This invention relates generally to hollow cathodes, and more particularly it pertains to hollow cathodes used to emit electrons in industrial applications.
Hollow cathodes are used to emit electrons in a variety of industrial applications. As described in a chapter by Delcroix, et al., in Vol. 35 of Advances in Electronics and Electron Physics (L. Marton, ed.), Academic Press, New York (1974), beginning on page 87, there are both high and low pressure regimes for hollow-cathode operation. In the high-pressure regime, the background pressure (the pressure in the region surrounding the hollow cathode) approaches or exceeds 1 Torr (130 Pascals) and no internal flow of ionizable working gas is required for operation. In the low-pressure regime with a background pressure below 0.1 Torr, an internal flow of ionizable working gas is required for efficient operation. It is for operation in the low-pressure regime below 0.1 Torr, and usually below 0.01 Torr, that the present invention is intended.
An important industrial application of low-pressure hollow cathodes is for electron emission in ion sources. These ion sources are of both gridded and gridless types. The ions generated in gridded ion sources are accelerated electrostatically by the electric field between the grids. Gridded ion sources are described in an article by Kaufman, et al., in the AIAA Journal, Vol. 20 (1982), beginning on page 745. The particular sources described in this article use a direct-current discharge to generate ions. It is also possible to use electrostatic ion acceleration with a radio-frequency discharge, in which case the only electron emitting requirement would be for a neutralizer cathode.
In gridless ion sources the ions are accelerated by the electric field generated by an electron current interacting with a substantial magnetic field in the discharge region, i.e., a magnetic field with sufficient strength to make the electron-cyclotron radius much smaller than the length of the discharge region to be crossed by the electrons. The closed-drift ion source is one type of gridless ion source and is described by Zhurin, et al., in an article in Plasma Sources Science & Technology, Vol. 8, beginning on page R1, while the end-Hall ion source is another type of gridless ion source and is described in U.S. Pat. No. 4,862,032—Kaufman, et al.
There are different types of low-pressure hollow cathodes. The simplest is a refractory-metal tube, usually of tantalum. This type is described in the review by Delcroix, et al., in the aforesaid chapter in Vol. 35 of Advances in Electronics and Electron Physics. For hollow cathodes of the sizes, electron emissions, and gas flows of most interest herein, the lifetime of these simple cathodes is limited to a few tens of hours.
Another type of hollow cathode has been developed for electric thrusters used in space propulsion and is described in a chapter by Kaufman in Vol. 36 of Advances in Electronics and Electron Physics (L. Marton, ed.), beginning on p. 265. The distinguishing feature of this type is an emissive insert that emits electrons at a lower temperature than does the plain metal-tube of the first type. The major advantage of this type is the long lifetime that is possible, of the order of 10,000 hours. The major disadvantage is the sensitivity of the supplemental emissive material to contamination. The emissive insert incorporates the supplemental emissive material that starts out as a carbonate (most often barium carbonate) and becomes an oxide when it is initially heated, or conditioned, for operation. If it is exposed to air after operation, the oxide combines with the water vapor in the air to become a hydroxide, which is much less effective as an emission material. Repeated exposure to air is not a problem in the space electric-propulsion application for which these cathodes were originally designed, but is much more serious in industrial applications.
A hollow cathode for industrial applications should have an operating lifetime of at least several hundred hours and be insensitive to repeated exposures to atmosphere between periods of operation. Shorter lifetimes than several hundred hours would be a problem because the time between maintenance in many industrial applications would then be limited by the cathode lifetime. While longer lifetimes might be of interest for industrial hollow cathodes, the time between maintenance would probably still be limited by other system components. In other words, the cost of a longer-lifetime hollow cathode, together with any special care and handling required, would have to be balanced against the replacement cost of a new hollow cathode of a simpler type.
The refractory metal tube of Delcroix, et al., in the aforesaid chapter in Vol. 35 of Advances in Electronics and Electron Physics is simple and, made of a metal such as tantalum, can stand repeated exposures to atmosphere between periods of operation. Its major shortcoming is a short lifetime. The space-propulsion hollow cathode described by Kaufman in the aforesaid chapter in Vol. 36 of Advances in Electronics and Electron Physics has a more than adequate lifetime, but is more complicated and more expensive, both to make and to use. For operation with frequent exposures to atmosphere, it is best to keep an inert gas flowing through such a cathode during atmospheric exposures to prevent degradation of the low-work-function, low-temperature emissive material. Even then, contamination from various gases used in the industrial application will probably limit the lifetime to far less than would be obtained in a space environment.
