1. Field of the Invention
The present invention relates generally to an information recording medium, and more particularly to a perpendicular magnetic recording medium having a perpendicularly magnetized film.
2. Description of the Related Art
With a reduction in size and an increase in capacity of a magnetic disk drive, it has recently been desired to reduce the grain size of magnetic particles in a recording medium. In a conventional recording method referred to as an in-plane (longitudinal) recording method, it is difficult to greatly reduce the grain size of magnetic particles because of thermal instability. Accordingly, a perpendicular magnetic recording method superior to the in-plane recording method in thermo-magnetic relaxation or the like has recently been investigated. A general perpendicular magnetic recording method employs a dual-layer medium fabricated by forming a soft-magnetic backing layer (base layer) on a substrate and forming a perpendicularly magnetized film on the soft-magnetic backing layer with a nonmagnetic layer interposed therebetween.
In a perpendicular magnetic recording medium for a hard disk, the use of a multilayer film of Co/Pd or Co/Pt as the perpendicularly magnetized film is being investigated. This multilayer film is formed by alternately depositing very thin magnetic films each having a thickness of 0.05 to 2 nm and very thin nonmagnetic films each having a thickness of 0.1 to 5 nm. As compared with a conventional recording medium using Co—Cr based alloy, this multilayer film exhibits much stronger perpendicular magnetic anisotropy, and it is therefore a promising candidate for the perpendicularly magnetized film. However, the above-mentioned multilayer film has a problem of large medium noise due to a continuous film. The medium noise is caused mainly by transition noise or opposite magnetic domain noise accompanying magnetization reversal.
The transition noise originates from grain boundary noise by magnetic crystalline particles or nonuniformity of magnetization reversal near the boundary of a recorded magnetic domain. The opposite magnetic domain noise is due to nonuniformity of magnetic particles, demagnetizing fields in a recording film, or leakage magnetic fields from the periphery of a recorded magnetic domain. A general measure against this medium noise is to form a film structure so that adjacent magnetic particles are magnetically isolated from each other. By such magnetic isolation of the adjacent magnetic particles, the medium originated noise (medium noise) can be reduced to improve an S/N and accordingly improve a linear recording density.
The magnetic characteristics of the medium are largely changed by magnetically isolating the adjacent magnetic particles. That is, the coercive force is increased, and the slope α (=4πdM/dH) near the coercive force in an M-H loop is decreased (α=1 in an ideal condition). As a technique for magnetically isolating the adjacent magnetic particles in the Co/Pd or Co/Pt multilayer magnetic film, a method of depositing films by sputtering under high pressures of gases or a method of using a granular base layer is known. However, even though these methods are used, it is not easy to form a single magnetic domain. Further, the control of magnetic characteristics by only one recording film is difficult.
It is therefore an object of the present invention to provide a perpendicular magnetic recording medium which can increase a coercive force in a magnetic recording layer and reduce the medium noise to thereby improve the S/N.
In accordance with the present invention, there is provided an information recording medium including a substrate; a roughness control layer provided on the substrate, the roughness control layer having a rough surface with a grain size of 5 to 20 nm and an average roughness (Ra) of 0.2 to 2.0 nm; an orientation control layer provided on the roughness control layer, the orientation control layer containing 30 at % or more of metal solely having an fcc structure; and a magnetic recording layer having perpendicular magnetic anisotropy provided on the orientation control layer in contact therewith, the magnetic recording layer being formed from a multilayer film composed of ferromagnetic thin films and nonmagnetic thin films alternately stacked.
Preferably, the metal contained as a principal component in the orientation control layer is selected from the group consisting of Pd, Pt, Au, and Ag. Preferably, the roughness control layer is formed of silicon oxide or nitride.
The roughness control layer of silicon oxide is formed by sputtering in an atmosphere of process gases containing oxygen and inert gas. The roughness control layer of silicon nitride is formed by sputtering in an atmosphere of process gases containing nitrogen and inert gas.
Preferably, the magnetic recording layer is formed from a multilayer film of a material selected from the group consisting of Co/Pd, Co/Pt, and CoB/PdB. Each of the ferromagnetic thin films has a thickness of 0.05 to 2 nm, and each of the nonmagnetic thin films has a thickness of 0.1 to 5 nm.
