This application claims priority under 35 U.S.C. §371 as a National Stage application of international application number PCT/JP2010/050499, filed Jul. 18, 2010, entitled “INDENTATION TEST METHOD AND INDENTATION TEST APPARATUS,” which claims priority to Japanese Patent Application No. JP2009-010426 Filed on Jan. 20, 2009, and Japanese Patent Application No. JP2009-185525, filed on Aug. 10, 2009 which are incorporated herein by reference.
The present invention relates to a novel indentation test method. The present invention further relates to a novel indentation test apparatus using the indentation test method.
A tensile test used to study deformation and other characteristics of a metallic material is a typical objective evaluation method but requires cutting a test piece off a bulk specimen, which makes the test highly invasive and makes it difficult to apply the test to the material of which a product is made and living biological tissue.
On the other hand, an indentation test also typically used in material hardness measurement allows noninvasive measurement because the test does not require cutting a test piece off a bulk specimen. It has been known in an indentation test that the Hertzian elastic contact theory can be used with metallic materials in a highly reliable manner (see Non-Patent Document 1, for example).
There have also been several indentation tests used to measure characteristics of a soft material that involves large deformation, such as biological soft tissue (see Non-Patent Documents 2 to 5, for example).
The present inventors have disclosed technical details associated with the invention (see Non-Patent Documents 6 to 9, for example).
In the measurement of characteristics of a soft material that involves large deformation, such as biological soft tissue, made in an indentation test described above, although Toshiyuki Sawa showed that the Hertzian elastic contact theory provides a high reliability, the high reliability only valid within a minute deformation range. Osamu Takatani et al. applied an indentation test to biological soft tissue but the test is based on an N-value approach essentially equivalent to the Hertzian elastic contact theory. Further, Yoshitaka Arima et al. reported an approach in which identification is made based on energy loss in loading and unloading processes along with an N-value approach, but a semi-infinite body is assumed as in the Hertzian elastic contact theory and no influence of thickness is considered. N. E. Waters reported a study on the influence of thickness, but the report described only the influence of thickness but does not describe any evaluation taking into account a stress-strain relationship. Tatsuya Ishibashi et al. reported that an indentation test was applied to a polymer material in consideration of an irreversible behavior, but the method is hardly applied to a soft material having high reversibility.
There is therefore a desire to solve the problems described above and develop a novel indentation test method and indentation test apparatus.
The invention has been made in view of the problems described above, and an object of the invention is to provide a novel indentation test method.
Another object of the invention is to provide a novel indentation test apparatus using the indentation test method.
To solve the problems described above and achieve the objects of the invention, an indentation test method according to the invention is a method for indenting a specimen with an indenter, the method comprising calculating an equivalent indentation strain of the specimen by using the thickness of the specimen and calculating Young's modulus of the specimen by using the equivalent indentation strain.
The indentation test method preferably, but not necessarily, further comprises identifying the thickness of the specimen. The indenter is preferably, but not necessarily, a spherical indenter. The diameter of the spherical indenter preferably, but not necessarily, ranges from 1×10−8 to 1 m. The identification of the thickness of the specimen is preferably, but not necessarily, performed by calculation based on the diameter of the spherical indenter, Young's modulus at the time of contact, and the second derivative of Young's modulus.
An indentation test apparatus according to the invention is an apparatus for indenting a specimen with an indenter, the apparatus comprising an equivalent indentation strain calculator that calculates an equivalent indentation strain of the specimen by using the thickness of the specimen and a Young's modulus calculator that calculates the Young's modulus of the specimen by using the equivalent indentation strain.
The indentation test apparatus preferably, but not necessarily, further comprises a specimen thickness identifier that identifies the thickness of the specimen. The indenter is preferably, but not necessarily, a spherical indenter. The diameter of the spherical indenter preferably, but not necessarily, ranges from 1×10−8 to 1 m. The identification of the thickness of the specimen is preferably, but not necessarily, performed by calculation based on the diameter of the spherical indenter, Young's modulus at the time of contact, and the second derivative of Young's modulus at the time of contact.
The invention provides the following advantages:
The indentation test method according to the invention can be a novel indentation test method because equivalent indentation strain of a specimen is calculated by using the thickness of the specimen and Young's modulus of the specimen is calculated by using the equivalent indentation strain.
The indentation test apparatus according to the invention can be a novel indentation test apparatus because the apparatus includes an equivalent indentation strain calculator that calculates equivalent indentation strain of a specimen by using the thickness of the specimen and a Young's modulus calculator that calculates Young's modulus of the specimen by using the equivalent indentation strain.