What might be called a compromise of the two types of hollow cathodes has been used in industrial applications. In this type, an emissive insert is used, but this insert consists only of tantalum foil. The lifetime is not as long without a low-work-function emissive material such as barium carbonate, but the tantalum-foil insert is less sensitive to atmospheric exposure than an insert that depends on the addition of an emissive material. Even with the reduced sensitivity to atmospheric exposure, a common mode of failure is oxidation of the tantalum foil and having it break into flakes, eventually clogging the flow passage through the tantalum-foil insert.
Another example of possible hollow-cathode configurations is U.S. Pat. No. 5,587,093. There is described a hollow cathode with multiple radiation shields surrounding a tube through which the working gas is introduced. However, there are intervening support structures between both the tube and the inner radiation shield and between the inner and outer radiation shields. These support structures permit a large fraction of the escaping heat to be conducted by the support structures around the ends of the radiation shields, thereby degrading the effectiveness of the radiation shields. Aston also uses an electrically heated emissive insert, a component not used in the present invention.
In light of the foregoing, it is a general object of the invention to provide a hollow cathode that is simple to fabricate and use, while having a long operating lifetime.
Another general object of the invention is to provide a hollow cathode that has a long operating lifetime while using a robust metallic part as the emissive surface.
A further general object of the invention is to provide a hollow cathode that has a long operating lifetime while using a refractory-metal tube with a small diameter, where the inside diameter either approaches the diameter of the emissive surface, or is equal to it. The small tube carries away less heat than a large tube and therefore requires less power to reach operating temperature.
A specific object of the invention is to provide a hollow cathode with an operating lifetime of at least several hundred hours that does not require conditioning before operation.
Another specific object of the invention is to provide a hollow cathode, with an operating lifetime of at least several hundred hours, that does not degrade significantly due to atmospheric exposure between periods of operation.
A further specific object of the invention is to provide a hollow cathode with an operating lifetime of at least several hundred hours that does not incorporate a supplemental emissive material.
Yet another specific object of the invention is to provide a hollow cathode with an operating lifetime of at least several hundred hours that is readily fabricated of materials that have minimal reaction with atmosphere when exposed thereto.
Still another specific object of the invention is to provide a hollow cathode with an operating lifetime of at least several hundred hours that does not require a metallic resistive heater for starting.
In accordance with one embodiment of the present invention, the hollow-cathode apparatus comprises a small-diameter tantalum tube with a plurality of tantalum-foil radiation shields, wherein the plurality of shields in turn comprise one or more spiral windings external to that tube and approximately flush with the open end from which electron emission takes place. The axial length of at least one of the inner windings (closer to the tantalum tube) is equal to or less than approximately half the length of the tantalum tube. An enclosed keeper surrounds the cathode. To start the cathode, a flow of ionizable inert gas, usually argon, is initiated through the cathode and out the open end. An electrical discharge is then started between the keeper and the hollow cathode. When heated to operating temperature, electrons exit from the open end of the hollow cathode.
Features of the present invention which are believed to be patentable are set forth with particularity in the appended claims. The organization and manner of operation of the invention, together with further objectives and advantages thereof, may be understood by reference to the following descriptions of specific embodiments thereof taken in connection with the accompanying drawings, in the several figures of which like reference numerals identify like elements and in which:
a shows the heat-loss distribution for full-length radiation shielding;
b shows the heat-loss distribution for an optimum distribution of radiation shielding;
Referring to
A cross section of the prior-art hollow-cathode assembly of
To obtain normal operation (≦50 V) in the low-pressure regime, it is necessary to supply a sufficient flow of ionizable working gas 13 to the hollow cathode so that the pressure in volume 11A, within and near the open end of cathode 11, is of the order of one Torr. Electrons are created by ionization of atoms or molecules of the ionizable working gas, but a major part of the electron emission from the hollow cathode comes from surface 22 inside the open end of the hollow cathode. This emission includes secondary electrons from ion bombardment, as well as enhanced emission due to high electric fields, but is primarily thermionic in nature. A thermionic-emission temperature near the open end of the hollow cathode is required for this emission.
