Claims
- 1. A method of manufacturing an impregnated cathode, including the steps of:fabricating a conductive porous element including part corresponding to an electron emitting region and part corresponding to a peripheral region other than the electron emitting region in a surface of the porous element; grinding the part corresponding to the peripheral region of the porous element to form a nonporous surface; and having the porous element impregnated with an electron emitting substance.
- 2. A method according to claim 1 wherein a step is formed in the step of fabricating the porous element so that the part corresponding to the peripheral region of the porous element is at the top of the step and the part corresponding to the electron emitting region is at the bottom of the step.
- 3. A method according to claim 2 wherein the grinding is performed so that the step height between the electron emitting region and the peripheral region is 10 μm or below.
- 4. A method according to claim 1 wherein the porous element is fabricated by sintering metal powder in the step of fabricating the porous element.
- 5. A method according to claim 4 wherein the metal powder is tungsten (W) or molybdenum (Mo).
- 6. A method of manufacturing an impregnated cathode, including the steps of:separately fabricating a first conductive porous element and a second conductive porous element whose porosity is lower than that of the first porous element, the second porous element having a concave capable of accommodating the first porous element; grinding a surface of the second porous element to form a nonporous surface; and fixing the first porous element into the concave of the second porous element and having the first and second porous elements each impregnated with an electron emitting substance.
- 7. A method of manufacturing an impregnated cathode with an electron emitting region and a peripheral region other than the electron emitting region in a surface thereof, including the steps of:molding a plurality of conductive substances and fabricating a plurality of porous elements; provisionally sintering each of the porous elements so that the shrinkage factors thereof are different from one another; sintering the porous elements combined with one another and fixing the porous elements to one another; and having the porous elements each impregnated with an electron emitting substance.
- 8. A method according to claim 7 wherein a first porous element corresponds to part corresponding to the electron emitting region and a second porous element corresponds to part corresponding to the peripheral region are at least fabricated as the plurality of porous elements.
- 9. A method according to claim 8 wherein a shrinkage factor of the first porous element is lower than that of the second porous element.
- 10. A method according to claim 8 further including the step of grinding a surface of the second porous element to form a nonporous surface.
- 11. A method according to claim 7 wherein the shrinkage factors of the porous elements are controlled by adjusting a pressure applied thereto for molding.
- 12. A method according to claim 7 wherein the shrinkage factors of the porous elements are controlled by adjusting a heating temperature or a heating duration for the provisional sintering.
Priority Claims (2)
Number |
Date |
Country |
Kind |
9-302176 |
Nov 1997 |
JP |
|
10-300114 |
Oct 1998 |
JP |
|
Parent Case Info
This application is a division of Ser. No. 09/184,132 filed Nov. 2, 1998.
US Referenced Citations (3)
Foreign Referenced Citations (2)
Number |
Date |
Country |
53-14548 |
Feb 1978 |
JP |
SHO60-62034 |
Apr 1985 |
JP |