An indentation test method and an indentation test apparatus according to a first embodiment the invention will be described below.
The indentation test method, which is a method for indenting a specimen with a spherical indenter, includes identifying the thickness of the specimen, calculating an equivalent indentation strain of the specimen by using the thickness of the specimen, and calculating a Young's modulus of the specimen by using the equivalent indentation strain.
The indentation test apparatus, which is an apparatus for indenting a specimen with a spherical indenter, includes a specimen thickness identifier that identifies the thickness of the specimen, an equivalent indentation strain calculator that calculates an equivalent indentation strain of the specimen by using the thickness of the specimen, and a Young's modulus calculator that calculates a Young's modulus of the specimen by using the equivalent indentation strain.
In the texts in the present specification, an alphabet with a hat character is described as “(alphabet) hat”, an alphabet with an overline is described as “(alphabet) overline”, and an alphabet with a second differential coefficient is described as “(alphabet) second differential coefficient”.
A description will be made of how to evaluate an indentation test. Contact deformation of a finite specimen will first be described.
When a sufficiently hard spherical indenter indents a semi-infinite specimen, the relationship between an indentation force F and an indentation depth δ shown in
In Equation (1), the coefficient A is expressed as follows:
In Equation (2), φ, E, and ν are the diameter of the spherical indenter, Young's modulus of the specimen, and the Poisson ratio, respectively. Further, the force distributed across a contact area having a radius “a” shown in
Young's modulus E is derived as a function of the indentation force F and strain ε from Equation (3) and Hooke's law σ=Eε as follows:
From Equations (1) and (4), the strain induced by the contact between the semi-infinite specimen and the rigid sphere is uniquely determined based on the diameter φ of the indenter and the indentation depth δ as follows:
The εH (overline) is called the Hertz strain.
Now, consider an indentation test in which a spherical indenter indents a specimen placed on a rigid body and having a variety of thicknesses hi (i=1, 2, . . . , ∞). Force F-indentation depth δ curves shown in
[Equation 6]
{circumflex over (F)}>F (6)
Assume now that the Hertzian elastic contact theory can be applied to the force F (hat), which is influenced by the difference in the thickness hi of the specimen. From Equation (1), the force F (hat) is expressed as follows:
[Equation 7]
{circumflex over (F)}=Âδ3/2 (7)
The coefficients A and A (hat) associated with the indentation depth δ therefore have the following relationship:
[Equation 8]
Â>A (8)
Further, assume that the diameter φ of the indenter and the Poisson ratio ν of the specimen do not change. Equation (2) then provides the following relationship. That is, Young's modulus E (hat) determined by applying the Hertzian elastic contact theory to the result of the indentation test conducted on any of the finite specimens is greater than the intrinsic Young's modulus E.
[Equation 9]
Ê>E (9)
Thus, the determined Young's modulus E (hat) is called a spherical indentation modulus.
When Equation (1) derived from the Hertzian elastic contact theory based on a semi-infinite specimen is applied to a finite specimen, the spherical indentation modulus E (hat) is influenced by the thickness hi, as shown in Equation (9). Consider now using the influence to identify the thickness hi of the specimen.
In the identification of the spherical indentation modulus E (hat), it is believed that the difference in the thickness hi of the specimen influences little the spherical indentation modulus E (hat) at the instant of contact when the amount of deformation is very small. That is, at the instant of contact, the following relationship for an arbitrary thickness hi can be derived from the condition under which Equation (1) is applied:
On the other hand, when the thickness hi of the specimen is smaller, the influence of the rigid body under the specimen appears earlier. As a result, when the thickness hi of the specimen is smaller, the identified spherical indentation modulus E (hat) increases more steeply as the indentation proceeds, as indicated by the solid lines in
The following relationship is therefore conceivable between the thickness hi of the specimen and the second derivative of the spherical indentation modulus E (hat) (second differential coefficient):
[Equation 12]
h=f({circumflex over (E)}″) (12)
If the function f(E(hat) (second differential coefficient)) shown in
How to evaluate indentation deformation will be described. The process of indenting a soft material involves a phenomenon in which a deformed region in the specimen greatly changes as the indenter indents the specimen, like the shape of the surface on which the force acts greatly changes. In view of the phenomenon, the indentation deformation is considered as the superposition of the contact deformation due to the spherical indenter and the compression deformation.