The significance of this nearly constant maximum temperature may not be apparent to someone unskilled in the art. In the case of a hollow cathode, the surface temperature required for thermionic emission is maintained primarily by ion bombardment. If the emission is low, the discharge voltage rises, increasing the energy of the bombarding ions and thereby increasing the surface temperature. Conversely, if the emission is high, the discharge voltage decreases, decreasing the energy of the bombarding ions and thereby decreasing the surface temperature. In this manner, controlling to a given emission results in the discharge voltage varying to maintain the emission surface within a narrow temperature range. In addition, thermionic electron emission varies extremely rapidly with emitter temperature, which means that a wide range of electron emissions corresponds to a narrow range of emission-surface temperatures. The net result is that, for a given emission-surface material, there will be a narrow range of emitter temperature for a wide range of operating conditions and configuration. For tantalum, that temperature is about 2400 K.
Referring to
Still referring to
Heater power supply 26 energizes resistive heater 27 to bring hollow cathode 21 to operating temperature. This power supply may be of either the direct or alternating current type. When a metallic resistive heater is used, radiation shields may surround the resistive heater to reduce the electrical power required for the hollow cathode to reach operating temperature. If the cathode is heated to operating temperature by igniter/keeper supply 23, power supply 26 and resistive heater 27 could be omitted.
Different ground connections may be used. The surrounding vacuum chamber is typically defined as ground potential and is often, but not always, at earth ground. If the cathode is at the potential of the surrounding vacuum chamber, the ground connection would be as shown by ground 28. If the anode is the surrounding vacuum chamber, the ground connection would be as shown by ground 29. In the latter case, electrical isolation would be required in the gas line which, far from the cathode, would also be at ground potential. The techniques for such electrical isolation are well known to those skilled in the art and are not pertinent to the present invention.
The preceding description of the electrical circuit diagram of
The simple tubular cathode of Delcroix, et al., has a limited lifetime, typically a few tens of hours in the sizes and operating conditions of interest for ion sources. Delcroix, et al., do not discuss the effect of working gas on lifetime, but the use of an inert gas such as argon, krypton, or xenon would be required to reach even this limited lifetime. A reactive gas such as oxygen or nitrogen would result in shorter lifetimes. (Nitrogen is considered inert in many applications, but is reactive in the environment of an electrical discharge.)
As a measure of tubular-cathode lifetime at operating conditions of interest, a tantalum tube 1.57 mm in diameter and 38 mm long, with a wall thickness of 0.38 mm was operated with an argon gas flow of 10 sccm (standard cubic centimeters per minute). The igniter/keeper current was 1.5 A (power supply 23 in
On the positive side, exposure to atmosphere had no observable adverse effect on the simple tubular cathode. While adsorbed water vapor might be expected to form an oxide layer during any subsequent operation, the thickness of this layer will be small compared to any reasonable tube thickness, hence should easily be removed during the subsequent operation.
The use of radiation shields is discussed by Delcroix, et al., in the aforesaid chapter in Vol. 35 of Advances in Electronics and Electron Physics. The use of two cylindrical radiation shields is shown in the figure on page 147 and the discussion on pages 145-146 therein to result in a drop in discharge voltage from about 44 V to about 35 V. While Delcroix, et al., find this drop worth noting, there is no indication of a possible effect on lifetime. On pages 147-148 therein, the total radiation from an unshielded cathode is estimated at 15-20% of the total discharge power. While this result is also worth noting, there is again no indication of a possible qualitative effect on lifetime that can be obtained by reducing radiation losses.
To obtain a lifetime for the double-shielded configuration described above, a 1.57-mm-diameter, 38-mm-long hollow cathode (similar to that described above) was operated with two concentric cylindrical tantalum shields having outside diameters of 9.5 mm and 3.18 mm. The thicknesses of these shields were approximately the same 0.38-mm thickness as the tantalum tube. Using the same operating conditions as were used for the simple tantalum tube hollow cathode, the initial keeper voltage was 13-14 V, significantly lower than the 16-17 V obtained with the simple tubular cathode and in agreement with the reduced operating voltage described by Delcroix, et al. However, the keeper voltage increased more rapidly than was observed with the simple tubular cathode and there was no increase in operating lifetime over that cathode.
Referring to
Hollow cathode 30 is brought to approximately operating temperature when resistive heater 27 is energized by a heater power supply (see power supply 26 in
As described by Nakanishi, et al., in an article in Journal of Spacecraft and Rockets, Vol. 11, beginning on page 560, operating lifetimes of the order of 10,000 hours have been demonstrated with the type of hollow cathode shown in
The use of electrode 16 as a keeper electrode permitted electron emission to be available for the subsequent initiation of ion-source operation without having to make that initiation simultaneous with starting the hollow cathode. For example, it was desirable to have the neutralizer hollow cathode ready to emit electrons before an ion beam is initially accelerated, and not to generate an unneutralized ion beam with the attendant high accelerator-grid impingement while the neutralizer hollow cathode was started.
