Number | Name | Date | Kind |
---|---|---|---|
3990038 | Jensen et al. | Nov 1976 | |
4145635 | Tuck | Mar 1979 | |
4336277 | Bunshah et al. | Jun 1982 | |
4340837 | Meyer | Jul 1982 | |
4509451 | Collins et al. | Apr 1985 | |
4560880 | Petric et al. | Dec 1985 | |
4583023 | Friedman et al. | Apr 1986 | |
4608063 | Kurokawa | Aug 1986 | |
4620913 | Bergman | Nov 1986 | |
4657774 | Satou et al. | Apr 1987 |
Entry |
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Desilets, "Plasma Etching Chamber," 12/1983, IBM Technical Disclosure Bulletin, vol. 26, No. 7B, pp. 3567-3569. |