In this process, first express the effect of the contact by using the Hertz strain εH (overline), and assume that the compression is expressed by the rate εV (overline) of change in the volume of the region influenced by compression deformation that occurs because the specimen is soft. The following relationship is then defined:
[Equation 13]
In Equation (13), εI (overline), which is a three-dimensional strain distribution induced in the specimen during the indentation process, is expressed by using an equivalent uniaxial strain and called the equivalent indentation strain.
In the indentation process of indenting a soft material with a spherical indenter, consider a compressed region V in the specimen that is deformed due to a particularly large force. In the region V, consider a spheroid not only perpendicular to the indenter sphere surface containing the line of intersection of the initial surface of the specimen and the surface of the indenter but also perpendicular to a lower interface of the specimen. The spheroid is hatched in
The volume V of the compressed region can be expressed by the following equation:
The strain induced in the compressed region can be determined from the change in the compressed region dV. Consider a simple method for expressing the change in the compressed region dV by using the amount of shift dδ of the upper surface of the compressed region. The change in the compressed region dV can be expressed by using the amount of shift dδ as follows:
[Equation 16]
dV=πe(h)2dδ=π(φδ−δ2)dδ (16)
Further, an increment dεV (overline) of the rate εV (overline) of change in the compressed region V can be defined by the following equation:
The strain εV (overline) induced in the compressed region can therefore be expressed by the following equation:
Based on Equation (18), the equivalent indentation strain εI (overline) expressed by Equation (13) is expressed as follows:
Assuming that the diameter φ of the indenter is infinite, the equivalent indentation strain εI (overline) is expressed as follows:
The equivalent indentation strain εI (overline) is thus uniaxial nominal strain. On the other hand, if the thickness h is infinite, the equivalent indentation strain εI (overline) is expressed as follows:
The equivalent indentation strain εI (overline) now agrees with the Hertz strain εH (overline).
The equivalent indentation strain εI (overline) expressed by Equation (19) is therefore found to be capable of representing both the contact deformation and the compression deformation.
Assuming that the equivalent indentation strain εI (overline) expressed by Equation (19) can equivalently express uniaxial deformation, the stress σ induced in the specimen can be expressed as follows:
[Equation 22]
σ=E
Further, assuming that Equation (3) is satisfied between the stress σ and the force F (hat) at the contact area, Young's modulus E of the specimen can be derived by using the equivalent indentation strain εI (overline) as follows:
Using Equation (23) and Equation (19), which expresses the equivalent indentation strain εI (overline), along with the method for determining the thickness hi of the specimen described above allows Young's modulus E of the specimen to be evaluated in theory based on the diameter φ of the spherical indenter, the force F (hat), and the indentation depth δ.
Indentation tests will next be conducted on specimens having known Young's modulus and a plurality of thicknesses to check the validity of the assumptions made above.
Experimental validation of the evaluation method will be described. An indentation test apparatus and conditions under which the apparatus operates will first be described.
To check that the same Young's modulus can be identified by indentation tests conducted on the specimens having different thicknesses, an indentation test apparatus shown in
An indentation test system 16 calculates a Young's modulus based on the magnitude of the force F sent from the load cell 2 and the indentation depth δ sent from the potentiometer 3 in the indentation test apparatus 15, as shown in
As for a specimen, a polyurethane resin, which has excellent moldability and stable physical properties and is hence used as a pseudo biological specimen, is selected as a soft material. Among a variety of polyurethane resins, a sheet of commercially available vibration-resistant mat material having low elasticity and high viscosity and manufactured by Peacelogi is used. The shape of the sheet material is 80×10−3 m in vertical length, 80×10−3 m in horizontal length, and about 4×10−3 m in thickness. A rectangular column-shaped specimen is cut off a single sheet of the material and used in a tensile test conducted for validation purposes, and specimens having different thicknesses are prepared for indentation tests by bonding an arbitrary number of specimens with the aid of the viscosity of the specimens themselves. Table 1 shows measured thicknesses of the thus prepared specimens. As for the spherical indenter used in the indentation tests, an acrylic sphere having a diameter φ of 2.0×10−2 m, which can be used in the human body in a future experiment, is used. The adhesion between the acrylic sphere and the specimen that come into contact with each other is reduced by applying talc powder onto the contact surface of the specimen. The slowest indentation rate available in the apparatus specifications is selected to minimize the influence of the viscosity of the polyurethane resin.
Young's modulus obtained in the tensile test will next be described. Results obtained in the tensile test are presented to validate the results obtained in the indentation tests. Table 2 shows conditions under which the tensile test is conducted. In particular, since the tensile rate was set at 1.0×10−4 m/s, which is the slowest rate available in the apparatus specifications, the rate of strain was 0.005/sec.