Referring to
The operation of hollow cathode 40 is similar in all important aspects to that of hollow cathode 30 described in connection with
The space-propulsion hollow cathodes shown in
Referring to
The enclosed keeper can be better understood by reference to
From a functional viewpoint, an enclosed keeper is defined as one in which most of the ionizable working gas from the hollow cathode must pass through the keeper aperture (64 in
The discharge with an enclosed keeper is started by applying a positive potential of the order of 1 kV to main body 61 (including igniter/keeper 16A/16B) relative to cathode body 31A/31B. The ionizable working gas enters volume 63 through cathode aperture 34 and leaves through igniter/keeper aperture 64, so that the pressure in volume 63 is intermediate of the pressure in cathode aperture 34 and surrounding volume 19. Because of the intermediate pressure in volume 63, the starting discharge is concentrated in this volume, thereby heating hollow cathode 50 to approximately operating temperature while starting the discharge. That is, a discharge between cathode 50 and igniter/keeper 16A/16B is the heating means to bring cathode 50 to operating temperature. After the discharge is started to the igniter/keeper, the current to the igniter/keeper is maintained at about 1.5 A, which corresponded to a cathode-keeper voltage ≦50 V and is usually in the 20-30 V range.
The electrical circuit diagram for operating cathode assembly 60 is similar to that shown in
The lack of an additional emissive material on rolled tantalum-foil insert 52 (
To summarize the prior art of hollow cathodes, the simple tubular hollow cathode of Delcroix, et al., withstands exposure to atmosphere very well, but it has a very short lifetime. The space electric-propulsion hollow cathodes, with an insert coated or impregnated with emissive material, can have extremely long lifetimes, but cannot withstand repeated exposure to atmosphere. The compromise hollow cathode with a rolled-foil insert that has no additional emissive material has an acceptable lifetime if the exposure to atmosphere is minimal. With repeated exposure, the rolled-foil insert also fails.
Another example of possible hollow-cathode configurations is the aforementioned U.S. Pat. No. 5,587,093—Aston. There is described an arc channel electrode in which an inner radiation shield, radiation shield 24, is positioned around the downstream end of body/return current tube 14, which in turn is positioned inside of arc channel electrode 33. An outer radiation shield, radiation shielding [sic] 45, is positioned outside of arc channel electrode 33. The inner and outer radiation shields are not adjacent to each other because there is intervening support structure (arc channel electrode 33) between the inner and outer radiation shields. Such intervening support structure permits a large fraction of the escaping heat to be conducted by the support structure around the ends of the outer radiation shield, thereby greatly degrading the effectiveness of the outer shield. Further, in Aston the radiation shields are not supported by the hollow tube through which the working gas flows (gas inlet/input current tube 13), so that there is another intervening support structure between working-gas tube 13 and the inner radiation shield, further degrading the effectiveness of the radiation shields. Also, in the Aston device at the end of tube 13 and connected thereto is helix 20, which is the emissive insert of insert/heater/orifice plate 11. Helix 20 is electrically heated by currents through tubes 13 and 14. Radiation shield 24 is loosely wrapped around the downstream end of tube 14 “over a length commensurate with the general length of the insert/heater/orifice plate 11.” The length of radiation shield 24 is not determined by a heat-loss mitigation protocol as in the present invention, but by the length of the electrically heated emissive insert (helix 20), a component that is not used in the present invention.
Referring to
The electrons that pass through aperture 74 come from volume 75 near the aperture, and mostly originate from internal tube surface 76 adjacent to volume 75. An enclosed keeper with apertured end 16A and cylindrical wall 16B is also shown in
In
Except for the replacement of cathode 50 in
The difference in lifetime between the preferred embodiment and the prior-art hollow cathode of Delcroix, et al., is dramatic. The preferred embodiment of
The keeper voltage was several volts lower at the beginning of the life test and several volts higher at the end, but it was 13-15 V over most of the lifetime. The increase in lifetime thus corresponded to only a small 2-3 V reduction in the discharge (keeper) voltage, indicating a highly nonlinear inverse relationship between discharge voltage and lifetime. The discharge voltage is closely related to the energy of the ions bombarding the end of the cathode and the internal emissive surface. From the large increase in lifetime that results from a small decrease in voltage, the ion energies are close to what is commonly called the sputtering threshold. Most significantly, this increase in lifetime was obtained with a robust 0.38-mm thickness for the emission surface, without recourse to either an additional emissive material or a fragile foil at this surface.
