peripheral region is suppressed and deposition of substances resulting from excess electron emitting substances and so on onto the grid is suppressed.




According to still the other impregnated cathode of the invention, the shrinkage factors of the plurality of porous elements are different from one another. As a result, no clearance is formed in the interface between the sintered porous elements during manufacturing. There is no possibility that the electron emitting substance seeps out of the surface of the impregnated cathode or a great amount of the electron emitting substance instantaneously evaporates while the cathode is heated. As a result, the electron emission characteristic is improved and the life of the impregnated cathode is increased.




According to the method of manufacturing an impregnated cathode of the invention, the impregnated cathode described above is easily manufactured.




In particular, the method of manufacturing an impregnated cathode of the invention offers the simple manufacturing steps and reduces manufacturing costs.




According to the other method of manufacturing an impregnated cathode of the invention, the plurality of porous elements whose shrinkage factors are different from one another are fixed to one another by sintering. As a result, the porous elements will not be damaged while being integrated. The yields during manufacturing will be therefore improved.




Obviously many modifications and variations of the present invention are possible in the light of the above teachings. It is therefore to be understood that within the scope of the appended claims the invention may be practiced otherwise than as specifically described.



Claims
  • 1. A method of manufacturing an impregnated cathode, including the steps of:fabricating a conductive porous element including part corresponding to an electron emitting region and part corresponding to a peripheral region other than the electron emitting region in a surface of the porous element; grinding the part corresponding to the peripheral region of the porous element to form a nonporous surface; and having the porous element impregnated with an electron emitting substance.
  • 2. A method according to claim 1 wherein a step is formed in the step of fabricating the porous element so that the part corresponding to the peripheral region of the porous element is at the top of the step and the part corresponding to the electron emitting region is at the bottom of the step.
  • 3. A method according to claim 2 wherein the grinding is performed so that the step height between the electron emitting region and the peripheral region is 10 μm or below.
  • 4. A method according to claim 1 wherein the porous element is fabricated by sintering metal powder in the step of fabricating the porous element.
  • 5. A method according to claim 4 wherein the metal powder is tungsten (W) or molybdenum (Mo).
  • 6. A method of manufacturing an impregnated cathode, including the steps of:separately fabricating a first conductive porous element and a second conductive porous element whose porosity is lower than that of the first porous element, the second porous element having a concave capable of accommodating the first porous element; grinding a surface of the second porous element to form a nonporous surface; and fixing the first porous element into the concave of the second porous element and having the first and second porous elements each impregnated with an electron emitting substance.
  • 7. A method of manufacturing an impregnated cathode with an electron emitting region and a peripheral region other than the electron emitting region in a surface thereof, including the steps of:molding a plurality of conductive substances and fabricating a plurality of porous elements; provisionally sintering each of the porous elements so that the shrinkage factors thereof are different from one another; sintering the porous elements combined with one another and fixing the porous elements to one another; and having the porous elements each impregnated with an electron emitting substance.
  • 8. A method according to claim 7 wherein a first porous element corresponds to part corresponding to the electron emitting region and a second porous element corresponds to part corresponding to the peripheral region are at least fabricated as the plurality of porous elements.
  • 9. A method according to claim 8 wherein a shrinkage factor of the first porous element is lower than that of the second porous element.
  • 10. A method according to claim 8 further including the step of grinding a surface of the second porous element to form a nonporous surface.
  • 11. A method according to claim 7 wherein the shrinkage factors of the porous elements are controlled by adjusting a pressure applied thereto for molding.
  • 12. A method according to claim 7 wherein the shrinkage factors of the porous elements are controlled by adjusting a heating temperature or a heating duration for the provisional sintering.
Priority Claims (2)
Number Date Country Kind
9-302176 Nov 1997 JP
10-300114 Oct 1998 JP
Parent Case Info

This application is a division of Ser. No. 09/184,132 filed Nov. 2, 1998.

US Referenced Citations (3)
Number Name Date Kind
4823044 Falce Apr 1989 A
5171180 Lee Dec 1992 A
6034469 Uda et al. Mar 2000 A
Foreign Referenced Citations (2)
Number Date Country
53-14548 Feb 1978 JP
SHO60-62034 Apr 1985 JP