An influence of the thickness of a specimen on the magnitude of the indentation force will next be described. In this description, an influence of the thickness of a specimen on the magnitude of the force obtained in an indentation test is evaluated.
As seen from the results, a smaller thickness hi of the specimen causes the indentation force to significantly increase as shown in
Based on the results, to express the significant increase in the indentation force, an equation containing a coefficient B expressing the influence of the increase in the indentation force is derived as follows:
[Equation 24]
{circumflex over (F)}=A{δ(1+Bδ)}3/2=Âδ3/2 (24)
As seen from the results shown in
[Equation 25]
E(1+Bδ)3/2=Ê (25)
Equation (25) corresponds to the relationship shown in
A description will now be made of a study on how to derive the thickness of a specimen. Based on the results of the indentation test described above that are influenced by the thickness hi of the specimens, a method for determining the thickness hi of the specimens will be discussed.
[Table 4]
The results shows that there is a strong exponential relationship between the thickness hi of the specimens and the second derivative E (hat) (second differential coefficient) in the indentation tests using the spherical indenter, and the thickness hi can be determined based on the relationship. The thickness hi of the specimens will be identified by using Equation (26).
A description will be made of a method for identifying Young's modulus even if the thickness of a specimen varies. In the method, the thickness of a specimen is determined by using the method described above and/or any other method, and the Young's modulus is identified in consideration of the information on the thickness of the specimen even if the thickness of the specimen varies.
First,
The study was conducted by assuming the Poisson ratio ν that has not been measured to be 0.4 for convenience and setting the indentation depth δ to be smaller than or equal to 0.01 m so that it does not exceed the radius of the indenter. From the result of the study, the Young's modulus E0, which is the modulus for zero strain at the time of contact and determined by Equation (25), is significantly high for the specimen having the smallest thickness hi. It is therefore difficult to identify the spherical indentation modulus E (hat) in an indentation process when the thickness hi of the specimen is very small. Further, the derived spherical indentation modulus E (hat) indicated by the lines in
In comparison with the results shown in
As seen from the results shown in
The experimental results described above indicate that in an indentation test in which a spherical indenter indents a soft material, adding the influence of the compression deformation that occurs in the specimen having a finite thickness primarily under the indenter to the contact deformation based on the Hertzian elastic contact theory allows the Young's modulus E to be identified irrespective of the thickness of the specimen.
A description will next be made of an indentation test method and an indentation test apparatus according to a second embodiment of the invention.
The indentation test method, which is a method for indenting a specimen with a spherical indenter, includes identifying the thickness of the specimen, calculating equivalent indentation strain of the specimen by using the thickness of the specimen, and calculating the Young's modulus of the specimen by using the equivalent indentation strain.
The indentation test apparatus, which is an apparatus for indenting a specimen with a spherical indenter, includes a specimen thickness identifier that identifies the thickness of a specimen, an equivalent indentation strain calculator that calculates equivalent indentation strain of the specimen by using the thickness of the specimen, and a Young's modulus calculator that calculates the Young's modulus of the specimen by using the equivalent indentation strain.
In the texts in the present specification, an alphabet with a hat character is described as “(alphabet) hat”, an alphabet with an overline is described as “(alphabet) overline”, and an alphabet with a second differential coefficient is described as “(alphabet) second differential coefficient”.
A description will be made of a Young's modulus measuring method used in a spherical indentation test. A method based on the Hertzian elastic contact theory will first be described.
When a sufficiently hard spherical indenter intends a semi-infinite specimen, the relationship between the indentation force F and the indentation depth δ can be derived from the Hertzian elastic contact theory by using the diameter φ of the spherical indenter, the Young's modulus E of the specimen, and the Poisson ratio ν thereof as follows:
Equation (27) represents the behavior of the indentation force F as shown in the diagrams of
A method based on the equivalent indentation strain will be described. The indentation force F (hat) acting on a finite specimen placed on a rigid body is greater than the indentation force F acting on a semi-finite specimen indicated by the solid line, and the influence of the rigid body appears in accordance with the thickness hi of the specimen (i=1, 2, . . . , ∞), as indicated by the broken lines in
[Equation 28]
The first term, which represents the contact deformation caused by the spherical indenter, is derived from the Hertzian elastic contact theory and expressed by the following equation:
The second term, which represents the compression deformation that occurs between the spherical indenter and the rigid body, is expressed by the following equation:
Based on the phenomenon indicted by the broken lines shown in
The following relationship is satisfied between the intrinsic Young's modulus E and the apparent Young's modulus E (hat):
[Equation 32]
E(1+Bδ)3/2=Ê (32)
Equation (32) represents a phenomenon in which the intrinsic Young's modulus E and the apparent Young's modulus E (hat) have the same value E0 when the contact starts, whereas the apparent Young's modulus E (hat) is measured to be greater than the intrinsic Young's modulus E as the indentation proceeds, as shown in
The relationship in the phenomenon between the thickness h of the specimen and the second derivative of Young's modulus E (hat) (second differential coefficient) at the time of contact has been found to be approximated by using an exponential relationship shown in
In Equation (33), G represents a coefficient that normalizes the second derivative of Young's modulus, and H represents a coefficient for the thickness of the specimen.