What is also unexpected is that the greatly improved lifetime was obtained with two pluralities of radiation shields: one that extended from the open end of the tantalum tube only about a quarter of the tube's length, and the other only about a half of the tube's length, as opposed to the approximately full-length plurality of shields described by Delcroix, et al. The advantage of the shorter radiation shields in the preferred embodiment can be understood by reference to
Referring first to
Using the preceding assumptions, the temperature distribution shown by the circles in
The next calculation shows that the use of radiation shielding did not greatly change the temperature distribution along the tantalum tube. In this calculation the assumptions were all the same as given above, except that the radiation loss was reduced by 90 percent. Such a large reduction would be difficult to obtain, so that the temperature distribution obtained should be a maximal departure from that with no radiation shielding. This calculation gave the temperature distribution shown by the triangles in
For thermionic electron emission to be the same for two configurations, the temperature of the electron emission surface near the tip must be approximately constant. The two temperature distributions in
Referring to
The concept upon which the present invention is based is illustrated in
Shields 73A′, 73B′, 73C′, and 73D′ increase in length from the open end of tube 71 in sequential order outward from hollow tantalum tube 71. That is, the inner shields (the shields closer to tantalum tube 71) are shorter than the outer shields (the shields farther from the tantalum tube). It should be apparent much or most of the benefit of the present invention can be obtained if the increase in length of these shields is approximately in sequential order, rather than strict sequential order. For example, several successive shields can have the same length without greatly compromising the overall thermal efficiency of the shields. In fact, such a construction was used in the preferred embodiment of
It may appear that conduction in radiation shields parallel to the tube shouldn't be a problem with a shield material as thin as 0.013 mm, the thinnest readily available thickness of tantalum foil. The preferred embodiment, however, has two pluralities of concentric shields, each with 15 layers of this material, making a total radial thickness of shield material approximately equal to the tube thickness of 0.038 mm. When the larger mean radii of the heat shields are considered, it is evident that the cross section for heat transfer parallel to the tantalum tube within these shields is actually greater than that in the tube, despite the small, 0.013-mm thickness of the shield material.
The spiral method of construction permits many more radiation shields in a given radial distance than if each layer were a thin tube that had to be slid in place over the next inner tube, and adequate clearance for this method of assembly provided between each pair of adjacent shields. Thermal conduction along the spiral path, however, can be significant under certain circumstances, generally increasing in importance relative to the radiation as the diameter to be enclosed decreases and the shield temperature decreases. For the cathode and shield diameters considered herein, radiation between layers is more important than conduction along the spiral path for shield temperatures greater than about 1200 K.
While a thorough calculation of a multi-shield configuration can be used to optimize radiation-shield performance, a simple two-plurality shield configuration similar to that shown in the preferred embodiment can be effective, increasing the lifetime by more than a factor of ten. As is shown in the next section, even a single plurality of shields extending for about half the tube length can increase the lifetime by a factor of six.
When compared to the prior-art configuration of the HCES 5000, the preferred embodiment showed an excellent ability to withstand repeated exposure to atmosphere. During the test of more than 600 hours, the cathode was removed from the vacuum environment and exposed to the atmosphere six times for examination and measurements. No degradation of the flow passage was observed due to this repeated exposure to atmosphere. Other tests of alternate embodiments with more exposures to atmosphere also support this resistance to atmospheric degradation.
Still comparing the preferred embodiment to the HCES 5000, a tantalum tube with a smaller diameter can be used while still providing the same internal diameter of emission surface. Tantalum is expensive and the smaller diameter permits a cost saving. It also reduces the heat loss to the cathode holder and reduces the power required to heat to operating temperature and start operation.
The preferred embodiment thus demonstrated the resistance to atmospheric exposure that would be expected from the simple refractory-metal tube of Delcroix, et al., while at the same time having an operating lifetime more than ten times longer.
