Claims
- 1. An inductively coupled plasma load coil, comprising:
a coiled copper capillary tube; an inner layer of a transition metal coating said tube; and an outer layer of a noble metal plated onto said inner layer, said noble metal being different from said transition metal.
- 2. The load coil defined in claim 1 wherein said transition metal is taken from the group consisting of nickel, platinum, palladium, rhodium, and ruthenium
- 3. The load coil defined in claim 2 wherein said transition metal is nickel.
- 4. The load coil defined in claim 3 wherein said noble metal is gold.
- 5. The load coil defined in claim 4 wherein said gold is substantially pure.
- 6. The coil defined in claim 5 wherein said gold is at least 99.5% pure.
- 7. The load coil defined in claim 6 wherein said inner layer is substantially thicker than said outer layer.
- 8. The load coil defined in claim 7 wherein said inner layer is about ten times as thick as said outer layer.
- 9. The load coil defined in claim 7 wherein said inner layer is about 1000 microns thick and said outer layer is about 10 microns thick.
- 10. An inductively coupled plasma load coil, comprising:
a coiled copper capillary tube; an outer layer of a noble metal electroplated onto said capillary tube; and an electroplated inner layer of a material for at least substantially impeding a migration of copper from said tube to said outer layer of said noble metal, the material of said inner layer being different from said noble metal.
- 11. The load coil defined in claim 10 wherein said material of said inner layer comprises a transition metal.
- 12. The load coil defined in claim 11 wherein said transition metal is taken from the group consisting of nickel, platinum, palladium, rhodium, and ruthenium
- 13. The load coil defined in claim 12 wherein said transition metal is nickel.
- 14. The load coil defined in claim 12 wherein said noble metal is gold.
CROSS-REFERENCE TO RELATED APPLICATION
[0001] This application claims the benefit of U.S. Provisional Patent Application No. 60/451,471 filed Mar. 3, 2003.
Provisional Applications (1)
|
Number |
Date |
Country |
|
60451471 |
Mar 2003 |
US |