The thickness h of the specimen is therefore determined by substituting the second derivative of Young's modulus E (hat) (second differential coefficient) at the time of contact into Equation (33), and the equivalent indentation strain εI (overline) expressed by Equation (28) is also determined from the thickness h of the specimen. Further, the equivalent indentation strain εI (overline) and the indentation force F (hat) can be used to determine Young's modulus E of the specimens having a variety of thicknesses by using the following equation:
It has been ascertained based on experimentally validated results obtained from specimens having a variety of thicknesses that the Young's modulus determined by using Equation (34) does not depend on thickness [1]. Further, if the measuring method can be used with a variety of hardness values and shapes, a specimen having a complicated deformation characteristic and shape, such as biological soft tissue, can be evaluated by the measuring method.
To study the hardness of a specimen and the diameter of the indenter that can be used with the measuring method, the influence of the Young's modulus E of a specimen and the diameter φ of a spherical indenter used in a test on the measuring method will next be experimentally evaluated. In particular, since the influence described above is found as a change in each force-indentation depth curve shown in
Experimental evaluation of the applicability of the measuring method will be described. A spherical indentation test will first be described.
To check the applicability of the Young's modulus measuring method used in a spherical indentation test, experiments are conducted with the hardness of a specimen and the diameter of the indenter changed.
First, as for a specimen used in the evaluation, a commercially available silicone rubber (silicone rubber sheet manufactured by Kyowa Industries, Inc.) is used because it has stable physical properties, a wide variety of hardness values, and excellent moldability. Among the variety of sheets, three types of sheet having different hardness values shown in Table 5 are prepared, and a plurality of specimens having different thicknesses are prepared by bonding an arbitrary number of specimens having a square shape each side of which is 100 mm and a thickness of 1 mm and 5 mm with the aid of the viscosity of the specimens themselves. The specimens are then checked to have no discontinuity between the bonded surfaces due to separation or other causes during and after a test.
An indentation test system 16 calculates Young's modulus based on the magnitude of the force F sent from the load cell 2 and the indentation depth δ sent from the potentiometer 3 in the indentation test apparatus 15, as shown in
The experiments are conducted under the conditions that the diameter of the indenter has five different values shown in Table 6 and the friction between the specimen and the spherical indenter that come into contact with each other is reduced by applying talc powder onto the contact surface. The following two spherical indenters are used: an acrylic sphere made by the inventors and a ball knob made of a phenolic resin manufactured by Esco Co., Ltd. Further, the slowest indentation rate available in the apparatus specifications, 1.0×10−4 m/s, is selected to reduce the influence of the viscosity of the specimen.
As an example of experimental results,
To check how well the experimental results correlate with the approximated curves, correlation coefficients are calculated. A specimen having a large thickness shows a correlation coefficient greater than 0.98, whereas a specimen having a thickness of 1 mm shows about as low as 0.92. In view of the results described above, specimens having a correlation coefficient greater than 0.95 and a thickness greater than or equal to 4 mm are used to evaluate the applicability of the measuring method according to the invention by conducting experiments with the hardness of the specimens and the diameter of the spherical indenter changed.
A method for evaluating the influence of the Young's modulus and the diameter of the indenter will be described. To observe the influence of the hardness of a specimen and the diameter of the indenter on a force curve, part of the change in the force obtained in an indentation test is shown in
Consider next how the change in the force curve in
First,
In the invention, the coefficient H is called a specimen thickness constant, and the function G is called a Young's modulus curvature function. The variables H and G are expressed by the following Equations (35) and (36):
[Equation 35]
H=2.13×10−3,m (35)
G(E0,φ)=
In Equations (35) and (36), G (overline)=7.32×107, m=1.29, and n=1.66.