A technical person skilled in the art would normally expect the use of more shielding material to result in better thermal shielding. The technical viewpoint discussed in connection with
The maximum length available for heat shields between the cathode holder and the open end of the tantalum tube was 29 mm. A single plurality of radiation shields was used, with an axial length of 29 mm. (The thermal contact of the cathode holder on the tantalum tube was closer to the end of the 38 mm long tube, but a nut on the union fitting that comprised the cathode holder prevented the use of longer heat shields.) The plurality of shields was comprised of 15 turns of 0.013-mm-thick tantalum foil, dimpled by pressing against 60-grit abrasive paper before winding. Except that the maximum length of single-plurality of radiation shields 72A was used, this hollow-cathode configuration was the same as hollow cathode 90 in
Another cathode was fabricated similar to hollow cathode 90 shown in
Referring to
Referring to
It should also be apparent that one or more axial breaks could have been used to reduce thermal conduction in the tantalum tube near the hot end, rather than a helical slit.
Referring to
An alternate means of restricting the loss of ionizable working gas would be to reduce the size of the aperture at the end of the tantalum tube by shaping or forming the tantalum tube, rather than by introducing a separate tip 71D. Other changes in diameter or wall thickness could be considered for the tantalum tube, if they could be incorporated at reasonable expense.
The other feature in
The radiation shields of several embodiments of the present invention were examined following completion of the duration test. Only the outer shields of the outer radiation-shield plurality retained normal flexibility and could be unrolled to any extent. Other shields were either welded together by the heat or sufficiently brittle that they could not be unrolled. Any possibility of flaking was apparently prevented by brittle radiation shields being held between the thicker tantalum tube and the relatively unaffected outer layers of the heat shield. Exposure of the thin radiation shields to atmosphere thus appears to have minimal adverse effects.
Tantalum was the tube material used in several embodiments herein. Alternate tube materials include molybdenum, niobium, rhenium, tungsten, alloys of tantalum or these metals, or carbon. Tantalum foil was the radiation-shield material used herein. The same materials used for the tube could also be used for the radiation shield. Because the radiation shields do not need to be electrically conductive, foils of other refractory materials such as alumina, mica, or quartz could be used for those shields that operate at low enough temperatures. A foil is herein defined as being a flat, sheet-like material that is about 0.1-0.2 mm thick, or less. Thicker material could be used, but would increase thermal conduction in the axial direction, and would increase thermal conduction from shield to shield when a spiral winding is used for the shields.
Igniter/keeper 16 (or 16A and 16B) has been used in the embodiments shown in
Hollow-cathode assemblies have been described in which a discharge between the hollow cathode and the surrounding enclosed keeper is used to heat the hollow cathode to operating temperature (see
Alternatively, it may be useful to have the shields end beyond the open end of the tantalum tube, as shown in
The shaping of refractory foil for spiral, multiple-turn windings that comprise a plurality of radiations shields is indicated in
Another example of the shaping of refractory foil for spiral, multiple-turn shield windings is indicated in
The heating means for the cathode to reach operating temperature in the preferred embodiment is a discharge between the cathode and igniter/keeper. Other heating means could be used. For example, the heating means could also be a discharge between the cathode and the anode. Or, alternatively, the heating means could also use a metallic resistive heater, as described in the Prior Art Section.
While particular embodiments of the present invention have been shown and described, and various alternatives have been suggested, it will be obvious to those of ordinary skill in the art that changes and modifications may be made without departing from the invention in its broadest aspects. Therefore, the aim in the appended claims is to cover all such changes and modifications as fall within the true spirit and scope of that which is patentable.
This application is a continuation-in-part of our application Ser. No. 10/463,908, filed Jun. 17, 2003, now abandoned, which claims priority from Provisional Application No. 60/392,187, filed Jun. 27, 2002.
Number | Name | Date | Kind |
---|---|---|---|
4218633 | Mirtich et al. | Aug 1980 | A |
4296330 | Thomson et al. | Oct 1981 | A |
4461970 | Anderson | Jul 1984 | A |
4800281 | Williamson | Jan 1989 | A |
4862032 | Kaufman et al. | Aug 1989 | A |
5359254 | Arkhipov et al. | Oct 1994 | A |
5587093 | Aston | Dec 1996 | A |
5898178 | Bunker | Apr 1999 | A |
6380685 | Patterson et al. | Apr 2002 | B2 |
Number | Date | Country | |
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20060132017 A1 | Jun 2006 | US |
Number | Date | Country | |
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60392187 | Jun 2002 | US |
Number | Date | Country | |
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Parent | 10463908 | Jun 2003 | US |
Child | 11339783 | US |