The above and other objects, features and advantages of the present invention and the manner of realizing them will become more apparent, and the invention itself will best be understood from a study of the following description and appended claims with reference to the attached drawings showing some preferred embodiments of the invention.
The SiOx roughness control layer 6 was formed so as to have a thickness of 10 nm by reactive sputtering using two lines of gases of Ar and O2 as process gases. The other inert gases such as Kr and Xe may be adopted as one of the process gases. The roughness control layer 6 has a rough surface having a grain size of 5 to 20 nm and an average roughness (Ra) of 0.2 to 2.0 nm. The Pd orientation control layer 8 was formed by DC magnetron sputtering in a cathode rotating type chamber. Three kinds of samples of the Pd orientation control layer 8 with different thicknesses of 2 nm, 5 nm, and 10 nm were prepared.
The Co/Pd multilayer recording layer 10 was formed by DC magnetron sputtering with alternate discharge to Co and Pd in a substrate rotating type sputter chamber. Totally 16 layers of Co and Pd were alternately stacked so that each Co layer has a thickness of 0.2 nm and each Pd layer has a thickness of 1 nm. Thus, the Co/Pd multilayer recording layer 10 having a thickness of 19.2 nm was obtained. Further, a comparative sample was prepared by forming the Co/Pd multilayer recording layer 10 directly on the SiOx roughness control layer 6.
While the magnetic recording layer 10 is formed from a Co/Pd multilayer film in this preferred embodiment, the magnetic recording layer 10 may be formed from a Co/Pt multilayer film or a CoB/PdB multilayer film. Further, the thickness of the Co or CoB ferromagnetic thin film of the multilayer recording layer 10 is preferably in the range of 0.05 to 2 nm, and the thickness of the Pd, Pt, or PdB nonmagnetic thin film of the multilayer recording layer 10 is preferably in the range of 0.1 to 5 nm.
The orientation control layer 8 may be formed of metal solely having an fcc structure, such as Pd, Pt, Au, and Ag, or alloy containing 30 at % or more of any one of these metals. As the elements of this alloy, Ti, Cr, and Ru, for example, may be adopted. While the roughness control layer 6 is formed of SiOx in this preferred embodiment, the roughness control layer 6 may be formed of SiNx. In this case, two lines of gases of Ar and N2 are used as the process gases, and this layer 6 is formed by reactive sputtering.
The formation of the SiOx roughness control layer 6 on the glass substrate 4 is effective for a reduction in medium noise. However, the insertion of the roughness control layer 6 causes the dispersion of crystal lattice matching, so that there is a possibility that the orientation of the Co/Pd or Co/Pt multilayer film may be degraded. The perpendicular magnetic anisotropy of the Co/Pd or Co/Pt multilayer film becomes maximum in the case of (111) orientation, and if crystal grains having other orientations are mixed, anisotropy dispersion occurs to cause the medium noise.
To solve this problem, the orientation control layer 8 is formed directly under the multilayer recording layer 10 according to the present invention. The formation of the orientation control layer 8 directly under the multilayer recording layer 10 can improve the (111) orientation of the Co/Pd or Co/Pt multilayer film and reduce the intensity of other orientations. Accordingly, the perpendicular magnetic anisotropy can be improved and the coercive force (Hc) can be increased.
The other configuration of this preferred embodiment is similar to that of the first preferred embodiment shown in
According to the present invention as described above in detail, in addition to the roughness control layer, the orientation control layer is formed directly under the multilayer recording layer, thereby improving the (111) orientation of the multilayer recording layer and reducing the intensity of other orientations. As a result, the perpendicular magnetic anisotropy can be improved and the coercive force can be increased. Further, in the medium including the soft-magnetic backing layer formed on the substrate, S/Nm can be improved by forming the orientation control layer directly under the multilayer recording layer.
This is a continuation of International PCT Application NO. PCT/JP02/05075, filed May 24, 2002, which was not published in English.
Number | Date | Country | |
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Parent | PCT/JP02/05075 | May 2002 | US |
Child | 10959729 | Oct 2004 | US |