As a result, the Young's modulus measuring method using equivalent indentation strain used in a spherical indentation test can be extended to a method that takes into consideration of the influence of the Young's modulus E0 of a specimen and the diameter φ of the spherical indenter by using Equation (36).
Measured Young's modulus will now be described. The validity of the evaluation method described above, in which the influence of the Young's modulus and the diameter of the indenter are considered, is examined by comparing obtained the Young's modulus with that obtained in a tensile test.
First, a system used in a tensile test conducted on a material to be evaluated is substantially the same as the indentation test apparatus shown in
Looking at the results shown in
Examples of the specimen to be tested by using the indentation test method and the indentation test apparatus according to the invention may include polyurethane, silicone rubber, polyolefin rubber, natural rubber, soft vinyl, and other polymer materials; skin, muscle, and other biological tissues; and jelly, gelatin, and other food products.
The Young's modulus E of a specimen preferably ranges from 100 Pa to 100 MPa. An advantage from the Young's modulus of a specimen being greater than or equal to 100 Pa is that the specimen will not collapse or break as indentation proceeds. An advantage from the Young's modulus of a specimen being smaller than or equal to 100 MPa is that a soft indenter can also be used.
The spherical indenter can, for example, be made of a metallic material and/or a resin material.
The diameter of the spherical indenter preferably ranges from 1×10−8 to 1 m. An advantage from the thickness of a specimen being greater than the diameter of the spherical indenter is that results are equivalent to those based on the Hertzian theoretical solution. An advantage from the thickness of a specimen being smaller than or equal to the diameter of the spherical indenter is that the Young's modulus that cannot be determined by using the Hertzian theory can identified.
The rate at which the spherical indenter is indented preferably ranges from 0.00001 to 10 m/s. An advantage from the rate at which the spherical indenter is indented being higher than or equal to 0.00001 m/s is that the measurement can be made in a short period. An advantage from the rate at which the spherical indenter is indented is lower than or equal to 10 m/s is that the apparatus can be operated in a safe manner.
The ratio of the indentation depth of the spherical indenter to the diameter of the spherical indenter is preferably smaller than or equal to one. An advantage from the ratio being smaller than or equal to one is that it is unnecessary to consider a case where the indenter is buried.
To reduce the adhesion between the spherical indenter and a specimen when they come into contact with each other, for example, talc powder or oil may be applied onto the surface of the specimen where it comes into contact with the indenter. When the adhesion between the spherical indenter and a specimen when they come into contact with each other is low, the process described above can be omitted.
The above description has been made with reference to the case where the indenter has a spherical shape, but the indenter is not limited to a spherical indenter. The shape of the indenter may alternatively be, for example, a solid cylinder, a hollow cylinder, or a cube.
In the indentation test method and the indentation test apparatus according to the invention, the thickness of a specimen is identified. Advantages from identifying the thickness of a specimen may, for example, be an ability to identify the Young's modulus, which is difficult to determine based on the Hertzian theory, and an ability to measure the state of skin or muscle in a noninvasive manner, which is required in human diagnosis.
The method for identifying the thickness of a specimen is not limited to that described above. Other methods for identifying the thickness of a specimen may include a method using an ultrasonic wave, X-rays, or MRI. Further, a method for optically measuring a cross section of a specimen and all other methods typically used to measure the thickness of a specimen can be used.
The mode for carrying out the invention described above can, of course, be replaced with a variety of other configurations without departing from the substance of the invention.
Number | Date | Country | Kind |
---|---|---|---|
2009-010426 | Jan 2009 | JP | national |
2009-185525 | Aug 2009 | JP | national |
Filing Document | Filing Date | Country | Kind | 371c Date |
---|---|---|---|---|
PCT/JP2010/050499 | 1/18/2010 | WO | 00 | 10/10/2011 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO2010/084840 | 7/29/2010 | WO | A |
Number | Name | Date | Kind |
---|---|---|---|
4852397 | Haggag | Aug 1989 | A |
6134954 | Suresh et al. | Oct 2000 | A |
6664067 | Hajduk et al. | Dec 2003 | B1 |
6778916 | Lee | Aug 2004 | B2 |
20030060987 | Dao et al. | Mar 2003 | A1 |
Number | Date | Country |
---|---|---|
2003-044827 | Feb 2003 | JP |
2004-361251 | Dec 2004 | JP |
Number | Date | Country | |
---|---|---|---|
20120022802 A1 | Jan 2012 | US |